CN220584076U - Detection optical module and detection device - Google Patents
Detection optical module and detection device Download PDFInfo
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- CN220584076U CN220584076U CN202322021265.7U CN202322021265U CN220584076U CN 220584076 U CN220584076 U CN 220584076U CN 202322021265 U CN202322021265 U CN 202322021265U CN 220584076 U CN220584076 U CN 220584076U
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- 239000011521 glass Substances 0.000 description 4
- 238000007689 inspection Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
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Abstract
The utility model discloses a detection optical module and detection equipment, wherein the detection optical module comprises a strip-shaped light hole, at least one straight light optical path and at least one non-straight light optical path, the optical path lengths of the straight light optical path and the non-straight light optical path are the same, the input end of a first straight light optical path is aligned with a first straight light area of a second end of the strip-shaped light hole, the output end is aligned with a light inlet of a first linear scanning camera, and a light signal output by the first straight light area is input into the light inlet of the first linear scanning camera through the first straight light optical path; the input end of the first non-straight light path is aligned with a first non-straight light area of the second end of the strip-shaped light hole, the output end is aligned with the light inlet of the second line scanning camera, and the light signal output by the first non-straight light area is reflected by the first reflecting piece and then is input into the light inlet of the second line scanning camera; the first non-straight light region and the first straight light region have a superposition region. The detection optical module can shorten and improve the detection efficiency.
Description
Technical Field
The utility model relates to the field of optical detection, in particular to a detection optical module and detection equipment.
Background
Automatic optical inspection AOI (Automated Optical Inspection) is an apparatus for inspecting defects based on optical principles. The method comprises the steps of automatically scanning a material to be detected (such as a PCB) through a camera, collecting images, detecting defects on the detected material through image processing, and displaying or marking the defects through display equipment or an automatic mark.
When the images are acquired, the images are generally acquired through a line scanning camera due to the large detection breadth of the materials and high imaging precision requirement, and the complete images corresponding to the materials to be detected are obtained by combining an imaging splicing technology, so that the defect detection of the materials is realized.
In the prior art, a line scan camera is mainly installed on a moving mechanism (such as a mechanical arm and a telescopic rod), and is controlled to move to a corresponding target position to collect a corresponding image (generally, four target positions exist, that is, the corresponding image needs to be shot at the four corresponding target positions). However, the same line scanning camera has slower picking speed, affects the detection speed, takes long time to obtain a complete image, is limited in the accuracy of the position of the line scanning camera, has non-uniform imaging results, occupies more resources in imaging splicing, and has low overall detection efficiency.
Disclosure of Invention
The utility model mainly aims to provide a detection optical module and detection equipment, which can shorten the time for acquiring complete images and improve the detection efficiency.
In order to achieve the above objective, the present utility model provides a detection optical module, which includes a strip-shaped optical hole, at least one straight optical path and at least one non-straight optical path, wherein the optical path lengths of the straight optical path and the non-straight optical path are the same;
the first end of the strip-shaped optical hole is aligned with the material to be detected, the first end of the strip-shaped optical hole is used for inputting optical signals reflected by the surface of the material to be detected, and the second end of the strip-shaped optical hole is used for outputting the optical signals;
the input end of the first straight light path is aligned with a first straight light area of the second end of the strip-shaped light hole, the output end of the first straight light path is aligned with the light inlet of the first linear scanning camera, and the light signal output by the first straight light area is input into the light inlet of the first linear scanning camera through the first straight light path;
the input end of the first non-straight light path is aligned with a first non-straight light area of the second end of the strip-shaped light hole, the output end of the first non-straight light path is aligned with the light inlet of the second line scanning camera, a first reflecting piece is arranged on the first non-straight light path, the incident light surface of the first reflecting piece is aligned with the first non-straight light area, the reflecting surface of the first reflecting piece is aligned with the light inlet of the second line scanning camera, and the light signals output by the first non-straight light area are reflected by the first reflecting piece and then input into the light inlet of the second line scanning camera;
wherein, the first non-straight light area and the first straight light area have a superposition area.
Optionally, the first section of the first non-straight light path is located on a path between the second end of the strip-shaped light hole and the first reflecting member, and the second section of the first non-straight light path is located on a path between the first reflecting member and the light inlet of the second line scanning camera, where an optical axis of the first section of the first non-straight light path is perpendicular to an optical axis of the second section of the first non-straight light path, and the first reflecting member is located at an intersection of the optical axis of the first section of the first non-straight light path and the optical axis of the second section of the first non-straight light path.
Optionally, the optical axis of the first section of the first non-straight light optical path is arranged along a vertical direction, and the optical axis of the second section of the first non-straight light optical path is arranged along a horizontal direction; and/or
The optical axis of the straight light path is arranged along the vertical direction.
Optionally, an input end of a second straight light path is aligned with a second straight light area of the second end of the strip-shaped light hole, an output end of the second straight light path is aligned with a light inlet of a third linear scanning camera, and an optical signal output by the second straight light area is input into the light inlet of the third linear scanning camera through the second straight light path;
the input end of the second non-straight light optical path is aligned with a second non-straight light area of the second end of the strip-shaped light hole, the output end of the second non-straight light optical path is aligned with the light inlet of the fourth linear scanning camera, a second reflecting piece is arranged on the second non-straight light optical path, the incident light surface of the second reflecting piece is aligned with the second non-straight light area, the reflecting surface of the second reflecting piece is aligned with the light inlet of the fourth linear scanning camera, and the light signals output by the second non-straight light area are reflected by the second reflecting piece and then input into the light inlet of the fourth linear scanning camera;
wherein, the second non-straight light region and the second straight light region have a superposition region.
Optionally, the input end of the first straight light path, the input end of the second straight light path, the input end of the first non-straight light path, and the input end of the second non-straight light path are arranged at intervals along the extending direction of the strip-shaped light hole.
Optionally, along the extending direction of the strip-shaped light hole, the input end of the first straight light path, the input end of the first non-straight light path, the input end of the second straight light path and the input end of the second non-straight light path are sequentially arranged.
Optionally, the optical axis of the first straight light path is parallel to the optical axis of the second straight light path.
Optionally, the optical axis of the first non-straight light path is parallel to the optical axis of the second non-straight light path.
Optionally, the first reflecting member includes a first total reflection prism.
The utility model also provides a detection device comprising a frame and a detection optical module comprising:
a frame; and
the detection optical module comprises the detection optical module, and the detection optical module is arranged on the rack.
According to the detection optical module provided by the utility model, the first straight light area and the first non-straight light area at the second end of the strip-shaped light hole are respectively aligned by setting the straight light path and the non-straight light path so as to respectively receive the light signals reflected by different areas on the surface of the material to be detected from the first end of the strip-shaped light hole, thereby realizing the partitioning and simultaneous imaging of the surface of the material to be detected.
Drawings
In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and other drawings may be obtained according to the structures shown in these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a first embodiment of a detection optical module according to the present utility model;
fig. 2 is a schematic structural diagram of a second embodiment of the detection optical module of the present utility model.
Reference numerals illustrate:
| reference numerals | Name of the name | Reference numerals | Name of the name |
| 1000 | Detection optical module | 4 | First reflecting member |
| 1 | Strip-shaped unthreaded hole | 5 | Third linear scanning camera |
| 2 | First line scanning camera | 6 | Fourth line scanning camera |
| 3 | Second line scanning camera | 7 | Second reflecting piece |
The achievement of the objects, functional features and advantages of the present utility model will be further described with reference to the accompanying drawings, in conjunction with the embodiments.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
It should be noted that all directional indicators (such as up, down, left, right, front, and rear … …) in the embodiments of the present utility model are merely used to explain the relative positional relationship, movement, etc. between the components in a particular posture (as shown in the drawings), and if the particular posture is changed, the directional indicator is changed accordingly.
Furthermore, the description of "first," "second," etc. in this disclosure is for descriptive purposes only and is not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In addition, the technical solutions of the embodiments may be combined with each other, but it is necessary to base that the technical solutions can be realized by those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should be considered to be absent and not within the scope of protection claimed in the present utility model.
Automatic optical inspection AOI (Automated Optical Inspection) is an apparatus for inspecting defects based on optical principles. The method comprises the steps of automatically scanning a material to be detected (such as a PCB) through a camera, collecting images, detecting defects on the detected material through image processing, and displaying or marking the defects through display equipment or an automatic mark.
When the images are acquired, the images are generally acquired through a line scanning camera due to the large detection breadth of the materials and high imaging precision requirement, and the complete images corresponding to the materials to be detected are obtained by combining an imaging splicing technology, so that the defect detection of the materials is realized.
In the prior art, a line scan camera is mainly installed on a moving mechanism (such as a mechanical arm and a telescopic rod), and is controlled to move to a corresponding target position to collect a corresponding image (generally, four target positions exist, that is, the corresponding image needs to be shot at the four corresponding target positions). However, the same line scanning camera has slower picking speed, affects the detection speed, takes long time to obtain a complete image, is limited in the accuracy of the position of the line scanning camera, has non-uniform imaging results, occupies more resources in imaging splicing, and has low overall detection efficiency.
In view of this, the present utility model provides a detection optical module 1000, which can shorten the time for acquiring the complete image and improve the detection efficiency, and fig. 1 to 2 are two embodiments of the detection optical module 1000 of the present utility model.
Referring to fig. 1, the present utility model discloses a detection optical module 1000, where the detection optical module 1000 includes a strip-shaped optical hole 1, at least one straight optical path and at least one non-straight optical path, and the optical path lengths of the straight optical path and the non-straight optical path are the same;
the first end of the strip-shaped optical hole 1 is aligned with a material to be detected, the first end of the strip-shaped optical hole 1 is used for inputting an optical signal reflected by the surface of the material to be detected, and the second end of the strip-shaped optical hole 1 is used for outputting the optical signal;
the input end of the first straight light path is aligned to a first straight light area of the second end of the strip-shaped light hole 1, the output end of the first straight light path is aligned to the light inlet of the first linear scanning camera 2, and the light signal output by the first straight light area is input to the light inlet of the first linear scanning camera 2 through the first straight light path;
the input end of the first non-straight light path is aligned with a first non-straight light area of the second end of the strip-shaped light hole 1, the output end of the first non-straight light path is aligned with the light inlet of the second line scanning camera 3, a first reflecting piece 4 is arranged on the first non-straight light path, the incident light surface of the first reflecting piece 4 is aligned with the first non-straight light area, the reflecting light surface of the first reflecting piece 4 is aligned with the light inlet of the second line scanning camera 3, and the light signal output by the first non-straight light area is reflected by the first reflecting piece 4 and then is input into the light inlet of the second line scanning camera 3;
wherein, the first non-straight light area and the first straight light area have a superposition area.
According to the detection optical module 1000 provided by the utility model, the first straight light area and the first non-straight light area at the second end of the strip-shaped light hole 1 are respectively aligned by setting the straight light path and the non-straight light path so as to respectively receive the light signals reflected by different areas on the surface of the material to be detected from the first end of the strip-shaped light hole 1, thereby realizing the partitioning and simultaneous imaging of the surface of the material to be detected.
In the present utility model, the material to be detected (for example, a flexible circuit board) is provided to be movable relative to the strip-shaped light hole 1, and the detection optical module 1000 is used to collect an image of a partial surface or an entire surface of the material to be detected, so as to perform brightness, spectrum, multi-point uniformity, visual color shift, defect detection and the like on the material to be detected. According to the above-mentioned detection optical module 1000, it should be noted that, in design and use, considering that the first line scanning camera 2 and the second line scanning camera 3 respectively correspond to the straight light path and the non-straight light path, after surface image acquisition, the imaging consistency of the different line scanning cameras, that is, the consistency of the size and the definition of the image, it is necessary to ensure that the optical path lengths of the straight light path and the non-straight light path are the same, so as to avoid that the imaging results are not uniform and the complexity of subsequent image processing is increased due to different optical path lengths.
In addition, it should be added that, in order to make the second end of the strip-shaped light hole 1 form the first straight light area and the first non-straight light area, in the present utility model, the first reflecting element 4 may be used as a light path changing purpose, and may be a first total reflection prism with an isosceles right triangle shape in cross section, where when light enters the prism from the hypotenuse of the isosceles triangle, the light rays penetrate the prism to one of the right angles, because the incident light angle is greater than the critical angle of the glass, and thus total reflection occurs on the one right angle, the reflected light rays will strike the other right angle, and be totally reflected on the right angle side, and finally be emitted on the incident hypotenuse, so as to be received and imaged by the second line scanning camera 3, in other embodiments, other reflecting elements may be used instead of the first total reflection prism, such as a plane mirror, and the general plane mirror is silvered on the rear surface of the glass, and the glass surface also reflects light rays, so that the light rays will pass through the glass surface and the silver surface, and thus the light rays will be reflected on the silver surface, and the other plane is reflected multiple times, and the best to be imaged by the prism, and the utility model has a better optical path loss, and the optical loss is more than the utility model, and the best has to be changed, and the utility model is better than the utility model, and the utility model has the full reflection loss is better than the utility model.
In the utility model, the first section of the first non-straight light path is located on the path between the second end of the strip-shaped light hole 1 and the first reflecting member 4, the second section of the first non-straight light path is located on the path between the first reflecting member 4 and the light inlet of the second line scanning camera 3, for convenience of understanding, the first section of the first non-straight light path is defined herein as the incident section of the first non-straight light region light, the second section of the first non-straight light path is defined as the reflecting section of the incident section, that is, the first non-straight light path is formed by the incident section and the reflecting section, the second end of the strip-shaped light hole 1 is arranged on one side of the incident section, the second line scanning camera 3 is arranged on one side of the reflecting section, furthermore, the second line scanning camera 3 can image the surface of the material to be detected without directly aligning with the strip-shaped light hole 1, so as to spatially shift the output end of the first non-straight light path from the output end of the first non-straight light path, thereby saving the layout space of the optical module, specifically, in order to make the image captured by the second line scanning camera 3 through the first reflecting member 4 clear and not deformed, it is necessary to determine the partial deflection angle of the optical axis of the first non-straight light path, in the present utility model, the optical axis of the first section of the first non-straight light path and the optical axis of the second section of the first non-straight light path are perpendicular to each other, the first reflecting member 4 is arranged at the intersection of the optical axis of the first section of the first non-straight light path and the optical axis of the second section of the first non-straight light path, so, the image reflected by the first reflecting piece 4 can be ensured not to generate distortion in the shape of the image and not to change in the size of the image in the lens of the second line scanning camera 3, the subsequent imaging processing is facilitated, and the first reflecting piece 4 can be directly used by adopting the existing products in the market without additional manufacturing. In other embodiments, the optical axis of the first section of the first non-straight light path and the optical axis of the second section of the first non-straight light path may also be disposed at a certain angle, but it should be noted that, in this case, the second line scanning camera 3 needs to be disposed at the same angle with respect to the second section of the first non-straight light path in the whole detection optical module 1000, so that not only the fixing difficulty of the camera is increased, but also the polarizing element needs to be remanufactured according to the inclination angle, which increases the process cost and the production cost, and therefore the use as an optimal solution is not required.
In the present utility model, in order to facilitate the arrangement of the detection optical module 1000, the optical axis of the first section of the first non-straight optical path is arranged along the vertical direction, the optical axis of the second section of the first non-straight optical path is arranged along the horizontal direction, and the optical axis of the straight optical path is arranged along the vertical direction. That is, in the present utility model, the strip-shaped optical hole 1 may be disposed on a horizontal plane, the optical signal is output vertically and upwardly from the second end of the strip-shaped optical hole 1, the first line scanning camera 2 is located directly above the strip-shaped optical hole 1, so as to be directly opposite to the surface of the material to be detected, and the first reflecting member 4 is located on the propagation path of the optical signal, so that the second line scanning camera 3 is aligned with the reflecting surface of the first reflecting member 4 and is horizontally disposed on the side surface of the strip-shaped optical hole 1, thus the whole detection optical module 1000 extends vertically and horizontally, and it is avoided that the detection optical module 1000 needs to occupy a larger space in one direction due to an oversized line scanning camera barrel or body when disposed side by side.
Generally, when testing materials to be tested, such as a flexible circuit board, a PCB board, a thick copper plate, a printed circuit board, etc., by using a testing device, it is generally required to take corresponding images at four target positions on the surface of the materials to be tested to ensure the testing accuracy, so in the present utility model, referring to fig. 2, the testing optical module 1000 further includes a second straight light path and a second non-straight light path, wherein an input end of the second straight light path is aligned with a second straight light area of the second end of the strip-shaped light hole 1, an output end of the second straight light path is aligned with an light inlet of the third linear scanning camera 5, and an optical signal output by the second straight light area is input into the light inlet of the third linear scanning camera 5 through the second straight light path; the input end of the second non-straight light path is aligned with a second non-straight light area of the second end of the strip-shaped light hole 1, the output end of the second non-straight light path is aligned with the light inlet of the fourth linear scanning camera 6, a second reflecting piece 7 is arranged on the second non-straight light path, the incident light surface of the second reflecting piece 7 is aligned with the second non-straight light area, the reflecting light surface of the second reflecting piece 7 is aligned with the light inlet of the fourth linear scanning camera 6, and the light signals output by the second non-straight light area are reflected by the second reflecting piece 7 and then input into the light inlet of the fourth linear scanning camera 6, wherein the second non-straight light area and the second straight light area are in a coincidence area. Therefore, the imaging of a plurality of areas or a plurality of target positions on the material to be detected can be realized, the uniformity and consistency of imaging results can be ensured, and the detection efficiency is obviously improved. Of course, according to the size and length of the material to be detected, according to the arrangement modes of the straight light path and the non-straight light path in the scheme of the utility model, the number of the straight light path and the non-straight light path may not be limited, and for the element with larger area or longer length, three or more than three straight light paths or non-straight light paths may be provided, which is not particularly limited herein.
It should be noted that the material of the second reflecting member 7 may be the same as that of the first reflecting member 4.
For facilitating subsequent imaging, the input end of the first straight light path, the input end of the second straight light path, the input end of the first non-straight light path and the input end of the second non-straight light path are arranged at intervals along the extending direction of the strip-shaped light hole 1, that is, the shooting areas of the first line scanning camera 2, the second line scanning camera 3, the third line scanning camera 5 and the fourth line scanning camera 6 are sampling areas continuously arranged along the length or width direction of the material to be detected, so that the final imaging image of the detection optical module 1000 is also continuous, and the detection efficiency and the detection precision can be improved.
In order to optimize the layout space of the first straight light path, the second straight light path, the first non-straight light path and the second non-straight light path, please continue to refer to fig. 2, in the extending direction of the strip-shaped light hole 1, the input end of the first straight light path, the input end of the first non-straight light path, the input end of the second straight light path and the input end of the second non-straight light path are sequentially arranged, that is, the straight light path and the non-straight light path are arranged at intervals, and in order to simplify the design and optimize the layout, in the utility model, the optical axis of the first straight light path is parallel to the optical axis of the second straight light path, and the optical axis of the first non-straight light path is parallel to the optical axis of the second non-straight light path, so that the space of the detection optical module 1000 can be designed more reasonably and aesthetically, thereby saving the production cost and the manufacturing cost.
The utility model also provides a detection device, which is generally used for detecting surface defects of a flexible circuit board or other elements, and comprises a frame and a detection optical module 1000, wherein the detection optical module 1000 is arranged on the frame, and the specific structure of the detection optical module 1000 refers to the above embodiment.
The foregoing description is only of the preferred embodiments of the present utility model and is not intended to limit the scope of the utility model, and all equivalent structural changes made by the description of the present utility model and the accompanying drawings or direct/indirect application in other related technical fields are included in the scope of the utility model.
Claims (10)
1. The detection optical module is characterized by comprising a strip-shaped light hole, at least one straight light path and at least one non-straight light path, wherein the light path lengths of the straight light path and the non-straight light path are the same;
the first end of the strip-shaped optical hole is aligned with the material to be detected, the first end of the strip-shaped optical hole is used for inputting optical signals reflected by the surface of the material to be detected, and the second end of the strip-shaped optical hole is used for outputting the optical signals;
the input end of the first straight light path is aligned with a first straight light area of the second end of the strip-shaped light hole, the output end of the first straight light path is aligned with the light inlet of the first linear scanning camera, and the light signal output by the first straight light area is input into the light inlet of the first linear scanning camera through the first straight light path;
the input end of the first non-straight light path is aligned with a first non-straight light area of the second end of the strip-shaped light hole, the output end of the first non-straight light path is aligned with the light inlet of the second line scanning camera, a first reflecting piece is arranged on the first non-straight light path, the incident light surface of the first reflecting piece is aligned with the first non-straight light area, the reflecting surface of the first reflecting piece is aligned with the light inlet of the second line scanning camera, and the light signals output by the first non-straight light area are reflected by the first reflecting piece and then input into the light inlet of the second line scanning camera;
wherein, the first non-straight light area and the first straight light area have a superposition area.
2. The detection optical module of claim 1, wherein the first segment of the first non-straight optical path is located on a path between the second end of the strip-shaped optical aperture and the first reflective element, and the second segment of the first non-straight optical path is located on a path between the first reflective element and the light entrance of the second line scanning camera, wherein an optical axis of the first segment of the first non-straight optical path is perpendicular to an optical axis of the second segment of the first non-straight optical path, and the first reflective element is disposed at an intersection of the optical axis of the first segment of the first non-straight optical path and the optical axis of the second segment of the first non-straight optical path.
3. The detection optical module according to claim 2, wherein an optical axis of a first section of the first non-straight optical path is disposed in a vertical direction, and an optical axis of a second section of the first non-straight optical path is disposed in a horizontal direction; and/or
The optical axis of the straight light path is arranged along the vertical direction.
4. The detection optical module of claim 1, wherein an input end of a second straight light path is aligned with a second straight light region of a second end of the strip-shaped light hole, an output end of the second straight light path is aligned with a light inlet of a third linear scanning camera, and an optical signal output by the second straight light region is input into the light inlet of the third linear scanning camera through the second straight light path;
the input end of the second non-straight light optical path is aligned with a second non-straight light area of the second end of the strip-shaped light hole, the output end of the second non-straight light optical path is aligned with the light inlet of the fourth linear scanning camera, a second reflecting piece is arranged on the second non-straight light optical path, the incident light surface of the second reflecting piece is aligned with the second non-straight light area, the reflecting surface of the second reflecting piece is aligned with the light inlet of the fourth linear scanning camera, and the light signals output by the second non-straight light area are reflected by the second reflecting piece and then input into the light inlet of the fourth linear scanning camera;
wherein, the second non-straight light region and the second straight light region have a superposition region.
5. The detection optical module of claim 4, wherein the input end of the first straight light path, the input end of the second straight light path, the input end of the first non-straight light path, and the input end of the second non-straight light path are disposed at intervals along the extending direction of the strip-shaped light hole.
6. The detection optical module according to claim 5, wherein the input end of the first straight optical path, the input end of the first non-straight optical path, the input end of the second straight optical path, and the input end of the second non-straight optical path are arranged in this order along the extending direction of the strip-shaped optical aperture.
7. The detection optical module of claim 4, wherein an optical axis of the first straight light path is parallel to an optical axis of the second straight light path.
8. The detection optical module of claim 4, wherein an optical axis of the first non-straight optical path is parallel to an optical axis of the second non-straight optical path.
9. The detection optical module of claim 1, wherein the first reflective element comprises a first total reflection prism.
10. A detection apparatus, characterized by comprising:
a frame; and
detection optical module comprising a detection optical module according to any one of claims 1 to 9, said detection optical module being provided on said housing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322021265.7U CN220584076U (en) | 2023-07-28 | 2023-07-28 | Detection optical module and detection device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322021265.7U CN220584076U (en) | 2023-07-28 | 2023-07-28 | Detection optical module and detection device |
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| CN220584076U true CN220584076U (en) | 2024-03-12 |
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| CN202322021265.7U Active CN220584076U (en) | 2023-07-28 | 2023-07-28 | Detection optical module and detection device |
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| CN (1) | CN220584076U (en) |
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2023
- 2023-07-28 CN CN202322021265.7U patent/CN220584076U/en active Active
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