CN209428592U - A kind of vacuum coating equipment - Google Patents
A kind of vacuum coating equipment Download PDFInfo
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- CN209428592U CN209428592U CN201822208035.0U CN201822208035U CN209428592U CN 209428592 U CN209428592 U CN 209428592U CN 201822208035 U CN201822208035 U CN 201822208035U CN 209428592 U CN209428592 U CN 209428592U
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- upper cover
- lower cover
- driving unit
- substrate
- fixing piece
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Abstract
The utility model discloses a kind of vacuum coating equipment, including coating chamber, magnetron sputter, the first driving unit, the second driving unit, the first fixing piece, the second fixing piece and substrate placing piece, magnetron sputter is set to coating chamber top center position；First driving unit and the output shaft of the second driving extend through the two side walls being located in same direction on coating chamber；First fixing piece and the second fixing piece are connected with the first driving unit and the second driving unit respectively；Substrate placing piece includes upper cover, lower cover and elastic plate, the surrounding of upper cover and lower cover be respectively equipped with the first extension while and when the second extension；Several through-holes are equipped in upper cover and lower cover；Elastic plate is set between upper cover and lower cover, is respectively equipped with the plate body of several elastic slices including two sides, the position of each elastic slice respectively with upper cover or lower cover corresponding through-hole and be adapted.The utility model carries the substrate placing piece rotation of substrate by driving, realizes respectively to after the substrate plated film of elastic slice two sides, improves the spraying uniformity of substrate.
Description
Technical field
The utility model belongs to technical field of vacuum plating, and in particular to a kind of vacuum coating equipment.
Background technique
Gas phase deposition technology includes physical gas phase deposition technology and chemical vapour deposition technique, for requiring to generate characteristic shape
Masking process is generally used when the plated film film layer of shape.It is big for placing the station of substrate inside vacuum coating equipment in the prior art
It is mostly relatively simple for structure, and be fixed and invariable, for example, placement with multi-layer structure can be arranged by having in some vacuum coating equipments
Frame puts substrate to be coated in each layer of rack, due to the position of magnetron sputter be it is fixed, for from magnetic control
The closer substrate of sputter then spray it is more uniform, but for from the farther away substrate of magnetron sputter, then spraying effect can poor one
A bit.
Utility model content
In view of the above-mentioned problems, can be realized to work as and complete one of them the utility model proposes a kind of vacuum coating equipment
After the plated film of substrate, by driving the substrate placing piece for carrying substrate to rotate, plated film is carried out to another substrate to realize,
Production efficiency can not only be greatly improved, and can be improved the spraying uniformity of substrate.
It realizes above-mentioned technical purpose, reaches above-mentioned technical effect, the utility model is achieved through the following technical solutions:
A kind of vacuum coating equipment, comprising:
Coating chamber, the coating chamber are double-layer structure, including outer layer and internal layer；
Magnetron sputter, the magnetron sputter are set to the middle position at the top of the coating chamber internal layer；
First driving unit and the second driving unit；First driving unit and the second driving unit are oppositely arranged,
Between the outer layer and internal layer of coating chamber, the output shaft of the two extends through two be located in same direction on coating chamber internal layer
A side wall；
One end of first fixing piece and the second fixing piece, first fixing piece and the second fixing piece is respectively with described first
The output shaft of driving unit and the second driving unit is connected；
Substrate placing piece, the both ends of the substrate placing piece are another with first fixing piece and the second fixing piece respectively
End is connected comprising upper cover, lower cover and elastic plate, the surrounding of the upper cover and lower cover are respectively equipped with outside the first extension side and second
Prolong side, when the two lid closes, first extension is bonded while with the second extension；Several are equipped in the upper cover and lower cover
Through-hole；The elastic plate is set between the upper cover and lower cover comprising plate body, the two sides of the plate body are equipped with several and stick up
Rise elastic slice, the position of each elastic slice respectively with upper cover or it is lower cover corresponding through-hole be adapted.
Preferably, the cross section of the elastic slice is circle, and one end is fixedly linked with the plate body, and the other end, which is in, to tilt
State, for realizing point contact between substrate.
Preferably, the cross section of the elastic slice is rectangle, and one end is fixedly linked with the plate body, and the other end, which is in, to tilt
State, for realizing that line contacts between substrate.
Preferably, the elastic slice with a thickness of 0.1mm to 5mm.
Preferably, the elastic slice is made of indium thallium alloy, Nitinol or Batterium.
Preferably, the position of the through-hole in the upper cover and lower cover is corresponding or does not correspond to.
Preferably, the cross section of the through-hole in the upper cover and lower cover is round or rectangle.
It preferably, is clearance fit between the substrate placing piece and coating chamber.
Preferably, handle is equipped in the upper cover and lower cover.
Compared with prior art, the utility model has the beneficial effects that
One of the utility model vacuum coating equipment proposes a kind of novel substrate placing piece, the substrate
Two blocks of substrates are fixed simultaneously inside substrate placing piece to realize using the elastic plate being set between upper cover and lower cover in placing piece,
After completing the plated film of one of substrate, by driving the substrate placing piece for carrying substrate to rotate, to realize to another
A substrate carries out plated film, can not only greatly improve production efficiency, and can be improved the spraying uniformity of substrate.
Detailed description of the invention
Fig. 1 is a kind of integrally-built main view of embodiment of the utility model；
Fig. 2 is a kind of structural schematic diagram of the substrate placing piece of embodiment of the utility model.
Specific embodiment
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, with reference to embodiments, to this
Utility model is further elaborated.It should be appreciated that specific embodiment described herein is only used to explain that this is practical
It is novel, it is not used to limit the utility model.
The application principle of the utility model is explained in detail with reference to the accompanying drawing.
Embodiment 1
As shown in Figs. 1-2, a kind of vacuum coating equipment, comprising:
A kind of vacuum coating equipment, comprising:
Coating chamber, the coating chamber are double-layer structure, including outer layer 1 and internal layer 2；
Magnetron sputter 3, the magnetron sputter 3 are set to the middle position at 2 top of coating chamber internal layer；
First driving unit 4 and the second driving unit 5；First driving unit 4 and the second driving unit 5 are set relatively
It sets, is respectively positioned between the outer layer 1 of coating chamber and internal layer 2, the output shaft of the two, which extends through, is located at same side on coating chamber internal layer 2
Upward two side walls；In a kind of specific embodiment of the utility model, first driving unit 4 and the second driving unit
5 can be realized using driving motor；
One end of first fixing piece 6 and the second fixing piece 7, first fixing piece 6 and the second fixing piece 7 respectively with it is described
First driving unit 4 is connected with the output shaft of the second driving unit 5；Described in a kind of specific embodiment of the utility model
One end on one fixing piece 6 and the second fixing piece 7 far from 5 output shaft of the first driving unit 4 and the second driving unit is equipped with U-shaped
Opening, for placing the both ends of substrate placing piece；And first is equipped with first at U-shaped opening on fixing piece 6 and the second fixing piece 7
Location hole；
Substrate placing piece is clearance fit between the substrate placing piece and coating chamber；The both ends of the substrate placing piece
It is connected respectively with the other end of first fixing piece 6 and the second fixing piece 7 comprising upper cover 8, lower cover 11 and elastic plate 9, institute
State upper cover 8 and lower cover 11 surrounding be respectively equipped with the first extension while and when the second extension, when the two lid closes, first extension
It is bonded while with the second extension；Several through-holes 10 are equipped in the upper cover 8 and lower cover 11, in the upper cover 8 and lower cover 11
Through-hole 10 position it is corresponding or do not correspond to；The cross section of through-hole 10 in the upper cover 8 and lower cover 11 be it is round or
Rectangle can also be other geometries, where being not the inventive point of the utility model due to 10 shape of through-hole,
It does not do and excessive repeating and limiting；The elastic plate 9 is set between the upper cover 8 and lower cover 11 comprising plate body 901, it is described
The two sides of plate body 901 be equipped with several tilting elastic slice 902, the position of each elastic slice 902 respectively with it is right in upper cover 8 or lower cover 11
The through-hole 10 answered is adapted；In a kind of specific embodiment of the utility model, the cross section of the elastic slice 902 is circle,
One end is fixedly linked with the plate body 901, and the other end is in tilting state, for realizing point contact between substrate；In this reality
With in novel another specific embodiment, the cross section of the elastic slice 902 is rectangle, and one end and the plate body 901 are fixed
It is connected, the other end is in tilting state, for realizing that line contacts between substrate；The elastic slice 902 with a thickness of 0.1mm extremely
5mm is made of indium thallium alloy, Nitinol or Batterium；The upper cover 8 and lower cover 11 are equipped with and described first
The corresponding second location hole of location hole, after for screw insertion, substrate placing piece and the first fixing piece 6 and second are consolidated in realization
Determine part 7 to be connected.
Further, for the ease of the substrate placing piece of taking away, handle (figure is equipped in the upper cover 8 and lower cover 11
In be not shown).
In summary:
One of the utility model vacuum coating equipment proposes a kind of novel substrate placing piece, the substrate
Two blocks of substrates are fixed simultaneously inside substrate placing piece to realize using the elastic plate being set between upper cover and lower cover in placing piece,
After completing the plated film of one of substrate, by driving the substrate placing piece for carrying substrate to rotate, to realize to another
A substrate carries out plated film, can not only greatly improve production efficiency, and can be improved the spraying uniformity of substrate.
The basic principles and main features of the present invention and the advantages of the present invention have been shown and described above.Current row
The technical staff of industry is described in above embodiments and description it should be appreciated that the present utility model is not limited to the above embodiments
Only illustrate the principles of the present invention, on the premise of not departing from the spirit and scope of the utility model, the utility model is also
It will have various changes and improvements, these various changes and improvements fall within the scope of the claimed invention.The utility model
Claimed range is defined by the appending claims and its equivalent thereof.
Claims (9)
1. a kind of vacuum coating equipment characterized by comprising
Coating chamber, the coating chamber are double-layer structure, including outer layer and internal layer；
Magnetron sputter, the magnetron sputter are set to the middle position at the top of the coating chamber internal layer；
First driving unit and the second driving unit；First driving unit and the second driving unit are oppositely arranged, and are respectively positioned on
Between the outer layer and internal layer of coating chamber, the output shaft of the two extends through two sides being located in same direction on coating chamber internal layer
Wall；
One end of first fixing piece and the second fixing piece, first fixing piece and the second fixing piece drives with described first respectively
The output shaft of unit and the second driving unit is connected；
Substrate placing piece, the both ends of the substrate placing piece other end phase with first fixing piece and the second fixing piece respectively
Even comprising upper cover, lower cover and elastic plate, the surrounding of the upper cover and lower cover are respectively equipped with the first extension side and the second extension
Side, when the two lid closes, first extension is bonded while with the second extension；It is logical that several are equipped in the upper cover and lower cover
Hole；The elastic plate is set between the upper cover and lower cover comprising plate body, the two sides of the plate body are equipped with several tiltings
Elastic slice, the position of each elastic slice respectively with upper cover or it is lower cover corresponding through-hole be adapted.
2. a kind of vacuum coating equipment according to claim 1, it is characterised in that: the cross section of the elastic slice is circle,
One end is fixedly linked with the plate body, and the other end is in tilting state, for realizing point contact between substrate.
3. a kind of vacuum coating equipment according to claim 1, it is characterised in that: the cross section of the elastic slice is rectangle,
One end is fixedly linked with the plate body, and the other end is in tilting state, for realizing that line contacts between substrate.
4. a kind of vacuum coating equipment according to claim 2 or 3, it is characterised in that: the elastic slice with a thickness of 0.1mm
To 5mm.
5. a kind of vacuum coating equipment according to claim 2 or 3, it is characterised in that: the elastic slice is by indium thallium alloy, nickel
Titanium alloy or Batterium are made.
6. a kind of vacuum coating equipment according to claim 1, it is characterised in that: through-hole in the upper cover and lower cover
Position is corresponding or does not correspond to.
7. a kind of vacuum coating equipment according to claim 1 or 6, it is characterised in that: logical in the upper cover and lower cover
The cross section in hole is round or rectangle.
8. a kind of vacuum coating equipment according to claim 1, it is characterised in that: the substrate placing piece and coating chamber it
Between be clearance fit.
9. a kind of vacuum coating equipment according to claim 1, it is characterised in that: be equipped with handle in the upper cover and lower cover
Hand.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822208035.0U CN209428592U (en) | 2018-12-27 | 2018-12-27 | A kind of vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822208035.0U CN209428592U (en) | 2018-12-27 | 2018-12-27 | A kind of vacuum coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209428592U true CN209428592U (en) | 2019-09-24 |
Family
ID=67973825
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822208035.0U Active CN209428592U (en) | 2018-12-27 | 2018-12-27 | A kind of vacuum coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209428592U (en) |
-
2018
- 2018-12-27 CN CN201822208035.0U patent/CN209428592U/en active Active
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