CN219065873U - Shooting device - Google Patents
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- CN219065873U CN219065873U CN202223393447.9U CN202223393447U CN219065873U CN 219065873 U CN219065873 U CN 219065873U CN 202223393447 U CN202223393447 U CN 202223393447U CN 219065873 U CN219065873 U CN 219065873U
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- 238000003384 imaging method Methods 0.000 claims abstract description 28
- 230000003287 optical effect Effects 0.000 abstract description 15
- 238000012360 testing method Methods 0.000 abstract description 10
- 230000007547 defect Effects 0.000 description 7
- 238000001514 detection method Methods 0.000 description 5
- 238000002834 transmittance Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000007689 inspection Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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Abstract
The utility model discloses a shooting device, which can be applied to the technical field of microscopic imaging and comprises: the system comprises a main camera, an objective lens, a lens structure, a first reflecting prism unit, a second reflecting prism unit, a third reflecting prism unit, a fourth reflecting prism unit, an auxiliary camera and a complex judgment camera; one end of the lens structure is connected with the main camera, and the other end of the lens structure is connected with the objective lens; the first reflecting prism unit and the third reflecting prism unit are arranged in the lens structure; the second reflecting prism unit is arranged outside the lens structure and used for reflecting the light reflected by the first reflecting prism unit to the auxiliary camera; the fourth reflecting prism unit is arranged outside the lens structure and used for reflecting the light reflected by the third reflecting prism unit to the complex judgment camera. Therefore, different imaging systems share one set of main mirror, calibration among different stations is omitted, a plurality of optical systems are integrated into one set, Z-axis height control, multiplying power switching and other components are reduced, and complexity and weight of the system are reduced while testing precision is improved.
Description
Technical Field
The utility model relates to the technical field of microscopic imaging, in particular to a shooting device.
Background
A microscope is mainly an instrument for magnifying a minute object to make the naked human eye clearly visible.
In the technical field of microscopic imaging, because the microscope with high magnification is basically used, the depth of field of an imaging system is smaller, and generally, the depth of field of the imaging system is only on the order of tens to tens of micrometers. In the process of detecting a wafer by using a high-magnification microscope, different types of defects need to be distinguished by using multiple wave bands. In the conventional photographing device, if the wafer defect is to be detected again, a plurality of high-magnification microscopes are required to be combined for use. Therefore, the detection stations are more, the photographing is complex, and the space is dense. In addition, the plurality of detection stations lead to the improvement of overall weight, equipment complexity and cost, the arrangement of the polishing light sources also becomes a problem, and the relative positions of different stations also need to be accurately calibrated, so that different cameras can take pictures of the same defect and perform subsequent marking work.
Therefore, how to reduce the complexity of the system and the weight of the system while improving the test accuracy is a problem that needs to be solved by those skilled in the art.
Disclosure of Invention
Based on the above-mentioned problem, this application provides a shooting device, through making the calibration that different imaging systems shared one set of main mirror, cancelled between the different stations, integrated into one set with many sets of optical system, reduced parts such as Z axle altitude control, multiplying power switching, realized reducing complexity and weight of system when improving the test accuracy.
The embodiment of the utility model provides a shooting device, which comprises: the system comprises a main camera, an objective lens, a lens structure, a first reflecting prism unit, a second reflecting prism unit, a third reflecting prism unit, a fourth reflecting prism unit, an auxiliary camera and a complex judgment camera;
one end of the lens structure is connected with the main camera, and the other end of the lens structure is connected with the objective lens;
the first reflecting prism unit and the third reflecting prism unit are arranged in the lens structure;
the main camera is used for receiving the light transmitted by the third reflecting prism unit;
the second reflecting prism unit is arranged outside the lens structure and is used for reflecting the light rays reflected by the first reflecting prism unit;
the auxiliary camera corresponds to the second reflecting prism unit and is used for receiving the light rays reflected by the second reflecting prism unit;
the fourth reflecting prism unit is arranged outside the lens structure and is used for reflecting the light rays reflected by the third reflecting prism unit;
the complex judgment camera corresponds to the fourth reflecting prism unit and is used for receiving the light rays reflected by the fourth reflecting prism unit.
Optionally, the secondary camera is disposed in a first direction of the primary camera; the complex judgment camera is arranged in the second direction of the main camera.
Optionally, the first direction is perpendicular to the second direction.
Optionally, the second reflecting prism unit includes:
the first, second and third reflecting sub-prisms.
Optionally, the first reflecting sub-prism, the second reflecting sub-prism and the third reflecting sub-prism are parallel to each other.
Optionally, the included angle between the first reflecting sub-prism, the second reflecting sub-prism and the third reflecting sub-prism and the horizontal plane is 45 degrees.
Optionally, the distances among the first reflecting sub-prism, the second reflecting sub-prism and the third reflecting sub-prism are equal.
Optionally, the first reflecting prism unit and the third reflecting prism unit are perpendicular to each other.
Optionally, the first reflecting prism unit is disposed below the third reflecting prism unit.
Optionally, an included angle between the fourth reflecting prism unit and the horizontal plane is 45 degrees.
Compared with the prior art, the utility model has the following advantages that:
in summary, the utility model discloses a photographing device, which can be applied to the technical field of microscopic imaging, and comprises: the system comprises a main camera, an objective lens, a lens structure, a first reflecting prism unit, a second reflecting prism unit, a third reflecting prism unit, a fourth reflecting prism unit, an auxiliary camera and a complex judgment camera; one end of the lens structure is connected with the main camera, and the other end of the lens structure is connected with the objective lens; the first reflecting prism unit and the third reflecting prism unit are arranged in the lens structure; the main camera is used for receiving the light transmitted by the third reflecting prism unit; the second reflecting prism unit is arranged outside the lens structure and is used for reflecting the light rays reflected by the first reflecting prism unit; the auxiliary camera corresponds to the second reflecting prism unit and is used for receiving the light rays reflected by the second reflecting prism unit; the fourth reflecting prism unit is arranged outside the lens structure and is used for reflecting the light rays reflected by the third reflecting prism unit; the complex judgment camera corresponds to the fourth reflecting prism unit and is used for receiving the light rays reflected by the fourth reflecting prism unit. Therefore, by enabling different imaging systems to share one set of main mirror, calibration among different stations is canceled, multiple sets of optical systems are integrated into one set, Z-axis height control, multiplying power switching and other components are reduced, and complexity and weight of the system are reduced while testing precision is improved.
Drawings
Fig. 1 is a side view of a schematic structure of a photographing device according to the present utility model;
fig. 2 is a schematic top view of a structure of a photographing device according to the present utility model;
fig. 3 is a schematic structural diagram of a second reflecting prism unit according to the present utility model.
Detailed Description
As described above, the existing photographing device needs to use a plurality of high-magnification microscopes in combination during the wafer inspection process, so that the complexity and weight of the system cannot be reduced while the testing accuracy is ensured. In particular, in the process of wafer inspection using a high-magnification microscope, it is necessary to distinguish between different types of defects using multiple bands. In the conventional photographing device, if the wafer defect is to be detected again, a plurality of high-magnification microscopes are required to be combined for use. Therefore, the detection stations are more, the photographing is complex, and the space is dense. In addition, the overall weight, the equipment complexity and the cost are improved due to the plurality of detection stations, the arrangement of the polishing light sources is also a problem, and the relative positions of different stations also need to be accurately calibrated, so that different cameras can take pictures of the same defect and perform subsequent marking work, and the complexity and the weight of the system cannot be reduced while the testing precision is improved.
In order to solve the above problems, the present utility model provides a photographing apparatus including: the system comprises a main camera, an objective lens, a lens structure, a first reflecting prism unit, a second reflecting prism unit, a third reflecting prism unit, a fourth reflecting prism unit, an auxiliary camera and a complex judgment camera; one end of the lens structure is connected with the main camera, and the other end of the lens structure is connected with the objective lens; the first reflecting prism unit and the third reflecting prism unit are arranged in the lens structure; the main camera is used for receiving the light transmitted by the third reflecting prism unit; the second reflecting prism unit is arranged outside the lens structure and is used for reflecting the light rays reflected by the first reflecting prism unit; the auxiliary camera corresponds to the second reflecting prism unit and is used for receiving the light rays reflected by the second reflecting prism unit; the fourth reflecting prism unit is arranged outside the lens structure and is used for reflecting the light rays reflected by the third reflecting prism unit; the complex judgment camera corresponds to the fourth reflecting prism unit and is used for receiving the light rays reflected by the fourth reflecting prism unit.
Therefore, by enabling different imaging systems to share one set of main mirror, calibration among different stations is canceled, multiple sets of optical systems are integrated into one set, Z-axis height control, multiplying power switching and other components are reduced, and complexity and weight of the system are reduced while testing precision is improved.
It should be noted that the photographing device provided by the utility model can be applied to the technical field of microscopic imaging. The foregoing is merely an example, and does not limit the application field of the photographing device provided by the present utility model.
In order to make the objects, technical solutions and advantages of the embodiments of the present utility model more apparent, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are only some embodiments of the present utility model, but not all embodiments of the present utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Fig. 1 is a schematic structural diagram of a photographing device according to the present utility model. Referring to fig. 1, a photographing apparatus 100 according to the present utility model includes: a main camera 101, an objective lens 102, a lens structure 103, a first reflecting prism unit 104, a second reflecting prism unit 105, a third reflecting prism unit 106, a fourth reflecting prism unit 107, an auxiliary camera 108, and a complex judgment camera 109;
one end of the lens structure 103 is connected with the main camera 101, and the other end is connected with the objective lens 102;
the first reflecting prism unit 104 and the third reflecting prism unit 106 are arranged in the lens structure 103;
the main camera 101 is configured to receive the light transmitted through the third reflection prism unit 106;
the second reflecting prism unit 105 is disposed outside the lens structure 103 and is configured to reflect the light reflected by the first reflecting prism unit 104;
the auxiliary camera 108 corresponds to the second reflecting prism unit 105 and is configured to receive the light reflected by the second reflecting prism unit 105;
the fourth reflecting prism unit 107 is disposed outside the lens structure 103 and is configured to reflect the light reflected by the third reflecting prism unit 106;
the complex camera 109 corresponds to the fourth reflecting prism unit 107, and is configured to receive the light reflected by the fourth reflecting prism unit 107.
The utility model integrates the microscopic imaging system, the focusing camera system and the color complex judgment imaging system into one set of optical system, so that different imaging systems share one set of main mirror, and the calibration among different stations is cancelled. Specifically, a certain amount of reflected light of the object is required for observing the object under test by a microscope, and if the reflected light of the object under test is too small, the observation may be unclear or impossible. When the light source is sufficient, the light source impinging on the object to be measured first enters the objective lens 102 after reflection, and then the incident light ray continues to enter the lens structure 103 along the light path and contacts the first reflecting prism unit 104. The first reflecting prism unit 104 is formed by a polygon prism, and the first reflecting prism unit 104 can reflect a part of the incident light, and the other part of the incident light is transmitted, that is, the incident light is divided into a first transmitted light and a first reflected light by the first reflecting prism unit 104. The first transmitted light ray passes through the first reflecting prism unit 104 and continuously contacts the third reflecting prism unit 106 along the optical path. The third reflecting prism unit 106 is also formed of a polygon prism, and the first transmitted light is divided into a second transmitted light and a second reflected light by the third reflecting prism unit 106. The second transmitted light passes through the third reflecting prism unit 106, and continues to enter the main camera 101 along the light path, and finally is displayed on the main camera 101 in an imaging way. The first reflected light beam irradiates the second reflecting prism unit 105 along the first reflecting light path, and is reflected by the second reflecting prism unit 105 to enter the auxiliary camera 108 for imaging display. The second reflected light beam irradiates the fourth reflecting prism unit 107 along the second reflected light path, and is reflected by the fourth reflecting prism unit 107 to enter the complex camera 109 for imaging display. Therefore, a plurality of optical systems are concentrated in the shooting device 100 provided by the application, the system integration level is improved, the Z-axis load is lightened, more space is reserved, and more detection equipment can be installed.
Fig. 2 is a schematic top view of a structure of a photographing device according to the present utility model. The present utility model is described with respect to how to control the space occupied by the cameras and to make the reflected light better enter the auxiliary camera 108 and the re-determination camera 109, with reference to fig. 2, the positions of the auxiliary camera 108 and the re-determination camera 109 are described. Accordingly, the secondary camera 108 is disposed in a first direction of the primary camera 101; the complex camera 109 is placed in the second direction of the main camera 101.
The camera size of secondary camera 108 is typically small and may be chosen to be mounted close to primary camera 101, thereby reducing the device size. The complex camera 109 is relatively large in size and thus is installed below the main camera 101. It should be noted that, in practical application, the relative positional relationship of the installation may be adjusted according to the system design.
As an embodiment, it is aimed at how to control the occupation space of the camera and make the reflected light better enter the auxiliary camera 108 and the re-judging camera 109. Correspondingly, the first direction is perpendicular to the second direction.
The first direction is perpendicular to the second direction, so that the auxiliary camera 108, the secondary camera 109 and the main camera 101 are relatively in the same horizontal plane, which can save installation space and reduce the volume of the photographing device 100.
Fig. 3 is a schematic structural diagram of a second reflecting prism unit according to the present utility model. Referring to fig. 3, a second reflecting prism unit 105 according to the present utility model includes:
a first reflecting sub-prism 201, a second reflecting sub-prism 202 and a third reflecting sub-prism 203.
The second reflecting prism unit 105 is constituted by a plurality of polygon prisms. Specifically, the second reflecting prism unit 105 includes three multi-prisms, namely, a first reflecting sub-prism 201, a second reflecting sub-prism 202, and a third reflecting sub-prism 203. The second reflecting prism unit 105 can reflect only a part of the image by adjusting the angles and the sizes of the first reflecting sub-prism 201, the second reflecting sub-prism 202 and the third reflecting sub-prism 203, and even change the optical path of the incident light entering the auxiliary camera 108, so that the imaging result in the auxiliary camera 108 is changed, and the purpose of auxiliary focusing is achieved.
As one implementation, it is directed to how to better get the first reflected light into secondary camera 108. Accordingly, the first reflecting sub-prism 201, the second reflecting sub-prism 202 and the third reflecting sub-prism 203 are parallel to each other.
In order to facilitate determining and capturing the optical path of the first reflected light obtained after the incident light passes through the first reflecting prism unit 104, the first reflecting prism unit 104 is generally disposed at an angle of 45 degrees with respect to the horizontal plane and at the same height as the second reflecting prism unit 105. In this way, the incident light beam incident perpendicularly to the horizontal plane irradiates the first reflected light beam generated by the first reflecting prism unit 104 along the horizontal plane, and the incident angles when the first reflected light beam contacts the first reflecting sub-prism 201, the second reflecting sub-prism 202 and the third reflecting sub-prism 203 are the same, so that the first reflecting sub-prism 201, the second reflecting sub-prism 202 and the third reflecting sub-prism 203 are parallel to each other in order to maximize the reflected light beam entering the auxiliary camera 108.
As one implementation, it is directed to how to better get the first reflected light into secondary camera 108. Correspondingly, the included angles between the first reflecting sub-prism, the second reflecting sub-prism and the third reflecting sub-prism and the horizontal plane are 45 degrees.
In combination with the above, the optical path of the first reflected light is parallel to the horizontal plane, and the included angles between the first reflecting sub-prism 201, the second reflecting sub-prism 202, and the third reflecting sub-prism 203 and the horizontal plane are set to be 45 degrees, so that the reflected light can be injected into the auxiliary camera 108 along the optical path perpendicular to the horizontal plane. In this manner, in addition to maximizing the amount of reflected light entering secondary camera 108, it is also convenient to calculate the specific optical path length of the incident light.
As one implementation, it is directed to how better the first reflected light is made to enter secondary camera 108. Accordingly, the distances among the first reflecting sub-prism 104, the second reflecting sub-prism 105 and the third reflecting sub-prism 106 are equal.
Specifically, in combination with the above, when the first reflecting prism unit 104 and the second reflecting prism unit 105 are set to have equal heights and have an included angle of 45 degrees with the horizontal plane, the first reflecting sub-prism 201, the second reflecting sub-prism 202 and the third reflecting sub-prism 203 are set to have the same distance, so that the reflected light rays passing through the first reflecting sub-prism 201, the second reflecting sub-prism 202 and the third reflecting sub-prism 203 can be orderly arranged in different imaging areas of the auxiliary camera 108 in the imaging of the auxiliary camera 108, and thus, the imaging of different reflecting sub-prisms in the auxiliary camera 108 can be clearly and conveniently observed to realize auxiliary focusing.
As one embodiment, it is directed to how to determine the relationship between the first reflecting prism unit 104 and the third reflecting prism unit 106 within the lens structure 103. Accordingly, the first reflecting prism unit 104 and the third reflecting prism unit 106 are perpendicular to each other.
Specifically, in order to facilitate determination and capture of the optical path of the second reflected light obtained by the incident light after passing through the third reflecting prism unit 106, the present utility model sets the third reflecting prism unit 106 to be perpendicular to the first reflecting prism unit 104. Referring to fig. 2, it can be understood that the angle between the third reflecting prism unit 106 and the horizontal plane is 45 degrees when the third reflecting prism unit 106 is viewed on the left side of the photographing device 100. Thus, when the incident light beam entering the objective lens 102 perpendicular to the horizontal plane continues to enter the lens structure 103 along the light path perpendicular to the horizontal plane and passes through the first reflecting prism unit 104 and contacts the third reflecting prism unit 106, the light path of the second reflecting light beam generated on the third reflecting prism unit 106 disposed at an angle of 45 degrees with respect to the horizontal plane can be directly determined to be parallel to the horizontal plane.
As an embodiment, it is directed to how to set the position between the first reflecting prism unit 104 and the third reflecting prism unit 106 within the lens structure 103. Accordingly, the first reflecting prism unit 104 is disposed below the third reflecting prism unit 106.
Since the auxiliary camera 108 is used to assist focusing, the first reflecting prism unit 104 used with the auxiliary camera 108 is placed close to the light source. The third reflecting prism unit 106 is disposed above the first reflecting prism unit 104, and is used in combination with the fourth reflecting prism unit 107 and the re-judging camera 109, and the re-judging camera 109 is used for re-judging and detecting the wafer defect. In addition, since the complex camera 109 provided in the present utility model has two working states, in which the first working state is to image with the main camera 101 at the same time, it is necessary to control the transmittance of the third reflecting prism unit 106, so that the transmittance of the third reflecting prism unit 106 is properly reduced, and the brightness of the second reflected light formed by the reflection of the third reflecting prism unit 106 is improved, thereby ensuring the imaging definition in the complex camera 109. The second working state is that the other main camera 101 detects first, so that the transmittance of the third reflecting prism unit 106 needs to be improved, the brightness of the second reflected light formed by the reflection of the third reflecting prism unit 106 is reduced, and the brightness of the projected light is improved, thereby ensuring the imaging definition in the main camera 101. In summary, whether the transmittance of the third reflecting prism unit 106 is reduced or increased, if the third reflecting prism unit 106 is disposed below the first reflecting prism unit 104, the imaging result in the auxiliary camera 108 will be affected, so that the third reflecting prism unit 106 is disposed above the first reflecting prism unit 104 in the present utility model, so that the imaging in the auxiliary camera 108 is stabilized.
As an embodiment, it is aimed at how to make the second reflected light better enter the re-judging camera 109. Specifically, the angle between the fourth reflecting prism unit 107 and the horizontal plane is 45 degrees.
In combination with the above, the second reflected light beam generated by the third reflecting prism unit 106 is horizontal, so in order to make more second reflected light beam enter the complex camera 109, the fourth reflecting prism unit 107 and the third reflecting prism unit 106 need to be disposed at the same height, and an included angle between the fourth reflecting prism unit 107 and the horizontal needs to be 45 degrees. Referring to fig. 2, it can be understood that the fourth reflecting prism unit 107 forms an angle of 45 degrees with the horizontal plane when the fourth reflecting prism unit 107 is viewed on the left side of the photographing device 100. In this way, it is convenient to calculate the specific optical path of the incident light, in addition to enabling the maximum amount of reflected light entering the complex judgment camera 109.
In summary, the utility model discloses a photographing device, which can be applied to the technical field of microscopic imaging, and comprises: the system comprises a main camera, an objective lens, a lens structure, a first reflecting prism unit, a second reflecting prism unit, a third reflecting prism unit, a fourth reflecting prism unit, an auxiliary camera and a complex judgment camera; one end of the lens structure is connected with the main camera, and the other end of the lens structure is connected with the objective lens; the first reflecting prism unit and the third reflecting prism unit are arranged in the lens structure; the main camera is used for receiving the light transmitted by the third reflecting prism unit; the second reflecting prism unit is arranged outside the lens structure and is used for reflecting the light rays reflected by the first reflecting prism unit; the auxiliary camera corresponds to the second reflecting prism unit and is used for receiving the light rays reflected by the second reflecting prism unit; the fourth reflecting prism unit is arranged outside the lens structure and is used for reflecting the light rays reflected by the third reflecting prism unit; the complex judgment camera corresponds to the fourth reflecting prism unit and is used for receiving the light rays reflected by the fourth reflecting prism unit. Therefore, by enabling different imaging systems to share one set of main mirror, calibration among different stations is canceled, multiple sets of optical systems are integrated into one set, Z-axis height control, multiplying power switching and other components are reduced, and complexity and weight of the system are reduced while testing precision is improved.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the utility model. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (10)
1. A photographing apparatus, comprising: the system comprises a main camera, an objective lens, a lens structure, a first reflecting prism unit, a second reflecting prism unit, a third reflecting prism unit, a fourth reflecting prism unit, an auxiliary camera and a complex judgment camera;
one end of the lens structure is connected with the main camera, and the other end of the lens structure is connected with the objective lens;
the first reflecting prism unit and the third reflecting prism unit are arranged in the lens structure;
the main camera is used for receiving the light transmitted by the third reflecting prism unit;
the second reflecting prism unit is arranged outside the lens structure and is used for reflecting the light rays reflected by the first reflecting prism unit;
the auxiliary camera corresponds to the second reflecting prism unit and is used for receiving the light rays reflected by the second reflecting prism unit;
the fourth reflecting prism unit is arranged outside the lens structure and is used for reflecting the light rays reflected by the third reflecting prism unit;
the complex judgment camera corresponds to the fourth reflecting prism unit and is used for receiving the light rays reflected by the fourth reflecting prism unit.
2. The photographing device of claim 1, wherein said secondary camera is disposed in a first direction of said primary camera; the complex judgment camera is arranged in the second direction of the main camera.
3. The imaging apparatus of claim 2, wherein said first direction is perpendicular to said second direction.
4. The photographing device of claim 1, wherein said second reflecting prism unit comprises:
the first, second and third reflecting sub-prisms.
5. The photographing device of claim 4, wherein said first reflecting sub-prism, said second reflecting sub-prism and said third reflecting sub-prism are parallel to each other.
6. The photographing device of claim 4, wherein the first, second and third sub-prisms have an included angle of 45 degrees with respect to a horizontal plane.
7. The photographing device of claim 4, wherein distances among the first, second and third reflecting sub-prisms are equal.
8. The photographing device of claim 1, wherein the first reflecting prism unit and the third reflecting prism unit are perpendicular to each other.
9. The photographing device of claim 1, wherein said first reflecting prism unit is disposed below said third reflecting prism unit.
10. The photographing device of claim 1, wherein the angle between the fourth reflecting prism unit and the horizontal plane is 45 degrees.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223393447.9U CN219065873U (en) | 2022-12-15 | 2022-12-15 | Shooting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223393447.9U CN219065873U (en) | 2022-12-15 | 2022-12-15 | Shooting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219065873U true CN219065873U (en) | 2023-05-23 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202223393447.9U Active CN219065873U (en) | 2022-12-15 | 2022-12-15 | Shooting device |
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| CN (1) | CN219065873U (en) |
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- 2022-12-15 CN CN202223393447.9U patent/CN219065873U/en active Active
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