CN209393454U - Curtain device and curtain system - Google Patents
Curtain device and curtain system Download PDFInfo
- Publication number
- CN209393454U CN209393454U CN201821768386.0U CN201821768386U CN209393454U CN 209393454 U CN209393454 U CN 209393454U CN 201821768386 U CN201821768386 U CN 201821768386U CN 209393454 U CN209393454 U CN 209393454U
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- slit
- curtain
- curtain device
- width
- supply head
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- 230000000694 effects Effects 0.000 claims description 22
- 210000001364 upper extremity Anatomy 0.000 claims description 3
- 239000000758 substrate Substances 0.000 abstract description 32
- 238000002386 leaching Methods 0.000 abstract description 27
- 230000008859 change Effects 0.000 abstract description 6
- 238000000576 coating method Methods 0.000 description 40
- 239000011248 coating agent Substances 0.000 description 39
- 229920002120 photoresistant polymer Polymers 0.000 description 10
- 239000002699 waste material Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 239000004744 fabric Substances 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000006641 stabilisation Effects 0.000 description 2
- 238000011105 stabilization Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000011344 liquid material Substances 0.000 description 1
- 239000010808 liquid waste Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000008450 motivation Effects 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
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- Coating Apparatus (AREA)
Abstract
The utility model relates to a kind of curtain device and curtain system, the curtain system that the utility model is proposed has a curtain device and a conveyer belt, the underface that conveyer belt passes through the slit of curtain device.Curtain device has a supply head, two fixed side rods and two movable side rods.Supply head has a supply head ontology and an aforementioned slots, and slit is formed in supply head ontology.Fixed side rod is located at width of the distance equal to slit of slit both sides and two fixed side rods.Movable side rod is adjacent to slit and can move along the width direction of slit, and thus can provide a width can be adjusted at any time the leaching curtain of variation.Specifically, middle section and two side portions are divided into for curtain is drenched by movable side rod, and the width of middle section can correspond to the change in shape of substrate with the spacing of movable side rod.
Description
Technical field
The utility model is the apparatus for coating about a kind of showering curtain type, and liquid material can be coated on to a substrate.
Background technique
It is the key technology that chip manufactures that photoresist (including positive and negative two types photoresist) is coated on chip, and the prior art
Many of to the method for substrate (can be chip) coating coating, such as rotary coating, atomizing coating or slit coating
Deng.Wherein, rotary coating is most often used in wafer coating photoresist, but during rotary coating, only less than
One at coating can really be applied to substrate, and lose ninety percent or more coating, and if coating viscosity it is higher when can not yet
It is coated using rotary apparatus for coating.And in slit coating, though can be reduced masking liquid waste, it can also make the coating on substrate
Energy even spread, but due to narrow slit type coating apparatus complexity, and cause product cost excessively high.
Another coating method is curtain, is that coating is discharged by a slit of apparatus for coating, thus shape
At leaching curtain.And substrate is covered on substrate by passing through below leaching curtain, and in substrate by drenching curtain when leaching curtain.However, existing skill
In the curtain device of art, it is fixed for being formed by leaching curtain width, therefore only can be suitably used for the substrate of specific width.Tool
For body, in order to enable substrate completely to be covered by coating, the width for drenching curtain is greater than the width of substrate, if but drench curtain width
It will cause coating when excessive greater than substrate again to be not used for being coated on substrate and form waste, therefore preferably leaching curtain width omits
Greater than the width of substrate.However, many substrates and non-rectangle, and may be round or other shapes, therefore drench the width of curtain
It is only capable of the maximum width slightly larger than substrate, and the waste of coating can still occur in the part of substrate other width.
In view of this, propose a kind of more preferably improvement plan, industry urgent problem to be solved thus.
Utility model content
The main purpose of the utility model is that proposing a kind of curtain system and curtain device, institute
The width of the leaching curtain of formation can change immediately adjustment with the width of substrate.
In order to achieve the above object, the curtain system that is proposed of the utility model have a curtain device and
One conveyer belt passes through the underface of the slit of curtain device.
The curtain device that the utility model is proposed includes
One supply head, includes
One supply head ontology；
One slit above-mentioned, from the side of the supply head ontology towards extending in the supply head ontology；And
One feeding inlet extends from the another side of the supply head ontology into the supply head ontology, and it is narrow to be connected to this
Seam；
Two fixed side rods are fixed on the side that the supply head ontology is formed with the slit, and are located at the slit two
It is other；The distance of described two fixed side rods is equal to the width of the slit；And
Two movable side rods, are adjacent to the slit and can move along the width direction of the slit.
In foregoing curtain device, respectively the top of the activity side rod in being in the width direction of the slit
Centre is high and both ends are low.
In foregoing curtain device, respectively the top surface of the activity side rod includes:
One interconnecting piece, is a flat surface；And
Two distributary divisions are adjacent to the opposite sides side of the interconnecting piece respectively, and described two distributary divisions certainly should respectively
Interconnecting piece extends downwardly and outwardly.
In foregoing curtain device, respectively the top surface of the activity side rod includes two distributary divisions, upper limb phase
It is adjacent, and described two distributary divisions are extended downwardly and outwardly from adjacent place respectively.
In foregoing curtain device, respectively the top of the activity side rod is in the width direction of the vertical slit
It is high for central low and both ends.
In foregoing curtain device, respectively the top surface of the activity side rod includes:
An at least distributary division；And
Multiple edge parts；Edge part described in two of them is adjacent to the opposite sides side of an at least distributary division respectively, and
Wherein from this, at least a distributary division is extended upwardly and outwardly respectively for described two edge parts.
In foregoing curtain device, respectively the activity side rod is in the one side shape towards another activity side rod
Cheng Youyi protrudes side, which is in vertical, and the extension line on the protrusion side intersects with the extension line in the slit width direction.
Foregoing curtain device also have there are two accumulator tank, be fixedly arranged on described two active edges respectively
Bar, and it is mobile with described two movable side rods respectively；Respectively the accumulator tank is from the fixed activity side rod to far from another work
The direction of dynamic side rod extends, and respectively the accumulator tank in the length in the width direction of the slit not less than the slit width one
Half.
In foregoing curtain device, respectively the accumulator tank is not less than in the length in the width direction of the slit
The width of the slit.
The utility model also proposes a kind of curtain system, have a foregoing curtain device with
And a plummer, it is located at the underface of the slit.The curtain device can be mobile relative to the plummer.
Based on above-mentioned technological means, the utility model has the advantage of curtain system and curtain devices
Can provide a width can be adjusted at any time the leaching curtain of variation.Specifically, by movable side rod will drench curtain be divided into middle section and
Two side portions, and the leaching curtain of middle section is the practical upper leaching curtain for being coated on substrate, and the width of the leaching curtain of middle section can be with
The spacing of movable side rod correspond to the change in shape of substrate.Therefore, the curtain system of the utility model and showering curtain type apply
Cloth apparatus can thoroughly reduce the waste of coating.
In addition, the curtain system and curtain device of the utility model can also pass through setting accumulator tank and benefit
Extra coating is recycled with the mode vacuumized, can not only thoroughly be reduced the waste of coating, can more be greatly improved the use of coating
Rate；And the curtain system and curtain device of the utility model can be applicable to the painting of different viscosities masking liquid
Cloth, and it is able to maintain the uniformity of coating, and have the advantages that operation is easy.
Detailed description of the invention
Fig. 1 is the stereoscopic schematic diagram of the utility model first embodiment.
Fig. 2 is the stereoscopic schematic diagram of another angle of the utility model first embodiment.
Fig. 3 is the diagrammatic cross-section of the utility model first embodiment.
Fig. 4 is the diagrammatic cross-section of another angle of the utility model first embodiment.
Fig. 5 is the stereoscopic schematic diagram of the movable side rod of the utility model first embodiment.
Fig. 6 is the diagrammatic cross-section of the movable side rod of the utility model first embodiment.
Fig. 7 is the diagrammatic cross-section of another angle of the movable side rod of the utility model first embodiment.
Fig. 8 and Fig. 9 is the consecutive action figrue of the utility model first embodiment.
Figure 10 is the stereoscopic schematic diagram of the utility model second embodiment.
Specific embodiment
Referring first to Fig. 1 to 2.The utility model proposes a kind of curtain system, can have in first embodiment
There are a curtain device 1 and a conveyer belt 2, and conveyer belt 2 passes through the lower section of curtain device 1, therefore conveyer belt 2
The lower section that substrate A passes through curtain device 1 can be used to carry and convey.
Then please also refer to Fig. 3 and Fig. 4.Curtain device 1 have a supply head 10, two fixed side rods 20,
And two movable side rods 30, and selectively there are two accumulator tank 40 and multiple guide bars 50 for tool.Supply head 10 has a supply head
Ontology 100, a slit 11 and a feeding inlet 12.Slit 11 is from the side of supply head ontology 100 towards in supply head ontology 100
Extend, in other words, slit 11 is formed with the opening of thin-and-long in the side of supply head ontology 100.Conveyer belt 2 passes through slit 11
Underface (underface being open), thus when coating by slit 11 opening flow out and is formed drench curtain B when, coating can be flow to
Substrate A on conveyer belt 2.Feeding inlet 12 extends from the another side of supply head ontology 100 into supply head ontology 100, and even
Slit 11 is passed through, thus coating can flow into slit 11 by feeding inlet 12.
In the present embodiment, supply head 10 may also be formed with a sprue 13 and a secondary channels 14, but in other embodiments
Multiple secondary channels 14 can also be formed with or do not have secondary channels 14.Specifically, sprue 13 and secondary channels 14 are all located at feed
Inside head ontology 100, and all extend horizontally.The length of the width of slit 11, sprue 13 and secondary channels 14 in the present embodiment
It is all equal, but the length of sprue 13 or area of section are greater than the length or area of section of secondary channels 14.Sprue 13 is located at narrow
Between seam 11 and feeding inlet 12, and it is connected to slit 11 and feeding inlet 12.Secondary channels 14 are located at the opening of sprue 13 and slit 11
Between.
In other embodiments, 11 different piece of slit can have different width, and sprue 13 and secondary channels 14
Length is different.Specifically, slit 11 can be divided into first segment and second segment, and sprue 13 be connected to secondary channels 14 it is narrow
The opposite sides side of the first segment of seam 11, and secondary channels 14 and the opening of slit 11 are connected to the phase of the second segment of slit 11
To two sides.Width in the first segment horizontal direction of slit 11 is less than the width in the second segment horizontal direction of slit 11, narrow
The equal length of width and sprue 13 in the first segment horizontal direction of seam 11, and in the second segment horizontal direction of slit 11
The equal length of width and secondary channels 14, and opening width is equal to the width of the second segment of slit 11.
In other embodiments, width in 11 horizontal direction of slit can by it is upper under it is cumulative.
Fixed side rod 20 is fixed on supply head ontology 100, be specifically affixed to supply head ontology 100 be formed with it is narrow
On the side of seam 11.Fixed side rod 20 is located at 11 both sides of slit, and the distance of two fixed side rods 20 is equal to slit 11
The width of opening.In other words, fixed side rod 20 is located on the extension line of 11 width direction of slit.Each fixed side rod 20 is in towards separately
The one side of one fixed side rod 20 is formed with a protrusion side, and protrusion side is in extension line and 11 width of slit vertical, and that protrude side
The extension line in direction intersects.The left and right side of slit 11 and protrusion Bian Chengyi straight line, the left and right side for thus drenching curtain B is along solid
It flows on the protrusion side of edge fixing rod 20.
Next referring to Fig. 1, Fig. 3 and Fig. 5.Two movable side rods 30 are adjacent to slit 11 and can be along the width of slit 11
Direction is mobile, and is specifically adjacent to the opening of slit 11.It is formed by imaginary plane in leaching curtain B, each activity side rod
30 section can be up-narrow and down-wide wedge shape or taper, and thus, it is possible to divide leaching curtain B and reduce leaching curtain B in movable 30 upper end of side rod
Product stream.The section can also for a left and right sides are all vertical and top is towards another movable inclined bevel edge of side rod 30
Polygon, but not limited to this, as long as can reach.
Then please also refer to Fig. 6 and Fig. 7.In this present embodiment, in horizontal direction, the top of each activity side rod 30 in
The width direction of parallel slits 11 is center height and both ends are low, and is central low and both ends in the width direction of vertical slits 11
It is high.In the present embodiment, the top surface of each activity side rod 30 includes 31, two distributary divisions 32 of an interconnecting piece and four edge parts 33.
Interconnecting piece 31 may include three connected planes, and can be defined as one first plane 311 and two the second planes
312.First plane 311 is horizontal plane and connects two distributary divisions 32, and two the second planes 312 are connected to the first plane 311
Opposite sides side and tilt toward each other.In other words, the second plane 312 outwardly and upwardly extends from the first plane 311.Two
Second plane 312 all connects two edge parts 33.Two distributary divisions 32 are adjacent to the opposite sides side of interconnecting piece 31 respectively, and
It is to be adjacent to the other opposite sides side of the first plane 311, and two distributary divisions 32 downwardly and outwardly prolong from interconnecting piece 31 respectively
It stretches.Distributary division 32 can be plane or curved surface.Two of them edge part 33 is adjacent to the opposite sides of a wherein distributary division 32 respectively
Side, and described two edge parts 33 are extended upwardly and outwardly from the distributary division 32 respectively.Each edge part 33 can be plane or song
Face.
Therefore, in the width direction of parallel slits 11, movable side rod 30 by the section of edge part 33 be also it is central high and
Both ends are low, and in the width direction of vertical slits 11, are all central low and both ends by the section of interconnecting piece 31 and distributary division 32
It is high.
In the present embodiment, movable side rod 30 is in symmetrical in the width direction of parallel slits 11, however, in other realities
Applying in example only to have the half of aforementioned shapes without in symmetry shape.In other embodiments, movable side rod 30, which can not have, to be connected
Socket part 31, and the upper limb of two distributary divisions 32 is connected with each other.Two interconnecting pieces 31 downwardly and outwardly prolong from adjacent place respectively
It stretches.In other embodiments, movable side rod 30 can not have edge part 33.
In the present embodiment, each activity side rod 30 is formed with a protrusion side 300 in the one side towards another movable side rod 30,
The protrusion side 300 of movable side rod 30 is in vertical, and the extension line for protruding side 300 intersects with the extension line of 11 width direction of slit.
As a result, when drenching opening outflow of the curtain B from slit 11, leaching curtain B can be flowed along the protrusion side 300 of movable side rod 30, keep leaching
The stabilization of curtain B.In addition, each activity side rod 30 can also be formed with a protrusion side in the another side far from another movable side rod 30
300。
Then referring again to Fig. 1 and Fig. 2.Two accumulator tanks 40 are fixedly arranged on two movable side rods 30 respectively, and respectively with
Two movable side rods 30 are mobile；Each accumulator tank 40 prolongs from fixed movable side rod 30 to the direction far from another movable side rod 30
It stretches, and each accumulator tank 40 is not less than the half of the width of slit 11, and the present embodiment in the length in the width direction of slit 11
In can be not less than slit 11 width.
In the present embodiment, movable side rod 30 is movably arranged on guide bar 50, therefore power mechanism (figure is not painted)
When pushing accumulator tank 40, accumulator tank 40 can drive movable side rod 30 to move on guide bar 50.
Next referring to Fig. 1 to Fig. 3, Fig. 8 and Fig. 9.By above structure, when coating flows into supply head by feeding inlet 12
After 10, the width that coating can be made to flow in lateral flow on sprue 13 increases.Then, the coating in sprue 13 is again along narrow
Seam 11 flow to secondary channels 14, and in secondary channels 14 again lateral flow and make coating on flow path more evenly or can have more
Big width.Finally, coating is just flowed out by the opening of slit 11 and forms leaching curtain B.By two movable side rods 30, curtain B meeting is drenched
It is divided into three parts, the leaching curtain B of middle section is the leaching curtain B for being actually coated on substrate A, and can after the movable movement of side rod 30
Change the width of leaching curtain B, therefore the width for drenching curtain B can adjust at any time with the width of substrate A.And the leaching curtain B of two side portions is then
Accumulator tank 40 can be flowed into and can be utilized again.
In the first embodiment of curtain system, substrate A is placed on conveyer belt 2 and is passed through by the drive of conveyer belt 2
Curtain B is drenched, therefore substrate A can be applied coating.
Next referring to Figure 10.In the second embodiment of the proposed curtain system of the utility model, technology is special
Sign is similar to first embodiment, and difference, which is only that in second embodiment, does not have conveyer belt, but there is a plummer 3 and one to move
Motivation structure (figure is not painted).Mobile mechanism is connected to curtain device 1, thus makes curtain device 1 can be relative to
Plummer 3 is mobile.In other words, in use, plummer 3 does not move after substrate is placed in plummer 3, but by showering curtain type
Apparatus for coating 1 is driven and moved relative to plummer 3 by mobile mechanism, and makes coating leaching in the substrate on plummer 3, and drench curtain
The width of B can change with the movement of curtain device 1 and the shape of substrate.
In conclusion passing through the curtain system and curtain device 1 of the utility model, it is possible to provide one is wide
Degree can be adjusted at any time the leaching curtain B of variation.Specifically, being divided into middle section and both sides for curtain B is drenched by movable side rod 30
Point, and the leaching curtain B of middle section is the practical upper leaching curtain B for being coated on substrate A, and the width of the leaching curtain B of middle section can be with
The spacing of movable side rod 30 corresponds to the change in shape of substrate A, and the leaching curtain B of two side portions can be recovered and utilize again.Therefore, originally
The curtain system and curtain device 1 of utility model can thoroughly reduce the waste of coating.
For example, the utility model can be applied to wafer coating photoresist, that is, substrate A drenches an act B for chip
For photoresist.Due to high outside the viscosity of photoresist, photoresist is to squeeze into entering for supply head 10 by a high-pressure pump
Material mouth 12.It and is closed inside supply head 10, therefore other than it can maintain the pressure of photoresist, moreover it is possible to prevent in photoresist
Volatile composition volatilization.Photoresist can fill up sprue 13 or secondary channels 14 after high pressure squeezes into supply head 10 as a result,
And be averagely dispersed in slit 11, the stabilization for the paint thickness being coated on chip is kept, and ensure its uniformity.
Claims (11)
1. a kind of curtain device, which is characterized in that the curtain device includes
One supply head, includes
One supply head ontology；
One slit, from the side of the supply head ontology towards extending in the supply head ontology；And
One feeding inlet extends into the supply head ontology from the another side of the supply head ontology, and is connected to the slit；
Two fixed side rods are fixed on the side that the supply head ontology is formed with the slit, and are located at the slit both sides；Institute
The distance for stating two fixed side rods is equal to the width of the slit；And
Two movable side rods, are adjacent to the slit and can move along the width direction of the slit.
2. curtain device as described in claim 1, which is characterized in that respectively the top of the activity side rod is in the slit
It is that central high and both ends are low in width direction.
3. curtain device as claimed in claim 2, which is characterized in that respectively the top surface of the activity side rod includes:
One interconnecting piece, is a flat surface；And
Two distributary divisions are adjacent to the opposite sides side of the interconnecting piece respectively, and described two distributary divisions are respectively from the connection
Portion extends downwardly and outwardly.
4. curtain device as claimed in claim 2, which is characterized in that respectively the top surface of the activity side rod includes two points
Stream portion, upper limb is adjacent, and described two distributary divisions are extended downwardly and outwardly from adjacent place respectively.
5. curtain device as described in claim 1, which is characterized in that respectively this is narrow in vertical at the top of the activity side rod
It is that central low and both ends are high in the width direction of seam.
6. curtain device as claimed in claim 5, which is characterized in that respectively the top surface of the activity side rod includes:
An at least distributary division；And
Multiple edge parts；Edge part described in two of them is adjacent to the opposite sides side of an at least distributary division respectively, and described
From this, at least a distributary division is extended upwardly and outwardly respectively for two edge parts.
7. curtain device as described in claim 1, which is characterized in that respectively the activity side rod is in towards another activity
The one side of side rod is formed with a protrusion side, and the protrusion side is in vertical, and the extension line on the protrusion side and the slit width direction
Extension line intersection.
8. the curtain device as described in any one of claims 1 to 7, which is characterized in that the curtain dress
Setting also tool, there are two accumulator tanks, are fixedly arranged on described two movable side rods respectively, and mobile with described two movable side rods respectively；
Respectively the accumulator tank from the fixed activity side rod to far from another activity side rod direction extension, and respectively the accumulator tank in this
Length in the width direction of slit is not less than the half of the width of the slit.
9. curtain device as claimed in claim 8, which is characterized in that respectively the accumulator tank is in the width direction of the slit
On length be not less than the slit width.
10. a kind of curtain system, which is characterized in that the curtain system includes
One curtain device as claimed in any one of claims 1-9 wherein；And
One conveyer belt passes through the underface of the slit.
11. a kind of curtain system, which is characterized in that the curtain system includes
One curtain device as claimed in any one of claims 1-9 wherein；And
One plummer is located at the underface of the slit；
Wherein, which can be mobile relative to the plummer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821768386.0U CN209393454U (en) | 2018-10-30 | 2018-10-30 | Curtain device and curtain system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821768386.0U CN209393454U (en) | 2018-10-30 | 2018-10-30 | Curtain device and curtain system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209393454U true CN209393454U (en) | 2019-09-17 |
Family
ID=67878991
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821768386.0U Active CN209393454U (en) | 2018-10-30 | 2018-10-30 | Curtain device and curtain system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209393454U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109317355A (en) * | 2018-10-30 | 2019-02-12 | 怡定兴科技股份有限公司 | Curtain device and curtain system |
-
2018
- 2018-10-30 CN CN201821768386.0U patent/CN209393454U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109317355A (en) * | 2018-10-30 | 2019-02-12 | 怡定兴科技股份有限公司 | Curtain device and curtain system |
| CN109317355B (en) * | 2018-10-30 | 2021-01-15 | 怡定兴科技股份有限公司 | Curtain coating device and curtain coating system |
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