CN209182269U - Multifunctional sample platform - Google Patents
Multifunctional sample platform Download PDFInfo
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- CN209182269U CN209182269U CN201821600111.6U CN201821600111U CN209182269U CN 209182269 U CN209182269 U CN 209182269U CN 201821600111 U CN201821600111 U CN 201821600111U CN 209182269 U CN209182269 U CN 209182269U
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- sample
- stage body
- multifunctional
- sample stage
- collet
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Abstract
The utility model discloses a kind of multifunctional sample platforms, it include: sample stage body, wherein, the sample stage body is made of non-magnetic material or non-conductive material, and the sample stage body is to offer at least one window on semi-cylindrical and the section of the semi-cylindrical sample stage body.The multifunctional sample platform of the utility model can be applied in existing FIB and TEM system, while can also realize the atom position FIB delamination of sample, the effective integration of three step failure analysis technique of nano-probe electrical testing and tem analysis.I.e. in the process of entire failure analysis, sample transfer is not needed, therefore, the success rate and efficiency of entire failure analysis process can be improved in the multifunctional sample platform of the utility model, avoids and reduces breakage of the sample in failure analysis work, lose and pollute.
Description
Technical field
The utility model relates to IC manufacturing field, in particular to a kind of multifunctional sample platform.
Background technique
With the development of technology, the observation with operation of micro- sample are widely used in aerospace, auto industry, partly lead
Body, biomedicine, MEMS, macromolecule, solar energy/fuel cell chemical industry, rock, microelectronics, microsensor, are partly led at petroleum
In body material, automatic control, aerospace, auto industry and machine tool.
Traditional sample stage can only carry out simple translation observation and operation to sample, although by adjusting imaging device
Angle, the rotation observation to sample can be realized in the visual field, but the spatial position of sample can not be changed.Another party
Face, when need to sample carry out failure analysis when, need by sample from be transferred on sample stage with technique be adapted system in
It goes, influences the success rate and efficiency of entire failure analysis process.
Utility model content
The utility model provides a kind of multifunctional sample platform, to solve the above-mentioned technical problems in the prior art.
In order to solve the above technical problems, the utility model provides a kind of multifunctional sample platform, comprising: sample stage body,
In, the sample stage body is made of non-magnetic material or non-conductive material, the sample stage body be semi-cylindrical and
At least one window is offered on the section of the semi-cylindrical sample stage body.
Preferably, the diameter of the sample stage body is 2-5mm, with a thickness of 80-120 μm.
Preferably, being provided with nanoscale circuit in the sample stage body.
Preferably, further including the collet for carrying the sample stage body.
Preferably, the collet includes: pedestal, the support base on the pedestal and is arranged in the support base
The limit plate of side, wherein the arc groove to match with the cambered surface of the sample stage body is offered on the support base, it is described
It is bolted between the position of the limit plate limit plate corresponding and described with the arc groove and the support base.
Preferably, the collet is made of nonmagnetic metal material.
Preferably, further including two-way for carrying the collet.
Preferably, described two-way include: pedestal, be provided on the pedestal and receiving that shape and collet match
Slot and the adjusting bolt being divided on the pedestal of the holding tank two sides, also, one of side wall of the holding tank is high
Height of the degree lower than sample in the collet.
Preferably, the pedestal both ends are additionally provided with for the fixing bolt with external affixed connection.
Preferably, described two-way is made of nonmagnetic metal material.
Compared with prior art, multifunctional sample platform provided by the utility model can be placed directly in the sample of TEM system
In product bar, without removing sample, tem analysis can be realized.And sample can realize sample without leaving sample stage
The two-way fixed point in surface and section, accurate FIB delamination and in-situ nano probe electric performance test.In addition, sample stage can benefit
Nanoscale circuit wiring is carried out with ion etching, is powered on TEM failure analysis in situ.
From the foregoing, it will be observed that the multifunctional sample platform of the utility model can be applied in existing FIB and TEM system, simultaneously
It can also realize the atom position FIB delamination of sample, the active set of three step failure analysis technique of nano-probe electrical testing and tem analysis
At.I.e. in the process of entire failure analysis, sample transfer is not needed, therefore, the multifunctional sample platform of the utility model can be with
The success rate and efficiency for improving entire failure analysis process avoid and reduce breakage of the sample in failure analysis work, lose
And pollution.
Detailed description of the invention
Fig. 1 a~1b is the structural schematic diagram of the sample stage body of multifunctional sample platform in the utility model；
Fig. 2 a~2b is the structural schematic diagram of the collet of multifunctional sample platform in the utility model；
Fig. 3 a~3b is two-way structural schematic diagram of multifunctional sample platform in the utility model.
It is as shown in the figure: 100- sample stage body, 110- window；
200- collet, 210- pedestal, 220- support base, 230- support base, 240- bolt；
Two-way of 300-, 310- pedestal, 320- holding tank, 330- adjust bolt, 340- fixing bolt.
Specific embodiment
To keep the above objects, features, and advantages of the utility model more obvious and easy to understand, with reference to the accompanying drawing to this
The specific embodiment of utility model is described in detail.It should be noted that the utility model attached drawing is all made of simplified form
And non-accurate ratio is used, only to convenient, lucidly aid illustration the utility model embodiment purpose.
The utility model provides a kind of multifunctional sample platform, comprising: sample stage body 100.As illustrated in figs. 1A and ib, institute
Sample stage body 100 is stated to be made of non-magnetic material or non-conductive material.Specifically, the sample stage body 100 is half
At least one window 110 is offered on the section of the cylindrical and described semi-cylindrical sample stage body 100, the window 110 is used
In carrying sample, and the window 110 be it is U-shaped, by the U-shaped window 110 it can be observed that sample surface and section, into
And it may be implemented to the two-way fixed point of sample and accurate FIB delamination.
Further, the diameter of the sample stage body 100 is 2-5mm, and the present embodiment is preferably 3mm, and thickness (that is to say
The height of semicolumn) it is 80-120 μm, preferably 100 μm, the sample stage body 100 of the size can be placed directly into TEM system
In the specimen holder of system, TEM sample analysis is carried out.
Preferably, the sample stage body 100 uses when needing sample stage being applied to ion etching wiring
Non-conductive material, and then nanoscale circuit can be set in the sample stage body 100.
With continued reference to Fig. 1, the sample stage body 100 can manufacture to be formed using monocrystalline silicon, preparation process are as follows: provide
Diameter is the single crystal silicon substrate of the cylindrical shape of 3mm, and such as 100 μm of required thickness of single crystal silicon substrate is gone out using ultrasonic cut,
Then, Si is plated on the surface of the single crystal silicon substrate3N4Layer, while single crystal silicon substrate is etched as needed, through-hole is obtained, this is logical
Usually by two windows 110, symmetrically connection is formed in hole, finally, cutting single crystal silicon substrate forms two identical sample playscripts with stage directions
Body 100 simultaneously polishes the section of sample stage body 100.
Please emphasis referring to Fig. 2 a and Fig. 2 b, the multifunctional sample platform further includes for carrying the sample stage body 100
Collet 200, the collet 200 include: pedestal 210, the support base 220 on the pedestal 210 and be arranged described
The limit plate 230 of 220 side of support base, wherein the cambered surface with the sample stage body 100 is offered on the support base 220
The arc groove (not shown) to match, the position of the limit plate 230 limit plate 230 corresponding and described with the arc groove
It is connect between the support base 220 by bolt 240.Specifically, the sample stage body 100 is arranged in the arc groove
In, side is contacted with the top of support base 220, and another contacts with limit plate 230, can be adjusted by adjusting the bolt 240
Position between whole limit plate 230 and support base 220, and then sample stage body 100 is fixed.
Preferably, the collet 200 is made of nonmagnetic metal material, sample will not be impacted.
Preferably, the multifunctional sample platform further includes two-way 300 for carrying the collet 200.Emphasis ginseng
According to Fig. 3 a and Fig. 3 b, described two-way 300 include: pedestal 310, be provided on the pedestal 310 and shape and 200 phase of collet
The holding tank 320 matched and the adjusting bolt 330 being divided on the side wall of 320 two sides of holding tank, certain side wall is institute
State a part of pedestal 310.Specifically, the collet 200 is placed in the holding tank 320, and by the adjusting bolt 330
It is fixed.Further, the both ends of the pedestal 310 are additionally provided with for the fixing bolt 340 with external affixed connection, are led to
Crossing the fixing bolt 340 can be fixedly mounted on described two-way 300 in different systems, realize and grasp to the difference of sample
Make.Preferably, described two-way 300 is made of nonmagnetic metal material.
Further, in the present embodiment, the sample stage body 100 is the positive top for being placed on the collet 200,
And the collet 200 is to tile to be placed in the holding tank 320 after being laterally rotated by 90 °, therefore the holding tank 320
One of side wall height lower than sample in the collet 200 height, to avoid sample is blocked, it is ensured that the side of sample
It can be observed and operate with surface.
With continued reference to Fig. 1 a to Fig. 3 b, below with accurate FIB delamination, nano surface probe electrical testing and plane TEM failure
For analysis, the multifunctional workstation of the utility model is described in detail.
For FIB cutting, get sample and FIB delamination:
Failure positioning analysis is carried out to sample, then FIB In situcut is carried out to sample and is got sample；
Sample fixation is pasted onto the window 110 of sample stage body 100, and sample stage body 100 is fixed on collet
In 200；
In FIB system, is directly etched using using ion beam along sample surfaces, etch into the technique where defect always
Layer.
It is analyzed for nano surface probe electrical testing:
Sample fixation is pasted onto the window 110 of sample stage body 100, and sample stage body 100 is fixed on collet
In 200, then collet 200 is fixed in two-way 300.
Sample stage body 100 is rotated by 90 ° using two-way 300, that is, allow surveyed sample surface upward.
Then, two-way 300 and sample therein are placed into progress surface electrical testing in nano-probe equipment together.
For the preparation of plane TEM sample and plane TEM failure analysis:
Behind the failure structure or the position that determine sample using nano-probe electrical testing；
Sample fixation is pasted onto the window 110 of sample stage body 100, and sample stage body 100 is fixed on collet
In 200, then collet 200 is fixed in two-way 300.
Sample stage body 100 is rotated by 90 ° using two-way 300, that is, surveyed sample is allowed to be established, to make sample
Surface is upward.
Sample is thinned according to normal TEM sample preparation method in FIB system；
Sample stage body 100 and sample are taken out and are placed directly into TEM sample bar, TEM sample analysis is started.
Compared in the prior art, multifunctional sample platform provided by the utility model can be placed directly in TEM system
In specimen holder, without removing sample, tem analysis can be realized.And sample can realize sample without leaving sample stage
Surface and section two-way fixed point, accurate FIB delamination and in-situ nano probe electric performance test.In addition, sample stage can be with
Nanoscale circuit wiring is carried out using ion etching, is powered on TEM failure analysis in situ.
From the foregoing, it will be observed that the multifunctional sample platform of the utility model can be applied in existing FIB and TEM system, simultaneously
It can also realize the atom position FIB delamination of sample, the active set of three step failure analysis technique of nano-probe electrical testing and tem analysis
At.I.e. in the process of entire failure analysis, sample transfer is not needed, therefore, the multifunctional sample platform of the utility model can be with
The success rate and efficiency for improving entire failure analysis process avoid and reduce breakage of the sample in failure analysis work, lose
And pollution.
Obviously, it is practical new without departing from this can to carry out various modification and variations to utility model by those skilled in the art
The spirit and scope of type.If in this way, these modifications and variations of the present invention belong to the utility model claims and its
Within the scope of equivalent technologies, then the utility model is also intended to including these modification and variations.
Claims (10)
1. a kind of multifunctional sample platform characterized by comprising sample stage body, wherein the sample stage body is using non-magnetic
Property material or non-conductive material be made, the sample stage body is cutting for semi-cylindrical and the semi-cylindrical sample stage body
At least one window is offered on face.
2. multifunctional sample platform as described in claim 1, which is characterized in that the diameter of the sample stage body is 2-5mm, thick
Degree is 80-120 μm.
3. multifunctional sample platform as described in claim 1, which is characterized in that be provided with nanoscale electricity in the sample stage body
Road.
4. multifunctional sample platform as described in claim 1, which is characterized in that further include for carrying the sample stage body
Collet.
5. multifunctional sample platform as claimed in claim 4, which is characterized in that the collet includes: pedestal, is located at the pedestal
On support base and the limit plate of the support base side is set, wherein offered on the support base and the sample
The arc groove that the cambered surface of playscript with stage directions body matches, the position of the limit plate limit plate corresponding and described with the arc groove with it is described
It is bolted between support base.
6. multifunctional sample platform as claimed in claim 4, which is characterized in that the collet is made of nonmagnetic metal material.
7. multifunctional sample platform as claimed in claim 4, which is characterized in that further include for carrying the two-way of the collet
Platform.
8. multifunctional sample platform as claimed in claim 7, which is characterized in that described two-way include: pedestal, be provided with it is described
On pedestal and shape and the collet holding tank to match and the adjusting bolt being divided on the side wall of the holding tank two sides, and
And one of Sidewall Height of the holding tank is lower than the height of sample in the collet.
9. multifunctional sample platform as claimed in claim 8, which is characterized in that the both ends of the pedestal be additionally provided with for it is outer
The fixing bolt of the affixed connection in portion.
10. multifunctional sample platform as claimed in claim 7, which is characterized in that described two-way uses nonmagnetic metal material system
At.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821600111.6U CN209182269U (en) | 2018-09-29 | 2018-09-29 | Multifunctional sample platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821600111.6U CN209182269U (en) | 2018-09-29 | 2018-09-29 | Multifunctional sample platform |
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| Publication Number | Publication Date |
|---|---|
| CN209182269U true CN209182269U (en) | 2019-07-30 |
Family
ID=67360625
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821600111.6U Active CN209182269U (en) | 2018-09-29 | 2018-09-29 | Multifunctional sample platform |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109239114A (en) * | 2018-09-29 | 2019-01-18 | 胜科纳米（苏州）有限公司 | Multifunctional sample platform |
| CN111751183A (en) * | 2020-07-03 | 2020-10-09 | 长江存储科技有限责任公司 | Sample table column and manufacturing method thereof |
-
2018
- 2018-09-29 CN CN201821600111.6U patent/CN209182269U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109239114A (en) * | 2018-09-29 | 2019-01-18 | 胜科纳米（苏州）有限公司 | Multifunctional sample platform |
| CN111751183A (en) * | 2020-07-03 | 2020-10-09 | 长江存储科技有限责任公司 | Sample table column and manufacturing method thereof |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: Room 507, building 09, Northwest District, Suzhou nano City, No. 99, Jinjihu Avenue, Suzhou Industrial Park, China (Jiangsu) pilot Free Trade Zone, Suzhou, Jiangsu 215000 Patentee after: Shengke nano (Suzhou) Co.,Ltd. Address before: 215123 507, building 09, Northwest District, Suzhou nano City, No. 99, Jinjihu Avenue, Suzhou Industrial Park, Jiangsu Province Patentee before: SHENGKE NANO (SUZHOU) Co.,Ltd. |
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