CN209311348U - Detection device - Google Patents

Detection device Download PDF

Info

Publication number
CN209311348U
CN209311348U CN201822085766.0U CN201822085766U CN209311348U CN 209311348 U CN209311348 U CN 209311348U CN 201822085766 U CN201822085766 U CN 201822085766U CN 209311348 U CN209311348 U CN 209311348U
Authority
CN
China
Prior art keywords
detection
light source
detector
plane
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201822085766.0U
Other languages
Chinese (zh)
Inventor
李青格乐
陈晓静
方一
陈鲁
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenzhen Zhongke Feice Technology Co Ltd
Original Assignee
Institute of Microelectronics of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Institute of Microelectronics of CAS filed Critical Institute of Microelectronics of CAS
Priority to CN201822085766.0U priority Critical patent/CN209311348U/en
Application granted granted Critical
Publication of CN209311348U publication Critical patent/CN209311348U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

This disclosure relates to a kind of detection device.Detection device includes: first light source component (40), for providing lateral detection light to the examined object (10) at least one curved detection surface, the normal of the curved detection surface at least two positions on the first bending direction is not parallel;With detector (20), setting is in the side of the examined object (10), for acquiring reflected light of the lateral detection light in the examined object (10) along the continuous surface of the first bending direction;Wherein, the first light source component (40) is configured as fixing when the detector (20) detects the curved detection surface relative to the examined object (10), and moves relative to the detector (20) along first bending direction.The embodiment of the present disclosure is able to use less detecting lenses to realize that curved surface detects.

Description

Detection device
Technical field
This disclosure relates to detection field more particularly to a kind of detection device.
Background technique
The detection method of mirror article surface defect is generally included: bright field detection and dark field detection.Among these, light field Detection is the beam intensity by detecting determinand surface reflection, to realize the method detected to determinand surface.Light field Detection has many advantages, such as that high sensitivity, program setting are simple, has important application in industrial detection.
In existing industrial detection method, when the curved surface of measuring targets is detected, generally require by multiple Detector collects the information of determinand reflection from different directions.This detection method is lower to light source requirements, can use routine Annular light source, strip source, coaxial light source etc..However, since detecting lenses number is more, and detecting lenses are expensive, Lead to detection device higher cost, in addition, the detection of multiple detecting lenses is also easy to increase the complexity of data processing.
Summary of the invention
In view of this, the embodiment of the present disclosure provides a kind of detection device, it is curved to realize to be able to use less detecting lenses Curved surface detection.
In one aspect of the present disclosure, a kind of detection device is provided, comprising:
First light source component, for providing lateral detection to the examined object at least one curved detection surface The normal of light, the curved detection surface at least two positions on the first bending direction is not parallel;With
The side of the examined object is arranged in detector, for acquiring the lateral detection light described to be detected Reflected light of the object along the continuous surface of the first bending direction;
Wherein, the first light source component is configured as when the detector detects the curved detection surface It fixes relative to the examined object, and is moved relative to the detector along first bending direction.
In some embodiments, the curved detection surface includes detection plane and the first detection surface, and the detection is flat Face is connect with first detection surface, and the normal at the first detection surface each point is uneven with the detection plane Row.
In some embodiments, the first light source component includes arc light source or concave mirror, the arc light source or recessed The side that face mirror closes on first detection surface is concave arc.
In some embodiments, the first light source component includes planar light source or plane mirror.
In some embodiments, the examined object has the two of the both ends for being located at the detection planar opposite side A first detection surface, the detection device includes two first light source components, is separately positioned on two first inspections The outside for surveying surface, when any first detection surface of the detector to two in first detection surface detects The lateral detection light of respective side is provided.
In some embodiments, the optical axis of the camera lens of the detector and the angle of the detection plane are less than 90 ° and institute State the difference of the maximum angle of the first detection normal to a surface and the detection plane.
In some embodiments, the angle of the optical axis of the camera lens of the detector and the normal of the detection plane is 10 ° ~20 °.
In some embodiments, the detection device further include:
Second light source component is fixed relative to the detector, at least providing detection light to the detection plane, with Toilet states detector and acquires reflected light of the detection light of the second light source component offer in the detection plane.
In some embodiments, the second light source component is planar light source or bending light source.
In some embodiments, the detection plane and first detection surface are mirror surface.
Therefore, it according to the embodiment of the present disclosure, is provided using first light source component to the curved detection surface of examined object Lateral detection light, can also be obtained even with less detector so laterally detected provided by first light source component light to The reflected light on the surface of detection object, to reduce the cost of detection device, is simplified with realizing the detection of curved detection surface The complexity of data.
Detailed description of the invention
The attached drawing for constituting part of specification describes embodiment of the disclosure, and together with the description for solving Release the principle of the disclosure.
The disclosure can be more clearly understood according to following detailed description referring to attached drawing, in which:
Fig. 1 is the structural schematic diagram according to some embodiments of disclosure detection device;
Fig. 2 is the schematic diagram that the examined object that Fig. 1 embodiment is bent upwards the first detection surface is detected;
Fig. 3 is the schematic diagram that Fig. 1 embodiment detects the first detection reclinate examined object in surface;
Fig. 4 is the structural schematic diagram according to other embodiments of disclosure detection device.
It should be understood that the size of various pieces shown in attached drawing is not to draw according to actual proportionate relationship. In addition, same or similar reference label indicates same or similar component.
Specific embodiment
The various exemplary embodiments of the disclosure are described in detail now with reference to attached drawing.Description to exemplary embodiment It is merely illustrative, never as to the disclosure and its application or any restrictions used.The disclosure can be with many differences Form realize, be not limited to the embodiments described herein.These embodiments are provided so that the disclosure is thorough and complete, and The scope of the present disclosure is given full expression to those skilled in the art.It should also be noted that unless specifically stated otherwise, otherwise in these implementations Component described in example and positioned opposite, material component, numerical expression and the numerical value of step should be construed as merely and show Example property, not as limitation.
" first ", " second " used in the disclosure and similar word are not offered as any sequence, quantity or again The property wanted, and be used only to distinguish different parts.The similar word such as " comprising " or "comprising" means the element before the word Cover the element enumerated after the word, it is not excluded that be also covered by the possibility of other element."upper", "lower", "left", "right" etc. are only used In indicating relative positional relationship, after the absolute position for being described object changes, then the relative positional relationship may also be correspondingly Change.
In the disclosure, when being described to certain device between the first device and the second device, in the certain device There may be devices between two parties between the first device or the second device, and device between two parties can also be not present.When being described to specific device When part connects other devices, which can be directly connected to without device between two parties with the other devices, can also be with It is not directly connected to the other devices and there is device between two parties.
All terms (including technical term or scientific term) that the disclosure uses are common with disclosure fields The meaning that technical staff understands is identical, unless otherwise specifically defined.It is also understood that in term such as defined in the general dictionary The meaning consistent with their meanings in the context of the relevant technologies should be interpreted as having, without application idealization or The meaning of extremely formalization explains, unless being clearly defined herein.
Technology, method and apparatus known to person of ordinary skill in the relevant may be not discussed in detail, but suitable In the case of, the technology, method and apparatus should be considered as part of specification.
As shown in Figure 1, being the structural schematic diagram according to some embodiments of disclosure detection device.With reference to Fig. 1, and combine Fig. 2-Fig. 4, in some embodiments, detection device include: detector 20 and first light source component 40.Detector 20 setting to The side of detection object 10, the examined object 10 have at least one curved detection surface, and the curved detection surface is the The normal of at least two positions is not parallel on one bending direction.Examined object 10 can be the glass for including curved surface, ceramics, Metal etc., such as mobile phone shell, optical lens, cell piece or camber display screen.The curved detection surface of examined object 10 can wrap Include detection plane 11 and the first detection surface 12,12'.Detection plane 11 is connect with first detection surface 12,12', and institute It is not parallel with the detection plane to state the first detection surface 12, the normal at 12' each point.
First light source component 40 may be provided at at least side of examined object 10, for detecting surface to described first 12,12' provides lateral detection light.And detector 20 can acquire the lateral detection light of the sending of first light source component 40 described to be checked Object 10 is surveyed along the reflected light on the continuous surface of the first bending direction.In some embodiments, which can be with For flat mirror surface, the first detection surface can be spherical, cylindrical or other shapes curved mirror.In other embodiments In, detecting plane 11 and the first detection surface may be non-specular surface.
When first light source component 40 provides lateral detection light to the first detection surface 12,12' as bright field light source, laterally Light is detected by the first detection surface 12,12' back reflection, the suitable reflected light of angle is received by a detector.If the first detection There are spot or defect in surface 12,12', then spot or defect can absorb or scattered portion detects light, and detector is caused to be received To the light intensity of reflected light die down, be exactly that the position corresponding to spot or defect is darker in reflection to imaging.
Lateral detection light is provided to the first detection surface 12,12' due to using first light source component, using less Detector can also obtain laterally detected provided by first light source component light first detect surface 12,12' reflected light, with Realize that the detection on the first detection surface 12,12' simplifies the complexity of data to reduce the cost of detection device.
Referring to figs. 2 and 3, in order to improve first light source component 40 to first detection surface 12,12 ' provide detection light when Light intensity uniformity, preferably make first light source component 40 include arc light source, the arc light source close on it is described first detection surface 12,12 ' side may be designed as concave arc.The arc light source can also use disperse light source.In further embodiments, may be used Making first light source component 40 includes concave mirror, and the side which closes on first detection surface 12,12 ' is imploded arcs Shape.The effect of the concave mirror is similar to arc light source, and the light that environment light or other light sources issue can be reflected by it On first detection surface 12,12 ', to save the energy, the relevant cost of light source is reduced.In still other embodiments, the first light Source component 40 is also possible to planar light source or plane mirror.
In figure 2 and figure 3, examined object 10 has two of the both ends for being located at detection 11 opposite side of plane First detection surface 12,12 '.In order to provide lateral detection light to the two first detection surfaces 12,12 ', detection device can be wrapped Two first light source components 40 are included, the outside on described two first detections surface 12,12 ' is separately positioned on.In the detector When any first detection surface 12,12 ' in 20 pairs of described two first detections surfaces 12,12 ' detects, first light source group Part 40 can provide lateral detection light to the first detection surface 12 of this side, 12' or the first detection surface 12 of opposite side, 12'.
It in some embodiments, is in certain between the optical axis of the camera lens of detector 20 and the normal of the detection plane 11 Angle.By taking the detection of mobile phone shell as an example, when detector 20 is arranged, the side of left and right two that plane 11 is detected in Fig. 2 is also distinguished It is connected with the first detection surface 12,12 '.Since the normal on the first detection surface 12,12 ' changes greatly, it is therefore desirable to according to the One detection surface 12,12 ' normal with detect plane 11 maximum angle come be arranged detector 20 camera lens optical axis with it is described Detect the angle of the normal of plane 11.In some embodiments, the angle be preferably smaller than 90 ° with it is described first detection surface 12 with The difference of the maximum angle of the detection plane 11.It is highly preferred that the optical axis of the camera lens of detector 20 and the detection plane 11 The angle of normal is 10 °~20 °.
According to the characteristic of detector 20, can by relative to the relative movement between examined object 10 and detector 20 come Realize the acquisition of the reflected light on some or all of examined object 10 detection surface.In some embodiments, first light source group Part 40 can be configured to when the detector 20 detects the curved detection surface relative to the examined object 10 is fixed, and moves relative to the detector 20 along first bending direction.That is, first light source component 40 can be As examined object 10 moves together in detection process, and keep the relative position between examined object 10.First light Source component 40 can also be remain stationary together with examined object 10, and by the mobile position to change reception reflected light of detector 20 It sets.
With reference to Fig. 1-Fig. 4, in some embodiments, detection device can also include second light source component 30,30 '.This Two light source assemblies 30,30 ' are fixed relative to the detector 20, at least providing detection light to the detection plane 11, with Toilet states detector 20 and acquires reflection of the detection light of the offer of second light source component 30,30 ' in the detection plane 11 Light.
In Fig. 1-Fig. 3, second light source component 30 is bending light source, which can be all by curved surface light source Connection is formed, and can also be connected and be formed with planar light source by curved surface light source.According to the form of examined object may be selected be suitble to The form of second light source component 30.For example, for the mobile phone shell that the shape for detecting plane 11 is rectangle, in addition to detecting The short side of plane is equipped with the first detection surface 12, is connected with other detection surfaces in the long side of detection plane 11.And in order to acquire Second light source component can be then arranged to U-shaped structure by the reflected light of the long side of mobile phone shell, and wherein the two sides of U-shaped structure are song Area source, and the bottom of U-shaped structure is planar light source, and the bright field detection on the detection surface of long side may be implemented in this way, and By curved surface light source, it may make the detection light for being supplied to the detection surface of long side more uniform, improve detection effect.
With reference to Fig. 4, in further embodiments, second light source component 30 ' can also be planar light source.Such as in detection plane When 11 second direction side is not connected to other detection surfaces, the structure of second light source component 30 ' can be simplified, it is difficult to reduce manufacture Degree.
Compared to Fig. 1 and Fig. 2, the first detection surface 12 ' of the examined object 11 in Fig. 3 and Fig. 4 is flat relative to detection Face 11 to close to detector 20 direction be bent, for this bend mode, still can be used first light source component 40 be this first It detects surface 12 ' and lateral detection light is provided, such as provide lateral detection light to the first detection surface 12 ' of opposite side.
The setting position of first light source component 40 with first detection surface 12 or 12 ' bending direction and maximum deflection angle Degree is related.It is, for example, less than equal to 15 ° when smaller for maximum bend angle, it is convenient to omit the second light source component 40 of corresponding side. And for biggish maximum bend angle, such as 30 °~45 °, if second light source component 40 can be omitted then according to the first light The angle of divergence of source component 30 determines, if the angle of divergence of first light source component 30 is smaller, can optionally omit the of respective side Two light source assemblies 40, or increase second light source component 40 to improve the edge brightness of 10 respective side of examined object.
Front is illustrated multiple embodiments of disclosure detection device.Above-mentioned detection device can be used for all kinds of need The scene of Surface testing is carried out, such as detection device may be provided in automated optical detection equipment, can reduce cost, simplified Data processing.
So far, the presently disclosed embodiments is described in detail.In order to avoid covering the design of the disclosure, do not describe Some details known in the field.Those skilled in the art as described above, completely it can be appreciated how implement here Disclosed technical solution.
Although being described in detail by some specific embodiments of the example to the disclosure, the skill of this field Art personnel it should be understood that above example merely to be illustrated, rather than in order to limit the scope of the present disclosure.The skill of this field Art personnel it should be understood that can not depart from the scope of the present disclosure and spirit in the case where, modify to above embodiments or Some technical features can be equivalently replaced.The scope of the present disclosure is defined by the following claims.

Claims (10)

1. a kind of detection device characterized by comprising
First light source component (40), for providing lateral visit to the examined object (10) at least one curved detection surface Light is surveyed, the normal of the curved detection surface at least two positions on the first bending direction is not parallel;With
Detector (20), setting in the side of the examined object (10), for acquire the lateral detection light it is described to Reflected light of the detection object (10) along the continuous surface of the first bending direction;
Wherein, the first light source component (40) is configured as examining the curved detection surface in the detector (20) It is fixed relative to the examined object (10) when survey, and transported relative to the detector (20) along first bending direction It is dynamic.
2. detection device according to claim 1, which is characterized in that the curved detection surface includes detection plane (11) With the first detection surface (12,12'), the detection plane (11) and the first detection surface (12,12') connection, and it is described Normal at first detection surface (12,12') each point is not parallel with the detection plane.
3. detection device according to claim 2, which is characterized in that the first light source component (40) includes arc light source Or concave mirror, the arc light source or concave mirror close on described first and detect the side of surface (12,12') as concave arc.
4. detection device according to claim 1, which is characterized in that the first light source component (40) includes planar light source Or plane mirror.
5. detection device according to claim 2, which is characterized in that the examined object (10), which has, is located at institute Two first detections surface (12,12') at the both ends of detection plane (11) opposite side are stated, the detection device includes two First light source component (40) is separately positioned on the outside of two first detections surface (12,12'), in the detector (20) offer when being detected to any first detection surface (12,12') in two first detections surface (12,12') The lateral detection light of respective side.
6. detection device according to claim 2, which is characterized in that the optical axis of the camera lens of the detector (20) with it is described Detect the angle of plane (11) less than 90 ° with the normal of first detection surface (12,12') and detection plane (11) The difference of maximum angle.
7. detection device according to claim 6, which is characterized in that the optical axis of the camera lens of the detector (20) with it is described The angle for detecting the normal of plane (11) is 10 °~20 °.
8. detection device according to claim 2, which is characterized in that further include:
Second light source component (30,30 '), it is fixed relative to the detector (20), at least to the detection plane (11) Detection light is provided, so that the detector (20) acquire the detection light of second light source component (30,30 ') offer in the inspection Survey the reflected light on plane (11).
9. detection device according to claim 8, which is characterized in that the second light source component (30,30 ') is planar light Source or bending light source.
10. detection device according to claim 2, which is characterized in that the detection plane (11) and first detection Surface is mirror surface.
CN201822085766.0U 2018-12-13 2018-12-13 Detection device Active CN209311348U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201822085766.0U CN209311348U (en) 2018-12-13 2018-12-13 Detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201822085766.0U CN209311348U (en) 2018-12-13 2018-12-13 Detection device

Publications (1)

Publication Number Publication Date
CN209311348U true CN209311348U (en) 2019-08-27

Family

ID=67676558

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201822085766.0U Active CN209311348U (en) 2018-12-13 2018-12-13 Detection device

Country Status (1)

Country Link
CN (1) CN209311348U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110495901A (en) * 2019-09-12 2019-11-26 北京纳米维景科技有限公司 The real-time CT imaging system of static state and image formation control method with pairs of radiographic source ring

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110495901A (en) * 2019-09-12 2019-11-26 北京纳米维景科技有限公司 The real-time CT imaging system of static state and image formation control method with pairs of radiographic source ring

Similar Documents

Publication Publication Date Title
CN101900691B (en) Glass inspection systems
US9423245B2 (en) Arrangement for optical measurements and related method
CN107561089B (en) Inner hole detection optical system and inner hole detection equipment
CN110044931B (en) Detection apparatus for curved surface glass surface and internal defect
CN105492862B (en) Method and device for optically detecting the shape of and/or inspecting an object
CN205484071U (en) Test paper detection device
JP2007183225A (en) Light radiation device, surface shape inspection system, and surface shape inspection method
CN209311348U (en) Detection device
Breitbarth et al. Measurement accuracy and practical assessment of the lidar camera Intel RealSense L515
CN208833665U (en) A kind of CCD target surface calibrating apparatus for fixing based on compromising emanation imaging
KR101416860B1 (en) Particle inspecting system for camera lens module
CN107110790A (en) Systems for optical inspection
CN113466246B (en) High-precision imaging system, method, image acquisition device and detection equipment
CN207600954U (en) A kind of portable colour comparison detection apparatus
JP2014240766A (en) Surface inspection method and device
KR101447857B1 (en) Particle inspectiing apparatus for lens module
Filip et al. Anisotropic materials appearance analysis using ellipsoidal mirror
Ma et al. Improvement on object detection accuracy by using two compound eye systems
CN109239067A (en) A kind of ultrashort burnt visual imaging detection method of miniaturization
WO2012124057A1 (en) Semiconductor-light-emitter-testing device
CN219065873U (en) Shooting device
CN220584076U (en) Detection optical module and detection device
KR20110133183A (en) Inspecting machine for flat panel
Zhang et al. Spherical optical surface defects digitizing evaluation system
JP2012173277A (en) Shape measuring apparatus and optical filter to be used for the same

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant
CP01 Change in the name or title of a patent holder
CP01 Change in the name or title of a patent holder

Address after: 518110 101, 201, 301, No.2, Shanghenglang fourth industrial zone, Tongsheng community, Dalang street, Longhua District, Shenzhen City, Guangdong Province

Patentee after: Shenzhen Zhongke feice Technology Co.,Ltd.

Address before: 518110 101, 201, 301, No.2, Shanghenglang fourth industrial zone, Tongsheng community, Dalang street, Longhua District, Shenzhen City, Guangdong Province

Patentee before: Shenzhen Zhongke Flying Test Technology Co.,Ltd.