CN209175539U - A kind of adjustable polishing cloth conditioner discs in diamond grinding block position - Google Patents
A kind of adjustable polishing cloth conditioner discs in diamond grinding block position Download PDFInfo
- Publication number
- CN209175539U CN209175539U CN201821468579.4U CN201821468579U CN209175539U CN 209175539 U CN209175539 U CN 209175539U CN 201821468579 U CN201821468579 U CN 201821468579U CN 209175539 U CN209175539 U CN 209175539U
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- China
- Prior art keywords
- groove
- diamond grinding
- grinding block
- disk body
- polishing cloth
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- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The utility model discloses a kind of adjustable polishing cloth conditioner discs in diamond grinding block position, disk body is equipped with several grooves for being used to place diamond grinding block, groove includes being arranged along disk body central axis and across the first groove body of disk body and the second groove body being symmetrically set positioned at the first groove body two sides, second groove body one end is connect with the first groove body, the other end is circumferentially attached with disk body, the scale for positioning to diamond grinding block is equipped in groove, sliding slot is symmetrically arranged on the two sides side wall above scale in groove, diamond grinding block both ends are slidably connected with sliding slot, equidistant intervals are equipped with several horizontally disposed placing grooves on the side wall being located at below sliding slot, the support rod that diamond grinding block is provided symmetrically at the center on the end face of groove, one end of support rod and diamond grinding block are articulated and connected close to the end face of groove, The other end horizontal connection of support rod has the supporting block that can be embedded in placing groove, and disk body can be used for being pasted on polishing machine polishing disk, simple and convenient.
Description
Technical field
The utility model relates to a kind of polishing cloth conditioner discs, specifically a kind of adjustable polishing in diamond grinding block position
Cloth conditioner discs.
Background technique
Silicon is with diamond crystal structures, is a kind of partly to lead well with the hard brittle material of Covalent bonding together between atom
Body material, currently forming 90% or more of IC semiconductor chip is all silicon wafer, for the printed IC on silicon wafer,
And be tightly combined with other elements, the necessary silicon wafer that is straight, and cutting through silicon chip cutter in the surface of silicon wafer, surface has
Requirement is not achieved in score, and polishing machine is needed to polish silicon chip surface, reduces silicon chip surface and occurs during the grinding process
Surface scratching；
During polishing machine polished silicon slice, the pattern on polishing cloth surface generates direct decision to the pattern of silicon wafer and makees
With needing to carry out polishing cloth surface topography sometimes to reach high-precision polish results, generating high-precision wafer topography
Finishing, the prior art have it is manual modified with diamond grinding block, such dressing method more flexibly but to the pattern of polishing cloth hardly possible
With control；Or some is modified ring with diamond and is modified, the polishing cloth pattern repaired is easily controllable, but pattern fixation can not adjust
It is whole.
Utility model content
To solve the above problems, the utility model provides a kind of adjustable polishing cloth conditioner discs in diamond grinding block position, this
Polishing cloth conditioner discs, which can be used for modifying, to be pasted on the polishing disk of polishing machine, simple and convenient.
The utility model is achieved through the following technical solutions:
A kind of adjustable polishing cloth conditioner discs in diamond grinding block position, including disk body are provided with several on the disk body
For placing the groove of diamond grinding block, the groove include be arranged along disk body central axis and across the first groove body of disk body with
And the second groove body being symmetrically set positioned at the first groove body two sides, one end of second groove body are connect with the first groove body, institute
It states the second groove body other end and disk body is circumferentially attached；
The scale for positioning to diamond grinding block, two be located above scale in the groove are provided in the groove
Sliding slot is symmetrically arranged on the side wall of side, both ends and the sliding slot of the diamond grinding block are slidably connected, in the side being located at below sliding slot
Equidistant intervals are equipped with several horizontally disposed placing grooves, center of the diamond grinding block on the end face of groove on wall
The support rod that place is provided symmetrically, one end of the support rod and diamond grinding block are articulated and connected close to the end face of groove, institute
The other end horizontal connection for stating support rod has the supporting block that can be embedded in placing groove.
Further, the disk body is circle.
Further, the diameter of carrier plate of diameter and polishing machine of the disk body is identical.
Further, the thickness of carrier plate of thickness and polishing machine of the disk body is identical.
Further, the ontology of the diamond grinding block is the stainless steel plate of rectangle, is coated on the end face far from groove
Silicon carbide layer.
Further, the support rod is retractable structure.
The utility model has the beneficial effects that:
The polishing cloth conditioner discs of the utility model can be used for finishing and be pasted on the polishing disk of polishing machine, simple and convenient, lead to
The diamond grinding block crossed in disk body groove polishes polishing cloth, and diamond grinding block can slide in the groove of disk body, when
After diamond grinding block is adapted to the position of needs by scale, support rod is elongated to length appropriate, supporting block insertion is put
It sets in slot, diamond grinding block is fixed, start polishing machine, polishing cloth is polished by diamond grinding block, when needing to adjust
When the position of diamond grinding block, supporting block is detached from out of placing groove, after freely slidable diamond grinding block to suitable position
It fixes again.
Detailed description of the invention
Fig. 1 is the overall structure diagram of the utility model；
Fig. 2 is the top view of the utility model；
Fig. 3 is the structural schematic diagram of the utility model groove；
Fig. 4 is the cross-sectional view of the diamond grinding block of the utility model；
Appended drawing reference: 1, disk body, 2, diamond grinding block, 3, groove, the 301, first groove body, the 302, second groove body, 4, scale,
5, placing groove, 6, support rod, 7, supporting block, 8, silicon carbide layer.
Specific embodiment
Below in conjunction with attached drawing of the invention, the technical scheme in the embodiment of the utility model is carried out clearly and completely
Description.
A kind of adjustable polishing cloth conditioner discs in diamond grinding block position, including disk body 1, the disk body 1 are circle, the disk
The diameter of carrier plate of diameter and polishing machine of body 1 is identical, the thickness and the thickness phase of the carrier plate of polishing machine of the disk body 1
Together, several are provided on the disk body 1 for placing the groove 3 of diamond grinding block 2, the ontology of the diamond grinding block 2 is
The stainless steel plate of rectangle is coated with silicon carbide layer 8 on the end face far from groove, and the groove 3 includes setting along 1 central axis of disk body
It sets and across the first groove body 301 of disk body 1 and the second groove body 302 being symmetrically set positioned at 301 two sides of the first groove body, institute
The one end for stating the second groove body 302 is connect with the first groove body 301, and 302 other end of the second groove body and disk body 1 are circumferentially attached, institute
Stating the first groove body 301 realizes diamond grinding block 2 free to slide across the symmetrical two sides of disk body 1；
It is provided with the scale 4 for positioning to diamond grinding block in the groove 3, is located above scale in the groove 3
Two sides side wall on be symmetrically arranged with sliding slot, the both ends of the diamond grinding block 2 are slidably connected with sliding slot, be located at sliding slot below
Side wall on equidistant intervals be equipped with several horizontally disposed placing grooves 5, the diamond grinding block 2 is on the end face of groove
Center at the support rod 6 that is provided symmetrically, the support rod 6 is retractable structure, one end of the support rod 6 and Buddha's warrior attendant
Stone mill block is articulated and connected close to the end face of groove, and the other end horizontal connection of the support rod 6 has the support that can be embedded in placing groove
Block 7；
When polishing cloth needs to modify, conditioner discs are pasted on the polishing disk of polishing machine, it is simple and convenient, it is recessed by disk body
Diamond grinding block 2 in slot polishes polishing cloth, and diamond grinding block 2 can slide in the groove 3 of disk body, works as diamond
After abrading block 2 is adapted to the position of needs by scale 4, support rod 6 is elongated and arrives length appropriate, supporting block 7 is embedded in and is placed
It is in slot 5, diamond grinding block 2 is fixed, start polishing machine, polishing cloth is polished by diamond grinding block 2, when needing to adjust
When the position of diamond grinding block 2, supporting block 7 is detached from out of placing groove 5, freely slidable diamond grinding block 2 arrives suitable position
It postpones and fixes again.
The basic principles and main features and advantage of the utility model, the technical staff of the industry has been shown and described above
It should be appreciated that the present utility model is not limited to the above embodiments, the above embodiments and description only describe this
The principle of utility model, on the premise of not departing from the spirit and scope of the utility model, the utility model also has various change
And improvement, these various changes and improvements fall within the scope of the claimed invention, the utility model requires protection scope
It is defined by the appending claims and its equivalent thereof.
Claims (6)
1. a kind of adjustable polishing cloth conditioner discs in diamond grinding block position, it is characterised in that: including disk body (1), the disk body (1)
On be provided with several for placing the grooves (3) of diamond grinding block (2), the groove (3) includes along disk body (1) central axis
It is arranged and across the first groove body (301) of disk body (1) and the second slot being symmetrically set positioned at the first groove body (301) two sides
One end of body (302), second groove body (302) is connect with the first groove body (301), the second groove body (302) other end with
Disk body (1) is circumferentially attached；
It is provided with the scale (4) for positioning to diamond grinding block in the groove (3), is located on scale in the groove (3)
It is symmetrically arranged with sliding slot on the two sides side wall of side, the both ends of the diamond grinding block (2) are slidably connected with sliding slot, are being located at sliding slot
Equidistant intervals are equipped with several horizontally disposed placing grooves (5) on the side wall of lower section, and the diamond grinding block (2) is close to groove
End face on center at the support rod (6) that is provided symmetrically, one end of the support rod (6) and diamond grinding block are close to recessed
The end face of slot is articulated and connected, and the other end horizontal connection of the support rod (6) has the supporting block (7) that can be embedded in placing groove.
2. the adjustable polishing cloth conditioner discs in a kind of diamond grinding block position according to claim 1, it is characterised in that: described
Disk body (1) is circle.
3. the adjustable polishing cloth conditioner discs in a kind of diamond grinding block position according to claim 1, it is characterised in that: described
The diameter of disk body (1) is identical as the diameter of the carrier plate of polishing machine.
4. the adjustable polishing cloth conditioner discs in a kind of diamond grinding block position according to claim 1, it is characterised in that: described
The thickness of disk body (1) is identical as the thickness of the carrier plate of polishing machine.
5. the adjustable polishing cloth conditioner discs in a kind of diamond grinding block position according to claim 1, it is characterised in that: described
The ontology of diamond grinding block (2) is the stainless steel plate of rectangle, is coated with silicon carbide layer (8) on the end face far from groove.
6. the adjustable polishing cloth conditioner discs in a kind of diamond grinding block position according to claim 1, it is characterised in that: described
Support rod (6) is retractable structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821468579.4U CN209175539U (en) | 2018-09-10 | 2018-09-10 | A kind of adjustable polishing cloth conditioner discs in diamond grinding block position |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821468579.4U CN209175539U (en) | 2018-09-10 | 2018-09-10 | A kind of adjustable polishing cloth conditioner discs in diamond grinding block position |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209175539U true CN209175539U (en) | 2019-07-30 |
Family
ID=67359456
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821468579.4U Active CN209175539U (en) | 2018-09-10 | 2018-09-10 | A kind of adjustable polishing cloth conditioner discs in diamond grinding block position |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209175539U (en) |
-
2018
- 2018-09-10 CN CN201821468579.4U patent/CN209175539U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 471000 No. 99 Binhe North Road, Luoyang hi tech Industrial Development Zone, Henan Patentee after: Mesk Electronic Materials Co., Ltd Address before: 471000 No. 99 Binhe North Road, Luoyang hi tech Industrial Development Zone, Henan, Luoyang Patentee before: MCL ELECTRONIC MATERIALS Ltd. |
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| CP03 | Change of name, title or address |