JP2521736B2 - Microscope adjustment inspection device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention measures relative focusing shift of an image, visual field shift at the time of focusing, and the like by using an objective lens on the side of two eyepieces of a binocular microscope. The present invention relates to a microscope adjusting and inspecting device.

[Prior Art] As a peculiar quality characteristic required for a microscope, for example, a binocular microscope, there is no relative focus shift of an image due to the two objective lenses on the eyepiece side or visual field shift at the time of focus. .

As a device for simultaneously measuring the focus shift and the visual field shift, a system in which a chart image is magnified by an objective lens with a lens included in a measurement system and the magnified image is observed and measured has been conventionally used. That is, for example, observing the pinhole image with the eyepiece lens, moving the eyepiece lens or the pinhole so as to obtain the best focus, and measuring the difference between the left and right positions to obtain the left and right focusing deviation amount. Alternatively, the amount of visual field shift is measured by the difference between the positions of the pinhole images in the left and right visual fields.

Further, the above-mentioned measurement is necessary not only for measuring the focus shift and the field shift between the image planes of the left and right eyepieces of the binocular microscope, but also for the relationship between the eyepiece side image plane and the camera side image plane during photography. Is.

[Problems to be Solved by the Invention] Generally, the depth on the focal side of an image formed by an optical system is determined by the wavelength of light and the numerical aperture on the image side, and this depth is the focus detection accuracy. However, in a microscope in which an objective lens, a trinocular tube, and the like are modularized, each unit is required to have a precision higher than the above general depth in order to make the units compatible with each other. Therefore, in the prior art in which each unit is used as a single item for focus measurement and inspection, the focus is simply detected by visual inspection, no matter how the magnification is increased, the required accuracy cannot be satisfied.

The present invention has been made in view of the above-mentioned problems of the prior art, and provides a microscope adjustment inspection apparatus capable of measuring relative or absolute focusing deviation, visual field deviation, and the like in a microscope with high accuracy. The purpose is to

[Means and Actions for Solving Problems] The present invention is directed to a projection lens for projecting an image formed by an objective lens of a subject, and a pupil plane splitting prism arranged near the exit pupil of the projection lens. And a light receiving element arranged at the reference image plane position of the projection lens to detect coordinate positions of a plurality of images, and a focus shift amount or an amount proportional to this from a position signal in the light receiving element. It is possible to measure the in-focus deviation due to the objective lens of the subject with high accuracy by configuring the above-mentioned calculation unit and the display unit for displaying the calculation result of the calculation unit.

[Example] Hereinafter, an example of the present invention will be described in detail with reference to the drawings.

(First Embodiment) FIG. 1A is a schematic configuration diagram of a microscope 2 to which a microscope adjustment inspection device (hereinafter, simply referred to as an adjustment inspection device) 1 (a part of which is shown) according to the present invention is attached. Device 3
The microscope 2 which built in is shown.

Reference numeral 4 in the drawing denotes a pinhole (object surface), and the pinhole 4 is irradiated with light through the light source 5, the auxiliary lens 6, the mirror 7, and the condenser lens 8. 4 is provided at the reference position on the optical axis. The image of the pinhole 4 is formed (focused) on a first image point 10 via an objective lens (lens to be measured or lens to be adjusted) 9. 10 is set so that an image is formed at a constant distance (position) 1 from the body attachment part 12 of the eyepiece lens in the eyepiece tube 11.

The adjustment inspection apparatus 1 of the present embodiment is attached to the eyepiece tube 11 instead of the eyepiece to perform the focus measurement and inspection of the objective lens 9. Hereinafter, the configuration of the adjustment inspection apparatus 1 and the microscope 2 will be described. The configuration of the optical system related to the optical system of FIG. 1 will be described with reference to FIGS. 1b and 2a, b, c.

The adjustment inspection device 1 is composed of a device main body 20, adjustment jigs 21 and 22 for reference adjustment of the device main body 20, and a controller 23. The adjustment jigs 21 and 22 are It is removed during measurement work.

Before describing each of the components 20, 21, 22, and 23, the configuration of the optical system in the adjustment inspection device 1 will be described with reference to FIG. In addition, a pinhole 4 on the side of the microscope (inspection body) 2, an objective lens (lens to be inspected or lens to be adjusted) 9, first
Since the image point 10 of is described in FIG. 1a,
Description is omitted. As shown in the figure, the first image point 10 is formed as a second image point 28 on the screen 27 via the projection lens 25 and the pupil plane dividing prism 26 of the apparatus main body 20.

The pupil plane splitting prism 26 is arranged near the exit pupil of the projection lens 25, and as shown in FIG. 2C, two wedge prisms 26a and 26b having the same wedge angle are closely attached to each other on the side surface. It was done. It is set so that the upper and lower light rays in FIG. 2a are split at this contact surface, and the upper light flux is a convergent light directed toward the front side of the drawing sheet due to the effect of the wedge, and the following light flux is the same. Is set so that the light converges toward the back side of the paper. Any of these convergent lights is set to form an image of the pinhole 4 on the screen 27. In addition, what is indicated by α is a wedge angle (wedge angle) of each wedge prism 26a, 26b. FIG. 2b shows the position and size of each image on the screen 27. The image by the upper ray bundle is shown by the reference numeral 28a, and the image by the lower ray bundle is shown by the reference numeral 28b.

Next, the configuration of the adjustment inspection device 1 in which the adjustment jig parts 21 and 22 are detachably mounted will be described mainly using FIG.

The device main body 20 includes a frame body 30 for accommodating the projection lens 25,
A holder 31 for holding the pupil plane dividing prism 26, a holding frame 32 for holding the holder 31 movably in a direction perpendicular to the optical axis, a micrometer head 33 for measuring the amount of movement of the holder 31, a device body frame 34, a device body frame A connection ring 35 between the 34 and the holding frame 32 and a CCD camera (not limited to a CCD camera, but may be a camera using an image pickup tube) 37 having a light receiving surface 36, etc. An adjusting jig portion 22 composed of a pupil projection lens 38 and a holder 39 thereof is detachably mounted inside. Reference numeral 40 denotes a lid for fixing the holder 39, and the pupil projection lens 38 is for observing the exit pupil plane of the projection lens 25, that is, the split surface of the pupil plane splitting prism 26. The configuration is such that it can be adjusted in the optical axis direction via.

The holder 31 of the pupil plane dividing prism 26 has a hole 41 of a holding frame 32.
The micrometer head 33 is constantly urged via a coil spring 43 which is mounted on a slidable guide pin 42. Reference numeral 44 indicates a holder of the micrometer head 33, and reference numeral 45 indicates a holding ring for fixing the projection lens 25 portion. The holding frame 32 has a projection lens.
A frame 30 accommodating 25 parts is fixed via fixing screws 46. Reference numeral 47 indicates a reference contact surface 47 that contacts the body-attached portion (reference surface) 12 (see FIG. 1a) on the side of the microscope 2 that is the test object.
Helicoid screw 48 with respect to frame 30
The reference contact surface 47a is precisely moved in the optical axis direction by rotating the feeding ring 47. Reference numeral 49 indicates a turning ring for rotating the feeding ring 47, and reference numeral 50 indicates a microscope 2 having a contact surface at the end and a long groove in the axial direction at the opening end thereof.
It is a pin for determining the rotation direction with respect to. The connection ring 35 that connects the device body frame 34 and the holding frame 32 is a CCD camera 37.
The azimuth is set to a mechanism capable of adjusting and fixing the azimuth at a right angle or parallel to the split surface of the pupil plane splitting prism 26.

The adjustment jig portions 21 and 22 are jigs for reference adjustment of the apparatus main body portion 20 as described above, are used only during adjustment, and are removed during measurement. Although the adjusting jig portion 22 has been described above, the adjusting jig portion 21 is composed of a pinhole 51 for adjustment and a pinhole holding frame 52 for holding the pinhole 51. The frame 52 is configured to be screwed to the frame body 30 via the screw portion 53.

The control unit 23 includes an image processing unit 60, a calculation unit 61, a display unit 62, and a video output monitor 63. Image processing unit 60
Is for detecting the coordinate points of the respective barycentric points of the two image points from the video signal from the CCD camera 37, and the calculation section 61 combines the coordinate points detected by the image processing section 60. This is for calculating the amount corresponding to the amount of defocus and the amount corresponding to the amount of field deviation (the amount of deviation from the reference value). or,
The display unit 62 displays the calculation result and the intensity difference between the two image points.

 Next, the operation based on the above configuration will be described.

First, the operation of adjusting the adjustment jig portions 21 and 22 will be described. First, attach the pupil projection lens 38 and the holder 39 to the main frame 34
Mounted on the camera, and hold the pupil projection lens 38 while observing the dividing line of the pupil plane dividing prism 26 on the video output monitor 63.
Adjust in the direction of the optical axis with respect to 39, and bring out the focus. Next, while rotating the body frame 34 with respect to the coupling ring 35, the pupil plane division prism 26 is fixed so that the azimuth of the division line is perpendicular to the X direction of the CCD camera 37 (vertical direction in FIG. 1b). To do. The setting is made so that the two coordinate axes do not differ from each other, and thereby an accurate measurement value can be obtained.

Next, the pupil projection lens 38 is removed, and the pinhole 51 is correctly attached, that is, the reference contact surface 47a of the feeding ring 47.
The pinhole holding frame 52 mounted in such a manner that the distance between the surface in contact with the pinhole 51 surface and the surface of the pinhole 51 exactly matches the reference value is arranged so as to hit the reference contact surface 47a of the feeding ring 47, and the display portion 62 is displayed. While observing the value of the amount δ corresponding to the focus shift amount, the feeding ring 47 is operated so that this value becomes zero. Then, in this state, the turning ring 49 having a scale is fixed to the feeding ring 47 with a fixing screw so that the 0 position of the scale matches the index line of the holding frame 32. With the above operation, the adjustment of the origin position with respect to the focus shift is completed.

When the adjustment is completed, the adjusting jig portion 21 is removed, another pinhole 4 (see 1a) is arranged at the center of the reference sample surface, and the frame body 30 is brought into contact with the eyepiece mounting portion of the microscope 2 as the subject. Insert until face 47a abuts. The adjusted inspection device 1 thus adjusted is set, and the measurement is started. At the time of measurement, while observing the value of δ on the display unit 62, the rotating ring 49 is operated so that the value of δ becomes 0, and the scale of the rotating ring 49 when it becomes 0 is read. This makes it possible to accurately measure the focus shift amount with respect to the reference image point. By measuring this for the left and right and obtaining the difference between them, it is possible to measure the relative left and right focusing deviation amount. Further, it is needless to say that the left and right individual absolute defocus amounts with respect to the reference image point) can also be measured in the above measurement process.

The focus shift is calculated and displayed by the control unit 23 and the image point of the pinhole 4 (see FIG. 1) formed on the light receiving surface 36 of the CCD camera 37. The theory of calculating the left and right focusing shift amount and the visual field shift amount at 23 will be described with reference to FIGS. 2A, 2B, 3C, and 3A, 3B. In the description, the x direction means the vertical direction in FIG. 2b, the y direction means the same horizontal direction, and the z direction means the optical axis direction in FIG. 2a.

As shown in the figure, the relative position of the two image points 28a and 28b is 0 (that is, the same position) in the x direction,
The y direction is mainly determined by the wedge angle α of the wedge prisms 26a and 26b, and the interval between these two points 28a and 28b is set to l _{0 as} shown in FIG. 2b.

The sizes of the image points 28a and 28b are exactly the same when considering the ideal optical system, and they are the size d in the x direction.
It becomes an elliptical shape having a size dy _{0 in} the x ₀ and y directions.

Where n is the refractive index of the wedge prisms 26a and 26b, λ is the wavelength of light, f _w is the focal length of the lens 9 to be tested, NA _w is the NA of the lens 9 to be tested, β _w is the magnification of the lens 9 to be tested, f ₀ projection lens 2
The focal length of 5, EXP ₀ is the position of the exit pupil of the projection lens 25, β
₀ is the magnification of the projection lens 25, α is the wedge prism 26a, 26
Assuming that the wedge angle (wedge angle) of b is l ₀ = 2 (n−1) (β ₀ f ₀ + f ₀ −EXP ₀ ) sin α (1) Becomes

Next, consider a case where the first image point 10 changes forward (on the right side in the figure) on the optical axis in this state. 3A and 3B are diagrams showing this state. In this case, the second image point 28 is the screen
Since it changes to the front of 27 (right side in the figure), the center of gravity of the upper ray bundle is on the upper side and the center of gravity of the lower ray bundle is on the lower side, so the image point position on the screen 27 (in this case, the center of gravity of the ray bundle is The position) changes in the opposite direction in the x direction by an equal distance with respect to the dividing line, as shown in FIG. 3b. Now, x of these 2 points 28a, 28b
Let δ be the difference between the coordinates of the directions. Also, as in FIG. 2b, y
The difference between the coordinates of the two points 28a, 28b in the direction is l. Even in this case, the size and shape of the two image points 28a and 28b are exactly the same, and the size in the x direction is dx, the size in the y direction is dy, and Δ _z is the point 10 'from point 10. And the distance.

l = l ₀ (5) Becomes

Here, when the screen 27 is placed within the depth of focus of the second image point 28, the size and shape of the image point on the screen 27 can be ignored on the screen 27 because Δ can be ignored. It is almost the same as when the points match. Therefore, if Δ _Z is in a minute range, δ may be changed depending on the difference between the image formation point and the screen 27.
Only will change. Thus, by detecting the [delta], it is possible to detect the shift amount delta _Z in the z direction of the first image point 10. Further, the center of the visual field can be obtained as an average coordinate of the coordinates of these two image points 28a and 28b,
This is compared with the center coordinates of the reference visual field and the difference Δ _X between the respective coordinates
And Δ _Y are obtained, this Δ _X Δ _Y becomes the visual field deviation from the reference visual field.

If the left and right Δx, Δy, and Δz are obtained by the above method and the left and right differences are calculated, the left and right in-focus deviation amounts and the visual field deviation amounts can be obtained.

On the basis of the above theory, the microscope 2 (Fig.
It is possible to measure the left and right focusing deviation amount and the visual field deviation amount (see the reference) with high accuracy.

The moving mechanism of the pupil plane dividing prism 26 shown in FIG. 1b is used to align the dividing line with the center of the pupil when the pupil on the pupil plane is eccentric with respect to its axis. is there.
This is because when the size of the pupil is small, even a slight deviation of the pupil significantly increases the intensity difference between the two image points on the light receiving surface 36 of the CCD camera 37, which affects the measurement accuracy. In this embodiment, the micrometer head 33 is set so that the pupil position can be read, but it is not always necessary to read it. Also in the manual driving, it is possible to servo-control the pupil plane splitting prism 26 so that the intensity signals of the image points are always the same.

Generally, in the case of visual focus detection, the depth of focus is determined by the value of the image side NA, and focus detection within this depth of focus is difficult, but according to this embodiment, the detection resolution of about 10% of the depth of focus is Can be easily obtained. As for the left and right relative out-of-focus amounts, the external conditions such as the illumination condition and the sample shape condition act in the same manner on both the left and right sides, and therefore, a value similar to the resolution can be obtained in terms of accuracy. Here, what is a little problem is the absolute defocus amount. In general, the pupil division method has the maximum sensitivity with respect to a specific azimuth defined by the division plane, and the sensitivity in the direction perpendicular to this is zero. Therefore, the measured value will be different from that of visual inspection for the object (inspection object) in which astigmatism has occurred due to lens decentering etc. (In the case of visual observation, the same sensitivity is applied in all directions. Average detection is possible). For this reason, the accuracy of the measured value of the absolute defocus amount may deteriorate. In this embodiment, in order to eliminate this influence, the pin 50 is used to accurately determine two directions at right angles. The in-focus deviation amount is measured separately in these two directions, and the two values are averaged. To improve the accuracy.

It should be noted that the side surface forming the dividing line of the pupil plane dividing pre-bum 26 has a light difference loss due to scattering when it is a polished surface,
It is advantageous. Also, the absolute visual field deviation amount can be detected as the deviation amount from the reference coordinate point (visual field center coordinate point) at the average coordinate point of the two image point coordinates, as described above, and the right and left relative visual field deviation amount is It can be obtained as the difference between these individual absolute visual field shift amounts.

As for the adjustment inspection for each unit, the adjustment inspection for each unit may be performed by setting the master unit.

(Second Embodiment) FIG. 4 is a block diagram showing a second embodiment of the present invention. In the figure, 20 indicates the apparatus main body,
This is the one in which the feeding mechanism (mechanical parts 47 and 49) is removed from FIG. 1b. This method is a method of calculating the focus shift amount from the δ value by utilizing the fact that δ and the focus shift amount are in a proportional relationship without directly measuring the focus point. Is an effective means when is known. As for the origin adjustment, since it is sufficient to calibrate using the detected value when the adjusting jig portion 21 is used as in the first embodiment, it is unnecessary. or,
Reference numeral 70 denotes the input unit of the detection side NA. According to this method, it is necessary to input and set the NA, but in the case of the same type of test object, it is only necessary to set once, and the measurement value can be obtained only by inserting the apparatus main body 20 into the eyepiece mounting portion. So
There is an advantage that the operability is very good.

(Third Embodiment) FIG. 5 is a block diagram showing a third embodiment. In the figure, reference numeral 80 indicates a holder for arranging the apparatus main body sections 20 in parallel, and reference numeral 81 indicates two CCD cameras 37.
The image processing section for detecting the coordinate points of the respective barycentric points (hence the total of 4 points) of the two point images from the video signals from the reference numeral 82, the reference numeral 82 indicates the amount of defocus from each of the two coordinate points. And the amount corresponding to the amount of visual field deviation (the amount of deviation from the reference value)
And a calculation unit for calculating the difference between the two, that is, the relative focus shift amount and the visual field shift amount, and 83 indicates the calculation result, that is, the left and right absolute focus shift amounts and the absolute focus shift amounts. It is a display unit for displaying 6 amounts of the visual field shift amount, the left and right relative focus shift amount and the relative visual field shift amount, and a total of 8 amounts of the intensity difference between the two image points on each of the left and right sides.

Incidentally, the intensity of each dotted line is preferably in a range determined in order to prevent deterioration of detection accuracy, and although not shown in the present embodiment, several kinds of ND filters are arranged on the illumination system side, and the detected light amount is A mechanism for switching to fall within the range is provided for adjustment, and if it still does not fall within the range, a warning sign is displayed on the display unit 83. The reason for adjusting the light quantity with the ND filter instead of adjusting the light quantity with the light source is to avoid changes in the spectral characteristics of the illumination light, and depending on the required accuracy, the ND filter is unnecessary. In addition, in order to measure the absolute defocus amount with high accuracy,
It is effective to dispose a filter for correcting the difference with the spectral sensitivity of the CCD camera 37 on the illumination device side. A feature of this embodiment is that the device main body 20 can be mounted on the two eyepiece mounting parts and the left and right sides can be simultaneously measured. Therefore, the relative focus shift amount and the relative visual field shift amount can be calculated without calculation. There is an advantage that can be measured.

(Fourth Embodiment) Although not shown, this embodiment is configured by replacing the CCD camera 37 with two optical position detecting elements and an amplifier in the configuration of the first embodiment. The advantage of this embodiment is that
That is, the weight can be reduced as compared with the other embodiments. this is,
This is particularly effective when it is required to reduce the weight in view of the strength of the eyepiece mounting portion of the test object.

In the first to fourth examples, the detection of the difference between the left and right is described, but the difference between the objective image on the eyepiece side and the objective image on the dry plate surface at the time of taking a photograph is also the same. Of course, it is possible to measure the focus shift amount and the visual field shift amount at the same time. Also, by the individual combination of each embodiment,
Of course, the same effect can be obtained according to the purpose.

Further, in each embodiment, the description has been centered on the measurement inspection, but for the adjustment, the device main body 20 is arranged in the reference state,
When the focus is adjusted, δ is adjusted to 0, and when the visual field is adjusted, the lenses on the side to be inspected may be moved so that the average coordinate points of the two image points coincide with the center of the visual field.

(Fifth Embodiment) This embodiment is constructed by using a pupil plane splitting prism 89 shown in FIG. 6 in place of the pupil plane splitting prism 26 used in the apparatus main body 20 of FIG. 1B. It is a thing. In the first to fourth examples, all the prisms are for two divisions, but in the present embodiment, as shown in the figure, a prism for four divisions is used to perform focus detection in consideration of astigmatism of the object to be inspected. There is an advantage that it can be implemented without rotating the device main body 20 or the prism in the device main body 20. That is, when the object to be detected has no astigmatism and only the in-focus shift, the four image points 90 as shown in FIG.
Is displayed on the monitor 63. And this position is
It is a position that is line-symmetric with respect to the two axes that are inclined by 45 ° with respect to the coordinate axes. When the feeding ring 47 is actuated in this state, the angle θ ₁ shown in the figure changes, and at the time of focusing, as shown in FIG. 8, the four points 90 are co-located on both coordinate axes. next,
Considering the position of the image point at the time of focusing when the object to be inspected has astigmatism, in this case, the feeding ring 47 may be operated so that θ ₁ shown in FIG. 7 becomes 90 °. That is, the focal point is when the state shown in FIG. 9 is reached. In FIG. 9, the maximum value of the angle α ₀ (or y ₁ / x ₁ ) when the device body 20 is rotated is the amount representing the magnitude of astigmatism. Note that x ₁ ~
x ₄ , y _{1 to} y ₄ represent the coordinates of each point 90.

(Sixth Embodiment) This embodiment is based on the pupil plane splitting prism 26 of the first embodiment.
Instead of the pupil splitting prisms 95, 96 shown in FIG. 10 or FIG.
It is configured by using. This pupil division prism
95 and 96 are different in the arrangement of the four wedge prisms from the prism 89 used in the previous embodiment. First, when the object to be inspected has no astigmatism and only the focus shift, as shown in FIG. 12, four image points 90 are projected on the monitor 63 (in this case, θ ₃ = θ _2). ). At that position, the angle formed by the two straight lines connecting the two image points 90 facing each other is 90 degrees, as shown in the figure, and this angle is independent of the focus shift amount. When the feeding ring 47 is operated in this state, the angle θ ₂ shown in the figure changes, and when focusing, as shown in FIG. 8 like the previous embodiment, the four points are located on both coordinate axes. .
Next, considering the position of the image point at the time of focusing when the object has astigmatism, in this case, pay attention to θ ₂ and θ ₃ shown in FIG. Is θ ₃ ≠ θ ₂ ) As shown in FIG. 13, it suffices to operate the feeding ring 47 so that the four image points 90 are line-symmetric with respect to the two axes inclined by 45 ° with respect to the coordinate axes. It becomes the focal point when it becomes. In FIG. 13, the angle α ₀ − when the device body 20 is rotated
The maximum value of the absolute value of 90 ° (or X ₁ ² + Y ₁ ² ) is the amount representing the magnitude of astigmatism.

In the fifth and sixth embodiments described above, the average focus point in two orthogonal directions can be detected without rotating the apparatus main body 20, so that the degree of coincidence with the visual focus point is high. is there. Further, the fifth embodiment has an advantage that the detection precision of the in-focus point is particularly high, and the sixth embodiment has an advantage that the detection precision of the astigmatism becomes particularly high.

[Effects of the Invention] As described above, according to the present invention, relative focusing shift and visual field shift of images by the two objective lenses of the binocular microscope, or images by the objective lenses of the eyepiece side, and photography. The relative out-of-focus shift and the field-of-view shift on the camera side at this time and the above-mentioned independent absolute out-of-focus and field-of-view shift can be measured with high accuracy.

[Brief description of drawings]

FIGS. 1 a and b are explanatory views showing a first embodiment of the present invention, FIGS. 2 a, b and c, and FIGS. 3 a and b are explanatory views showing an operating state of the first embodiment, and FIG. 5 is an explanatory view showing a second embodiment of the present invention, FIG. 5 is an explanatory view showing a third embodiment of the present invention, and FIG. 6, FIG. 7, FIG. 8 and FIG. It is explanatory drawing which shows 5th Example of invention. FIG. 10, FIG. 11, FIG. 12 and FIG. 13 are explanatory views showing the sixth embodiment of the present invention. 2 …… Microscope (subject) 4 …… Pinhole 9 …… Objective lens 25 …… Projection lens 26 …… Pupil plane splitting prism 27 …… Screen 36 …… Light receiving surface 61 …… Computing section 62 …… Display section

Claims (2)

(57) [Claims] 1. An image of a subject obtained by an objective lens is
A projection lens for projecting as a next image, and four wedge prisms arranged near the exit pupil of the projection lens and having the same wedge angle so that the wedge directions are all different and one top of each wedge prism. To detect the coordinate positions of the four divided images of the subject image obtained by the pupil plane dividing prism and the projection lens, which are configured to be joined to each other at one point. Of the light receiving element, an arithmetic unit for calculating the focusing shift amount from the position signals of the coordinates of the four divided images obtained by the light receiving element, and a display unit for displaying the arithmetic result by the arithmetic unit. Microscope adjustment and inspection device configured. 2. The pupil plane splitting prism has an automatic adjustment mechanism for manually adjusting the split plane in a plane perpendicular to the optical axis or by servo control by an image point intensity difference signal. The microscope adjustment inspection device according to claim 1.