CN209173692U - Exhaust treatment system - Google Patents
Exhaust treatment system Download PDFInfo
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- CN209173692U CN209173692U CN201821868661.6U CN201821868661U CN209173692U CN 209173692 U CN209173692 U CN 209173692U CN 201821868661 U CN201821868661 U CN 201821868661U CN 209173692 U CN209173692 U CN 209173692U
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Abstract
A kind of exhaust treatment system provided by the utility model, including interconnected washing chamber, combustion chamber and recovery room, when being passed through setting gas in the combustion chamber, the first pneumatic operated valve on first water inlet line of the washing chamber is opened, third pneumatic operated valve on the water return pipeline is closed, and is passed through the washing water of the second setting flow into the washing chamber by first water inlet line；When not being passed through setting gas, first pneumatic operated valve is closed, the third pneumatic operated valve is opened, and the recycle-water in the recovery room is back flowed back into the washing chamber by first water return pipeline and is recycled, when being passed through and not being passed through setting gas, using different water-use models, it can also be saved water in the case where guaranteeing exhaust-gas treatment effect, reduce the operating cost of equipment.
Description
Technical field
The utility model relates to field of semiconductor manufacture more particularly to a kind of exhaust treatment systems.
Background technique
In semiconductor technology processing procedure, diffusion furnace tube equipment is a kind of very common equipment, is mainly used for diffusion, oxygen
Change, annealing and alloying technology, while applying also for the distinct temperature processing to material.Diffusion furnace tube equipment during the work time can
Exhaust gas is generated, if these exhaust gas can cause greatly to pollute without processing direct emission to air and environment, so usually diffusion
Furnace tube device can all connect an exhaust treatment system, in order to effectively handle exhaust gas, existing exhaust treatment system water consumption
All very big, the operating cost of equipment is very high.
Utility model content
The purpose of this utility model is to provide a kind of exhaust treatment systems, to reduce the water consumption of exhaust treatment system.
In order to achieve the above object, the utility model provides a kind of exhaust treatment system, including washing chamber, combustion chamber and
Recovery room, the washing chamber and the combustion chamber are connected to the recovery room；
The washing chamber has the first water inlet line, for receiving washing water and the washing water being passed through to the washing
In room, and the first pneumatic operated valve is provided on first water inlet line；
The recovery room has the second water inlet line, for receiving washing water and the washing water being passed through to the recycling
In room, and the second pneumatic operated valve is provided on second water inlet line, and between the recovery room and the washing chamber also
It is connected to by one first water return pipeline, is provided with third pneumatic operated valve on first water return pipeline；
Second pneumatic operated valve interval, one setting time is opened, with logical to the recovery room by second water inlet line
The washing water for entering the first setting flow, when being passed through setting gas in the combustion chamber, first pneumatic operated valve is opened, described
Third pneumatic operated valve is closed, the washing water of the second setting flow is passed through into the washing chamber by first water inlet line,
The first setting flow is less than the second setting flow；It is described when not being passed through the setting gas in the combustion chamber
First pneumatic operated valve is closed, and the third pneumatic operated valve is opened, and the recycle-water in the recovery room is made to pass through first return pipe
Road back flows back into the washing chamber.
Optionally, the combustion chamber includes the combustion chamber being sequentially communicated, water curtain chamber and cooling chamber, and the water curtain chamber is located at institute
It states between combustion chamber and the cooling chamber, the setting gas flows into the water curtain chamber after burning in the combustion chamber, through institute
It states to flow into the cooling chamber after water curtain chamber is isolated and be flowed into the recovery room after cooling.
Optionally, the exhaust treatment system further includes the second water return pipeline, and the second water return pipeline connection is described to return
Room and the combustion chamber are received, the recycle-water in the recovery room is back flowed back by the water curtain chamber by second water return pipeline
And in the cooling chamber.
Optionally, the 4th pneumatic operated valve that the recovery room also has an outlet conduit and is set on the outlet conduit,
When the water level of the recycle-water in the recovery room reaches a setting height, the 4th pneumatic operated valve is opened, and passes through the water outlet
Recycle-water in the recovery room is discharged pipeline.
Optionally, first flow adjuster is also respectively provided on first water inlet line and second water inlet line
And second flow adjuster, to adjust the washing water flow in first water inlet line or second water inlet line.
Optionally, it is described first setting flow be less than or equal to 4 liters/min, it is described second setting flow be more than or equal to 12 liters/
Minute.
Optionally, the gas that sets is sour gas.
In exhaust treatment system provided by the utility model, including interconnected washing chamber, combustion chamber and recovery room,
It is provided with the first pneumatic operated valve on first water inlet line of the washing chamber, is provided on the second water inlet line of the recovery room
Two pneumatic operated valves, a water return pipeline are connected to the recovery room and the washing chamber and are provided with third pneumatic operated valve, and described second
One setting time of pneumatic operated valve interval is passed through the washing water of the first setting flow to the recovery room, sets when being passed through in the combustion chamber
When determining gas, first pneumatic operated valve is opened, the third pneumatic operated valve is closed, and is washed by first water inlet line to described
The washing water that the second setting flow greater than the first setting flow is passed through in room is washed, to increase the dosage for being passed through washing water；When not
When being passed through setting gas, first pneumatic operated valve is closed, and the third pneumatic operated valve is opened, and second water inlet line is every certain
Time opens once, and the recycle-water in the recovery room is back flowed back into the washing chamber by first water return pipeline and followed
Ring utilizes, the utility model by combustion chamber be passed through setting gas and it is logical set gas when, using different water-use models,
It can also be saved water in the case where guaranteeing exhaust-gas treatment effect, reduce the operating cost of equipment.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of exhaust treatment system；
Fig. 2 is the structural schematic diagram of exhaust treatment system provided by the embodiment of the utility model；
In figure, appended drawing reference are as follows:
The washing chamber 1'-；The washing chamber 1-；
The first water inlet line of 11'-；The first water inlet line of 11-；
The combustion chamber 2'-；The combustion chamber 2-；21- combustion chamber；22- water curtain chamber；23- cooling chamber；
3'- recovery room；3- recovery room；
The second water inlet line of 31'-；The second water inlet line of 31-；
The first water return pipeline of 4'-；The first water return pipeline of 4-；
The first pneumatic operated valve of K1'-；The first pneumatic operated valve of K1-；
The second pneumatic operated valve of K2'-；The second pneumatic operated valve of K2-；
K3'- third pneumatic operated valve；K3- third pneumatic operated valve；
K4- normally-closed pneumatic valve；
L1- first flow adjuster；L2- second flow adjuster；
The second water return pipeline of 5-；6- third water inlet line.
Specific embodiment
Fig. 1 is a kind of structural schematic diagram of exhaust treatment system, including washing chamber 1', combustion chamber 2' and recovery room 3', institute
It states the washing chamber 1' and combustion chamber 2' and is respectively positioned on the top of the recovery room 3', and washing chamber 1', combustion chamber 2' and recovery room
It is interconnected between 3', the washing chamber 1' has the first water inlet line 11', and is provided on the first water inlet line 11'
First pneumatic operated valve K1', the recovery room 3' have the second water inlet line 31', and the is provided on the second water inlet line 31'
Two pneumatic operated valve K2', one first water return pipeline 4' are connected to the recovery room 3' and washing chamber 1', and first water return pipeline
Third pneumatic operated valve K3' is provided on 4'.The exhaust treatment system has systemic circulation mode and interior circulation pattern.The systemic circulation
Mode opens the first pneumatic operated valve K1', simultaneously closes off the second pneumatic operated valve K2' and the third pneumatic operated valve K3', passes through described the
One water inlet line 11' is passed through washing water into the washing chamber 1', and such water consumption is very big (in the combustion chamber 2' not
Constantly there is setting gas to be passed through), but can guarantee the effect of exhaust-gas treatment, to sour gas and treatment effect dusty
Preferably；The interior circulation pattern opens the second pneumatic operated valve K2' and third pneumatic operated valve K3', and it is pneumatic to close described first
Valve K1' is passed through washing water to the recovery room 3' by the second water inlet line 31', and the recycle-water in recovery room 3' is logical
It crosses the first water return pipeline 4' to back flow back into the washing chamber 1', interior circulation pattern water consumption is smaller, but the effect of exhaust-gas treatment
Fruit is simultaneously bad, for peracidity processing procedure, can not effectively keep the neutrality of recycle-water, equipment component is easy to be invaded
Erosion；Further, the switching of both modes is also extremely inconvenient, needs to shut down and just can be carried out pattern switching.
Based on this, the utility model provides a kind of exhaust treatment system, including interconnected washing chamber, combustion chamber and
Recovery room, is provided with the first pneumatic operated valve on the first water inlet line of the washing chamber, on the second water inlet line of the recovery room
It is provided with the second pneumatic operated valve, a water return pipeline is connected to the recovery room and the washing chamber and is provided with third pneumatic operated valve,
Second pneumatic operated valve interval, one setting time is passed through the washing water of the first setting flow to the recovery room, when the combustion chamber
In when being passed through setting gas, first pneumatic operated valve is opened, third pneumatic operated valve closing passes through first water inlet line
It is passed through the washing water of the second setting flow greater than the first setting flow, into the washing chamber to increase the use of the washing water
Amount；When not being passed through setting gas, first pneumatic operated valve is closed, and the third pneumatic operated valve is opened, second water inlet line
It opens once at regular intervals, and the recycle-water in the recovery room back flows back into described wash by first water return pipeline
It washs in room and recycles, the utility model passes through combustion chamber when being passed through setting gas and logical setting gas, using different
Water-use model can also save water in the case where guaranteeing exhaust-gas treatment effect, reduce the operating cost of equipment.
Specific embodiment of the present utility model is described in more detail below in conjunction with schematic diagram.It is retouched according to following
It states and claims, will be become apparent from feature the advantages of the utility model.It should be noted that attached drawing is all made of very simplification
Form and use non-accurate ratio, only to it is convenient, lucidly aid in illustrating the purpose of the utility model embodiment.
Fig. 2 is the structural schematic diagram of exhaust treatment system provided in this embodiment.As shown in Fig. 2, the exhaust-gas treatment system
System includes washing chamber 1, combustion chamber 2 and recovery room 3, and the washing chamber 1 and the combustion chamber 2 are connected to the recovery room 3；Institute
Stating washing chamber 1 has the first water inlet line 11, for receiving washing water and the washing water being passed through into the washing chamber 1,
And the first pneumatic operated valve K1 is provided on first water inlet line 11, the recovery room 3 has the second water inlet line 31, is used for
It receives washing water simultaneously the washing water is passed through into the recovery room 3, and is provided with the on second water inlet line 31
Two pneumatic operated valve K2, and be also connected to by one first water return pipeline 4 between the recovery room 3 and the washing chamber 1, described first
Third pneumatic operated valve K3 is provided on water return pipeline 4；One setting time of the interval second pneumatic operated valve K2 is opened, to pass through described the
Two water inlet lines 31 are passed through the washing water of the first setting flow to the recovery room 3, when being passed through setting gas in the combustion chamber 2
When body, the first pneumatic operated valve K1 is opened, and the third pneumatic operated valve K3 is closed, with by first water inlet line 11 to described
The washing water of the second setting flow is passed through in washing chamber 1, the first setting flow is less than the second setting flow；When described
When not being passed through the setting gas in combustion chamber 2, the first pneumatic operated valve K1 is closed, and the third pneumatic operated valve K3 is opened, and is made
Recycle-water in the recovery room 3 is back flowed back into the washing chamber 1 by first water return pipeline 4.
Specifically, as shown in Fig. 2, the washing chamber 1 and the combustion chamber 2 and the recovery room 3 are interconnected, the combustion
Burning room 2 includes the combustion chamber 21, water curtain chamber 22 and the cooling chamber 23 that are sequentially communicated, the water curtain chamber 22 be located at the combustion chamber 21 with
Between the cooling chamber 23, the cooling chamber 23 is connected to the recovery room 3 and the washing chamber 1, and the combustion chamber 2 has one
Air inlet, the setting gas generated in a diffusion furnace tube equipment are flowed into the combustion chamber 21 by the air inlet, and
Other fuel gas can be also passed through in the combustion chamber 21, the setting gas is usually sour gas and may also be containing big
The dust of amount, in the combustion chamber 21, the setting gas burns after mixing with other described fuel gas, then into
Enter in the water curtain chamber 22, also can further generate dust after the setting gas and other described gas fuel burnings, it is described
There is water curtain, the exhaust gas after burning carries out back-fire relief, cooling, isolation and dilution, and dust is prevented to be attached to chamber in water curtain chamber 22
On wall, the exhaust gas flows into cooling in the cooling chamber 23 again, is flowed into again in the washing chamber 1 and the recovery room 3 later, institute
It states after the washing water entered in washing chamber 1 handles remaining exhaust gas and (absorbs sour gas and dust), then flow into described
Recovery room 3 forms recycle-water, is not constantly all being passed through the setting gas in the combustion chamber 2, for example, may among one day
Have and be passed through within 8-10 hours the setting gas, remaining time is not passed through the setting gas.
The washing chamber 1 has first water inlet line 11, is provided with described first on first water inlet line 11
Pneumatic operated valve K1 and first flow adjuster L1, the recovery room 3 have second water inlet line 31, second water inlet line
The second pneumatic operated valve K2 and second flow adjuster L2, the first flow adjuster L1 and the second flow tune are provided on 31
Section device L2 is respectively used to adjust the washing water flow on first water inlet line 11 and second water inlet line 31, for example,
Can by the first flow adjuster L1 by the second of first water inlet line 11 set flow set as more than or equal to
12 liters/min, flow set is set to be small for the first of second water inlet line 31 by the second flow adjuster L2
In equal to 4 liters/min.Further, the upstream end of first water inlet line 11 and second water inlet line 31 can connect
Together, then jointly a water inlet is connected, to simplify whole equipment.
The washing chamber 1 is connected to the recovery room 3 by the first water return pipeline 4, and the recycle-water in the recovery room 3 is logical
It crosses first water return pipeline 4 and reenters in the washing chamber 1 and recycled, also set on first water return pipeline 4
It is equipped with third pneumatic operated valve K3.It is connected to, described will be returned by the second water return pipeline 5 between the recovery room 3 and the combustion chamber 2
It receives and is recycled in the recycle-water feeding combustion chamber 2 in room 3, to reduce water consumption, and no matter what shape other pneumatic operated valves are
State, second water return pipeline 5 are in the state to circulate always.Further, first water return pipeline 4 and second return pipe
One end that road 5 connects the recovery room 3 can first link together, then connect with the recovery room 3, so, so that it may
Share a suction pump, filter and heat exchanger.Optionally, one end that second water return pipeline 5 connects the combustion chamber 2 can be with
There are two branch pipes for tool, and two branch pipes are connected respectively to the water curtain chamber 22 and cooling chamber 23 of the combustion chamber 2, in the water
Water curtain isolation is formed in curtain chamber 22.
The exhaust treatment system also has major cycle mode and interior circulation pattern, under both modes, described second
Pneumatic operated valve K2 be interval one setting time opens, i.e., every the setting time (such as 300 seconds) pass through described second into
Waterpipe 31 is passed through the washing water of the first setting flow to the recovery room 3, to guarantee that the washing water in the recovery room 3 supplies
It answers, when being passed through setting gas in the combustion chamber 2, needs largely to wash water process exhaust gas at this time, open described first
Pneumatic operated valve K1 closes the third pneumatic operated valve K3, is passed through second into the washing chamber 1 by first water inlet line 11 and sets
The washing water of constant flow, this is main circulation pattern, and the first setting flow is less than the second setting flow, i.e. whole system
In the washing water of existing the second setting of first water inlet line 11 supply flow there is the second water inlet line 31 to supply first again to set
The washing water of constant flow, such mode water consumption is larger, equipment operation higher cost, but imitates to the processing of exhaust gas dusty
Fruit is preferable.When not being passed through the setting gas in the combustion chamber 2, the first pneumatic operated valve K1 is closed, the third is pneumatic
Valve K3 is opened, and is only passed through the washing water of the first setting flow into the recovery room 3 by second water inlet line 31, due to
The first setting flow is less than the second setting flow, and the recycle-water in the recovery room 3 passes through first return water
Pipeline 4 is back flowed back into the washing chamber 1 and is recycled, this is interior circulation pattern, described due to not being passed through under such mode
Gas is set, i.e. Water usage is less, will not influence exhaust-gas treatment effect.
Further, the recovery room 3 also with an outlet conduit (not shown) and be set on the outlet conduit the
Four pneumatic operated valves, when the water level of the recycle-water in the recovery room 3 reaches a setting height, the 4th pneumatic operated valve is opened, and is led to
It crosses the outlet conduit recycle-water in the recovery room 3 is discharged.Alternatively, when the interior circulation pattern recycles a set time
Afterwards, such as after circulation half an hour, the 4th pneumatic operated valve can also be opened by the recycle-water discharge in the recovery room 3, again
Be passed through washing water into the recovery room 3, due to second water inlet line 31 every the setting time to the recovery room 3
It is passed through the washing water of the first setting flow, also the recycle-water in the recovery room 3 is discharged accordingly for the outlet conduit, can be with
Timely the water recycled in entire exhaust treatment system is replaced, avoids the acid excessively high damage of the recycle-water in exhaust treatment system
Each equipment in bad exhaust treatment system, and the effect of exhaust-gas treatment is also more preferable.Further, the recovery room 3 can also be arranged
One third water inlet line 6, normally-closed pneumatic valve K4 is provided on the third water inlet line 6, and the normally-closed pneumatic valve K4 is in normal
Closed state, when needing maintenance down, the recycle-water in the recovery room 3 is drained, can be by opening the normally-closed pneumatic
Valve K4 is passed through washing water into the recovery room 3, to guarantee the process of maintenance.It is understood that the third water inlet line 6
Water inlet can be connected with the water inlet of the water inlet of first water inlet line 11 and second water inlet line 31, it is described
The water outlet of third water inlet line 6 can be connected with the water outlet of second water inlet line 31, to simplify whole system.
Based on this, the utility model additionally provides a kind of waste gas processing method, comprising:
S1: the exhaust treatment system is provided；
S2: second pneumatic operated valve interval, one setting time is opened, with by second water inlet line to the recycling
Room is passed through the washing water of the first setting flow；When being passed through setting gas in the combustion chamber, first pneumatic operated valve is opened,
The third pneumatic operated valve is closed, to be passed through the washing of the second setting flow into the washing chamber by first water inlet line
Water, the first setting flow are less than the second setting flow；When the setting gas is not passed through in the combustion chamber, institute
The closing of the first pneumatic operated valve is stated, the third pneumatic operated valve is opened, and the recycle-water in the recovery room is made to pass through first return water
Pipeline back flows back into the washing chamber.
Specifically, the air inlet of the combustion chamber 2 connects a diffusion furnace tube equipment, generated in the diffusion furnace tube equipment
The setting gas is flowed into the exhaust treatment system by the air inlet, and the diffusion furnace tube equipment is at the exhaust gas
Reason system sends control signal, to control the opening and closing of the first pneumatic operated valve K1 and the third pneumatic operated valve K3, for example,
It is also sent to the exhaust treatment system when diffusion furnace tube equipment is passed through the setting gas to the exhaust treatment system
High level signal, the first pneumatic operated valve K1 are opened, and the third pneumatic operated valve K3 is closed, into major cycle mode, the diffusion
Furnace tube device also sends low electricity to the exhaust treatment system when stopping being passed through the setting gas to the exhaust treatment system
Ordinary mail number, the first pneumatic operated valve K1 are closed, and the third pneumatic operated valve K3 is opened, into interior circulation pattern.
To sum up, in exhaust treatment system provided by the embodiment of the utility model, including interconnected washing chamber, combustion chamber
And recovery room, the first pneumatic operated valve, the second water inlet line of the recovery room are provided on the first water inlet line of the washing chamber
On be provided with the second pneumatic operated valve, a water return pipeline is connected to the recovery room and the washing chamber and to be provided with third pneumatic
Valve, second pneumatic operated valve interval, one setting time is passed through the washing water of the first setting flow to the washing chamber, when the combustion
When being passed through setting gas in burning room, first pneumatic operated valve is opened, the third pneumatic operated valve is closed, and is intake by described first
Pipeline is passed through the washing water of the second setting flow greater than the first setting flow into the washing chamber, is passed through described wash to increase
Wash the flow of indoor washing water；When not being passed through setting gas, first pneumatic operated valve is closed, and the third pneumatic operated valve is opened,
Second water inlet line is opened once at regular intervals, and the recycle-water in the recovery room passes through first return pipe
Road is back flowed back into the washing chamber and is recycled, and the utility model is being passed through setting gas and illogical setting gas by combustion chamber
When body, using different water-use models, it can also be saved water in the case where guaranteeing exhaust-gas treatment effect, reduce the fortune of equipment
Change into this.
The preferred embodiment that above are only the utility model, does not play the role of any restrictions to the utility model.
Any person of ordinary skill in the field, in the range of not departing from the technical solution of the utility model, to the utility model
The technical solution and technology contents of exposure make the variation such as any type of equivalent replacement or modification, belong to without departing from the utility model
Technical solution content, still fall within the protection scope of the utility model.
Claims (7)
1. a kind of exhaust treatment system, which is characterized in that including washing chamber, combustion chamber and recovery room, the washing chamber and described
Combustion chamber is connected to the recovery room；
The washing chamber has the first water inlet line, for receiving washing water and the washing water being passed through to the washing chamber
In, and the first pneumatic operated valve is provided on first water inlet line；
The recovery room has the second water inlet line, for receiving washing water and the washing water being passed through to the recovery room
In, and the second pneumatic operated valve is provided on second water inlet line, and also logical between the recovery room and the washing chamber
The connection of one first water return pipeline is crossed, is provided with third pneumatic operated valve on first water return pipeline；
Second pneumatic operated valve interval, one setting time is opened, to be passed through the to the recovery room by second water inlet line
The washing water of one setting flow, when being passed through setting gas in the combustion chamber, first pneumatic operated valve is opened, the third
Pneumatic operated valve is closed, described to be passed through the washing water of the second setting flow into the washing chamber by first water inlet line
First setting flow is less than the second setting flow；When the setting gas is not passed through in the combustion chamber, described first
Pneumatic operated valve is closed, and the third pneumatic operated valve is opened, and the recycle-water in the recovery room is made to pass through the first water return pipeline weight
It newly flows into the washing chamber.
2. exhaust treatment system as described in claim 1, which is characterized in that the combustion chamber includes the burning being sequentially communicated
Chamber, water curtain chamber and cooling chamber, the water curtain chamber is between the combustion chamber and the cooling chamber, and the setting gas is described
The water curtain chamber is flowed into after burning in combustion chamber, is flowed into after water curtain chamber isolation in the cooling chamber described in being flowed into after cooling
In recovery room.
3. exhaust treatment system as claimed in claim 2, which is characterized in that the exhaust treatment system further includes the second return water
Pipeline, second water return pipeline are connected to the recovery room and the combustion chamber, described will be returned by second water return pipeline
The recycle-water received in room back flows back into the water curtain chamber and the cooling chamber.
4. exhaust treatment system as described in claim 1, which is characterized in that the recovery room also has an outlet conduit and sets
The 4th pneumatic operated valve being placed on the outlet conduit, when the water level of the recycle-water in the recovery room reaches a setting height,
4th pneumatic operated valve is opened, and the recycle-water in the recovery room is discharged by the outlet conduit.
5. exhaust treatment system as described in claim 1, which is characterized in that first water inlet line and second water inlet
First flow adjuster and second flow adjuster are also respectively provided on pipeline, to adjust first water inlet line or described
Washing water flow in second water inlet line.
6. exhaust treatment system as claimed in claim 5, which is characterized in that the first setting flow is less than or equal to 4 liters/min
Clock, the second setting flow are more than or equal to 12 liters/min.
7. such as exhaust treatment system of any of claims 1-6, which is characterized in that the gas that sets is sour gas
Body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821868661.6U CN209173692U (en) | 2018-11-12 | 2018-11-12 | Exhaust treatment system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821868661.6U CN209173692U (en) | 2018-11-12 | 2018-11-12 | Exhaust treatment system |
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| Publication Number | Publication Date |
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| CN209173692U true CN209173692U (en) | 2019-07-30 |
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ID=67364177
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| CN201821868661.6U Active CN209173692U (en) | 2018-11-12 | 2018-11-12 | Exhaust treatment system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111167266A (en) * | 2018-11-12 | 2020-05-19 | 长鑫存储技术有限公司 | Exhaust gas treatment system and method |
-
2018
- 2018-11-12 CN CN201821868661.6U patent/CN209173692U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111167266A (en) * | 2018-11-12 | 2020-05-19 | 长鑫存储技术有限公司 | Exhaust gas treatment system and method |
| CN111167266B (en) * | 2018-11-12 | 2024-03-29 | 长鑫存储技术有限公司 | Exhaust gas treatment system and method |
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