CN209321779U - A kind of drag chain - Google Patents
A kind of drag chain Download PDFInfo
- Publication number
- CN209321779U CN209321779U CN201821923927.2U CN201821923927U CN209321779U CN 209321779 U CN209321779 U CN 209321779U CN 201821923927 U CN201821923927 U CN 201821923927U CN 209321779 U CN209321779 U CN 209321779U
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- CN
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- Prior art keywords
- drag chain
- pieces
- preset interval
- transfer line
- interval includes
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Abstract
The utility model provides a kind of drag chain, and drag chain includes plural block drag chain section, including: at least one piece of first drag chain section, the first drag chain section are equipped with a plurality of via holes that extending direction when unfolding along drag chain extends and is set side by side.The technical solution of the utility model beneficial effect is: the first drag chain section is equipped with a plurality of via holes that extending direction when unfolding along drag chain extends and is set side by side, each via hole places a transfer line, so that transfer line is individually placed, pullling between transfer line is avoided in the process of moving and is worn, and transmission stability is improved.
Description
Technical field
The utility model relates to technical field of industrial equipment more particularly to a kind of drag chains.
Background technique
With the rapid development of industry, drag chain has wide range of applications, and wherein drag chain is divided into plastics drag chain, engineering drag chain, steel
Aluminium drag chain, steel pull chain, bridge-type totally enclosed type drag chain, uncap in bridge-type type drag chain, mute type drag chain, heavy-load type drag chain, assembling
Drag chain, whole drag chain, convenient type opening drag chain, uncap outside bridge-type light-duty drag chain, engineering plastics drag chain, plastics drag chain etc..
In the prior art, drag chain is to place transfer line, and there are many transfer line quantity in industrial equipment, such as Fig. 1 institute
Show, transfer line can only be deposited in drag chain, including drag chain T1, transfer line T2, is carrying out mobile process in this way
In be highly susceptible to the influence pullled and worn, and then cause the transmission between transfer line unstable, so that industrial risk increases
It is high.
Summary of the invention
For the above-mentioned problems in the prior art, a kind of drag chain is now provided.
Specific technical solution is as follows:
A kind of drag chain, the drag chain include plural block drag chain section, including:
At least one piece of first drag chain section, the first drag chain section be equipped with extending direction when unfolding along the drag chain extend and
The a plurality of via holes being set side by side.
Preferably, a plurality of via holes are laterally arranged on extending direction when unfolding perpendicular to the drag chain.
Preferably, a plurality of via holes are set on a connecting plate, and the connecting plate is fixed on corresponding described first
On drag chain section.
Preferably, the connecting plate is engaged by grab with the corresponding first drag chain section.
Preferably, the connecting plate passes through rivet and the corresponding first drag chain section riveted.
Preferably, the connecting plate is bolted by bolt with the corresponding first drag chain section.
Preferably, two pieces of drag chain sections have a preset interval.
Preferably, the preset interval includes zero piece of drag chain section；Or
The preset interval includes one piece of drag chain section；Or
The preset interval includes two pieces of drag chain sections；Or
The preset interval includes three pieces of drag chain sections；Or
The preset interval includes four pieces of drag chain sections；Or
The preset interval includes five pieces of drag chain sections；Or
The preset interval includes six pieces of drag chain sections；Or
The preset interval includes seven pieces of drag chain sections；Or
The preset interval includes eight pieces of drag chain sections；Or
The preset interval includes nine pieces of drag chain sections；Or
The preset interval includes ten pieces of drag chain sections.
Preferably, the via hole is hexagon.
Preferably, the via hole is circle；Or
The via hole is polygon.
The technical solution of the utility model beneficial effect is: at least one piece of first drag chain section, and the first drag chain section is equipped with edge
A plurality of via holes that extending direction when drag chain is unfolded extends and is set side by side, each via hole place a transfer line, so that
Transfer line is individually placed, and is avoided pullling between transfer line in the process of moving and is worn, and transmission stability is improved.
Detailed description of the invention
Fig. 1 is that in the prior art, drag chain places the overall structure diagram of transfer line；
Fig. 2 is the overall structure diagram of the drag chain of the embodiments of the present invention.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are in the premise for not making creative work
Under every other embodiment obtained, fall within the protection scope of the utility model.
It should be noted that in the absence of conflict, the feature in the embodiments of the present invention and embodiment can
To be combined with each other.
The utility model is described in further detail in the following with reference to the drawings and specific embodiments, but not as the utility model
It limits.
In industrial equipment, when two wafers carry out bonding technology, after the alignment of upper wafer coordinate, lower wafer can be moved
It moves on to designated position to be bonded with upper wafer, drives the mobile lower platform of lower wafer synchronizing moving together with drag chain, if
There is abrasion in the transfer line of drag chain or the accurate movement that can all influence lower platform is pullled in agitation.Bonding alignment in the prior art
In photoetching equipment, the transfer line in drag chain includes signal wire, power supply line, gas pipeline, and there are many transfer line quantity, can only will be passed
Defeated pipeline is deposited in drag chain, as shown in Figure 1, being highly susceptible to the shadow pullled and worn during carrying out mobile in this way
It rings, and then alignment precision is caused to be deteriorated, but when such case is when bonding alignment photoetching equipment occurs many times, bonding technology wind
Danger can also increase.
For the above-mentioned problems in the prior art, the utility model provides a kind of drag chain, including plural block drag chain section,
Including:
At least one piece of first drag chain section 1, the first drag chain section 1, which is equipped on extending direction when unfolding along drag chain, to be extended and side by side
The a plurality of via holes 10 being arranged.
It is applied to industrial equipment as shown in Fig. 2, drag chain includes plural block drag chain section by the technical solution of above-mentioned drag chain
It in technical field, has wide range of applications, mainly to place transfer line, in the present embodiment, drag chain is mainly used for placing brilliant
Transfer line in circle bonding technology, wherein transfer line includes at least signal wire, power supply line, gas pipeline, and transfer line
There are many quantity, when two wafers carry out bonding technology, after the alignment of upper wafer coordinate, can move lower wafer and move on to designated position
It is bonded with upper wafer, the mobile lower platform of lower wafer synchronizing moving together with drag chain is driven, if the transfer tube of drag chain
There is abrasion in line or the accurate movement that can all influence lower platform is pullled in agitation.
Further, at least one piece of first drag chain section 1, the first drag chain section 1 are equipped with extending direction when unfolding along drag chain
The a plurality of via holes 10 for extending and being set side by side, each via hole 10 is to place a transfer line, so that transfer line list
It is solely placed, avoids pullling between transfer line in the process of moving and wears, improve transmission stability, and then raising pair
Quasi- precision reduces bonding technology risk.
In a kind of preferably embodiment, extending direction when unfolding perpendicular to drag chain is laterally arranged in a plurality of via holes 10
On.
Specifically, drag chain includes plural block drag chain section, is applied in technical field of industrial equipment, has wide range of applications,
Mainly to place the transfer line in wafer bonding technique in the present embodiment, as shown in Fig. 2, the laterally setting of a plurality of via holes 10
On extending direction when unfolding perpendicular to drag chain, when the quantity of transfer line is more, transfer line is classified,
Each via hole 10 is to place a transfer line, so that transfer line is individually placed, avoids passing in the process of moving
It pullling between defeated pipeline and wears, improves transmission stability, and then improve alignment precision, reduce bonding technology risk.
In a kind of preferably embodiment, a plurality of via holes 10 are set on a connecting plate 11, and connecting plate 11 is fixed on pair
On the first drag chain section 1 answered.
Specifically, drag chain is applied in technical field of industrial equipment, has wide range of applications, mainly to place transfer tube
Line, in the present embodiment, drag chain are mainly used for placing the transfer line in wafer bonding technique, as shown in Fig. 2, by will be plural
A via hole 10 is set on connecting plate 11, and connecting plate 11 is fixed on corresponding first drag chain section 1, when the quantity ratio of transfer line
When more, transfer line is classified, each via hole 10 is to place a transfer line, so that transfer line list
It is solely placed, avoids pullling between transfer line in the process of moving and wears, improve transmission stability, and then raising pair
Quasi- precision reduces bonding technology risk.
In a kind of preferably embodiment, connecting plate 11 is engaged by grab with corresponding first drag chain section 1.
Specifically, drag chain is applied in technical field of industrial equipment, has wide range of applications, mainly to place transfer tube
Line, in the present embodiment, drag chain be mainly used for place wafer bonding technique in transfer line, connecting plate 11 by grab with it is right
The first drag chain section 1 engaging answered, this detachably connected mode is easy to operate, is convenient for user's installation and removal.
Further, as shown in Fig. 2, connecting plate 11 is fixed on by the way that a plurality of via holes 10 are set on connecting plate 11
On corresponding first drag chain section 1, when the quantity of transfer line is more, transfer line is classified, each mistake
Hole 10 is to place a transfer line so that transfer line is individually placed, avoid in the process of moving transfer line it
Between pull and wear, improve transmission stability, and then improve alignment precision, reduce bonding technology risk.
In a kind of preferably embodiment, connecting plate 11 passes through rivet and corresponding first drag chain section, 1 riveted.
Specifically, drag chain is applied in technical field of industrial equipment, has wide range of applications, mainly to place transfer tube
Line, in the present embodiment, drag chain be mainly used for place wafer bonding technique in transfer line, connecting plate 11 by rivet with it is right
1 riveted of the first drag chain section answered, this detachably connected mode is easy to operate, is convenient for user's installation and removal.
Further, as shown in Fig. 2, connecting plate 11 is fixed on by the way that a plurality of via holes 10 are set on connecting plate 11
On corresponding first drag chain section 1, when the quantity of transfer line is more, transfer line is classified, each mistake
Hole 10 is to place a transfer line so that transfer line is individually placed, avoid in the process of moving transfer line it
Between pull and wear, improve transmission stability, and then improve alignment precision, reduce bonding technology risk.
In a kind of preferably embodiment, connecting plate 11 is bolted by bolt with corresponding first drag chain section 1.
Specifically, drag chain is applied in technical field of industrial equipment, has wide range of applications, mainly to place transfer tube
Line, in the present embodiment, drag chain be mainly used for place wafer bonding technique in transfer line, connecting plate 11 by bolt with it is right
The first drag chain section 1 bolt answered, this detachably connected mode is easy to operate, is convenient for user's installation and removal.
Further, as shown in Fig. 2, connecting plate 11 is fixed on by the way that a plurality of via holes 10 are set on connecting plate 11
On corresponding first drag chain section 1, when the quantity of transfer line is more, transfer line is classified, each mistake
Hole 10 is to place a transfer line so that transfer line is individually placed, avoid in the process of moving transfer line it
Between pull and wear, improve transmission stability, and then improve alignment precision, reduce bonding technology risk.
In a kind of preferably embodiment, two pieces of drag chain sections have a preset interval；
Preset interval includes zero piece of drag chain section；Or
Preset interval includes one piece of drag chain section；Or
Preset interval includes two pieces of drag chain sections；Or
Preset interval includes three pieces of drag chain sections；Or
Preset interval includes four pieces of drag chain sections；Or
Preset interval includes five pieces of drag chain sections；Or
Preset interval includes six pieces of drag chain sections；Or
Preset interval includes seven pieces of drag chain sections；Or
Preset interval includes eight pieces of drag chain sections；Or
Preset interval includes nine pieces of drag chain sections；Or
Preset interval includes ten pieces of drag chain sections.
Specifically, drag chain is applied in technical field of industrial equipment, has wide range of applications, mainly to place transfer tube
Line, in the present embodiment, drag chain are mainly used for placing the transfer line in wafer bonding technique, and drag chain includes plural block drag chain
Section, at least one piece of first drag chain section 1, the first drag chain section 1 are equipped with extending direction when unfolding along drag chain and extend and be set side by side
A plurality of via holes 10, wherein two pieces of drag chain sections have a preset interval, and preset interval includes zero piece or one piece or two pieces
Either three pieces or four pieces or five pieces or six pieces or seven pieces or eight pieces or nine pieces or ten pieces, it should be noted that
Preset interval can be according to user's self-setting, and details are not described herein.
In a kind of preferably embodiment, via hole 10 is hexagon.
Specifically, as shown in Fig. 2, via hole 10 can be hexagon, a plurality of via holes 10 form a honeycomb structure, via hole
10 quantity is arranged according to the quantity of transfer line, in the present embodiment, when two wafers carry out bonding technology, when upper crystalline substance
After circle coordinates alignment, lower wafer can be moved move on to designated position and bonded with upper wafer, the lower platform for driving lower wafer mobile
The synchronizing moving together with drag chain, during synchronizing moving, each via hole 10 is corresponding to place a transfer line, so that passing
Defeated pipeline is individually placed, and is avoided pullling between transfer line in the process of moving and is worn, and transmission stability is improved, into
And alignment precision is improved, reduce bonding technology risk.
In a kind of preferably embodiment, via hole 10 is circle；
Or via hole 10 is polygon.
Specifically, via hole 10 can be circle, in the present embodiment, the quantity of via hole 10 according to the quantity of transfer line come
Setting, when two wafers carry out bonding technology when, when upper wafer coordinate alignment after, can move lower wafer move on to designated position with it is upper
Wafer is bonded, and drives the mobile lower platform of lower wafer synchronizing moving together with drag chain, during synchronizing moving, often
An one via hole 10 piece transfer line of corresponding placement avoids transfer tube so that transfer line is individually placed in the process of moving
It pullling between line and wears, improves transmission stability, and then improve alignment precision, reduce bonding technology risk.
Further, via hole 10 can be the polygons such as polygon, such as triangle, quadrangle, pentagon, the present embodiment
In, the quantity of via hole 10 is arranged according to the quantity of transfer line, when two wafers carry out bonding technology, when upper wafer coordinate
After alignment, lower wafer can be moved move on to designated position and bonded with upper wafer, the lower platform and drag chain for driving lower wafer mobile
Synchronizing moving together, during synchronizing moving, each via hole 10 is corresponding to place transfer line, so that transfer line
It is individually placed, avoids pullling between transfer line in the process of moving and wears, improve transmission stability, and then improve
Alignment precision reduces bonding technology risk.
The foregoing is merely the utility model preferred embodiment, be not intended to limit the embodiments of the present invention and
Protection scope should can appreciate that all in the utility model specification and diagram to those skilled in the art
Hold made equivalent replacement and obviously change obtained scheme, the protection model of the utility model should all be included in
In enclosing.
Claims (10)
1. a kind of drag chain, the drag chain includes plural block drag chain section characterized by comprising
At least one piece of first drag chain section, the first drag chain section are equipped with extending direction when unfolding along the drag chain and extend and side by side
The a plurality of via holes being arranged.
2. drag chain according to claim 1, which is characterized in that a plurality of via holes are laterally arranged perpendicular to the drag chain
On extending direction when unfolding.
3. drag chain according to claim 1, which is characterized in that a plurality of via holes are set on a connecting plate, described
Connecting plate is fixed on the corresponding first drag chain section.
4. drag chain according to claim 3, which is characterized in that the connecting plate is dragged by grab with corresponding described first
Chain link engaging.
5. drag chain according to claim 3, which is characterized in that the connecting plate is dragged by rivet with corresponding described first
Chain link riveted.
6. drag chain according to claim 3, which is characterized in that the connecting plate is dragged by bolt with corresponding described first
Chain link bolt.
7. drag chain according to claim 1, which is characterized in that two pieces of drag chain sections have a preset interval.
8. drag chain according to claim 7, which is characterized in that the preset interval includes zero piece of drag chain section；Or
The preset interval includes one piece of drag chain section；Or
The preset interval includes two pieces of drag chain sections；Or
The preset interval includes three pieces of drag chain sections；Or
The preset interval includes four pieces of drag chain sections；Or
The preset interval includes five pieces of drag chain sections；Or
The preset interval includes six pieces of drag chain sections；Or
The preset interval includes seven pieces of drag chain sections；Or
The preset interval includes eight pieces of drag chain sections；Or
The preset interval includes nine pieces of drag chain sections；Or
The preset interval includes ten pieces of drag chain sections.
9. drag chain according to claim 1, which is characterized in that the via hole is hexagon.
10. drag chain according to claim 1, which is characterized in that the via hole is circle；Or
The via hole is polygon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821923927.2U CN209321779U (en) | 2018-11-21 | 2018-11-21 | A kind of drag chain |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821923927.2U CN209321779U (en) | 2018-11-21 | 2018-11-21 | A kind of drag chain |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209321779U true CN209321779U (en) | 2019-08-30 |
Family
ID=67710933
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821923927.2U Active CN209321779U (en) | 2018-11-21 | 2018-11-21 | A kind of drag chain |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209321779U (en) |
-
2018
- 2018-11-21 CN CN201821923927.2U patent/CN209321779U/en active Active
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