CN111167266A - Exhaust gas treatment system and method - Google Patents
Exhaust gas treatment system and method Download PDFInfo
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- CN111167266A CN111167266A CN201811340431.7A CN201811340431A CN111167266A CN 111167266 A CN111167266 A CN 111167266A CN 201811340431 A CN201811340431 A CN 201811340431A CN 111167266 A CN111167266 A CN 111167266A
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- washing
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- 238000000034 method Methods 0.000 title claims abstract description 18
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 230
- 238000005406 washing Methods 0.000 claims abstract description 114
- 238000011084 recovery Methods 0.000 claims abstract description 81
- 238000002485 combustion reaction Methods 0.000 claims abstract description 58
- 238000001816 cooling Methods 0.000 claims description 17
- 238000009792 diffusion process Methods 0.000 claims description 16
- 239000002253 acid Substances 0.000 claims description 6
- 239000007789 gas Substances 0.000 abstract description 68
- 239000002912 waste gas Substances 0.000 abstract description 22
- 238000004064 recycling Methods 0.000 abstract description 16
- 230000000694 effects Effects 0.000 abstract description 7
- 239000000428 dust Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 238000002955 isolation Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000002378 acidificating effect Effects 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
- B01D53/18—Absorbing units; Liquid distributors therefor
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
Abstract
The invention provides a waste gas treatment system and a waste gas treatment method, which comprise a washing chamber, a combustion chamber and a recovery chamber which are mutually communicated, wherein when set gas is introduced into the combustion chamber, a first pneumatic valve on a first water inlet pipeline of the washing chamber is opened, a third pneumatic valve on a water return pipeline is closed, and washing water with a second set flow rate is introduced into the washing chamber through the first water inlet pipeline; when set gas is not introduced, the first pneumatic valve is closed, the third pneumatic valve is opened, recovered water in the recovery chamber flows into the washing chamber again through the first return water pipeline for recycling, and different water using modes are adopted when the set gas is introduced and not introduced, so that water can be saved under the condition of ensuring the waste gas treatment effect, and the operation cost of equipment is reduced.
Description
Technical Field
The invention relates to the field of semiconductor manufacturing, in particular to a waste gas treatment system and a waste gas treatment method.
Background
In a semiconductor process, a diffusion furnace tube apparatus is a very common apparatus, which is mainly used for diffusion, oxidation, annealing and alloying processes, and is also suitable for special temperature treatment of materials. Diffusion furnace tube equipment can produce waste gas at the working process, if these waste gases directly discharge without handling, can cause very big pollution to air and environment, so diffusion furnace tube equipment all can connect a waste gas treatment system usually, and for effectual processing waste gas, the water consumption of current waste gas treatment system is all very big, and the running cost of equipment is very high.
Disclosure of Invention
The invention aims to provide an exhaust gas treatment system and an exhaust gas treatment method, which are used for reducing the water consumption of the exhaust gas treatment system.
In order to achieve the aim, the invention provides an exhaust gas treatment system which comprises a washing chamber, a combustion chamber and a recovery chamber, wherein the washing chamber and the combustion chamber are communicated with the recovery chamber;
the washing chamber is provided with a first water inlet pipeline which is used for receiving washing water and introducing the washing water into the washing chamber, and a first pneumatic valve is arranged on the first water inlet pipeline;
the recovery chamber is provided with a second water inlet pipeline for receiving washing water and leading the washing water into the recovery chamber, a second pneumatic valve is arranged on the second water inlet pipeline, the recovery chamber and the washing chamber are communicated through a first return water pipeline, and a third pneumatic valve is arranged on the first return water pipeline;
the second pneumatic valve is opened at a set time interval so as to introduce washing water with a first set flow rate into the recovery chamber through the second water inlet pipeline, when set gas is introduced into the combustion chamber, the first pneumatic valve is opened, the third pneumatic valve is closed so as to introduce washing water with a second set flow rate into the washing chamber through the first water inlet pipeline, and the first set flow rate is smaller than the second set flow rate; when the set gas is not introduced into the combustion chamber, the first pneumatic valve is closed, the third pneumatic valve is opened, and the recovered water in the recovery chamber flows into the washing chamber again through the first water return pipeline.
Optionally, the combustion chamber is including the burning chamber, water curtain chamber and the cooling chamber that communicate in proper order, the water curtain chamber is located the burning chamber with between the cooling chamber, it is in to set for gas flow into after the burning in the burning chamber the water curtain chamber, the warp flow into after the water curtain chamber is kept apart after the cooling chamber flows into flow into in the recovery room after cooling.
Optionally, the exhaust gas treatment system further includes a second water return pipe, the second water return pipe is communicated with the recycling chamber and the combustion chamber, and recycled water in the recycling chamber flows into the water curtain cavity and the cooling cavity again through the second water return pipe.
Optionally, the recycling chamber further has an outlet pipe and a fourth pneumatic valve disposed on the outlet pipe, and when the water level of the recycled water in the recycling chamber reaches a set height, the fourth pneumatic valve is opened to discharge the recycled water in the recycling chamber through the outlet pipe.
Optionally, the first water inlet pipeline and the second water inlet pipeline are further provided with a first flow regulator and a second flow regulator respectively, so as to regulate the flow rate of the washing water in the first water inlet pipeline or the second water inlet pipeline.
Optionally, the first set flow rate is less than or equal to 4 liters/minute, and the second set flow rate is greater than or equal to 12 liters/minute.
Optionally, the set gas is an acid gas.
The invention also provides a waste gas treatment method, which comprises the following steps:
providing the exhaust treatment system;
the second pneumatic valve is opened at intervals of a set time so as to introduce washing water with a first set flow rate into the recovery chamber through the second water inlet pipeline; when set gas is introduced into the combustion chamber, the first pneumatic valve is opened, the third pneumatic valve is closed, so that washing water with a second set flow rate is introduced into the washing chamber through the first water inlet pipeline, and the first set flow rate is smaller than the second set flow rate; when the set gas is not introduced into the combustion chamber, the first pneumatic valve is closed, the third pneumatic valve is opened, and the recovered water in the recovery chamber flows into the washing chamber again through the first water return pipeline.
Optionally, the gas inlet of the combustion chamber is connected to a diffusion furnace tube device, and the setting gas generated in the diffusion furnace tube device flows into the waste gas treatment system through the gas inlet.
Optionally, the diffusion furnace tube device sends a control signal to the exhaust gas treatment system to control the opening and closing of the first pneumatic valve and the third pneumatic valve.
The waste gas treatment system comprises a washing chamber, a combustion chamber and a recovery chamber which are communicated with each other, wherein a first pneumatic valve is arranged on a first water inlet pipeline of the washing chamber, a second pneumatic valve is arranged on a second water inlet pipeline of the recovery chamber, a water return pipeline is communicated with the recovery chamber and the washing chamber and is provided with a third pneumatic valve, the second pneumatic valve is used for introducing washing water with a first set flow rate into the recovery chamber at intervals of a set time, when set gas is introduced into the combustion chamber, the first pneumatic valve is opened, the third pneumatic valve is closed, and washing water with a second set flow rate larger than the first set flow rate is introduced into the washing chamber through the first water inlet pipeline so as to increase the use amount of the introduced washing water; when set gas is not introduced, the first pneumatic valve is closed, the third pneumatic valve is opened, the second water inlet pipeline is opened once at regular intervals, and the recovered water in the recovery chamber flows into the washing chamber again through the first water return pipeline for recycling.
Drawings
FIG. 1 is a schematic diagram of an exhaust treatment system;
FIG. 2 is a schematic structural diagram of an exhaust treatment system according to an embodiment of the present invention;
in the figures, the reference numbers are:
1' -a washing chamber; 1-a washing chamber;
11' -a first water inlet conduit; 11-a first water inlet pipe;
2' -a combustion chamber; 2-a combustion chamber; 21-a combustion chamber; 22-water curtain cavity; 23-a cooling chamber;
3' -a recovery chamber; 3-a recovery chamber;
31' -a second water inlet conduit; 31-a second water inlet pipe;
4' -a first water return conduit; 4-a first water return pipeline;
k1' -first pneumatic valve; k1 — first pneumatic valve;
k2' -a second pneumatic valve; k2 — second pneumatic valve;
k3' -a third pneumatic valve; k3 — third pneumatic valve;
k4-normally closed pneumatic valve;
l1 — first flow regulator; l2 — second flow regulator;
5-a second water return pipeline; 6-a third water inlet pipeline.
Detailed Description
Fig. 1 is a schematic structural diagram of an exhaust gas treatment system, which includes a washing chamber 1', a combustion chamber 2' and a recovery chamber 3', wherein the washing chamber 1' and the combustion chamber 2 'are both located above the recovery chamber 3', and the washing chamber 1', the combustion chamber 2' and the recovery chamber 3 'are communicated with each other, the washing chamber 1' has a first water inlet pipe 11', and the first water inlet pipe 11' is provided with a first pneumatic valve K1', the recovery chamber 3' has a second water inlet pipe 31', and the second water inlet pipe 31' is provided with a second pneumatic valve K2', a first water return pipe 4' communicates the recovery chamber 3 'with the washing chamber 1', and the first water return pipe 4 'is provided with a third pneumatic valve K3'. The exhaust treatment system has a large circulation mode and an internal circulation mode. In the large circulation mode, the first pneumatic valve K1 'is opened, the second pneumatic valve K2' and the third pneumatic valve K3 'are closed at the same time, and washing water is introduced into the washing chamber 1' through the first water inlet pipeline 11', so that the water consumption is very large (set gas is not introduced into the combustion chamber 2' all the time), but the waste gas treatment effect can be ensured, and the treatment effect on acid gas and high-dust is better; the internal circulation mode opens the second pneumatic valve K2 'and the third pneumatic valve K3', closes the first pneumatic valve K1', introduces the washing water into the recovery chamber 3' through the second water inlet pipe 31', and the recovery water in the recovery chamber 3' flows back into the washing chamber 1 'through the first water return pipe 4', the water consumption of the internal circulation mode is small, but the effect of waste gas treatment is not good, for the high acid process, the neutrality of the recovery water cannot be effectively maintained, and the equipment parts are easy to be corroded; further, the switching between these two modes is also very inconvenient, requiring a shutdown to switch modes.
Based on the above, the invention provides a waste gas treatment system and method, comprising a washing chamber, a combustion chamber and a recovery chamber which are communicated with each other, wherein a first pneumatic valve is arranged on a first water inlet pipeline of the washing chamber, a second pneumatic valve is arranged on a second water inlet pipeline of the recovery chamber, a water return pipeline is communicated with the recovery chamber and the washing chamber and is provided with a third pneumatic valve, the second pneumatic valve feeds washing water with a first set flow rate into the recovery chamber at intervals of a set time, when set gas is fed into the combustion chamber, the first pneumatic valve is opened, the third pneumatic valve is closed, and washing water with a second set flow rate larger than the first set flow rate is fed into the washing chamber through the first water inlet pipeline so as to increase the using amount of the washing water; when set gas is not introduced, the first pneumatic valve is closed, the third pneumatic valve is opened, the second water inlet pipeline is opened once at regular intervals, and the recovered water in the recovery chamber flows into the washing chamber again through the first water return pipeline for recycling.
The following describes in more detail embodiments of the present invention with reference to the schematic drawings. Advantages and features of the present invention will become apparent from the following description and claims. It is to be noted that the drawings are in a very simplified form and are not to precise scale, which is merely for the purpose of facilitating and distinctly claiming the embodiments of the present invention.
Fig. 2 is a schematic structural diagram of the exhaust gas treatment system according to the present embodiment. As shown in fig. 2, the waste gas treatment system comprises a washing chamber 1, a combustion chamber 2 and a recovery chamber 3, wherein the washing chamber 1 and the combustion chamber 2 are both communicated with the recovery chamber 3; the washing chamber 1 has a first water inlet pipe 11 for receiving washing water and passing the washing water into the washing chamber 1, and a first pneumatic valve K1 is provided on the first water inlet pipe 11, the recovery chamber 3 has a second water inlet pipe 31 for receiving washing water and passing the washing water into the recovery chamber 3, and a second pneumatic valve K2 is provided on the second water inlet pipe 31, and the recovery chamber 3 and the washing chamber 1 are communicated with each other through a first water return pipe 4, and a third pneumatic valve K3 is provided on the first water return pipe 4; the second pneumatic valve K2 is opened at a set time interval to supply a first set flow rate of washing water to the recovery chamber 3 through the second water inlet pipe 31, when a set gas is supplied to the combustion chamber 2, the first pneumatic valve K1 is opened, the third pneumatic valve K3 is closed to supply a second set flow rate of washing water to the washing chamber 1 through the first water inlet pipe 11, and the first set flow rate is smaller than the second set flow rate; when the set gas is not introduced into the combustion chamber 2, the first pneumatic valve K1 is closed, the third pneumatic valve K3 is opened, and the recovered water in the recovery chamber 3 is re-flowed into the washing chamber 1 through the first return water pipe 4.
Specifically, as shown in fig. 2, the washing chamber 1, the combustion chamber 2 and the recovery chamber 3 are communicated with each other, the combustion chamber 2 includes a combustion chamber 21, a water curtain chamber 22 and a cooling chamber 23 which are sequentially communicated, the water curtain chamber 22 is located between the combustion chamber 21 and the cooling chamber 23, the cooling chamber 23 is communicated with the recovery chamber 3 and the washing chamber 1, the combustion chamber 2 has an air inlet, the set gas generated in a diffusion furnace tube device flows into the combustion chamber 21 through the air inlet, and other combustible gases are also introduced into the combustion chamber 21, the set gas is usually an acid gas and may also contain a large amount of dust, the set gas and the other combustible gases are mixed and then combusted in the combustion chamber 21, and then the set gas and the other combustible gases are introduced into the water curtain chamber 22, and the set gas and the other combustible gases also further generate dust after being combusted, the water curtain cavity 22 is provided with a water curtain to perform fire retardance, cooling, isolation and dilution on the combusted waste gas and prevent dust from attaching to the cavity wall, the waste gas flows into the cooling cavity 23 again for cooling and then flows into the washing chamber 1 and the recovery chamber 3, the washing water entering the washing chamber 1 processes the rest waste gas (absorbs acid gas and dust) and then flows into the recovery chamber 3 to form recovered water, the set gas is introduced into the combustion chamber 2 not at all times, for example, the set gas may be introduced for 8-10 hours in one day, and the set gas is not introduced for the rest time.
The washing chamber 1 has the first water inlet pipe 11, the first air operated valve K1 and the first flow regulator L1 are provided on the first water inlet pipe 11, the recovery chamber 3 has the second water inlet pipe 31, the second water inlet pipe 31 is provided with the second air operated valve K2 and the second flow regulator L2, the first flow regulator L1 and the second flow regulator L2 are used to regulate the flow rate of the washing water on the first water inlet pipe 11 and the second water inlet pipe 31, respectively, for example, the second set flow rate of the first water inlet pipe 11 may be set to 12 liters/minute or more by the first flow regulator L1, and the first set flow rate of the second water inlet pipe 31 may be set to 4 liters/minute or less by the second flow regulator L2. Further, the inlet ends of the first water inlet pipe 11 and the second water inlet pipe 31 can be connected together, and then are connected with a water inlet together, so as to simplify the whole equipment.
The washing chamber 1 and the recovery chamber 3 are communicated through a first water return pipe 4, the recovered water in the recovery chamber 3 is re-introduced into the washing chamber 1 through the first water return pipe 4 for recycling, and a third air-operated valve K3 is further provided on the first water return pipe 4. The recycling chamber 3 is communicated with the combustion chamber 2 through a second water return pipeline 5, so that recycled water in the recycling chamber 3 is sent into the combustion chamber 2 for cyclic utilization, water consumption is saved, and the second water return pipeline 5 is in a direct-flow state no matter what state other pneumatic valves are. Further, the ends of the first water return pipe 4 and the second water return pipe 5 connected to the recovery chamber 3 may be connected together and then connected to the recovery chamber 3, so that a water pump, a filter and a heat exchanger may be shared. Alternatively, one end of the second water return pipe 5 connected to the combustion chamber 2 may have two branch pipes, and the two branch pipes are respectively connected to the water curtain cavity 22 and the cooling cavity 23 of the combustion chamber 2 to form a water curtain isolation in the water curtain cavity 22.
The exhaust gas treatment system also has a main circulation mode and an internal circulation mode, in both of which the second pneumatic valve K2 is opened at a set time interval, that is, washing water of a first set flow rate is introduced into the recovery chamber 3 through the second water inlet pipe 31 at every set time (for example, 300 seconds) to ensure the supply of washing water in the recovery chamber 3, when a set gas is introduced into the combustion chamber 2, which requires a large amount of washing water to treat the exhaust gas, the first pneumatic valve K1 is opened, the third pneumatic valve K3 is closed, washing water of a second set flow rate is introduced into the washing chamber 1 through the first water inlet pipe 11, which is the main circulation mode, the first set flow rate is smaller than the second set flow rate, that is, both the first water inlet pipe 11 and the second water inlet pipe 31 in the entire system supply washing water of the second set flow rate, the mode has the advantages of large water consumption and high equipment running cost, but has good treatment effect on the waste gas with high dust. When the set gas is not introduced into the combustion chamber 2, the first pneumatic valve K1 is closed, the third pneumatic valve K3 is opened, the washing water with the first set flow rate is introduced into the recovery chamber 3 only through the second water inlet pipe 31, and since the first set flow rate is smaller than the second set flow rate and the recovered water in the recovery chamber 3 flows into the washing chamber 1 again through the first water return pipe 4 for recycling, the internal circulation mode is adopted, and in this mode, even if the water consumption is low because the set gas is not introduced, the waste gas treatment effect is not affected.
Further, the recycling chamber 3 further has an outlet pipe (not shown) and a fourth pneumatic valve disposed on the outlet pipe, and when the water level of the recycled water in the recycling chamber 3 reaches a set height, the fourth pneumatic valve is opened to discharge the recycled water in the recycling chamber 3 through the outlet pipe. Or, after the internal circulation mode is circulated for a fixed time, for example, for half an hour, the fourth pneumatic valve may also be opened to discharge the recovered water in the recovery chamber 3, and then the washing water is introduced into the recovery chamber 3 again, and since the second water inlet pipe 31 introduces the washing water at the first set flow rate into the recovery chamber 3 every set time, the water outlet pipe also correspondingly discharges the recovered water in the recovery chamber 3, so that the water circulating in the whole exhaust gas treatment system can be replaced in time, the recovered water in the exhaust gas treatment system is prevented from being too acidic to damage each device in the exhaust gas treatment system, and the effect of the exhaust gas treatment is better. Further, the recovery chamber 3 can be further provided with a third water inlet pipeline 6, the third water inlet pipeline 6 is provided with a normally closed pneumatic valve K4, the normally closed pneumatic valve K4 is in a normally closed state, when the machine needs to be stopped for maintenance, the recovered water in the recovery chamber 3 is drained, and the normally closed pneumatic valve K4 can be opened to introduce washing water into the recovery chamber 3 so as to guarantee the maintenance process. It is understood that the inlet of the third water inlet pipe 6 may be connected to the inlet of the first water inlet pipe 11 and the inlet of the second water inlet pipe 31, and the outlet of the third water inlet pipe 6 may be connected to the outlet of the second water inlet pipe 31, so as to simplify the entire system.
Based on this, the present invention also provides an exhaust gas treatment method comprising:
s1: providing the exhaust treatment system;
s2: the second pneumatic valve is opened at intervals of a set time so as to introduce washing water with a first set flow rate into the recovery chamber through the second water inlet pipeline; when set gas is introduced into the combustion chamber, the first pneumatic valve is opened, the third pneumatic valve is closed, so that washing water with a second set flow rate is introduced into the washing chamber through the first water inlet pipeline, and the first set flow rate is smaller than the second set flow rate; when the set gas is not introduced into the combustion chamber, the first pneumatic valve is closed, the third pneumatic valve is opened, and the recovered water in the recovery chamber flows into the washing chamber again through the first water return pipeline.
Specifically, an air inlet of the combustion chamber 2 is connected to a diffusion furnace tube device, the set gas generated in the diffusion furnace tube device flows into the exhaust gas treatment system through the air inlet, the diffusion furnace tube device sends a control signal to the exhaust gas treatment system to control the opening and closing of the first pneumatic valve K1 and the third pneumatic valve K3, for example, the diffusion furnace tube device sends a high level signal to the exhaust gas treatment system when the set gas is introduced into the exhaust gas treatment system, the first pneumatic valve K1 is opened, the third pneumatic valve K3 is closed to enter a main circulation mode, the diffusion furnace tube device sends a low level signal to the exhaust gas treatment system when the set gas is stopped being introduced into the exhaust gas treatment system, the first pneumatic valve K1 is closed, and the third pneumatic valve K3 is opened, and entering an internal circulation mode.
In summary, in the system and method for processing exhaust gas provided by the embodiment of the present invention, the system includes a washing chamber, a combustion chamber and a recovery chamber, which are communicated with each other, wherein a first pneumatic valve is disposed on a first water inlet pipe of the washing chamber, a second pneumatic valve is disposed on a second water inlet pipe of the recovery chamber, a water return pipe is communicated with the recovery chamber and the washing chamber, and a third pneumatic valve is disposed on the water return pipe, the second pneumatic valve supplies washing water with a first set flow rate to the washing chamber at a set time interval, when a set gas is supplied to the combustion chamber, the first pneumatic valve is opened, the third pneumatic valve is closed, and washing water with a second set flow rate larger than the first set flow rate is supplied to the washing chamber through the first water inlet pipe to increase the flow rate of the washing water supplied to the washing chamber; when set gas is not introduced, the first pneumatic valve is closed, the third pneumatic valve is opened, the second water inlet pipeline is opened once at regular intervals, and the recovered water in the recovery chamber flows into the washing chamber again through the first water return pipeline for recycling.
The above description is only a preferred embodiment of the present invention, and does not limit the present invention in any way. It will be understood by those skilled in the art that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (10)
1. An exhaust gas treatment system is characterized by comprising a washing chamber, a combustion chamber and a recovery chamber, wherein the washing chamber and the combustion chamber are communicated with the recovery chamber;
the washing chamber is provided with a first water inlet pipeline which is used for receiving washing water and introducing the washing water into the washing chamber, and a first pneumatic valve is arranged on the first water inlet pipeline;
the recovery chamber is provided with a second water inlet pipeline for receiving washing water and leading the washing water into the recovery chamber, a second pneumatic valve is arranged on the second water inlet pipeline, the recovery chamber and the washing chamber are communicated through a first return water pipeline, and a third pneumatic valve is arranged on the first return water pipeline;
the second pneumatic valve is opened at a set time interval so as to introduce washing water with a first set flow rate into the recovery chamber through the second water inlet pipeline, when set gas is introduced into the combustion chamber, the first pneumatic valve is opened, the third pneumatic valve is closed so as to introduce washing water with a second set flow rate into the washing chamber through the first water inlet pipeline, and the first set flow rate is smaller than the second set flow rate; when the set gas is not introduced into the combustion chamber, the first pneumatic valve is closed, the third pneumatic valve is opened, and the recovered water in the recovery chamber flows into the washing chamber again through the first water return pipeline.
2. The exhaust gas treatment system of claim 1, wherein the combustion chamber comprises a combustion chamber, a water curtain chamber and a cooling chamber, which are sequentially connected, the water curtain chamber is located between the combustion chamber and the cooling chamber, the setting gas flows into the water curtain chamber after being combusted in the combustion chamber, flows into the cooling chamber after being isolated by the water curtain chamber, and flows into the recovery chamber after being cooled.
3. The exhaust gas treatment system of claim 2, further comprising a second water return pipe communicating the recovery chamber and the combustion chamber, wherein the recovered water in the recovery chamber is re-flowed into the water curtain chamber and the cooling chamber through the second water return pipe.
4. The exhaust treatment system of claim 1, wherein the recovery chamber further comprises an outlet conduit and a fourth pneumatic valve disposed on the outlet conduit, wherein when the level of the recovered water in the recovery chamber reaches a set level, the fourth pneumatic valve opens to drain the recovered water from the recovery chamber through the outlet conduit.
5. The exhaust treatment system of claim 1, wherein the first and second water inlet conduits are further provided with first and second flow regulators, respectively, to regulate the flow of the scrubber water within the first or second water inlet conduits.
6. The exhaust gas treatment system according to claim 5, wherein the first set flow rate is 4 liters/minute or less, and the second set flow rate is 12 liters/minute or more.
7. The exhaust treatment system of any of claims 1-6, wherein the set gas is an acid gas.
8. An exhaust gas treatment method, comprising:
providing an exhaust gas treatment system according to any one of claims 1 to 7;
the second pneumatic valve is opened at intervals of a set time so as to introduce washing water with a first set flow rate into the recovery chamber through the second water inlet pipeline; when set gas is introduced into the combustion chamber, the first pneumatic valve is opened, the third pneumatic valve is closed, so that washing water with a second set flow rate is introduced into the washing chamber through the first water inlet pipeline, and the first set flow rate is smaller than the second set flow rate; when the set gas is not introduced into the combustion chamber, the first pneumatic valve is closed, the third pneumatic valve is opened, and the recovered water in the recovery chamber flows into the washing chamber again through the first water return pipeline.
9. The exhaust gas treatment method of claim 8, wherein an inlet of the combustion chamber is connected to a diffusion furnace tube apparatus, and the set gas generated in the diffusion furnace tube apparatus flows into the exhaust gas treatment system through the inlet.
10. The exhaust gas treatment method of claim 9, wherein the diffusion furnace apparatus sends control signals to the exhaust gas treatment system to control the opening and closing of the first and third pneumatic valves.
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| CN201811340431.7A CN111167266B (en) | 2018-11-12 | 2018-11-12 | Exhaust gas treatment system and method |
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| CN201811340431.7A CN111167266B (en) | 2018-11-12 | 2018-11-12 | Exhaust gas treatment system and method |
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| CN111167266B CN111167266B (en) | 2024-03-29 |
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