CN209401647U - The manual changing machine of slide rail type graphite boat stuck point - Google Patents
The manual changing machine of slide rail type graphite boat stuck point Download PDFInfo
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- CN209401647U CN209401647U CN201821996246.9U CN201821996246U CN209401647U CN 209401647 U CN209401647 U CN 209401647U CN 201821996246 U CN201821996246 U CN 201821996246U CN 209401647 U CN209401647 U CN 209401647U
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- graphite boat
- mould
- stuck point
- boat piece
- column
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model belongs to solar battery manufacturing field, more particularly to a kind of manual changing machine of slide rail type graphite boat stuck point, including graphite boat piece positioning mould, load and unload mould, handpress, shifting sledge component, the graphite boat piece of stuck point to be replaced is placed in graphite boat piece positioning mould by operator when use, graphite boat piece positioning mould is adjusted to suitable position using shifting sledge component, then the handling mould of its lower end is driven to be pushed using handpress, old stuck point in graphite boat piece is unloaded, multiple old stuck points can disposably be unloaded, work efficiency is high, after old stuck point unloading, new stuck point is placed in the stuck point hole of graphite boat piece by operator, then luggage is clicked through to neocaine using handling mould to match, multiple new stuck points can be disposably installed, the utility model overall structure is simple, it takes up space small, manufacturing cost It is low, easy for operation, not high to operator's skill requirement and work efficiency is high, later maintenance cost is low, is suitable for a wide range of promote the use of.
Description
Technical field
The invention belongs to solar battery manufacturing field more particularly to a kind of manual changing machine of slide rail type graphite boat stuck point.
Background technique
With the fast development of solar battery, more and more solar batteries enter civil field.In solar-electricity
In the production process in pond, PECVD(PlasmaEnhancedChemicalVaporDeposition, plasma enhanced chemical gas
Phase sedimentation) coating process is important link in production procedure, play very important effect.PECVD be by microwave or
Radio frequency etc. makes the gas ionization containing film composed atom, is being partially formed plasma, and plasma chemistry activity is very strong,
It is easy to react, goes out desired film in deposition on substrate.When silicon wafer carries out its surface coating process, need not plate
On the loader of the silicon wafer insertion PECVD vacuum coating equipment of film.Currently, loader generallys use graphite boat, concrete operations
Cheng Shi: silicon wafer is inserted into graphite boat and is positioned thereon by graphite boat stuck point, then, the graphite boat for being loaded with silicon wafer is placed on
In PECVD vacuum coating equipment, plated film is carried out to silicon wafer using PECVD technique.In order to fix silicon wafer in graphite boat, graphite
The graphite boat piece of boat is equipped with the stuck point for fixing silicon wafer, since silicon wafer can have certain mill during inserting and taking to stuck point
Damage, needs periodically to replace stuck point, to guarantee the kilter of graphite boat, and then guarantees the coating quality of silicon wafer.
The replacing options operating procedure of conventional graphite boat stuck point is complicated and cumbersome, compares simultaneously assembly crewman's skill requirement
Height will lead to graphite boat piece and the damage of graphite boat stuck point in replacement process or assemble not in place, biography if skill operation is not in place
The graphite boat stuck point replacement operation method of system is: graphite boat stuck point needs are used to a manual simplified press, while press two
Side need to obtain the height as handpress platform with cystosepiment or rubber pad pad, and operator is sitting in graphite in face of press
Boat piece, which is laid flat, to be placed in above handpress platform, is then successively unloaded 24 stuck points of graphite boat with handpress, graphite boat
The stuck point that operator will more renew after stuck point unloads is placed in above corresponding card hole, cautious to help the right side with left hand
Hand rotates press down, and the dynamics that hand makes will be got hold of, if the dynamics used is too big to damage graphite boat and stuck point by pressure, if
The dynamics used is too small just to press not in place, and can only once fill a stuck point, after the stuck point for having pressed a graphite boat piece, continue
The replacement of next graphite boat piece stuck point, a graphite boat are formed by 27, need replacing several within usual one day as stone
Black boat stuck point, personnel are complicated for operation cumbersome, usually because having little time to replace graphite boat stuck point, and cause manufacturing schedule slow, and one
As in the case of graphite boat piece is damaged because of driving plan or stuck point presses situation not in place very more, during leading to silicon wafer to manufacture
Damage or dropping situations, influence product quality.Although having occurred the automatic changing machine of graphite boat stuck point successively in the market,
Due to this automatic changing machine complicated integral structure, manufacturing cost is higher, and operating process is cumbersome, and take up space compared with
Greatly, relatively high to operating environment requirements and later maintenance cost, there are great limitations in popularization and application.
Summary of the invention
Present invention aim to address above-mentioned the deficiencies in the prior art, provide a kind of overall structure is simple, it is small to take up space,
Manufacturing cost is low, it is easy for operation, to the slide rail type graphite boat stuck point that operator's skill requirement is not high and work efficiency is high
Manual changing machine.
The present invention solves technical solution used by above-mentioned the deficiencies in the prior art:
A kind of manual changing machine of slide rail type graphite boat stuck point characterized by comprising
Graphite boat piece positioning mould, for placing the graphite boat piece of stuck point to be replaced and being positioned to it;
Mould is loaded and unloaded, is arranged above the graphite boat piece positioning mould, for being carried out to the old stuck point in the graphite boat piece
Handling;
Handpress, setting in the handling mould upper end, for the old stuck point replacement offer into the graphite boat piece to
Under pressure, the handling mould carries out upper bottom above the graphite boat piece positioning mould under the drive of the handpress
It moves;
Shifting sledge component is arranged below the graphite boat piece positioning mould, and the graphite boat piece positioning mould is in the shifting
Left and right displacement is carried out under the drive of dynamic slide track component.
Preferably, heretofore described graphite boat piece positioning mould is equipped with several positioning columns, several positioning column intervals
The both sides of the edge of the graphite boat piece positioning mould are set.
Preferably, heretofore described handling mould is constituted by unloading a mould or decorateeing mould, and the mould that unloads is for the stone
Old stuck point in black boat piece is unloaded, and the mould of decorateeing is for assembling new stuck point to graphite boat piece.
Preferably, heretofore described to unload a mould or the surrounding for decorateeing mould is all provided with there are four positioning hole, it is described
Four positioning holes are adapted with the positioning column.
Preferably, heretofore described unload unloads a column equipped with several on the downside of a mould, and the mould of decorateeing is equipped with several decorate
Column.
Preferably, heretofore described handpress includes base, column, pressure point rotating handle, compression bar, and the column is solid
Fixed to be arranged on the base, the compression bar is movably arranged on the column and can slide up in the side of the vertical base
Dynamic, the compression bar is equipped with rack gear, and the column is equipped with the gear being meshed with the rack gear, the pressure point rotating handle
One end is vertically fixedly connected in the rotary shaft of the gear.By rotating pressure point rotating handle rotate gear, gear makes rack gear
It moves in the vertical direction, so that compression bar be driven to move in the vertical direction, the lower end of compression bar is made to press graphite boat piece.
Preferably, heretofore described shifting sledge component is to be equipped with rail bed in the handpress two sides, described
Rail bed is equipped with sliding rail, and the sliding rail is equipped with can be along its slide free to slide, the graphite boat piece positioning mould setting
On the slide.
The invention has the advantages that since the manual changing machine of slide rail type graphite boat stuck point of the present invention includes that graphite boat piece is fixed
Position mould, handling mould, handpress, shifting sledge component, are placed the graphite boat piece of stuck point to be replaced by operator when use
In graphite boat piece positioning mould, graphite boat piece positioning mould is adjusted to suitable position using shifting sledge component, then utilizes hand
Dynamic compressor drives the handling mould of its lower end to be pushed, and unloads, can disposably unload to the old stuck point in graphite boat piece
Multiple old stuck points, work efficiency is high, and after old stuck point unloading, new stuck point is placed on to the stuck point hole of graphite boat piece by operator
In hole, luggage then is clicked through to neocaine using handling mould and is matched, overall structure of the present invention is simple, take up space small, manufacturing cost is low,
It is easy for operation, not high to operator's skill requirement and work efficiency is high, later maintenance cost is low, is suitable for a wide range of promote
It uses.
Detailed description of the invention
Fig. 1 is a kind of example structure schematic diagram of the manual changing machine of slide rail type graphite boat stuck point of the present invention, and a kind of
Preferred embodiment schematic diagram.
Fig. 2, Fig. 3 are a kind of example structure schematic diagram that the present invention unloads a mould, wherein Fig. 3 is the main view of Fig. 2.
Fig. 4 is a kind of example structure schematic diagram that the present invention decorates mould.
Fig. 5 is a kind of example structure schematic diagram of handpress of the present invention.
Specific embodiment
It is described below for disclosing the present invention so that those skilled in the art can be realized the present invention.It is excellent in being described below
Embodiment is selected to be only used as illustrating, it may occur to persons skilled in the art that other obvious modifications.It defines in the following description
Basic principle of the invention can be applied to other embodiments, deformation scheme, improvement project, equivalent program and do not carry on the back
Other technologies scheme from the spirit and scope of the present invention.
In the description of the present invention, it should be noted that the orientation or position of the instructions such as term " on ", "lower", "left", "right"
Setting relationship is to be based on the orientation or positional relationship shown in the drawings, and is merely for convenience of description of the present invention and simplification of the description, rather than
The device or element of indication or suggestion meaning must have a particular orientation, be constructed and operated in a specific orientation, therefore cannot
It is interpreted as limitation of the present invention.
Fig. 1-Fig. 5 shows a kind of example structure schematic diagram of the manual changing machine of slide rail type graphite boat stuck point of the present invention,
It is also a kind of preferred embodiment schematic diagram.As Figure 1-Figure 5, slide rail type graphite boat stuck point described in the present embodiment is replaced manually
Machine, including graphite boat piece positioning mould 10, handling mould 20, handpress 30, shifting sledge component 40, wherein the graphite boat piece
Positioning mould 10 is for placing the graphite boat piece of stuck point to be replaced and positioning to it;The handling mould 20 is arranged in the graphite boat
Above piece positioning mould, for being loaded and unloaded to the old stuck point in the graphite boat piece;The handpress 30 is arranged in the dress
Mould unloading upper end provides downward pressure for the old stuck point replacement into the graphite boat piece, and the handling mould is described manual
Upper and lower displacement is carried out above the graphite boat piece positioning mould under the drive of press;The shifting sledge component 40 is arranged described
Below graphite boat piece positioning mould, the graphite boat piece positioning mould carries out left and right displacement under the drive of the shifting sledge component.
Preferably, as shown in Figure 1, heretofore described graphite boat piece positioning mould 10 is equipped with several positioning
Column 11, several positioning columns 11 are arranged at intervals on the both sides of the edge of the graphite boat piece positioning mould 10.
Preferably, as Figure 1-Figure 4, handling mould 20 described in the present embodiment are by unloading a mould 21 or decorateeing
Mould 22 is constituted, wherein the mould 21 that unloads is described to decorate the use of mould 22 for unloading to the old stuck point in the graphite boat piece
In to the new stuck point of graphite boat piece assembly.
Preferably, as shown in Figure 2 and Figure 3,21 surrounding of a mould is unloaded described in the present embodiment to set there are four unloading
Point location hole 23, described four are unloaded point location hole 23 and are adapted with the positioning column 11, and unloading can benefit in a course of work
With positioning column 11 and the mutual cooperation of point location hole 23 is unloaded, a mould 21 will be unloaded and positioned, an accuracy and work are unloaded in raising
Stability.Preferably, it is unloaded described in the present embodiment it can be seen from Fig. 2, Fig. 3 and unloads a column 24 equipped with several on the downside of mould 21, led to
It crosses and unloads a column 24 and can unload the old stuck point in graphite boat stuck point, in the present embodiment, the column 24 that unloads preferably is set
There are six, thus using changing machine of the present invention can disposably uninstall six Geju City stuck points, working efficiency is unloaded compared to traditional artificial
Point operation improves six times.
Preferably, as shown in figure 4, the surrounding for decorateeing mould 22 described in the present embodiment is set, there are four decorateeed
Hole 25 is positioned, positioning hole 25 is decorateeed for described four and is adapted with the positioning column 11, decorateeing in the course of work can use
Positioning column 11 cooperates with positioning hole 25 is decorateeed, and will decorate mould 22 and positions, and raising decorates accuracy and work surely
It is qualitative.Preferably, as seen from Figure 4, it is decorateeed described in the present embodiment and decorates column 26 equipped with several on the downside of mould 22, by decorateeing
Column 26 can assemble new stuck point on graphite boat, and in the present embodiment, the column 26 of decorateeing is preferably provided with six, thus utilizes
Changing machine of the present invention can disposably install six new stuck points, and working efficiency decorates operation and improve six times compared to traditional artificial.
Preferably, as shown in figure 5, handpress 30 described in the present embodiment include base 31, column 32,
Pressure point rotating handle 33, compression bar 34, the column 32 are fixed on the base 31, and the compression bar 34 is movably arranged on institute
It states on column 32 and rack gear 35, the column 32 can be equipped in the square upward sliding of the vertical base 31, the compression bar 34
It is equipped with the gear 36 being meshed with the rack gear 35, one end of the pressure point rotating handle 33 is vertically fixedly connected on the tooth
In the rotary shaft of wheel 36.By rotation 33 rotate gear 36 of pressure point rotating handle in the present embodiment, gear 36 makes rack gear 35 perpendicular
Histogram moves up, so that compression bar 34 be driven to move in the vertical direction, the lower end of compression bar 34 is made to press graphite boat piece.
Preferably, as shown in Figure 1, shifting sledge component described in the present embodiment 40 is in the manual pressure
30 two sides of machine are equipped with rail bed 41, and the rail bed 41 is equipped with sliding rail 42, and the sliding rail 42 is equipped with can be along its freedom
The slide 43 of sliding, the graphite boat piece positioning mould 10 are arranged on the slide 43.Slide 43 can drive in the course of work
Graphite boat piece positioning mould is free to slide on the slide rail, needs freely to adjust the position of graphite boat piece positioning mould as the case may be,
Flexible operation improves replacement precision.
Changing machine of the present invention when in use, smooth is put by operator by graphite boat piece to be replaced is correct first
It sets in graphite boat piece positioning mould, then the mobile graphite boat piece positioning mould of left hand, unloads point location hole pair for four that unload a mould
Positioning column above meta anthracite boat piece positioning mould, the right hand rotate down the pressure point rotating handle of handpress, disposably lay down six
A stuck point operates total pressure five times with this, lays down and is changed to and decorates mould the mould that unloads above handpress after all stuck points, stone
Black boat piece positioning mould is moved to left side of body, 24 graphite boat stuck points is placed on graphite boat piece stuck point hole with hand, then
Left hand moves graphite boat piece positioning mould, the positioning that four that decorate mould are decorateeed above positioning aligned graphite boat piece positioning mould
Column, the right hand rotate down press handle, disposably install six stuck points, total pressure are operated five times with this, after installing all stuck points
It takes graphite boat piece away, replaces the stuck point above next graphite boat piece.
Compared with the prior art, the present invention mainly has the advantage that 1, once six stuck points of unloading, once can only in the past
Unload a stuck point, it now is possible to once unload six stuck points, speed is six times of former traditional approach;2, six cards are disposably filled
Point can only once fill a stuck point in the past, it now is possible to once fill six stuck points, speed is six times of former traditional approach;3,
Protect graphite boat piece injury-free, frequent misalignment, caused to damage graphite boat piece by pressure when decorateeing or unload in the past, can using the present invention
To prevent similar situation occur;4, easy for operation, it is not high to the skill requirement of operator, on former relevant operation personnel
Hilllock operation needs one week of training and learning that could operate, and accidentally damages graphite boat piece by pressure sometimes or installation is not in place, now only
Need training and learning once can be competent at this work to two days, and install almost it is qualified, do not damage;5, work efficiency is high, is now
Six times of efficiency of traditional approach in the past;6, safety, former operator are often pressed onto finger, can be prevented using the present invention similar
It happens;7, manufacturing cost is low, if purchasing new automation equipment ten of thousands or even hundreds of thousands easily, structure of the invention
Simply, taking up space, small, manufacturing cost is low, can save great amount of cost for enterprise;8, it is able to maintain live 6S, uses foam in the past
It pads in graphite boat piece in the following, the foam scrap for causing operation scene to be floatd everywhere, can prevent similar situation using the present invention now
Appearance.
It should be understood by those skilled in the art that foregoing description and the embodiment of the present invention shown in the drawings are only used as illustrating
And it is not intended to limit the present invention.The purpose of the present invention has been fully and effectively achieved.Function and structural principle of the invention exists
It shows and illustrates in embodiment, under without departing from the principle, embodiments of the present invention can have any deformation or modification.
Claims (7)
1. a kind of manual changing machine of slide rail type graphite boat stuck point characterized by comprising
Graphite boat piece positioning mould, for placing the graphite boat piece of stuck point to be replaced and being positioned to it;
Mould is loaded and unloaded, is arranged above the graphite boat piece positioning mould, for being loaded and unloaded to the old stuck point in the graphite boat piece;
Handpress, setting provide downwards in the handling mould upper end for the old stuck point replacement into the graphite boat piece
Pressure, the handling mould carry out upper and lower displacement above the graphite boat piece positioning mould under the drive of the handpress;
Shifting sledge component is arranged below the graphite boat piece positioning mould, and the graphite boat piece positioning mould is described mobile sliding
Left and right displacement is carried out under the drive of rail assembly.
2. the manual changing machine of slide rail type graphite boat stuck point according to claim 1, which is characterized in that the graphite boat piece is fixed
Position mould is equipped with several positioning columns, and several positioning columns are arranged at intervals on the both sides of the edge of the graphite boat piece positioning mould.
3. the manual changing machine of slide rail type graphite boat stuck point according to claim 2, which is characterized in that the four of the handling mould
Periphery is set there are four hole is positioned, and four positioning hole is adapted with the positioning column.
4. the manual changing machine of slide rail type graphite boat stuck point according to claim 3, which is characterized in that the handling mould is by unloading
Point mould decorates mould composition, and the mould that unloads is described to decorate mould use for unloading to the old stuck point in the graphite boat piece
In to the new stuck point of graphite boat piece assembly.
5. the manual changing machine of slide rail type graphite boat stuck point according to claim 4, which is characterized in that described to unload on the downside of a mould
Unload a column equipped with several, it is described decorate mould and be equipped with several decorate column.
6. the manual changing machine of slide rail type graphite boat stuck point according to claim 1, which is characterized in that the handpress packet
Base, column, pressure point rotating handle, compression bar are included, the column is fixed on the base, and the compression bar is movably arranged on
On the column and rack gear can be equipped in the square upward sliding of the vertical base, the compression bar, the column be equipped with
One end of the gear that the rack gear is meshed, the pressure point rotating handle is vertically fixedly connected in the rotary shaft of the gear.
7. the manual changing machine of slide rail type graphite boat stuck point according to claim 1, which is characterized in that the shifting sledge group
Part is to be equipped with rail bed in the handpress two sides, and the rail bed is equipped with sliding rail, and the sliding rail is equipped with can edge
Its slide free to slide, the graphite boat piece positioning mould are arranged on the slide.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201821996246.9U CN209401647U (en) | 2018-11-30 | 2018-11-30 | The manual changing machine of slide rail type graphite boat stuck point |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201821996246.9U CN209401647U (en) | 2018-11-30 | 2018-11-30 | The manual changing machine of slide rail type graphite boat stuck point |
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Publication Number | Publication Date |
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CN209401647U true CN209401647U (en) | 2019-09-17 |
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CN201821996246.9U Active CN209401647U (en) | 2018-11-30 | 2018-11-30 | The manual changing machine of slide rail type graphite boat stuck point |
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2018
- 2018-11-30 CN CN201821996246.9U patent/CN209401647U/en active Active
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