CN209373241U - Efficient light path folded device and the highly sensitive gas sensor of miniaturization - Google Patents
Efficient light path folded device and the highly sensitive gas sensor of miniaturization Download PDFInfo
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Abstract
The application belongs to laser gas sensory field, a kind of efficient light path folded device and miniaturization high-precision gas sensor are provided, the multiple reflections to light beam may be implemented in efficient light path folded device, have longer light path and higher light path volume ratio, compact；The efficient light path folded device that highly sensitive gas sensor is provided by using first aspect and second aspect is minimized, optical length, small in size, light channel structure are stablized, and can effectively improve the accuracy and precision of gas concentration test result.
Description
Technical field
This application involves laser gas sensory fields, and in particular to a kind of efficient light path folded device and miniaturization high-precision
Gas sensor.
Background technique
It minimizes highly sensitive gas sensor and is mainly used in coal, petrochemical industry, electric power, metallurgy, municipal works etc.
It is possible that the field for the leakage of inflammable and explosive and polluted gas occur, generating significant threat to people life property safety.At present
TDLAS (Tunable Diode Laser Absorption Spectroscopy, tunable diode laser absorption spectroscopy) skill
Art is based primarily upon adjustable laser and carries out spectrum analysis near infrared band, is the important development side in one, current detection of gas field
To.Gas detector based on TDLAS technology specifically includes that tunable laser, detection gas chamber, photodetector, auxiliary are mechanical
And electronic component needs to detect gas chamber with longer light path, so that laser beam is in institute to reach enough detectivities
The enough distances of transmission in gas need to be analyzed, and, to enhance absorption line, detection gas chamber need to be using the form of light path folding, limited
Multiple reflections light beam as far as possible to be in volume to reach enough light paths, thus realize miniaturization and it is highly sensitive, can be in complicated ring
The gas detector of reliably working under border.
Existing miniaturization gas detector, exists or light path is short or volume is bigger than normal or light channel structure is unstable etc. asks
Topic.
Utility model content
In view of this, the embodiment of the present application provides a kind of efficient light path folded device and miniaturization high-precision gas sensing
Device exists to solve existing miniaturization gas detector or light path is short or volume is bigger than normal or light channel structure is unstable etc. asks
Topic.
The embodiment of the present application first aspect provides a kind of efficient light path folded device comprising:
One input terminal, for inputting light beam；
One output end is used for output beam, and the input terminal and the output end are separately positioned；
One principal plane reflecting mirror；
One concave mirror has a focal plane, and the distance of the focal plane to the concave mirror is described
The focal length f of concave mirror；The focal plane has an origin, and the origin is the principal plane reflecting mirror and concave reflection
Microscope group at intersection point of the system optical axis on the focal plane；
One inclined mirror is less than the plane mirror of the principal plane reflecting mirror, the inclined mirror for area
Normal and the principal plane reflecting mirror normal between inclination angle be θ 1；The tiltangleθ 1 is not zero；
The plane of incidence of the input terminal, the exit facet of the output end, the principal plane reflecting mirror and the inclined reflection
Mirror is coplanar and is located at the focal plane of the concave mirror；
Light beam is inputted from the input terminal, anti-by the concave mirror, the principal plane reflecting mirror and the inclination
After penetrating the multiple reflections between mirror, exported from the output end.
In one embodiment, the output end is located at the input light beam by the just whole of concave mirror reflection 4
Reach the position of the focal plane after several times time.
The embodiment of the present application second aspect provides a kind of efficient light path folded device comprising:
One input terminal, for inputting light beam；
One output end is used for output beam, and the input terminal and the output end are separately positioned；
One principal plane reflecting mirror；
One concave mirror has a focal plane, and the distance of the focal plane to the concave mirror is described
The focal length f of concave mirror；The focal plane has an origin, and the origin is the principal plane reflecting mirror and concave reflection
Microscope group at intersection point of the system optical axis on the focal plane；
One inclined mirror is less than the plane mirror of the principal plane reflecting mirror, the inclined mirror for area
Normal and the principal plane reflecting mirror normal between inclination angle be θ 1；The tiltangleθ 1 is not zero；
One lateral reflecting mirror is less than the plane mirror of the principal plane reflecting mirror, the lateral reflecting mirror for area
Normal and the principal plane reflecting mirror normal between inclination angle be θ 2；The tiltangleθ 2 is not zero；
The plane of incidence of the input terminal, the principal plane reflecting mirror and the inclined mirror it is coplanar and be located at the concave surface
The focal plane of reflecting mirror；
Light beam is inputted from the input terminal, anti-by the concave mirror, the principal plane reflecting mirror and the inclination
After penetrating the multiple reflections between mirror, the incidence end of the output end is reflexed to by the lateral reflecting mirror, it is defeated from the output end
Out.
In one embodiment, the lateral reflecting mirror is located at the input light beam by concave mirror reflection 2
Reach the position of the focal plane after positive integer times time.
The embodiment of the present application third aspect provides a kind of highly sensitive gas sensor of miniaturization comprising the application is implemented
Efficient light path folded device described in example first aspect or second aspect, the efficient light path folded device are set to gas testing to be measured
In plenum space locating for body；
The highly sensitive gas sensor of the miniaturization further include:
One laser is used to provide the described the light beam of input terminal input positioned at the incidence end of the input terminal；
One detector is gone forward side by side positioned at the exit end of the output end for receiving from the light beam that the output end exports
Row detection, obtains the gas concentration test data of the gas to be tested.
In one embodiment, the miniaturization high sensitivity gas sensor, further includes:
One spectroscope, positioned at the exit end of the input terminal, for the light beam inputted from the input terminal to be divided into two
Road；
One reference gas chamber is sealed with one inner detector of calibrating gas；
One inner detector, is set to inside the reference gas chamber, for receiving in the reference gas chamber internal transmission
Light beam and detected, obtain the absorption peak wavelength location information of the calibrating gas；
After the light beam inputted from the input terminal is divided into two-way by the spectroscope, enters the efficient light path all the way and fold
Device enters in the reference gas chamber be transmitted to the inner detector all the way.
In one embodiment, the miniaturization high sensitivity gas sensor, further includes:
One pedestal is used to provide the described plenum space, and the efficient light path folded device is fixed on the gas chamber
Space；
One protective cover plate is mechanically connected by fastener and the pedestal, for preventing dust and water from entering the height
Light path folded device is imitated, the efficient light path folded device is protected, and it is empty to allow gas to be tested to penetrate into the gas chamber
Between；
The laser and the detector are set to the outer of the pedestal, and the exit end of the laser passes through described
Input terminal is connected to the plenum space, and the incidence end of the detector is connected to by the output end with the plenum space.
In one embodiment, the miniaturization high sensitivity gas sensor, further includes:
One focussed collimated lens is used between the exit end of the laser and the incidence end of the input terminal
The light beam issued to the laser is focused and collimates.
In one embodiment, the miniaturization high sensitivity gas sensor, further includes:
One convergent lens, between the exit end of the output end and the incidence end of the detector, for will be from
The light beam of the output end output converges to the incidence end of the detector.
In one embodiment, the detector is also used to the absorption peak wavelength location information according to the calibrating gas,
The classification of the gas to be tested is determined and tests its concentration.
The efficient light path folded device that the first aspect and second aspect of the embodiment of the present application provide, may be implemented to light beam
Multiple reflections, have longer light path and higher light path volume ratio, compact；
The miniaturization high sensitivity gas sensor that the third aspect of the embodiment of the present application provides, by using first aspect
The efficient light path folded device provided with second aspect, optical length, small in size, light channel structure are stablized, and can effectively improve gas
The accuracy and precision of concentration test result.
Detailed description of the invention
It in order to more clearly explain the technical solutions in the embodiments of the present application, below will be to embodiment or description of the prior art
Needed in attached drawing be briefly described, it should be apparent that, the accompanying drawings in the following description is only some of the application
Embodiment for those of ordinary skill in the art without any creative labor, can also be according to these
Attached drawing obtains other attached drawings.
In order to more clearly explain the technical solutions in the embodiments of the present application, make required in being described below to embodiment
Attached drawing is briefly described, it should be apparent that, the accompanying drawings in the following description is some embodiments of the present application, for ability
For the those of ordinary skill of domain, without creative efforts, it can also be obtained according to these attached drawings other attached
Figure.
Fig. 1 is the schematic diagram for the efficient light path folded device that the embodiment of the present application one provides；
Fig. 2 is distribution of the efficient light path folded device light-beam position on focal plane and incline that the embodiment of the present application one provides
The position of oblique reflection mirror；
Fig. 3 is inclined mirror inclined direction explanation in the efficient light path folded device of the offer of the embodiment of the present application one；
Fig. 4 is the schematic diagram for the efficient light path folded device that the embodiment of the present application two provides；
Fig. 5 and Fig. 6 is the schematic diagram for the highly sensitive gas sensor of miniaturization that the embodiment of the present application three provides；
Fig. 7 is the schematic diagram for the highly sensitive gas sensor of miniaturization that the embodiment of the present application four provides；
Fig. 8 is the schematic diagram for the highly sensitive gas sensor of miniaturization that the embodiment of the present application five provides.
Specific embodiment
In being described below, for illustration and not for limitation, the tool of such as particular system structure, technology etc is proposed
Body details, so as to provide a thorough understanding of the present application embodiment.However, it will be clear to one skilled in the art that there is no these specific
The application also may be implemented in the other embodiments of details.In other situations, it omits to well-known system, device, electricity
The detailed description of road and method, so as not to obscure the description of the present application with unnecessary details.
In order to illustrate technical solution described herein, the following is a description of specific embodiments.
In order to make those skilled in the art more fully understand the application, below in conjunction with attached in the embodiment of the present application
Figure, technical solutions in the embodiments of the present application are explicitly described, it is clear that described embodiment is the application a part
Embodiment, instead of all the embodiments.Based on the embodiment in the application, those of ordinary skill in the art are not making
Every other embodiment obtained, shall fall within the protection scope of the present application under the premise of creative work.
The description and claims of this application and term " includes " and their any deformations in above-mentioned attached drawing, meaning
Figure, which is to cover, non-exclusive includes.In addition, term " first " and " second " etc. are for distinguishing different objects, not for retouching
State particular order.
Embodiment one
As shown in Figure 1, the application provides a kind of efficient light path folded device 100, comprising:
One input terminal 101, for inputting light beam；
One output end 102 is used for output beam, and the input terminal 101 and the output end 102 are separately positioned；
One principal plane reflecting mirror 104；
One concave mirror 103, has a focal plane 106, and the distance 107 of concave mirror 103 is arrived in focal plane 106
For the focal length f of concave mirror 103；Focal plane 106 has an origin 109, origin 109 be principal plane reflecting mirror 104 with it is recessed
Intersection point of the system optical axis 108 that face reflecting mirror 103 forms on focal plane 106；
One inclined mirror 105 is less than the plane mirror of principal plane reflecting mirror 104, inclined mirror 105 for area
Normal and principal plane reflecting mirror 104 normal between inclination angle be θ 1；Tiltangleθ 1 is not zero；
The plane of incidence of input terminal 101, the exit facet of output end 102, principal plane reflecting mirror 104 and inclined mirror 105 are total
Face and the focal plane 106 for being located at concave mirror 103；
Light beam is inputted from input terminal 101, passes through concave mirror 103, principal plane reflecting mirror 104 and inclined mirror 105
Between multiple reflections after, from output end 102 export.
From the point of view of optical characteristics, due to using confocal system, on focal plane 106, the radius and divergence half-angle of light beam
It will be converted between two groups of values, only order of reflection with concave mirror 103 unrelated with the order of reflection of concave mirror 103
Parity it is related.If the radius that input terminal 101 inputs light beam is A0, divergence half-angle is β 0, by a concave mirror 103
Reflection reach focal plane 106 after light beam radius be A1, the angle of divergence is partly β1, then there is following relationship:
A1=β 0f (1)
β1=A0/f (2)
The radius of light beam is A after the reflection of concave mirror 103 twice reaches focal plane 1062, divergence half-angle β2,
It can be by being obtained twice using (1) and (2) formula:
A2=β1F=(A0/f) f=A0 (3)
β2=A1/ f=(β 0f)/f=β 0 (4)
From (3) and (4), formula be can see, after input light beam reaches focal plane 106 after the reflection of concave mirror 103 twice
Restore the characteristic (A0, β 0) of input light beam, it is readily seen that after the reflection of even-times concave mirror 103, the spy of light beam
Property will with input light beam it is identical；Reflection to odd-times concave mirror 103, the characteristic of light beam will take (1) and (2) obtained
Radius and divergence half-angle (A1, β1)。
For inputting the key light beam position and angle (opposite principal plane reflecting mirror 104 and the composition of concave mirror 103 of light beam
Optical axis) transformation, in the case where no introducing inclined mirror 105, can prove pass through four concave mirrors 103
Reflection reach focal plane after, the key light beam position of light beam is overlapped with the key light beam position of input light beam, angle with input light beam
Main beam angle be mirrored into symmetrically about optical axis；Due to the key light beam position of light beam and the key light beam position weight of input light beam
It closes, light beam is no longer reflected by principal plane reflecting mirror 104, and is exported by input terminal 102, therefore in no introducing inclined mirror
In the case where 105, light beam is at most reflected four times by concave mirror 103, and total optical path is very limited.
The embodiment of the present application one is drawn on the confocal optical system that concave mirror 103 and principal plane reflecting mirror 104 form
Enter an inclined mirror 105,109 certain distance of position deviation from origin, and it is located at input light beam through concave mirror 103 the
Primary event or third time reflection reach the position of focal plane 106, and inclined mirror 105 changes the reflection angle of light beam, makes
Light beam changes position of the subsequent even-numbered reflections light beam on focal plane 106 after the reflection of concave mirror 103, and odd number
Position of the secondary reflection light beam on focal plane 106 is constant, so that the position of all light beams no longer conflicts with input terminal 101, realizes
The multiple reflections of light beam.
It can be proved that as shown in Fig. 2, introduce inclined mirror 105 after, the focal plane locating for principal plane reflecting mirror 104
On 106, after concave mirror 1+4n (n=0,1,2,3) secondary reflection, the position of light beam is in the same position
It sets, is denoted as P1(i.e. 201)；After concave mirror 3+4n (n=0,1,2,3) secondary reflection, the position of light beam
In the same position, it is denoted as P3(i.e. 202)；After concave mirror 4+4n (n=0,1,2,3) secondary reflection,
The position of light beam is P4、P8、P12, the position P of they and input light beam0Point-blank, it is denoted as L4(i.e.
203)；After concave mirror 2+4n (n=0,1,2,3) secondary reflection, the position of light beam is P2、P2、
P10, they are point-blank denoted as L2(i.e. 204).
For convenience of description, in Fig. 2 and Fig. 3, inclined mirror 105 has been selected in through 103 third secondary reflection of concave mirror
Position P of the light beam in focal plane afterwards3(i.e. 202), its normal 205 form one with the normal 206 of principal plane reflecting mirror 104 and incline
A vector, referred to as shift vector are made in bevel angle θ 1, the crest line direction that the plane and focal plane 106 formed along two normals is crossed to form
Δ P (i.e. 207), length is defined by the formula:
Δ P=tan (2 θ 1) f (1)
It is easy to prove to being distributed in L2Upper light-beam position P2、P2、P10, and it is distributed in L4Light-beam position
P0、P4、P8、P12, adjacent beams location interval is the Δ P that (1) formula provides that serves as reasons, and L2And L4It is parallel to
ΔP.It can be seen that Δ P contains 1 size and Orientation of tiltangleθ of inclined mirror.
The P known to the property of confocal optical system1(201) and P3(202) origin 109 about focal plane is symmetrical, is
Make inclined mirror 105 not to P1On light beam interference, inclined mirror 105 deviate focal plane origin 109 distance be greater than P1Or
P3On beam radius A1, the A known to aforementioned (1) formula1=β 0f；It is reached simultaneously to guarantee that inclined mirror 105 can reflect
On all beam energies, light passing diameter be greater than P1Or P3On beam diameter 2A1, i.e. 2 β 0f.
To avoid inclined mirror 105 to L2Or L4The interference of upper light beam, the selection in 1 direction of tiltangleθ is so that shift vector
The direction of Δ P is not in input terminal 101 and P3(202) on line direction, shape forms an angle therewith, anti-by even-times concave surface
After penetrating the reflection of mirror 103, distance of the center of input light beam to the boundary of inclined mirror 105 when light beam reaches focal plane 106
Greater than the radius A0 of input light beam, to make with L2Or L4On using beam diameter as the light passing band of width not with inclined mirror 105
Overlapping.
Output end 102 can take in L2Or L4On, it is excellent to be chosen at the L conllinear with input terminal4On, i.e., output end 102 is located at defeated
Enter light beam is reached focal plane 106 position after the positive integer times number of the reflection of concave mirror 103 4, therefore input terminal 101
With output end 102 in L4(203) two sides；This configuration mode of output end 102 makes position and the angle pair of output beam
Concave mirror 103 is that position deviation is insensitive with respect to the angle of principal plane reflecting mirror 104, and optical system has very high stabilization
Property.
In one embodiment, the input terminal is the first optical fiber, and light beam is inputted by first optical fiber；
Alternatively, the input terminal is the light hole or angle of release on the principal plane reflecting mirror, light beam enters from free space
The input terminal；
The output end is the second optical fiber, and the output beam passes through second optical fiber output；
Alternatively, the output end is the light hole or angle of release on the principal plane reflecting mirror, the output beam is from described
Output end is exported to free space.
Input terminal 101 is illustratively shown in Fig. 1 and Fig. 3 and output end 102 is the light passing on principal plane reflecting mirror 104
The case where hole or angle of release.
In a particular application, the form of light hole and angle of release is suitble to the biggish incoherent input light beam situation of the angle of divergence, light
Beam is inputted by free-space propagation mode；It is the lesser coherent beam of the angle of divergence for input light beam, such as laser selects optical fiber
As light beam input terminal, output end correspondingly selects optical fiber output light beam.
The multiple reflections to light beam may be implemented in the present embodiment, have longer light path and higher light path volume ratio,
Compact.
Embodiment two
As shown in figure 4, the present embodiment provides a kind of efficient light path folded devices 200, on the basis of example 1, also
Include:
One lateral reflecting mirror 110 is less than the plane mirror of principal plane reflecting mirror 104, lateral reflecting mirror 110 for area
Normal and principal plane reflecting mirror 104 normal between inclination angle be θ 2；Tiltangleθ 2 is not zero；
The plane of incidence of input terminal 101, principal plane reflecting mirror 104 and inclined mirror 105 are coplanar and be located at concave mirror
103 focal plane 106；
Light beam is inputted from input terminal 101, passes through concave mirror 103, principal plane reflecting mirror 104 and inclined mirror 105
Between multiple reflections after, the incidence end of output end 102 is reflexed to by lateral reflecting mirror 110, from output end 102 export.
To avoid lateral reflecting mirror 110 to L2Or L4The interference of upper light beam, the selection in 2 direction of tiltangleθ is so that through lateral anti-
Concave mirror 103 will not be reached by penetrating the output beam after mirror 110 reflects, but away from the direction of concave mirror 103
It is transmitted to output end 102.
Lateral reflecting mirror 110 can take in L2Or L4On, so that input light beam is by the positive integer of the reflection of concave mirror 103 2
Times number and then output end 102 is reflected by lateral reflecting mirror 110；, lateral reflecting mirror 110 and this of output end 102 are matched
The mode of setting makes output end 102 relative to input terminal 101 not in same plane or the same side, can be to avoid input terminal and output end
In the mechanical conflicts that the same side generates, the volume of efficient light path folded device 200 is reduced, effectively to lay according to actual needs
The position of output end 102.
It should be understood that efficient light path folded device 200 provided by embodiment two is provided relative to embodiment one
Efficient light path folded device 100 working principle it is essentially identical, distinctive points between the two are only highlighted in embodiment two,
Other embodiments in embodiment one can also be equally applicable to embodiment two, and details are not described herein again.
Embodiment three
As shown in Figure 5 and Figure 6, the present embodiment provides a kind of highly sensitive gas sensors 300 of miniaturization, including embodiment
Efficient light path folded device 100 in one or the efficient light path folded device 200 in embodiment two, efficient light path folded device
100 or 200 are set in plenum space locating for gas to be tested；
Minimize highly sensitive gas sensor 300 further include:
One laser 301, positioned at the incidence end of input terminal 101, for providing the light beam of the input of input terminal 101；
One detector 302 is gone forward side by side positioned at the exit end of output end 102 for receiving from the light beam that output end 102 exports
Row detection, obtains the gas concentration test data of gas to be tested.
Illustratively showing in Fig. 5 and minimizing highly sensitive gas sensor 300 includes the efficiency light in embodiment one
The case where journey folded device 100.
Illustratively showing in Fig. 6 and minimizing highly sensitive gas sensor 300 includes the efficiency light in embodiment two
The case where journey folded device 200.
In a particular application, it is based on TDLAS technology, the beam attenuation that can emit by measuring gas to be tested laser
To measure the concentration of gas to be tested.
In a particular application, laser is semiconductor laser, for providing laser light source.
In a particular application, detector is the photodetector that can convert optical signals to electric signal.
In one embodiment, the incidence end of the input terminal connects the exit end of the laser by optical fiber, described
Input terminal inputs the light beam that the laser issues；
The exit end of the output end connects the incidence end of the detector by optical fiber, the light exported from the output end
Beam is received by the detector.
In one embodiment, the miniaturization high sensitivity gas sensor, further includes:
One pedestal is used to provide the described plenum space, and the efficient light path folded device is fixed on the gas chamber
Space；
One protective cover plate is mechanically connected by fastener and the pedestal, for preventing dust and water from entering the height
Light path folded device is imitated, the efficient light path folded device is protected, and it is empty to allow gas to be tested to penetrate into the gas chamber
Between；
The laser and the detector are set to the outer of the pedestal, and the exit end of the laser passes through described
Input terminal is connected to the plenum space, and the incidence end of the detector is connected to by the output end with the plenum space.
In a particular application, base and cover plate can be specifically mechanically connected by fasteners such as screw, bolt, buckles, base
Seat and cover board collectively form the main casing for minimizing highly sensitive gas sensor, for minimizing highly sensitive gas sensing
Each device in device plays fixed, support and protective effect, shape, structure and material (the preferably impermeable finish of base and cover plate
Material) it can be configured according to actual needs, it is not particularly limited in the present embodiment.
Highly sensitive gas sensor is minimized provided by the present embodiment, is come by using efficient light path folded device real
Existing, optical length, small in size, light channel structure are stablized, and can effectively improve the accuracy and precision of gas concentration test result.
It should be understood that the distinctive points between embodiment one and embodiment two are only highlighted in embodiment three, it is real
Embodiment three can be also equally applicable to by applying the other embodiments in example one and embodiment two, and details are not described herein again.
Example IV
As shown in fig. 7, the present embodiment provides a kind of highly sensitive gas sensors 400 of miniaturization, in embodiment three
On the basis of, further includes:
One spectroscope 303, positioned at the exit end of input terminal 101, for the light beam inputted from input terminal 101 to be divided into two
Road；
One reference gas chamber 304, is sealed with calibrating gas；One inner detector, is set to inside reference gas chamber 304,
For receiving the light beam in 304 internal transmission of reference gas chamber and being detected, the absorption peak wavelength position of the calibrating gas is obtained
Confidence breath；
The light beam inputted from input terminal 101 is split after mirror 303 is divided into two-way, enters efficient light path folded device all the way
100 or 200, enter in reference gas chamber 304 be transmitted to the inner detector all the way.
In a particular application, spectroscope (Beam splitter) can use plane beam splitter or cube beam splitter.
In one embodiment, the detector is also used to the absorption peak wavelength location information according to the calibrating gas,
The classification of the gas to be tested is determined and tests its concentration.
Alternatively, the highly sensitive gas sensor of the miniaturization further includes connecting with the data output end of the detector
Processor, the processor are used for the gas concentration test data of the gas to be tested and the absorption peak of the calibrating gas
Wavelength location test data compares, and exports comparing result；
Alternatively, the data output end of the detector and external processing apparatus communicate to connect, the external processing apparatus is used
In gas concentration test data and the calibrating gas to the gas to be tested absorption peak wavelength location test data into
Row comparison, and export comparing result.
In a particular application, processor can be central processing unit (Central Processing Unit, CPU), also
It can be other general processors, digital signal processor (Digital Signal Processor, DSP), dedicated integrated electricity
Road (Application Specific Integrated Circuit, ASIC), ready-made programmable gate array (Field-
PrograAAable Gate Array, FPGA) either other programmable logic device, discrete gate or transistor logic,
Discrete hardware components etc..General processor can be microprocessor or the processor is also possible to any conventional processor
Deng.
In a particular application, external processing apparatus can be desktop PC, laptop, tablet computer, industry control
The equipment that machine, mobile phone etc. have data processing and display function.
The present embodiment by additionally increasing a reference gas chamber, can gas concentration test data to gas to be tested and
The absorption peak wavelength location test data of calibrating gas compares processing, obtains comparing result, to effectively improve test knot
The accuracy and accuracy of fruit.
It should be understood that minimizing highly sensitive gas sensor 400 provided by example IV relative to embodiment
The working principle that highly sensitive gas sensor 300 is minimized provided by three is essentially identical, only highlights in example IV
Distinctive points between the two, the other embodiments in embodiment three can also be equally applicable to embodiment three, and details are not described herein again.
Embodiment five
As shown in figure 8, the present embodiment provides a kind of highly sensitive gas sensor 500 of miniaturization, in embodiment three or
On the basis of example IV, further includes:
One focussed collimated lens 305 is used between the exit end of laser 301 and the incidence end of input terminal 101
The light beam issued to laser 301 is focused and collimates.
Fig. 8 illustratively shows the highly sensitive gas sensor 500 of miniaturization on the basis of example IV, further includes
The case where one focussed collimated lens 305.
In a particular application, focussed collimated lens are by the collimation that has the condenser lens of focussing force He have collimating effect
Lens combination forms, and specific implementation can be configured according to actual needs.
In one embodiment, the highly sensitive gas sensor of the miniaturization, further includes:
One convergent lens, between the exit end of output end and the incidence end of detector, being used for will be defeated from output end
Light beam out converges to the incidence end of detector.
In a particular application, convergent lens is made of at least one lens for having convergence of rays effect, specific implementation side
Formula can be configured according to actual needs.
Focussed collimated lens are additionally arranged by the exit end in laser in the present embodiment, can effectively control laser beam
Spot size so that harassing minimum between hot spot；Convergent lens is set by the incidence end in detector, is conducive to complete, quasi-
Really receive the light beam exported from output end.
The foregoing is merely the preferred embodiments of the application, not to limit the application, all essences in the application
Made any modifications, equivalent replacements, and improvements etc. within mind and principle, should be comprising within the scope of protection of this application.
Claims (10)
1. a kind of efficient light path folded device characterized by comprising
One input terminal, for inputting light beam；
One output end is used for output beam, and the input terminal and the output end are separately positioned；
One principal plane reflecting mirror；
One concave mirror, has a focal plane, and the distance of the focal plane to the concave mirror is the concave surface
The focal length f of reflecting mirror；The focal plane has an origin, and the origin is the principal plane reflecting mirror and concave reflection microscope group
At intersection point of the system optical axis on the focal plane；
One inclined mirror is less than the plane mirror of the principal plane reflecting mirror, the method for the inclined mirror for area
Inclination angle between line and the normal of the principal plane reflecting mirror is θ 1；The tiltangleθ 1 is not zero；
The plane of incidence of the input terminal, the exit facet of the output end, the principal plane reflecting mirror and the inclined mirror are total
Face and the focal plane for being located at the concave mirror；
Light beam is inputted from the input terminal, passes through the concave mirror, the principal plane reflecting mirror and the inclined mirror
Between multiple reflections after, from the output end export.
2. efficiently light path folded device as described in claim 1, which is characterized in that the output end is located at the input light beam
Reached the position of the focal plane after the positive integer times time of concave mirror reflection 4.
3. a kind of efficient light path folded device characterized by comprising
One input terminal, for inputting light beam；
One output end is used for output beam, and the input terminal and the output end are separately positioned；
One principal plane reflecting mirror；
One concave mirror, has a focal plane, and the distance of the focal plane to the concave mirror is the concave surface
The focal length f of reflecting mirror；The focal plane has an origin, and the origin is the principal plane reflecting mirror and concave reflection microscope group
At intersection point of the system optical axis on the focal plane；
One inclined mirror is less than the plane mirror of the principal plane reflecting mirror, the method for the inclined mirror for area
Inclination angle between line and the normal of the principal plane reflecting mirror is θ 1；The tiltangleθ 1 is not zero；
One lateral reflecting mirror is less than the plane mirror of the principal plane reflecting mirror, the method for the lateral reflecting mirror for area
Inclination angle between line and the normal of the principal plane reflecting mirror is θ 2；The tiltangleθ 2 is not zero；
The plane of incidence of the input terminal, the principal plane reflecting mirror and the inclined mirror it is coplanar and be located at the concave reflection
The focal plane of mirror；
Light beam is inputted from the input terminal, passes through the concave mirror, the principal plane reflecting mirror and the inclined mirror
Between multiple reflections after, the incidence end of the output end is reflexed to by the lateral reflecting mirror, from the output end export.
4. efficiently light path folded device as claimed in claim 3, which is characterized in that the lateral reflecting mirror is located at the input
Light beam is reached the position of the focal plane after the positive integer times time of concave mirror reflection 2.
5. a kind of highly sensitive gas sensor of miniaturization, which is characterized in that described in any item high including Claims 1 to 4
Light path folded device is imitated, the efficient light path folded device is set in plenum space locating for gas to be tested；
The highly sensitive gas sensor of the miniaturization further include:
One laser is used to provide the described the light beam of input terminal input positioned at the incidence end of the input terminal；
One detector, positioned at the exit end of the output end, for receiving the light beam exported from the output end and being visited
It surveys, obtains the gas concentration test data of the gas to be tested.
6. as claimed in claim 5 minimize highly sensitive gas sensor, which is characterized in that further include:
One spectroscope, positioned at the exit end of the input terminal, for the light beam inputted from the input terminal to be divided into two-way；
One reference gas chamber, is sealed with calibrating gas；
One inner detector, is set to inside the reference gas chamber, for receiving the light in the reference gas chamber internal transmission
Beam is simultaneously detected, and the absorption peak wavelength location information of the calibrating gas is obtained；
After the light beam inputted from the input terminal is divided into two-way by the spectroscope, enter the efficient light path folder all the way
Part enters in the reference gas chamber be transmitted to the inner detector all the way.
7. such as the highly sensitive gas sensor of miniaturization described in claim 5 or 6, which is characterized in that further include:
One pedestal is used to provide the described plenum space, and the efficient light path folded device is fixed on the plenum space；
One protective cover plate is mechanically connected by fastener and the pedestal, for preventing dust and water from entering the efficiency light
Journey folded device protects the efficient light path folded device, and gas to be tested is allowed to penetrate into the plenum space；
The laser and the detector are set to the outer of the pedestal, and the exit end of the laser passes through the input
End is connected to the plenum space, and the incidence end of the detector is connected to by the output end with the plenum space.
8. such as the highly sensitive gas sensor of miniaturization described in claim 5 or 6, which is characterized in that further include:
One focussed collimated lens, between the exit end of the laser and the incidence end of the input terminal, for institute
The light beam for stating laser sending is focused and collimates.
9. such as the highly sensitive gas sensor of miniaturization described in claim 5 or 6, which is characterized in that further include:
One convergent lens, between the exit end of the output end and the incidence end of the detector, for will be from described
The light beam of output end output converges to the incidence end of the detector.
10. as claimed in claim 6 minimize highly sensitive gas sensor, which is characterized in that the detector is also used to
According to the absorption peak wavelength location information of the calibrating gas, the classification of the gas to be tested is determined and to test its dense
Degree.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822168462.0U CN209373241U (en) | 2018-12-21 | 2018-12-21 | Efficient light path folded device and the highly sensitive gas sensor of miniaturization |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201822168462.0U CN209373241U (en) | 2018-12-21 | 2018-12-21 | Efficient light path folded device and the highly sensitive gas sensor of miniaturization |
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| CN209373241U true CN209373241U (en) | 2019-09-10 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109597192A (en) * | 2018-12-21 | 2019-04-09 | 徐州旭海光电科技有限公司 | Efficient light path folded device and the highly sensitive gas sensor of miniaturization |
| CN111148986A (en) * | 2019-12-20 | 2020-05-12 | 徐州旭海光电科技有限公司 | Compact sensing device |
-
2018
- 2018-12-21 CN CN201822168462.0U patent/CN209373241U/en not_active Withdrawn - After Issue
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109597192A (en) * | 2018-12-21 | 2019-04-09 | 徐州旭海光电科技有限公司 | Efficient light path folded device and the highly sensitive gas sensor of miniaturization |
| CN109597192B (en) * | 2018-12-21 | 2024-02-06 | 江苏旭海光电科技有限公司 | High-efficiency optical path folding device and miniaturized high-sensitivity gas sensor |
| CN111148986A (en) * | 2019-12-20 | 2020-05-12 | 徐州旭海光电科技有限公司 | Compact sensing device |
| WO2021120187A1 (en) * | 2019-12-20 | 2021-06-24 | 徐州旭海光电科技有限公司 | Compact sensor device |
| CN111148986B (en) * | 2019-12-20 | 2023-02-10 | 徐州旭海光电科技有限公司 | Compact sensing device |
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