JP2007183225A - Light radiation device, surface shape inspection system, and surface shape inspection method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a technology capable of detecting all curved shapes of an inspected surface by one inspection by reflecting a mirror image of an image object at an arbitrary position on the inspected surface caught by a light receiving means, in the surface shape inspection using a complicated curved surfaces such as a concave curved surface or convex curved surface such as a vehicle body surface as the inspected surface. <P>SOLUTION: A light beam is radiated to the inspected surface F from the image object 21 having a plurality of substantially linear light beam radiation sections 21a, 21a, etc arranged in substantially parallel so as to form a circular arc surrounding an inspection surface radially about the inspected surface F as a substantially center, thereby forming a bright section and dark section on the inspected surface F. The shape of the inspected surface F is specified based on the appearing manner, the shape or the like of the bright section and dark section on the inspected surface F, and the goodness/badness of the quality is determined. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a technique for inspecting the quality of an inspected surface including a concave curved surface or a convex curved surface, such as a surface of a vehicle body.

Conventionally, when inspecting the quality of the surface of a vehicle body, etc., the inspector observes the shadow appearing on the surface to be inspected by illuminating the surface to be inspected based on the sensuality such as visual sense and tactile sense. A method for determining whether the product is good or bad has been adopted.
However, in the shadows that appear on the surface to be inspected, there is a difference in brightness due to the distance from the surface to be inspected to the light source and the gloss and color of the surface to be inspected. There was a problem that the judgment criteria varied depending on the conditions and individual inspectors.

Therefore, by utilizing the fact that the vehicle body is a smooth and highly reflective surface and has a mirror surface property, in Patent Document 1, a plurality of bright lines (hereinafter referred to as “highlight lines”) are formed on the surface to be inspected. A technique for inspecting the quality of the surface to be inspected by detecting distortion and waviness of the highlight line is proposed.
This technology includes a device in which a plurality of light sources that irradiate a surface to be inspected with a long slit beam are arranged in parallel, a device that captures a highlight line reflected on the surface to be inspected, and a device that analyzes the captured image The quality of the surface to be inspected is determined.

However, in the technique described in Patent Document 1, objects that form the highlight line on the surface to be inspected are arranged on substantially the same plane within a limited range.
For example, as shown in FIG. 12, the light sources 61, 61,... Arranged on substantially the same plane in a limited range are projected on the inspection surface F including curved surfaces such as convex curved surfaces and concave curved surfaces, When this is received by the light receiving means 62 and inspected, as shown in FIG. 13, the size of the highlight line appearing on the surface to be inspected as seen from the light receiving means is large or no highlight line is reflected. A part may occur.

Since the convex curved surface included in the surface F to be inspected has the property of a convex mirror, all the images obtained are erect virtual images, and since it has properties similar to a magnifying glass, highlight lines with a wide width and a large interval are formed. appear.
On the other hand, because the concave curved surface has the properties of a concave mirror, an object outside the focal point becomes an inverted real image, an inner object becomes an erect virtual image, and it has properties similar to a wide-angle mirror, so the width is narrow and spaced. Narrow highlight line is visible.

  As described above, when the surface to be inspected F includes a spherical mirror having a different property from that of the plane mirror, an image of the light source is formed in a range that cannot be captured by the light receiving means, and the object captured by the light receiving means is captured. There may be a portion where the highlight line is not reflected on the inspection surface.

In such a case, it is necessary to perform an inspection while moving an object or a light receiving unit that forms an image on the inspection surface for each inspection region of the inspection surface, and as a result, an oversight of a quality defect may occur. There is a concern that a detection failure may occur.
JP-A-6-194148

  Therefore, the present invention provides a mirror image of an image object at an arbitrary position of a surface to be inspected captured by a light receiving means in a surface shape inspection in which a surface to be inspected is a concave curved surface such as a vehicle body surface or a complex curved surface such as a convex curved surface. We propose a technique that can identify the curved surface shape of the surface to be inspected in one inspection.

  The problem to be solved by the present invention is as described above. Next, means for solving the problem will be described.

  That is, according to claim 1, in the light irradiation apparatus for irradiating the surface to be inspected with a light beam from the image object to form a bright portion and a dark portion on the surface to be inspected, the image object is a single or It has a light beam irradiation part having a plurality of regular shapes, and is formed so as to surround the surface to be inspected.

  According to a second aspect of the present invention, a plurality of light irradiation sections included in the image object are substantially linear, and are formed radially with the surface to be inspected as a center and forming an arc surrounding the surface to be inspected. They are arranged substantially in parallel.

  In Claim 3, the said light irradiation part is comprised by the light-emitting body, and the said image target object is the plate body formed so that the said to-be-inspected surface may be surrounded, and the said light beam irradiation fixed to this plate body Part.

  In Claim 4, the light irradiation apparatus as described in any one of Claims 1-3, the imaging device which images a to-be-inspected surface, and the image of the to-be-inspected surface imaged by the said imaging device is imaged Surface shape inspection comprising: an image processing device to be converted; and a determination device that determines the quality of the surface to be inspected based on bright and dark portions that appear on the surface to be inspected imaged by the image processing device System.

  According to a fifth aspect of the present invention, the determination device compares a bright part and a dark part appearing on the imaged surface to be inspected with a bright part and a dark part representing an ideal shape of a preset reference inspected surface. Thus, the quality of the imaged surface to be inspected is judged.

  According to a sixth aspect of the present invention, a light beam is irradiated on a surface to be inspected from an image object having a light irradiation portion having a shape having one or a plurality of regularities and formed so as to surround the surface to be inspected. The surface shape inspection method inspects the shape of the surface to be inspected based on the bright part and the dark part appearing on the surface to be inspected.

  According to a seventh aspect of the present invention, a plurality of light irradiation units included in the image object are substantially linear, are radially formed with the surface to be inspected substantially in the center, and form an arc surrounding the surface to be inspected. They are arranged substantially in parallel.

  In Claim 8, the said light irradiation part is comprised by the light-emitting body, and the said image target object is the plate body formed so that the said to-be-inspected surface might be surrounded, and the said light beam irradiation fixed to this plate body Part.

  In Claim 9, the to-be-inspected surface where the said image target object was imaged is imaged, the bright part and the dark part which appear on the imaged to-be-inspected surface are imaged, The bright part and the dark part which appear on the imaged to-be-inspected surface, The quality of the imaged surface to be inspected is determined by comparing a bright portion and a dark portion representing an ideal shape of the preset reference surface to be inspected.

  As effects of the present invention, the following effects can be obtained.

  Since the image object is reflected at an arbitrary position on the inspection surface captured by the light receiving means, it is possible to confirm a bright portion and a dark portion at an arbitrary position on the inspection surface. Therefore, it is not necessary to move the light receiving means and the image object for each measurement region of the surface to be inspected.

Next, embodiments of the invention will be described.
FIG. 1 is a minimum configuration diagram of a surface shape inspection system according to an embodiment of the present invention, FIG. 2 is a diagram for explaining an example of the relationship between an image object, a surface to be inspected, and light receiving means, and FIG. FIG. 4 is a diagram for explaining an example of the relationship between the surface to be inspected and the light receiving means, and FIG. 4 is a diagram showing highlight lines appearing on the surface to be inspected.
FIG. 12 is a diagram for explaining the relationship among the conventional image object, the surface to be inspected, and the light receiving means, and FIG. 13 is a diagram showing highlight lines appearing on the surface to be inspected by the conventional means.

The surface shape inspection system according to the embodiment of the present invention is for inspecting the shape of a smooth and highly reflective surface such as a vehicle body surface.
As shown in FIG. 1, the surface shape inspection system 10 includes an object reflected on the inspection surface F (hereinafter referred to as “image object 21”) and an image of the image object 21 reflected on the inspection surface F. And a light receiving means 31 for capturing the light.

  Since the surface F to be inspected is a smooth and highly reflective surface and has a mirror surface property, the light beam emitted from the image object 21 is reflected by the surface F to be inspected, and the light receiving means 31 reflects this light. By receiving light, an image of the image object 21 reflected on the inspection surface F is captured.

The image object 21 includes a light beam irradiation portion 21a having a shape having at least regularity.
The “irregular shape” of the light beam irradiation unit 21a is linear, and it is desirable that a plurality of the light beam irradiation units 21a be arranged substantially in parallel with a predetermined interval.

When the light irradiation part 21a of the image object 21 is reflected on the inspection surface F, a bright part and a dark part appear on the inspection surface F (the part where the light irradiation part 21a is reflected becomes a bright part, otherwise Is the dark part). Hereinafter, the bright part reflected on the inspection surface F captured by the light receiving means 31 is referred to as “highlight line”.
This highlight line flow (position, curvature, etc.), highlight line spacing, highlight line width change, highlight line outline change, etc. Based on this, the surface shape of the surface F to be inspected can be specified, surface defects such as distortion generated on the surface F to be inspected can be detected, and the shape of the surface F to be inspected can be inspected. Further, by comparing the flow of the highlight line with a predetermined ideal flow of the highlight line, it is possible to detect whether or not the shape of the surface F to be inspected is as designed.

As described above, if the light beam irradiation portion 21a of the image object 21 is substantially linear, the surface to be inspected is caused by the shape of the bright portion appearing on the surface F to be inspected, the distortion of the boundary line between the bright portion and the dark portion, and the like. The curved surface shape such as the unevenness of F can be easily specified.
However, the shape of the light irradiation part 21a of the image object 21 may be a regular shape, and even if it is a wavy line or a chain line, the surface F to be inspected is based on the change in regularity. Can be specified.

  Further, as described above, if the plurality of light irradiation units 21a are arranged substantially in parallel with a predetermined interval, a bright and dark striped pattern is formed on the surface F to be inspected by the light receiving means 31, and the surface to be inspected more. The shape of F can be clearly understood. However, the light irradiation part 21a of the image object 21 can also be single.

For example, the image object 21 forms an arc as shown in FIG. 2 and surrounds the surface F to be inspected, or forms a plurality of planes as shown in FIG. The image object 21 is provided so as to surround the inspection surface F.
Depending on the shape of the inspection surface F, the distance from the inspection surface F to the image object 21 becomes substantially uniform when the image object 21 forms an arc (FIG. 2), and the brightness of the highlight line is increased. It is desirable because it is difficult to change.

As described above, since the image object 21 is provided so as to surround the inspection surface F, the image object 21 is always reflected at an arbitrary position of the inspection surface F captured by the light receiving means 31, and the inspection surface. A highlight line can be confirmed at an arbitrary position of F.
That is, for example, as shown in FIG. 4, it is possible to eliminate a portion where a highlight line is not reflected on the inspection surface F captured by the light receiving means 31.
Therefore, the entire surface to be inspected F can be inspected at once, and the surface shape can be specified, and it is not necessary to move the light receiving means or the image object for each measurement area of the surface to be inspected, thereby preventing inspection defects due to oversight. can do.

The image object 21 includes a light emitting unit and a non-light emitting unit corresponding to the light irradiation unit 21a, and the light emitting unit itself emits light to irradiate the surface F to be inspected. The surface F to be inspected is provided with a corresponding reflecting portion and a non-reflecting portion to irradiate the inspection surface F with reflected light, or with a light shielding portion and a light transmitting portion corresponding to the light beam irradiation portion 21a. For example, it can be irradiated with transmitted light.
However, it is desirable that the light beam irradiation part 21a of the image object 21 is a light emitter that emits light by itself and irradiates the inspection surface F with light. Thus, by using the light irradiation part 21a of the image object 21 as a light emitter, the bright and dark parts where the image object 21 appears on the inspection surface F regardless of the color of the inspection surface F. The difference becomes clear and the highlight line can be captured more clearly.

  Next, an example of the surface shape inspection system 10 will be described.

Next, the surface shape inspection system 10A according to the first embodiment of the present invention will be described.
FIG. 5 is a configuration diagram of the surface shape inspection system according to the first embodiment of the present invention, FIG. 6 is a block diagram illustrating the configuration of the surface shape inspection system, FIG. 7 is a diagram illustrating a light irradiation device, and FIG. FIG. 9 is a comparison diagram of an image and a virtual image.

  As shown in FIGS. 5 and 6, the surface shape inspection system 10 </ b> A is an image of a light irradiation device 20 including an image object 21, an imaging device 30 as a light receiving unit 31, and an image captured by the imaging device 30. The image processing apparatus 40 that performs the conversion processing, and the determination apparatus 50 that determines the quality of the surface F to be inspected are configured.

  However, the light irradiation device 20 is provided as the surface shape inspection system 10, and an inspector as the light receiving means 31 performs inspection by visually recognizing the highlight line formed by the image object 21 reflected on the surface F to be inspected. The quality of the surface F to be inspected can also be determined.

The light irradiation device 20 includes an image object 21, and is a means for irradiating the surface F to be inspected with a light beam emitted from the image object 21 and expressing a highlight line on the surface F to be inspected. is there.
As shown also in FIG. 7, the light irradiation device 20 includes a curved plate 24 that is a plate body having a substantially arc shape so as to surround the surface F to be inspected, and a plurality of straight tube fluorescent lamps fixed to the curved plate 24. The lamps 22, 22... And a stand 23 that supports the curved plate 24 so that the posture thereof can be changed. Among these, the straight tube fluorescent lamps 22, 22... And the curved plate 24 constitute an image object 21. The straight tube fluorescent lamp 22 corresponds to the light beam irradiation unit 21 a of the image object 21.

  The straight tube fluorescent lamps 22, 22... Are arranged in a substantially horizontal direction along the inner side of a substantially arc shape formed by the curved plate 24, and each of the straight tube fluorescent lamps 22. -It arranges in parallel with the curved plate 24 so that 22 may become substantially equal intervals. Therefore, the plurality of straight tube fluorescent lamps 22, 22... Are arranged so as to have a substantially arc shape that radiates around the inspection surface F and surrounds the inspection surface F together. .

The curved plate 24 is supported on the stand 23 and can change its posture, and can be moved by a wheel 23 c provided on the stand 23.
.. And the curved plate 24 surround the inspected surface F, and the distance from the inspected surface F to the image target 21 is as uniform as possible. Thus, the position and orientation of the light irradiation device 20 are determined.

  When the light irradiation device 20 configured as described above irradiates the surface F to be inspected with the light beam emitted from the image object 21, a bright part in which the straight fluorescent lamps 22, 22. Similarly, a plurality of highlight lines (light and dark stripes) appear on the surface F to be inspected by the light receiving means 31 due to the dark portion where the curved plate 24 is reflected on the surface F to be inspected.

Since the straight fluorescent lamps 22, 22,... Are arranged at substantially equal intervals, the highlight lines appear at substantially equal intervals, and are particularly clear in the inspected surface F having a complicated surface shape. Unevenness of the surface shape of the surface F to be inspected can be observed.
However, the plurality of straight tube fluorescent lamps 22, 22... Are not limited to being arranged at substantially equal intervals, and the intervals can be appropriately adjusted according to the shape of the surface F to be inspected.

  Further, since the straight tube fluorescent lamp 22 that is the image object 21 is a light emitter, the highlight line is brightly reflected on the surface F to be inspected, and the border line of light and darkness that is the outline of the straight tube fluorescent lamp 22 is clear. It can be. Note that, depending on the color of the surface F to be inspected, the straight tube fluorescent lamp 22 that emits light of a color clearly reflected on the surface F to be inspected can be selected.

The light irradiation device 20 having the above configuration may include a halogen light source, a diffusion plate, and a light-shielding plate having a plurality of slits formed substantially in parallel as the image object 21 instead of the straight tube fluorescent lamp 22. it can.
In this case, the light beam output from the halogen light source can be irradiated to the surface F to be inspected as a parallel light beam through the diffusion plate and further as a directional and elongated light beam through the light shielding plate. As a result, a bright and dark striped highlight line can be projected on the inspection surface F.

The image pickup device 30 functions as the light receiving means 31 and is arranged so as to pick up an image of the inspection surface F from an oblique direction close to the front with respect to the inspection surface F.
As the imaging device 30, for example, a CCD camera can be employed. The image of the surface F to be inspected captured by the imaging device 30 is captured by the image processing device 40 as image data.

  The image processing device 40 or the determination device 50 includes a CPU 46 that performs various calculations, an input unit 47 that inputs information, a display unit 48 that displays and outputs calculation results such as image data, shape data, and determination results. Configured. These can be constituted by one or a plurality of general-purpose computers 45 or the like.

  In the image processing device 40, the inspection surface F captured by the light receiving means 31 is imaged based on the image data, and then a highlight line (or the outline of the highlight line) is extracted, which is approximated by a curve. And expressed as a number. From this curve, numerical values such as the radius of curvature of the surface shape of the surface F to be inspected, the direction of the center, and the radius of curvature are calculated.

  Further, the determination device 50 determines the quality of the inspection surface F based on the surface shape of the inspection surface F imaged or digitized by the image processing device 40. The determination result is output and displayed on the display unit 48.

  As a method for determining the quality of the surface F to be inspected in the determination device 50, numerical values such as the radius of curvature of the surface shape of the surface F to be inspected, the orientation of the center, the radius of curvature, etc. A comparison calculation process with a predetermined basic value that has been set is performed, and whether or not the difference is within a preset allowable range is determined, thereby determining whether the quality of the surface F to be inspected is good or bad. .

  In addition, as a method of determining the quality of the inspection surface F in the determination device 50, the highlight line (actual image) that appears on the inspection surface F imaged by the image processing device 40 and the ideal of the inspection surface F are shown. By comparing a line (virtual image) representing a typical bulge, reverse, etc., to determine whether the surface F to be inspected is distorted or whether the surface shape of the surface F to be inspected is as designed, The quality of the surface F to be inspected is determined.

  The line (virtual image) representing the ideal bulge, reverse, etc. of the surface F to be inspected is subjected to numerical analysis (simulation) based on the design in advance, or the surface shape inspection system 10 is inspected with non-defective products as inspection targets. It can be obtained from a preset reference surface to be inspected.

8A shows a line representing an ideal bulge, reverse, etc. of the surface F to be inspected by numerical analysis, and FIG. 8B shows a highlight line appearing on the imaged surface F to be inspected. ing. Similarly, FIG. 9A shows lines representing ideal bulge, reverse, etc. of the surface F to be inspected by numerical analysis, and FIG. 9B shows highlight lines appearing on the imaged surface F to be inspected. Show.
From these figures, a highlight line (actual image) appearing on the inspection surface F imaged by the image processing device 40 and a line (virtual image) representing an ideal bulge or reverse of the inspection surface F by numerical analysis. It can be seen that the image corresponds well.

  Note that the inspection surface F imaged by the image processing apparatus 40 has almost no difference from the image of the inspection surface F that can be viewed by the inspector, and therefore, a highlight line (actual image) that appears on the inspection surface F. The inspector visually compares a line (virtual image) representing an ideal bulge, reverse, etc. of the surface F to be inspected, and the curved surface shape such as the bulge, reverse, etc. of the surface F to be inspected is as designed. It can be easily determined whether or not.

Then, the surface shape inspection system 10B which concerns on Example 2 of this invention is demonstrated.
FIG. 10 is a configuration diagram of a surface shape inspection system according to the second embodiment of the present invention, and FIG. 11 is a diagram showing highlight lines appearing on the surface to be inspected.

As shown in FIG. 10, the surface shape inspection system 10B inspects the surface shape of the inspection surface F at a time when the entire periphery of the inspection object Fa is the inspection surface F, such as the periphery of the surface of the vehicle body. It is a system to do.
The surface shape inspection system 10B includes a light irradiation device 20 including an image object 21, an imaging device 30 as a light receiving unit 31, an image processing device 40 that processes an image captured by the imaging device 30, and a surface to be inspected. It is comprised by the determination apparatus 50 etc. which determine the quality of F quality.

  Among the elements constituting the surface shape inspection system 10B, the configurations and operations of the imaging device 30, the image processing device 40, and the determination device 50 are included in the surface shape inspection system 10A described in the first embodiment. Since it is substantially the same, description is abbreviate | omitted.

The light irradiation device 20 includes an image object 21, and is a means for irradiating the surface F to be inspected with a light beam emitted from the image object 21 and expressing a highlight line on the surface F to be inspected. is there.
The light irradiation device 20 includes a curved plate 24 that is a plate having a substantially arc shape, a plurality of straight tube fluorescent lamps 22, 22... Fixed to the curved plate 24, and the curved shape. It is comprised with the stand 23 which supports the board 24 so that an attitude | position change is possible. Among these, the curved plate 24 and the straight tube fluorescent lamp 22 constitute an image object 21, and the straight tube fluorescent lamp 22 corresponds to the light irradiation unit 21 a.

The curved plate 24 is formed in a substantially arc shape surrounding the inspection object Fa including the inspection surface F, that is, a dome shape surrounding the inspection object Fa including the inspection surface F.
The curved plate 24 may be divided into a plurality of pieces instead of a single piece.

  The straight tube fluorescent lamps 22, 22... Are curved plates 24 so that each of the straight tube fluorescent lamps 22 is in a substantially horizontal direction and the straight tube fluorescent lamps 22, 22 are spaced at substantially equal intervals. Are arranged in parallel with the curved plate 24 along the inner side of the substantially arc shape formed by. Therefore, the plurality of straight tube fluorescent lamps 22, 22... Are radially centered on the approximate center of the inspection object Fa including the inspection surface F, and the inspection object Fa including the inspection surface F is also provided. It will arrange | position so that the circular arc which surrounds may be comprised.

In the surface shape inspection system 10B provided with the light irradiation device 20 having the above-described configuration, at the approximate center of the dome-shaped space formed by the image object 21 including the straight tube fluorescent lamps 22, 22. The inspection object Fa is arranged, and the light beam emitted from the image object 21 is irradiated onto the inspection surface F. As a result, in the periphery of the inspection object Fa, which is the inspection surface F, a curved plate is formed on the inspection surface F in the same manner as a bright portion in which the straight tube fluorescent lamps 22, 22. A plurality of highlight lines (bright and dark stripes) appear due to the dark portion in which 24 is reflected, and these are picked up by the image pickup device 30.
Note that a plurality of imaging devices 30 as the light receiving means 31 can be arranged around the inspection object Fa so that the entire periphery of the inspection object Fa that is the inspection surface F can be imaged.

  Also in the surface shape inspection system 10B according to the present embodiment, as in the first embodiment, the image captured by the imaging device 30 is imaged by the image processing device 40, and the determination device 50 converts the image. The shape of the surface F to be inspected is specified based on the appearance and shape of the bright and dark portions of the surface F to be inspected, and the quality of the surface F to be inspected is determined.

In the surface shape inspection system 10B, the image object 21 included in the light irradiation device 20 is configured to surround the entire periphery of the inspection object Fa, but the image object 21 is configured to surround the inspection object Fa. Is not limited to surrounding.
For example, the image object 21 provided in the light irradiation device 20 is formed in a gate shape, and the inspection object Fa is inspected when the inspection object Fa passes through the gate formed by the image object 21. The highlight line reflected on the surface F can be captured by the light receiving means 31.

The minimum block diagram of the surface shape inspection system which concerns on the Example of this invention. The figure explaining an example of the relationship between an image target object, to-be-inspected surface, and a light-receiving means. The figure explaining an example of the relationship between an image target object, to-be-inspected surface, and a light-receiving means. The figure which shows the highlight line which appears on a to-be-inspected surface. The block diagram of the surface shape inspection system which concerns on Example 1 of this invention. The block diagram which shows the structure of a surface shape inspection system. The figure which shows a light irradiation apparatus. The comparison figure of an actual image and a virtual image. The comparison figure of an actual image and a virtual image. The block diagram of the surface shape inspection system which concerns on Example 2 of this invention. The figure which shows the highlight line which appears on a to-be-inspected surface. The figure explaining the relationship between the conventional image target object, to-be-inspected surface, and a light-receiving means. The figure which shows the highlight line which appears on a to-be-inspected surface by the conventional means.

Explanation of symbols

F surface to be inspected 10 surface shape inspection system 20 light irradiation device 21 image object 21a light beam irradiation unit 22 straight tube fluorescent lamp 23 stand 24 curved plate 30 imaging device 31 light receiving means 40 image processing device 50 determination device

Claims (9)

In a light irradiation device for irradiating a light beam onto an inspection surface from an image object to form a bright part and a dark part on the inspection surface,
The image object has a light beam irradiation part having a shape having one or more regularities, and is formed so as to surround the surface to be inspected.
Light irradiation device. The light irradiation part of the image object is substantially linear, and a plurality of light irradiation parts are arranged substantially in parallel so as to form a radial shape around the surface to be inspected and an arc surrounding the surface to be inspected. It is characterized by
The light irradiation apparatus according to claim 1. The light irradiation unit is composed of a light emitter,
The image object includes a plate formed so as to surround the surface to be inspected, and the light beam irradiation unit fixed to the plate.
The light irradiation apparatus of Claim 1 or Claim 2. The light irradiation device according to any one of claims 1 to 3,
An imaging device for imaging a surface to be inspected;
An image processing device for imaging an image of a surface to be inspected imaged by the imaging device;
A determination device for determining whether the quality of the surface to be inspected is good or not based on a bright portion and a dark portion appearing on the surface to be inspected imaged by the image processing device;
A surface shape inspection system comprising: The determination device includes:
By comparing a bright portion and a dark portion appearing on the imaged inspection surface with a bright portion and a dark portion representing an ideal shape of a preset reference inspection surface, the imaged inspection surface It is characterized by judging the quality of
The surface shape inspection system according to claim 4. A light irradiation part having a shape having a regularity or pluralities, and an image object formed so as to surround the surface to be inspected, irradiating the surface to be inspected with a light beam,
Inspecting the shape of the surface to be inspected based on the bright and dark parts appearing on the surface to be inspected,
Surface shape inspection method. The light irradiation part of the image object is substantially linear, and a plurality of light irradiation parts are arranged substantially in parallel so as to form a radial shape around the surface to be inspected and an arc surrounding the surface to be inspected. It is characterized by
The surface shape inspection method according to claim 6. The light irradiation unit is composed of a light emitter,
The image object includes a plate formed so as to surround the surface to be inspected, and the light beam irradiation unit fixed to the plate.
The surface shape inspection method according to claim 6 or 7. Imaging the inspection surface on which the image object is reflected,
The bright and dark parts appearing on the imaged surface to be inspected are imaged,
By comparing a bright portion and a dark portion appearing on the imaged inspection surface with a bright portion and a dark portion representing an ideal shape of a preset reference inspection surface, the imaged inspection surface It is characterized by judging the quality of
The surface shape inspection method as described in any one of Claims 6-8.