CN209282211U - Battery passivation film is opened figure, solar battery and solar components - Google Patents
Battery passivation film is opened figure, solar battery and solar components Download PDFInfo
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- CN209282211U CN209282211U CN201822067355.9U CN201822067355U CN209282211U CN 209282211 U CN209282211 U CN 209282211U CN 201822067355 U CN201822067355 U CN 201822067355U CN 209282211 U CN209282211 U CN 209282211U
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- opened
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- battery
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- 238000002161 passivation Methods 0.000 title claims abstract description 41
- 101001073212 Arabidopsis thaliana Peroxidase 33 Proteins 0.000 claims abstract description 46
- 101001123325 Homo sapiens Peroxisome proliferator-activated receptor gamma coactivator 1-beta Proteins 0.000 claims abstract description 46
- 102100028961 Peroxisome proliferator-activated receptor gamma coactivator 1-beta Human genes 0.000 claims abstract description 46
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 20
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 20
- 239000010703 silicon Substances 0.000 claims abstract description 20
- 239000004065 semiconductor Substances 0.000 claims description 3
- 230000006872 improvement Effects 0.000 description 10
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 150000001875 compounds Chemical class 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000000608 laser ablation Methods 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
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- Photovoltaic Devices (AREA)
Abstract
The utility model discloses a kind of battery passivation film die sinking figure, solar battery and solar components, the battery passivation film die sinking figure is formed on silicon wafer back passivating film and exposure silicon wafer, the passivating film die sinking figure includes spaced a plurality of line, every line is arranged successively by multiple graphic elements and is formed, and each graphic element is configured to dotted.PERC battery passivation film disclosed by the utility model is opened figure, a plurality of line in the die sinking figure is rearranged by multiple points, and point-like figure can be substantially reduced the percent opening of back passivation monocrystalline PERC battery compared to linear type figure, Uoc is effectively promoted, transfer efficiency is improved.
Description
Technical field
The utility model relates to photovoltaic cell production field, especially a kind of PERC battery passivation film is opened figure, PERC
Solar battery and PERC solar components.
Background technique
AT&T Labs, the U.S. in 1954 prepares the single crystal silicon solar cell that first piece of transfer efficiency is 6% in the world,
By continuous exploration in scientist 60 years, solar cell achieved huge breakthrough, and highest transfer efficiency has reached
46% (light-focusing multi-junction GaAs).Although solar cell has been developed that three generations, crystal silicon solar battery still occupies market master
How stream reduces a great problem that material cost is still photovoltaic industry, therefore the thickness design of silicon solar cell is constantly thinned.So
And when silicon wafer thickness is as thin as the diffusion length less than silicon wafer, the compound of cell backside will necessarily become limitation battery conversion effect
The principal element of rate, and (passsivated emmiter and rear cell, passivation emitter local back connect PERC battery
Electric shock pond) because of its good back passivating technique, the compound caused loss in efficiency in the back side can be reduced, the open-circuit voltage of battery is improved
And short circuit current.
PERC technology improves transfer efficiency by adding a dielectric passivation layer on the rear side of battery.Normal cell
Better level of efficiency is limited to the compound trend of light induced electron in structure.PERC battery maximizes the potential for spanning P-N junction
Gradient, this flowing for making electronics more stable reduce that electronics is compound and higher level of efficiency.
It is used widely in industrialized production from back passivating technique, cell piece efficiency significantly improves.It is well known that back
The key of passivating technique is back side plating aluminium oxide+silicon nitride film and laser slotting technology, and aluminium oxide+silicon nitride film is as field
Passivation dielectric film, reduction surface recombination, and laser slotting, it contacts back field aluminum paste with silicon wafer, forms BSF layers, but it is more to slot
Bigger to silicon wafer loss, corresponding Uoc loss is more, therefore while guaranteeing to carry on the back passivation effect, slots fewer, Uoc loses and gets over
It is few, cell piece efficiency can be effectively promoted, mostly uses linear type laser graphics, percent opening 3.66% in existing actual production process.
To reduce fluting loss, percent opening is reduced, Uoc is promoted, reaches and propose effect purpose, need to be carried out for the prior art into one
The improvement of step.
Utility model content
The purpose of this utility model is to provide a kind of lower PERC battery passivation films of percent opening to be opened figure.
The another object of the utility model is to provide a kind of higher PERC solar battery of cell piece efficiency.
A further object of the utility model is to provide a kind of higher PERC solar cell module of cell piece efficiency.
To realize one of above-mentioned purpose of utility model, the utility model provides a kind of PERC battery passivation film die sinking figure
Shape, is formed on silicon wafer back passivating film and exposure silicon wafer, and passivating film die sinking figure includes spaced a plurality of line, and every
Line is arranged successively by multiple graphic elements and is formed, and each graphic element is configured to dotted.
As the further improvement of the utility model embodiment, the passivating film die sinking figure includes parallel interval setting
A plurality of line, the graphic element interval setting on every line.
As the further improvement of the utility model embodiment, the radial dimension of the graphic element on every line exists
Between 95um-105um, the spacing between every two graphic element is between 450um-550um.
As the further improvement of the utility model embodiment, spacing between every two lines 900um-950um it
Between.
As the further improvement of the utility model embodiment, the graphic element continuous phase on the every line is run in
Column.
As the further improvement of the utility model embodiment, the radial dimension diameter of the graphic element on every line
Between 30um-50um.
As the further improvement of the utility model embodiment, spacing between every two lines 880um-920um it
Between.
As the further improvement of the utility model embodiment, the silicon wafer is equipped with multiple back electrodes, the passivation
Film is opened figure and bypasses the back electrode.
As the further improvement of the utility model embodiment, the graphic element of adjacent two lines is along perpendicular to this
The direction position of line is staggered.
As the further improvement of the utility model embodiment, each graphic element is configured to round dotted.
The utility model additionally provides a kind of PERC solar battery, including being set to as described in preceding any embodiment
PREC battery passivation film is opened the Metals-semiconductor contacts on figure.
The utility model provides a kind of PERC solar components, including foregoing PERC solar battery again.
Compared with prior art, PERC battery passivation film disclosed by the utility model is opened figure, PERC battery passivation film
A plurality of line in die sinking figure is rearranged by multiple points, and it is blunt can be substantially reduced back compared to linear type figure for point-like figure
Change the percent opening of monocrystalline PERC battery, effectively promotion Uoc, improves transfer efficiency.
Detailed description of the invention
Fig. 1 is the plane signal of the PERC battery passivation film die sinking figure in the preferred first embodiment of the utility model
Figure；
Fig. 2 is the enlarged diagram of the part a in Fig. 1；
Fig. 3 is the another form of schematic diagram of the PERC battery passivation film die sinking figure in Fig. 1；
Fig. 4 is the plane signal of the PERC battery passivation film die sinking figure in the preferred second embodiment of the utility model
Figure；
Fig. 5 is the enlarged diagram of the part b in Fig. 4；
Fig. 6 is the another form of schematic diagram of the PERC battery passivation film die sinking figure in Fig. 4.
Specific embodiment
The utility model is described in detail below with reference to specific embodiment shown in the drawings.But these embodiment party
Formula is not intended to limit the utility model, structure that those skilled in the art are made according to these embodiments, method or
Transformation functionally is all contained in the protection scope of the utility model.
It should be understood that the art of the representation space relative position used herein such as "upper", " top ", "lower", " lower section "
Language be for convenient for explanation purpose come describe as shown in the drawings a unit or feature relative to another unit or spy
The relationship of sign.The term of relative space position can be intended to include equipment in use or work other than orientation as shown in the figure
Different direction.
As depicted in figs. 1 and 2, in the preferred first embodiment of the utility model, PERC battery passivation film is opened figure
100 are formed on silicon wafer back passivating film and expose silicon wafer, and it includes spaced a plurality of line 10 which, which is opened figure 100,
Every line 10 is made of multiple graphic elements 11, and each graphic element 11 is configured to dotted.It is preferred in the present embodiment, it is a plurality of
Line 10 is configured to parallel interval setting.
In the present embodiment, a plurality of line in PERC battery passivation film die sinking figure 100 is rearranged by multiple points, die sinking side
The optional laser ablation of formula, corrosivity slurry etching etc., preferred laser ablation is illustrated in the present embodiment, i.e. a laser dot
At a point-like figure unit.And dot laser figure can be substantially reduced back passivation monocrystalline compared to linear type laser graphics
The percent opening of PERC battery, effectively promotion Uoc improve transfer efficiency, and dot laser figure is not necessarily to increase extra cost expense,
Laser device parameter need to be only set.
Specifically, the graphic element 11 on every line 10 is spaced setting, the graphic element 11 of adjacent two lines is along vertical
It is corresponding in the direction position of this bar line.The radial dimension of graphic element 11 on every line is between 95um-105um, every two
Spacing between graphic element is between 450um-550um, and the spacing between every two lines is between 900um-950um, monolithic
166-168 line is set on silicon wafer.Wherein dotted graphic element is preferably round point shape, and the diameter of dot itself is in 95um-
Between 105um.It is also possible to the polygon that outer profile a little is rule, such as quadrangle, pentagon and hexagon, diameter
It can be the external diameter of a circle of these figures to size.
Referring to shown in Fig. 3, another shape of PERC battery passivation film die sinking figure in the first preferred embodiment is shown
Formula, the passivating film are opened in figure, and the graphic element 11 of adjacent two lines is staggered along the direction position perpendicular to this bar line.?
That is the LASER SPECKLE between line and line is interlaced, guarantee that Al-BSF print thickness is uniform.
As shown in Figure 4 and Figure 5, in the preferred second embodiment of the utility model, PERC battery passivation film is opened figure
200 are formed on silicon wafer back passivating film and expose silicon wafer, which is opened a plurality of line that figure 200 includes parallel interval setting
20, every line 20 is made of multiple graphic elements 21, and each graphic element 21 is also configured to dotted.
The column specifically, 21 continuous phase of graphic element on every line 20 is run in, the graphic elements 21 of adjacent two lines along
It is corresponding perpendicular to the direction position of this bar line.The circumscribed circle diameter of graphic element 21 on every line is between 30um-50um, often
Spacing between two lines is between 880um-920um.Wherein dotted graphic element is preferably round point shape, dot itself it is straight
Diameter is between 30um-50um.
Referring to shown in Fig. 6, another shape of PERC battery passivation film die sinking figure in the second preferred embodiment is shown
Formula, the passivating film are opened in figure, and the graphic element 21 of adjacent two lines is staggered along the direction position perpendicular to this bar line.?
That is the LASER SPECKLE between line and line is interlaced, guarantee that Al-BSF print thickness is uniform.
In above-mentioned two embodiment, silicon wafer is equipped with multiple back electrodes, and passivating film is opened figure and bypasses back electrode, also
It is to say back electrode position without laser dotting, since back electrode material can not penetrate passivating film, to promote back surface
Passivation effect, to improve volume production efficiency on line.
According to above-described embodiment, experimental verification is carried out for dot laser figure, four groups of monocrystalline lists are chosen in the present embodiment
The PERC battery data of face light compares, first group i.e. second embodiment, laser spot size diameter 50um, between points
Spacing be 0.05mm, spacing between line and line is 1mm；Second group i.e. first embodiment, laser spot size diameter 100um,
Spacing between points is 0.5mm, and the spacing between line and line is 1mm；Third group, that is, first embodiment, laser spot size diameter
For 100um, spacing between points is 0.5mm, and the spacing between line and line is 0.9mm；4th group i.e. first embodiment,
Laser spot size diameter is 100um, and spacing between points is 0.5mm, and the spacing between line and line is 0.925mm；Verify data
It is as follows:
According to above-mentioned data comparison it is found that based on the data in above-mentioned two embodiment, percent opening is compared to linear
Figure has reduction, the data in first embodiment with respect to second embodiment for, percent opening has further reduction.
With the reduction of percent opening, although Uoc can be promoted, the increase of Rs can reduce FF, can reduce photoelectric conversion efficiency in turn, than
Such as second group of data, therefore the unlimited percent opening that reduces plays negative effect to the promotion of efficiency instead.
By set-point laser graphics compared to linear type laser graphics, back passivation monocrystalline PERC electricity can be substantially reduced
The percent opening in pond improves transfer efficiency, cooperates the reasonable control of percent opening, be able to achieve the optimization of efficiency, and dot laser figure
Shape is without increasing extra cost expense.
The utility model further relates on a kind of PERC solar battery, including PREC battery passivation film above-mentioned die sinking figure
Metals-semiconductor contacts, in addition, the utility model further relates to a kind of PERC solar components, including the PERC solar-electricity
Pond.
It should be appreciated that although this specification is described in terms of embodiments, but not each embodiment only includes one
A independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should will say
As a whole, the technical solution in each embodiment may also be suitably combined to form those skilled in the art can for bright book
With the other embodiments of understanding.
Tool of the series of detailed descriptions listed above only for the feasible embodiment of the utility model
Body explanation, they are all without departing from made by the utility model skill spirit not to limit the protection scope of the utility model
Equivalent implementations or change should be included within the scope of protection of this utility model.
Claims (12)
1. a kind of PERC battery passivation film is opened figure, it is formed on silicon wafer back passivating film and exposes silicon wafer, which is characterized in that institute
Stating passivating film die sinking figure includes spaced a plurality of line, and every line is arranged successively by multiple graphic elements and is formed, Mei Getu
Shape unit is configured to dotted.
2. PERC battery passivation film according to claim 1 is opened figure, which is characterized in that the passivating film is opened figure
Including a plurality of line that parallel interval is arranged, the graphic element interval on every line is arranged.
3. PERC battery passivation film according to claim 2 is opened figure, which is characterized in that the graphic element on every line
Radial dimension between 95um-105um, the spacing between every two graphic element is between 450um-550um.
4. PERC battery passivation film according to claim 2 is opened figure, which is characterized in that the spacing between every two lines
Between 900um-950um.
5. PERC battery passivation film according to claim 1 is opened figure, which is characterized in that the figure on the every line
Unit continuous phase is run in column.
6. PERC battery passivation film according to claim 5 is opened figure, which is characterized in that the graphic element on every line
Radial dimension diameter between 30um-50um.
7. PERC battery passivation film according to claim 5 is opened figure, which is characterized in that the spacing between every two lines
Between 880um-920um.
8. PERC battery passivation film according to claim 1 is opened figure, which is characterized in that the silicon wafer is equipped with multiple
Back electrode, the passivating film die sinking figure bypass the back electrode.
9. PERC battery passivation film according to claim 1 is opened figure, which is characterized in that the figure list of adjacent two lines
Member is staggered along the direction position perpendicular to this bar line.
10. PERC battery passivation film according to claim 1 is opened figure, which is characterized in that each equal structure of graphic element
It is round dotted for making.
11. a kind of PERC solar battery, including being set to such as PREC battery passivation any one of in claim 1~10
Film is opened the Metals-semiconductor contacts on figure.
12. a kind of PERC solar components, including PERC solar battery as claimed in claim 11.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822067355.9U CN209282211U (en) | 2018-12-10 | 2018-12-10 | Battery passivation film is opened figure, solar battery and solar components |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822067355.9U CN209282211U (en) | 2018-12-10 | 2018-12-10 | Battery passivation film is opened figure, solar battery and solar components |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209282211U true CN209282211U (en) | 2019-08-20 |
Family
ID=67610692
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822067355.9U Expired - Fee Related CN209282211U (en) | 2018-12-10 | 2018-12-10 | Battery passivation film is opened figure, solar battery and solar components |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209282211U (en) |
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2018
- 2018-12-10 CN CN201822067355.9U patent/CN209282211U/en not_active Expired - Fee Related
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: No. 199, deer mountain road, Suzhou high tech Zone, Jiangsu Province Patentee after: CSI Cells Co.,Ltd. Patentee after: Atlas sunshine Power Group Co.,Ltd. Address before: No. 199, deer mountain road, Suzhou high tech Zone, Jiangsu Province Patentee before: CSI Cells Co.,Ltd. Patentee before: CSI SOLAR POWER GROUP Co.,Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190820 |