CN209183514U - Basket equipment is inserted in a kind of Wafer Cleaning water - Google Patents
Basket equipment is inserted in a kind of Wafer Cleaning water Download PDFInfo
- Publication number
- CN209183514U CN209183514U CN201822163240.XU CN201822163240U CN209183514U CN 209183514 U CN209183514 U CN 209183514U CN 201822163240 U CN201822163240 U CN 201822163240U CN 209183514 U CN209183514 U CN 209183514U
- Authority
- CN
- China
- Prior art keywords
- mobile
- basket
- silicon wafer
- cleaning water
- sink
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 30
- 238000004140 cleaning Methods 0.000 title claims abstract description 22
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 72
- 239000010703 silicon Substances 0.000 claims abstract description 72
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 71
- 230000005540 biological transmission Effects 0.000 claims description 12
- 241000239290 Araneae Species 0.000 claims description 4
- 238000005096 rolling process Methods 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 53
- 230000033001 locomotion Effects 0.000 description 8
- 239000007921 spray Substances 0.000 description 5
- 238000010521 absorption reaction Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000012634 fragment Substances 0.000 description 2
- 230000005571 horizontal transmission Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201822163240.XU CN209183514U (en) | 2018-12-20 | 2018-12-20 | Basket equipment is inserted in a kind of Wafer Cleaning water |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201822163240.XU CN209183514U (en) | 2018-12-20 | 2018-12-20 | Basket equipment is inserted in a kind of Wafer Cleaning water |
Publications (1)
Publication Number | Publication Date |
---|---|
CN209183514U true CN209183514U (en) | 2019-07-30 |
Family
ID=67377580
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201822163240.XU Active CN209183514U (en) | 2018-12-20 | 2018-12-20 | Basket equipment is inserted in a kind of Wafer Cleaning water |
Country Status (1)
Country | Link |
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CN (1) | CN209183514U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109545724A (en) * | 2018-12-20 | 2019-03-29 | 天津中环领先材料技术有限公司 | Basket equipment is inserted in a kind of Wafer Cleaning water |
-
2018
- 2018-12-20 CN CN201822163240.XU patent/CN209183514U/en active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109545724A (en) * | 2018-12-20 | 2019-03-29 | 天津中环领先材料技术有限公司 | Basket equipment is inserted in a kind of Wafer Cleaning water |
CN109545724B (en) * | 2018-12-20 | 2024-04-09 | 天津中环领先材料技术有限公司 | Basket inserting equipment in silicon wafer cleaning water |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20191227 Address after: 214200 Dongfen Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Co-patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Patentee after: Zhonghuan leading semiconductor materials Co.,Ltd. Address before: 300384 in Tianjin Binhai high tech Zone Huayuan Industrial Zone (outer ring road No. 12 in Haitai) Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. |
|
TR01 | Transfer of patent right | ||
CP03 | Change of name, title or address |
Address after: 214200 Dongjia Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Patentee after: Zhonghuan Leading Semiconductor Technology Co.,Ltd. Country or region after: China Patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Address before: 214200 Dongjia Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Patentee before: Zhonghuan leading semiconductor materials Co.,Ltd. Country or region before: China Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. |
|
CP03 | Change of name, title or address |