CN209198871U - Light supply apparatus and exposure device - Google Patents
Light supply apparatus and exposure device Download PDFInfo
- Publication number
- CN209198871U CN209198871U CN201822147457.1U CN201822147457U CN209198871U CN 209198871 U CN209198871 U CN 209198871U CN 201822147457 U CN201822147457 U CN 201822147457U CN 209198871 U CN209198871 U CN 209198871U
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- reflecting mirror
- supply apparatus
- light supply
- face
- light
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Abstract
The utility model provides a kind of in the light supply apparatus with multiple lamps, and the light supply apparatus and exposure device of light optically focused can be made while inhibiting the loss of light quantity.The light supply apparatus with multiple lamps of the utility model can make light optically focused while inhibiting the loss of light quantity.Light supply apparatus (20) has the lamp unit (20A) being made of lamp (22A), reflecting mirror (24A) and the lamp unit (20B) being made of lamp (22B), reflecting mirror (24B), in the light supply apparatus (20), reflecting mirror (24A, 24B) is tilted relative to the face (V1, V2) vertical with central axis (C1, C2), is relatively parallel configuration in the side opening portion (29A, 29B) in the opening face (31A, 31B) parallel to each other for forming side opening portion (29A, 29B).
Description
Technical field
The utility model relates to one kind light supply apparatus used in exposure device etc., more particularly to equipped with multiple lamps
Light supply apparatus.
Background technique
In exposure device, the light radiated from discharge lamp draws by the reflecting mirrors such as oval shape mirror optically focused and to lamp optical system
It leads.It is equipped with integration lens (such as fly lens) in lamp optical system, homogenizes Illumination Distribution using integration lens.
Integration lens (such as fly lens) are that lenticule is carried out to lens list made of two-dimensional arrangements on direction in length and breadth
Member, therefore, because the enlargement of lamp, reflecting mirror and cause illumination decline, resolution ratio decline etc..Therefore, known following a kind of light
Source device, with multiple lamp units for being respectively equipped with lamp and reflecting mirror, so that the light optically focused radiated from each lamp unit
Mode configured light unit (referring to patent document 1).
Then, a part of two concave mirrors (elliptical reflector) is cut off to form section parallel to each other,
By reflecting mirror fixed configurations in the state of abutting section.It is cut being formed in a manner of intersecting the central axis of reflecting mirror
Section can make the light optically focused radiated from two lamps while inhibiting illumination decline.
Existing technical literature
Patent document
Patent document 1: Japanese Unexamined Patent Publication 2004-245912 bulletin
Utility model content
Utility model will solve the problems, such as
In concave mirror (elliptical reflector etc.), the 1st near focal point configured light center on axis in its center, because
This, the opening face of reflecting mirror forms the face vertical relative to mirror center axis, with being capable of equably optically focused.Therefore, when with
When the mode of light optically focused radiated from two reflecting mirrors being made to configure two reflecting mirrors, the opening portion of each reflecting mirror is relative to from light source
The axial direction (light supply apparatus center side direction) for the light that device radiates tilts, and integrally comes from multiple reflecting mirrors (mirror assembly)
It sees, opening face is not formed in the same plane.
It is radiated and being reflected by a reflector from lamp unit to specific direction with the radial light projected from lamp.But
In each reflecting mirror, opening face from peripheral part towards section near decline, therefore, reflecting surface near light supply apparatus center side with
Peripheral part is nearby compared, and is not extended to light emitting side fully, and reflective face region is not arranged sufficiently.Therefore, from lamp towards light source
The light that device center side nearby projects is advanced with not being mapped to reflecting surface, is become stray light and is generated light loss.
Thus, in the light supply apparatus being made of multiple lamp units, it is desirable that by lamp unit in a manner of inhibiting light loss
Group merges equipment.
The solution to the problem
The light supply apparatus of the utility model can be applied to exposure device etc., the light supply apparatus, with it is multiple by lamp and
The lamp unit that concave reflecting mirror is constituted, the light optically focused that will be radiated from each lamp unit, which is characterized in that, at least one
The opening face of the opening portion of a concave reflecting mirror is tilted relative to the face of the central axis upright with the concave reflecting mirror.
In the present invention, it is preferred that in adjacent concave reflecting mirror, the opening face of opening portion is located at same flat
On face.
In the present invention, it is preferred that concave reflecting mirror is equipped with side side opening face, with side side opening face and phase
Concave reflecting mirror is arranged in the mode that the side side opening face of adjacent concave reflecting mirror is parallel.
In the present invention, it is preferred that side side opening face is vertical relative to opening face.
In the present invention, it is preferred that concave reflecting mirror, which is formed with, to be not substantially parallel with each other at least two sides and open
Mouth face.
In the present invention, it is preferred that concave reflecting mirror is formed at least two orthogonal side side opening faces.
In the present invention, it is preferred that the opening face of opening portion is relative to the face vertical with mirror center axis
It is tilted in the range of 1.0 °~9.0 °.
In the present invention, it is preferred that concave reflecting mirror is made of elliptical reflector, and the bright spot of lamp is located at oval anti-
Penetrate the near focal point of mirror.
The exposure device of the utility model has above-mentioned light supply apparatus.
For example, can be constituted using the concave reflecting mirror with ellipse of revolution face or the paraboloid of revolution, and can be with
The bright spot of lamp is located at the mode of the near focal point of elliptical reflector to constitute lamp unit.
About the configuration structure of concave reflecting mirror, be able to carry out various configurations, can be set as adjacent concave reflecting mirror with
The structure for keeping the mode of mutual reflected light optically focused opposite.For example, in adjacent concave reflecting mirror, it being capable of opening with opening portion
Mouth face mode in the same plane configures and constitutes lamp unit.The tilt angle in the opening face as opening portion, is set as phase
The face vertical with mirror center axis is tilted in the range of 1.0 °~9.0 °.
Side opening face in side can be set for concave reflecting mirror.For example, anti-with side side opening face and adjacent concave
Concave reflecting mirror is arranged in the parallel mode in side side opening face for penetrating mirror.
About the formation in side side opening face, it is capable of forming the side side opening face vertical relative to opening face.In concave
In the case that reflecting mirror forms at least two side side opening faces, it also can be set to two sides side opening face and be not substantially parallel with each other
Structure.For example, being capable of forming at least two orthogonal side side opening faces in concave reflecting mirror.
In the assemble method of the light supply apparatus described in the other modes of the utility model, will respectively by concave reflecting mirror and
Multiple lamp units that lamp is constituted are combined in a manner of making the light optically focused radiated from each lamp unit, in the concave reflecting mirror, are opened
The opening face of oral area is tilted relative to the face of central axis upright.
The effect of utility model
According to the utility model, in the light supply apparatus with multiple lamps, can make while inhibiting the loss of light quantity
Light optically focused.
Detailed description of the invention
Fig. 1 is the block diagram of the exposure device of the 1st embodiment.
Fig. 2 is the top view that light supply apparatus viewed from above obtains.
Fig. 3 is the cross-sectional view of the light supply apparatus obtained along the III-III line cutting of Fig. 2.
Fig. 4 is the cross-sectional view of the reflecting mirror before forming side opening portion.
Fig. 5 is the perspective view to form the reflecting mirror after side opening portion.
Fig. 6 is the top view of the outline of the mirror assembly in the light supply apparatus of the 2nd embodiment.
Fig. 7 is the top view of the outline of the mirror assembly in the light supply apparatus of the 3rd embodiment.
Fig. 8 is the cross-sectional view of the mirror assembly of the 4th embodiment.
Description of symbols
10, exposure device；20, light supply apparatus；20A, 20B, lamp unit；22A, 22B, lamp；24A, 24B, reflecting mirror；25A,
25B, recess portion；27A, 27B, opening portion；28A, 28B, opening face；29A, 29B, side opening portion；31A, 31B, side are opened
Mouth face.
Specific embodiment
Illustrate the embodiments of the present invention referring to the drawings.
Fig. 1 is the block diagram of the exposure device of the 1st embodiment.
Pattern light is projected on substrate W using photomask 14 by exposure device 10, here, exposure device 10 is configured to contact
Exposure device.Exposure device 10 has from the light supply apparatus 20 of multiple discharge lamps composition (not shown herein) and respectively to substrate W
The photohead 11 of projection pattern light.
The discharge lamp of light supply apparatus 20 is high-pressure mercury-vapor lamp or extra-high-pressure mercury vapour lamp herein, such as contains 0.2mg/mm3
Above mercury.Discharge lamp is lighted by light source drive part 19.Photohead 11 has lamp optical system 12 and photomask 14, the photograph
Bright optical system 12 contains the integration lens that can make uniform-illumination.
The light radiated from light supply apparatus 20 is incident to photomask 14 via lamp optical system 12.Photomask 14 is passed through
Light be projected in the substrate W for being equipped on exposure desk 18.It is W-shaped at scheduled pattern in substrate as a result,.In addition, can also be covered by nothing
Mould exposure device, projection aligner etc. constitute exposure device 10.
Fig. 2 is the top view that light supply apparatus obtains from releasing side (reflecting mirror open side) from light.Fig. 3 is along Fig. 2
The cross-sectional view for the light supply apparatus that III-III line cutting obtains.But, the discharge lamp not shown in Fig. 2 only illustrates opening for reflecting mirror
Structure near oral area.
Light supply apparatus 20 is made of two lamp units 20A, 20B.Lamp unit 20A has discharge lamp 22A and reflecting mirror 24A,
Lamp unit 20B has discharge lamp 22B and reflecting mirror 24B, and the light radiated from discharge lamp 22A, 22B is anti-by reflecting mirror 24A, 24B
It penetrates and is radiated from lamp unit 20A, 20B to specific direction.Lamp unit 20A and lamp unit 20B is so that from lamp unit 20A and lamp unit
The light that 20B is radiated is configured by the mode of optically focused in light supply apparatus 20, from the light that light supply apparatus 20 radiates to illumination optical system
The integration lens of system 12 are incident.Discharge lamp 22A is to be integrally formed with seal pipe 24A1,24A2 in the two sides of discharge tube 23A
Lamp construction, discharge lamp 22B are also integrally formed with seal pipe 24B1,24B2 in the two sides of discharge tube 23B.
Reflecting mirror 24A is the concave reflecting mirror of the light reflection and optically focused for will radiate from discharge lamp 22A, is constituted herein
For elliptical reflector.Reflecting mirror 24A has bowl-shape recess portion 25A, is formed in ellipse of revolution face, that is, recess portion 25A inner peripheral surface 25S1
There is reflecting surface (mirror).The bright spot (intermediate point of a pair of electrodes) of discharge lamp 22A is located at the 1st near focal point of reflecting mirror 24A, sealing
Pipe 24A1 extends to the bottom 25DA of the opening of recess portion 25A.The central axis of discharge lamp 22A and the central axis of reflecting mirror 24A
C1 is consistent.Reflecting mirror 24B is configured to the elliptical reflector with reflecting mirror 24A the same shape, and has recess portion 25B.Reflecting mirror
24A, 24B constitute mirror assembly 24.
It is formed with opening portion 27A, 27B for projecting light in reflecting mirror 24A, 24B, and is formed with side opening portion
29A,29B.Reflecting mirror 24A, 24B are in contact with each other with side opening portion 29A, 29B or close state fixed configurations.By setting
For close state (between reflecting mirror 24A and reflecting mirror 24B there is small gap and reflecting mirror 24A and reflecting mirror 24B not
The contiguously state of configured in parallel), so as to prevent reflecting mirror 24A, 24B under the action of lighting the thermal expansion of generation because of lamp
It is damaged.The case where state that reflecting mirror is in contact is indicated in Fig. 2~Fig. 8, but in the case where reflecting mirror close state
It is same.The fixed configurations of reflecting mirror 24A, 24B are carried out according to known method.
In the opening portion 27B of the opening portion 27A and reflecting mirror 24B of reflecting mirror 24A, 28A, 28B, their opening face
In on same plane.Here, opening face 28A indicates the plane of the opening portion side end face 25T1 along recess portion 25A, be open face 28B table
Show the plane of the opening portion side end face 25T2 along recess portion 25B.Opening face 28A, 28B are respectively relative to and mirror center axis
C1, C2 vertical plane (referring to appended drawing reference V1, V2 of Fig. 3) inclination.
In side opening portion 29A, 29B of reflecting mirror 24A, 24B, side side opening face 31A, 31B is by side side
Face 25T3,25T4 are limited.Side side opening face 31A, 31B are faces parallel to each other, and reflecting mirror 24A, 24B are in side side opening face
It is contacted on 31A, 31B.Therefore, the inclination angle relative to face V1, the V2 vertical with central axis C1, C2 of opening face 28A, 28B
(being set as θ below) is equal to each other.In addition, reflecting mirror 24A, 24B are symmetrical relative to side side opening face 31A, 31B, therefore, open
The center Q1 in the entire opening face 28 of mouth face 28A and opening face 28B altogether is located on side side opening face 31A, 31B.In addition,
In the case where reflecting mirror 24A, 24B are closely configured, side side opening face 31A, 31B are configured to put down across small gap
Capable face, the entire center Q1 for being open face 28 are located at the centre of side side opening face 31A and side side opening face 31B.
The distance interval of the central axis C2 of the central axis C1 and reflecting mirror 24B of reflecting mirror 24A are closer to opening face
28A, 28B and become shorter.When the intersection point of central axis C1 and opening face 28A are set as P1, by central axis C2 and opening face
When the intersection point of 28B is set as P2, the distance until from intersection point P1, P2 to the center Q1 of opening face entirety is less than from the intersection point P1, P2
Distance until position 25Z1,25Z2 being located on the line by intersection point P1, P2 on recess portion 25A, 25B (referring to Fig. 2).
In this way, reflecting mirror 24A opening face 28A, reflecting mirror 24B opening face 28B relative to central axis C1, C2
Vertical face V1, V2 is inclined to be formed simultaneously same plane, and therefore, reflecting mirror 24A, 24B can will be radiated from lamp 22A, 22B
Light in the light reflection advanced adjacent to or around towards side opening portion 29A, 29B, and draw to lamp optical system 12
It leads.Near side side opening face 31A, 31B, opening face 28A, 28B will not be recessed to the bottom side 25DA, 25DB, keep and
The above-mentioned identical height of position 25Z1,25Z2.As a result, towards away from the closer recess portion inner peripheral surface of side opening portion 29A, 29B
The light of region (referring to appended drawing reference J1~J4 of Fig. 2) radiation of 25S1,25S2 can be reflected.
The tilt angle theta relative to face V1, the V2 vertical with central axis C1, C2 of opening face 28A, 28B are limited at
In the range of 1.0 °~9.0 °.When tilt angle theta is less than 1 °, reflecting effect can not be obtained, on the other hand, works as tilt angle theta
When more than 9 °, resolution ratio is caused to decline.Tilt angle theta is preferably set as to 2.0 °~6.0 ° of range, especially by inclination angle
The range that degree θ is set as 4.0 °~5.0 ° is preferable.
Fig. 4 is the cross-sectional view of the reflecting mirror before forming side opening portion.Fig. 5 is formed after side opening portion
The perspective view of reflecting mirror.Illustrate the forming method of reflecting mirror 24A, reflecting mirror 24B using Fig. 4, Fig. 5.
Reflecting mirror 240 as elliptical reflector has vertical plane V0 cant angle theta of the opening face 280 relative to central axis C0
Recess portion 250, and be formed as relative to the asymmetrical shape of central axis C0.In addition, the tilt angle theta of Fig. 4 can also be with Fig. 3
Tilt angle theta it is different.By cutting off a part of the recess portion 250 of reflecting mirror 240 in predetermined position, opened to form side
Oral area 290, opening face 310.At this moment, in a manner of forming the opening face 310 vertical relative to opening face 280, relative to opening
Face 280 is vertically cut off.As a result, forming reflecting mirror 24B as shown in Figure 5.Reflecting mirror 24A will be also by will reflect
Mirror 240 similarly cuts off along right angle orientation relative to opening face 280 and is formed.
Then, make the section of two reflecting mirrors opposite, fixed in the mode that opening face 310 is parallel, so as to constitute
The mirror assembly of Fig. 2, the light optically focused shown in Fig. 3 for making each lamp.Such vertical cutting is with previous like that along with subtle
The cutting of angle adjustment is different, can easily be done, and can accurately assemble more reflecting mirror to constitute reflecting mirror
Component.
In this way, according to the present embodiment, light supply apparatus 20 have by lamp 22A, reflecting mirror 24A the lamp unit 20A constituted and
The lamp unit 20B being made of lamp 22B, reflecting mirror 24B, in the light supply apparatus 20, reflecting mirror 24A, 24B relative to central axis
Line C1, C2 vertical face V1, V2 inclination, the side of the side side opening face 31A of side opening portion 29A, side opening portion 29B
Surface side opening face 31B is opposite in side opening portion 29A, the 29B being formed parallel to each other and fixes in parallel.Also, opening portion
The opening face 28A of 27A, the opening face 28B of opening portion 27B are formed on same plane.
Then, illustrate the 2nd embodiment using Fig. 6.In the 2nd embodiment, two reflection microscope groups are set as a list
Member, and constitute mirror assembly made of the multiple units of combination.
Fig. 6 is the top view of the outline of the mirror assembly in the light supply apparatus of the 2nd embodiment.
Here, in such a way that reflecting mirror 240 relative to Fig. 4 forms two lateral opening portions, relative to opening face
It is cut off along right angle orientation, they is organized and merges the mirror assembly 24 ' for constituting chiasmus.For the section of a reflecting mirror
CJ1~CJ2 is not parallel to each other, but section CJ1, CJ3, the CJ5 for being spaced a section are relationship parallel to each other,
And CJ2 and CJ4 is relationship parallel to each other.By forming such section, multiple lamps can configured in one direction
While inhibit resolution ratio decline, carry out light gathering efficiency higher light source configuration.
Then, the light supply apparatus of the 3rd embodiment is illustrated using Fig. 7.In the 3rd embodiment, it is made of 4 reflecting mirrors
Mirror assembly.
Fig. 7 is the top view of the outline of the mirror assembly in the light supply apparatus of the 3rd embodiment.Here, using each other
Orthogonal two faces cut off reflecting mirror 240 shown in Fig. 4, thus one reflecting mirror of forming, by configuring that for section
This is adjacent, to constitute mirror assembly 24 ".
Then, the light supply apparatus of the 4th embodiment is illustrated using Fig. 8.In the 4th embodiment, not in reflecting mirror shape
At section.
Fig. 8 is the cross-sectional view of the mirror assembly of the 4th embodiment.
As shown in figure 8, constituting the not formed section of reflecting mirror 24A ', 24B ' of mirror assembly 124.Also, so that by
The friendship of the center Q1 in the entire opening face 28 that opening face 28A, 28B are constituted, the central axis C1 of reflecting mirror 24A ' and opening face 28A
The mode that is on same line of intersection point P2 of point P1, the central axis C2 of reflecting mirror 24B ' and opening face 28B make reflecting mirror 24A ',
24B ' is relatively contacted.28A, 28B are in the same plane in opening face, can obtain effect in a same manner as in the first embodiment.
About reflecting mirror, elliptical reflector can be substituted using the paraboloidal paraboloidal mirror of formation rotational symmetry come structure
At can also be formed using recess portion type reflecting mirror in addition to this.If also, considering error when processing, in lamp ignition
Reflecting mirror thermal expansion etc., then small gap can also be set in side side opening face.In this case, reflecting mirror is opened
Mouth face is not proper in the same plane, but can bring the effect of above-mentioned reduction stray light yet.In addition,
It is also possible to meet above-mentioned structure at least adjacent reflecting mirror in the case where combining multiple reflecting mirrors.
Also the light source in addition to discharge lamp can be used, as long as using the light source radiated to concave reflecting mirror.In addition,
Light supply apparatus can also be used for the device in addition to exposure device.
Claims (9)
1. a kind of light supply apparatus will be radiated with multiple lamp units being made of lamp and concave reflecting mirror from each lamp unit
Light optically focused, which is characterized in that,
It hangs down relative to the central axis of the concave reflecting mirror in the opening face of the opening portion of at least one concave reflecting mirror
Straight face inclination.
2. light supply apparatus according to claim 1, which is characterized in that
In adjacent concave reflecting mirror, the opening face of opening portion is in the same plane.
3. light supply apparatus according to claim 2, which is characterized in that
The concave reflecting mirror is equipped with side side opening face,
In the side side opening face mode parallel with the adjacent side side opening face of concave reflecting mirror, the concave is set
Reflecting mirror.
4. light supply apparatus according to claim 3, which is characterized in that
Side side opening face is vertical relative to the opening face.
5. light supply apparatus according to claim 4, which is characterized in that
The concave reflecting mirror, which is formed with, is not substantially parallel with each other at least two side side opening faces.
6. light supply apparatus according to claim 5, which is characterized in that
The concave reflecting mirror is formed at least two orthogonal side side opening faces.
7. light supply apparatus described according to claim 1~any one of 6, which is characterized in that
The opening face of the opening portion tilts in the range of 1.0 °~9.0 ° relative to the face vertical with mirror center axis.
8. light supply apparatus according to claim 7, which is characterized in that
The concave reflecting mirror is made of elliptical reflector,
The bright spot of the lamp is located at the near focal point of the elliptical reflector.
9. a kind of exposure device, which is characterized in that
The exposure device has light supply apparatus according to any one of claims 1 to 8.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017244005A JP7051204B2 (en) | 2017-12-20 | 2017-12-20 | How to assemble a light source device, an exposure device and a light source device |
| JP2017-244005 | 2017-12-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209198871U true CN209198871U (en) | 2019-08-02 |
Family
ID=67179698
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822147457.1U Active CN209198871U (en) | 2017-12-20 | 2018-12-20 | Light supply apparatus and exposure device |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP7051204B2 (en) |
| CN (1) | CN209198871U (en) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS544076A (en) * | 1977-06-13 | 1979-01-12 | Nippon Telegr & Teleph Corp <Ntt> | Irradiation unit for far ultraviolet ray exposure |
| JP2007041467A (en) | 2005-08-05 | 2007-02-15 | Y E Data Inc | Light source for exposure device |
| JP5896758B2 (en) | 2012-01-25 | 2016-03-30 | シチズン電子株式会社 | LED light emitting device |
-
2017
- 2017-12-20 JP JP2017244005A patent/JP7051204B2/en active Active
-
2018
- 2018-12-20 CN CN201822147457.1U patent/CN209198871U/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP7051204B2 (en) | 2022-04-11 |
| JP2019109431A (en) | 2019-07-04 |
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