CN209486175U - Online double channels microwave power sensor - Google Patents
Online double channels microwave power sensor Download PDFInfo
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- CN209486175U CN209486175U CN201920061417.7U CN201920061417U CN209486175U CN 209486175 U CN209486175 U CN 209486175U CN 201920061417 U CN201920061417 U CN 201920061417U CN 209486175 U CN209486175 U CN 209486175U
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- coplanar waveguide
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Abstract
Online double channels microwave power sensor, including substrate, ground wire, coplanar waveguide transmission line, capacitor plate, sensing element, cantilever beam；Ground wire is set to upper surface of substrate two sides, and coplanar waveguide transmission line is parallel to two sides ground wire, and surface middle part on substrate is arranged；Sensing element is embedded in substrate, and is located at below the middle part of coplanar waveguide transmission line；It is equipped with one layer of metallic film below sensing element, is embedded in substrate, and parallel with coplanar waveguide transmission line；Cantilever beam is arranged on the ground wire of side by anchoring area, is suspended from above the sensing element；Capacitor plate is located at below cantilever beam, and between the ground wire and coplanar waveguide transmission line.The online double channels microwave power sensor uses MEMS surface manufacturing process, has many advantages, such as small in size, and integrated level is high.Also with resistance sensor, the power bracket of microwave signal to be measured can be greatlyd improve, by capacitance type sensor when microwave signal is weaker, the precision of detection signal can be improved.
Description
Technical field
The invention belongs to MEMS micro mechanical sensor fields, and in particular to online double channels microwave power sensor.
Background technique
The development of microwave technology based on MEMS (MEMS) has become the weight of a national science and technology levels
Indicate.In the research of the links such as signal generation, transmission and the receiving of microwave, the measurement of microwave power is essential
Basic test technology.Currently, the double channels microwave power sensor of traditional measurement microwave signal power is terminal type, meeting
Microwave signal is all consumed, subsequent device cannot continue with.In recent years, with the continuous development of sensing element, so that
Online double channels microwave power sensor is possibly realized.
Summary of the invention
The present invention is proposed for existing double channels microwave power sensing existing the problems such as all consuming microwave signal
Online double channels microwave power sensor.
Wire type double channels microwave power sensor, including substrate, ground wire, coplanar waveguide transmission line, capacitor plate, sensitive member
Part, cantilever beam；
The ground wire is set to the two sides of upper surface of substrate, and the coplanar waveguide transmission line is parallel to the ground wire of two sides, if
Set surface middle part on substrate；
In the sensing element insertion substrate, and it is located at below the middle part of coplanar waveguide transmission line；
It is equipped with one layer of metallic film below the sensing element, is embedded in substrate, and equal with coplanar waveguide transmission line
Row；
The cantilever beam is arranged on the ground wire of side by anchoring area, is suspended from above the sensing element；
The capacitor plate is located at below cantilever beam, and between the ground wire and coplanar waveguide transmission line.
Further, the material of the substrate is GaAs.
Further, for the capacitor plate when microwave signal enters, can generate electrostatic force makes cantilever beam deflection, to lead
It causes cantilever beam to change at a distance from the capacitor plate of lower section, finally capacitor is changed, by the change for measuring capacitor
Amount can calculate microwave power.
Further, the sensing element is made of silicon, and when microwave signal enters coplanar waveguide transmission line, can be added
Electronics inside hot silicon sensing element, can cause the resistance value of material itself to become when the warm-up movement state of electronics changes
Change, microwave power can be obtained in the variable quantity by measuring resistance value.
Further, the microwave power detector carries out the measurement of different microwave signal by two kinds of channels, when
It is measured when power signal is less than 1W by the capacitor that capacitor plate and overarm arm are formed, when power signal is in 1W ~ 100KW
When measured by sensing element.
The utility model has the advantages that
1. the utility model is passed due to being processed using MEMS technology compared to traditional microwave power detector
Sensor has many advantages, such as small in size, and integrated level is high.
2. the utility model detects microwave signal using condenser type, belong to online, is compared to traditional terminal thermoelectric
Type micro-wave power sensor will not be completely consumed microwave signal, subsequent can continue with, and have high sensitivity, measure model
Enclose the advantages that wide.
3. the utility model goes detection microwave signal using sensing element, the permission dynamic range of power signal to be measured is very big
And output signal is big, easily detection, has many advantages, such as that anti-overload ability is strong, dynamic range is big.
Detailed description of the invention
Fig. 1 is the top view of microwave power detector of the invention.
Fig. 2 is the front view of microwave power detector of the invention.
Fig. 3 is the side view of microwave power detector of the invention.
Wherein, 1- ground wire, 2- coplanar waveguide transmission line, 3- anchoring area, 4- capacitor plate, 5- cantilever beam, 6- sensing element, 7-
Metallic film.
Specific embodiment
Technical solution of the present invention is described in further detail with reference to the accompanying drawings of the specification.
Online double channels microwave power sensor, including substrate, ground wire 1, coplanar waveguide transmission line 2, capacitor plate 4,
Sensing element 6, cantilever beam 5.The material of the substrate is GaAs.
The ground wire 1 is set to the two sides of upper surface of substrate, and the coplanar waveguide transmission line 2 is parallel to the ground wire 1 of two sides,
Surface middle part on substrate is set.
The sensing element 6 is embedded in substrate, and is located at below the middle part of coplanar waveguide transmission line 2.
Below the sensing element 6 be equipped with one layer of metallic film 7, be embedded in substrate in, and with 2 phase of coplanar waveguide transmission line
In parallel.
The cantilever beam 5 is arranged on side ground wire 1 by anchoring area 3, is suspended from 6 top of sensing element.
The capacitor plate 4 is located at 5 lower section of cantilever beam, and between the ground wire 1 and coplanar waveguide transmission line 2.
For the capacitor plate 4 when microwave signal enters, can generate electrostatic force is bent cantilever beam 5, so as to cause cantilever
Beam 5 changes at a distance from lower section capacitor plate 4, finally capacitor is changed, and the knots modification by measuring capacitor is
Microwave power can be calculated.
The sensing element 6 is made of silicon, and when microwave signal enters coplanar waveguide transmission line 2, can heat silicon system
Electronics inside sensing element 6 can cause the resistance value of material itself to change when the warm-up movement state of electronics changes, and lead to
Microwave power can be obtained in the variable quantity for crossing measurement resistance value.
To sum up, the online double channels microwave power sensor can carry out different microwave letter by two kinds of channels
Number measurement, measured when power signal is less than 1W by the capacitor that capacitor plate 4 and overarm arm 5 are formed, work as power
Signal is measured in 1W ~ 100KW by sensing element 6.
The utility model is sensed due to being processed using MEMS technology compared to traditional microwave power detector
Device has many advantages, such as small in size, and integrated level is high.
The utility model detects microwave signal using condenser type for low-power level signal, belongs to online, is compared to biography
The terminal thermoelectric type micro-wave power sensor of system, will not be completely consumed microwave signal, subsequent can continue with, and have sensitive
The advantages that degree is high, and measurement range is wide.
The utility model goes detection microwave signal, the permission of power signal to be measured using sensing element for high-power signal
Dynamic range is very big and output signal is big, easily detects, and has many advantages, such as that anti-overload ability is strong, dynamic range is big.
The foregoing is merely better embodiment of the invention, protection scope of the present invention is not with above embodiment
Limit, as long as those of ordinary skill in the art's equivalent modification or variation made by disclosure according to the present invention, should all be included in power
In the protection scope recorded in sharp claim.
Claims (5)
1. online double channels microwave power sensor, including substrate, ground wire, coplanar waveguide transmission line, capacitor plate, sensitive member
Part, cantilever beam, it is characterised in that:
The ground wire is set to the two sides of upper surface of substrate, and the coplanar waveguide transmission line is parallel to the ground wire of two sides, and setting exists
In the middle part of upper surface of substrate；
In the sensing element insertion substrate, and it is located at below the middle part of coplanar waveguide transmission line；
It is equipped with one layer of metallic film below the sensing element, is embedded in substrate, and parallel with coplanar waveguide transmission line；
The cantilever beam is arranged on the ground wire of side by anchoring area, is suspended from above the sensing element；
The capacitor plate is located at below cantilever beam, and between the ground wire and coplanar waveguide transmission line.
2. online double channels microwave power sensor according to claim 1, it is characterised in that: the material of the substrate
For GaAs.
3. online double channels microwave power sensor according to claim 1, it is characterised in that: the capacitor plate is worked as
When microwave signal enters, can generate electrostatic force makes cantilever beam deflection, sends out at a distance from the capacitor plate of lower section so as to cause cantilever beam
Changing finally makes capacitor change, and the knots modification by measuring capacitor can calculate microwave power.
4. online double channels microwave power sensor according to claim 1, it is characterised in that: the sensing element by
Silicon is made, and when microwave signal enters coplanar waveguide transmission line, can heat the electronics inside silicon sensing element, electronics
Warm-up movement state can cause the resistance value of material itself to change when changing, and the variable quantity by measuring resistance value can be obtained
Microwave power.
5. online double channels microwave power sensor according to claim 1, it is characterised in that: the microwave power passes
Sensor carries out the measurement of different microwave signal by two kinds of channels, when power signal is less than 1W by capacitor plate and
The capacitor that overarm arm is formed measures, and is measured when power signal is in 1W ~ 100KW by sensing element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920061417.7U CN209486175U (en) | 2019-01-15 | 2019-01-15 | Online double channels microwave power sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920061417.7U CN209486175U (en) | 2019-01-15 | 2019-01-15 | Online double channels microwave power sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209486175U true CN209486175U (en) | 2019-10-11 |
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ID=68130963
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920061417.7U Active CN209486175U (en) | 2019-01-15 | 2019-01-15 | Online double channels microwave power sensor |
Country Status (1)
| Country | Link |
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| CN (1) | CN209486175U (en) |
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2019
- 2019-01-15 CN CN201920061417.7U patent/CN209486175U/en active Active
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