CN102612626A - Gas processing system - Google Patents

Gas processing system Download PDF

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Publication number
CN102612626A
CN102612626A CN2011800038338A CN201180003833A CN102612626A CN 102612626 A CN102612626 A CN 102612626A CN 2011800038338 A CN2011800038338 A CN 2011800038338A CN 201180003833 A CN201180003833 A CN 201180003833A CN 102612626 A CN102612626 A CN 102612626A
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China
Prior art keywords
gas
combustion
factory
water
pipe arrangement
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CN2011800038338A
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Chinese (zh)
Inventor
中山泉
高桥克典
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Edwards Japan Ltd
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Edwards Japan Ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/32—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00
    • B01D53/323—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00 by electrostatic effects or by high-voltage electric fields
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J15/00—Arrangements of devices for treating smoke or fumes
    • F23J15/08—Arrangements of devices for treating smoke or fumes of heaters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J15/00—Arrangements of devices for treating smoke or fumes
    • F23J15/006—Layout of treatment plant
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J15/00—Arrangements of devices for treating smoke or fumes
    • F23J15/06—Arrangements of devices for treating smoke or fumes of coolers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2252/00—Absorbents, i.e. solvents and liquid materials for gas absorption
    • B01D2252/10—Inorganic absorbents
    • B01D2252/103—Water
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/204—Inorganic halogen compounds
    • B01D2257/2047—Hydrofluoric acid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/55—Compounds of silicon, phosphorus, germanium or arsenic
    • B01D2257/553—Compounds comprising hydrogen, e.g. silanes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J2217/00—Intercepting solids
    • F23J2217/10—Intercepting solids by filters
    • F23J2217/102—Intercepting solids by filters electrostatic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J2217/00—Intercepting solids
    • F23J2217/60—Intercepting solids using settling/precipitation chambers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J2219/00—Treatment devices
    • F23J2219/80—Quenching
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

Abstract

Provided is a gas processing system suitable for achieving cost reduction, size reduction and improvement of maintenability of the entire gas processing system including a pipe. A gas processing system (1) is provided with: a water-cooled combustion-type harm removing device (2) which, with silane that is a semiconductor material gas and a gaseous fluoride such as NF3, CF4, C2F6, SF6, CHF3, or CF6 that is used as a cleaning gas when the interiors of closed chambers (C1, C2 ... Cn) of a plasma CVD device and the like are cleaned by plasma as gases to be processed, performs combustion decomposition and washing dust collection on the gases to be processed; an electric dust collection device (3) which performs electric dust collection on process gas after the combustion decomposition and washing dust collection; and a pipe (4) for sending the process gas after the electric dust collection to a plant scrubber facility (5).

Description

Gas handling system
Technical field
The present invention relates in factory silane (SiH 4) or Nitrogen trifluoride (NF 3) wait gas shape fluoride to carry out the gas handling system of innoxious (removing the evil), particularly relate to the gas handling system that low price, miniaturization, the maintainability of the whole gas handling system of having realized containing pipe arrangement improve.
Background technology
Fig. 2 is system's pie graph of representing one of the gas handling system example in semiconductor fabrication factory in the past or flat-panel monitor factory or the solar panel factory.In this semiconductor fabrication factory, at the C1 of each airtight chamber, C2 ... Carry out for example processing such as CVD (Chemical Vapor Deposition, chemical vapour deposition (CVD)), etching in the Cn.The gas shape material that processing gas such as the silane that uses in these processing or work in-process by-product generate is sent to gas handling system 1 and carries out innoxious.And then, at the C1 of airtight chamber, C2 ... The purge gas such as Nitrogen trifluoride that use in the plasma automated cleaning of Cn are sent to gas handling system 1 too and carry out innoxious.
Said gas handling system 1 uses the combustion-type device 6 of removing the evil to make by the C1 of airtight chamber, C2 ... After the gas that Cn discharges (below be called " pending the gas ") combustion decomposition; Processing gas after the combustion decomposition is delivered to filter bag BF; Utilize filter bag BF will handle dust in the gas (when being silane by the gas of combustion decomposition, silica (SiO then 2) powder becomes dust) capture, be recycled to and subtract among the container B F1.Processing gas behind the dust catching is sent in factory's washer equipment 5 through the pipe arrangement in the factory 4, utilizes the spraying of shower water to carry out disinfections such as acid treatment.
But, when the existing gas handling system of explanation was removed the evil (innoxious) to silane and Nitrogen trifluoride before utilizing, following problem can take place.
(1) since filter bag BF with subtract in the container B F1 SiO 2 powder that combustion decomposition produced that exists through silane and by a large amount of fluoric acids (HF) that combustion decomposition produced of Nitrogen trifluoride through filter bag BF; Thereby the fluoric acid that passes through and filter bag BF or the SiO 2 powder that subtracts in the container B F1 react, and produces silicon tetrafluoride gas (SiF 4).And then the silicon tetrafluoride gas that is produced flows in factory's washer equipment 5 through pipe arrangement 4.Therefore, in factory's washer equipment 5, react through silicon tetrafluoride gas and shower water, the sludge of SiO 2 powder is regenerated in large quantities, thereby the maintenance that need reclaim this sludge continually.
(2) a large amount of fluoric acids that combustion decomposition produced through Nitrogen trifluoride finally carry out acid treatment with factory's washer equipment 5; Thereby pipe arrangement 4 etc. all needs corrosion-resistance treatment (for this corrosion-resistance treatment, for example with reference to patent documentation 1) from the remove the evil whole pipe arrangement system or the filter bag BF of device 6 to factory washer equipment 5 of combustion-type.
(3) be delivered to filter bag BF for contained SiO 2 powder in the processing gas after silicone hydride combustion is decomposed; With in order to reduce the temperature of the processing gas after the combustion decomposition, need make from the remove the evil air output of whole pipe arrangement system (comprising pipe arrangement 4) of device 6 to factory washer equipment 5 of combustion-type is big air quantity (for example about 60m 3/ min); For to should the strong wind amount making whole pipe arrangement system form solid pipe arrangement, or need carry out the corrosion resistant food to pipe arrangement inside and apply, need to adopt the big integrated mill's washer equipment 5 of disposal ability with major diameter and with metals such as stainless steels, the gas handling system integral body that then contains factory's washer equipment 5 must become large-scale and cost an arm and a leg.
The prior art document
Patent documentation
Patent documentation 1: TOHKEMY 2007-232308 communique.
Summary of the invention
The technical problem that invention will solve
The present invention accomplishes in order to solve said problem points, and its purpose is to provide a kind of gas handling system, and it is suitable for realizing containing low price, the miniaturization of the whole gas handling system of pipe arrangement, the raising of maintainability.
The method that is used for the technical solution problem
In order to reach said purpose; The present invention is a kind of gas handling system; Its function is for to carry out harmless treatment with pending gas in factory; It is characterized in that possessing: said pending gas is carried out remove the evil device and to said combustion decomposition with the processing gas of washing behind the control of dust carries out the electric dust collecting means of electric precipitation and the pipe arrangement that the processing gas behind the said electric precipitation is delivered to original washer equipment in the said factory of combustion decomposition and the water-cooled combustion-type of washing control of dust.
Among said the present invention, said pipe arrangement can adopt and comprise by inner face and do not implement metal tube that the metals such as stainless steel of corrosion-resistance treatment constitute, or comprise constituting of the pitch tube that is made up of resins such as vinyl chloride.
Among said the present invention, the above-mentioned gas treatment system also can possess exhaust pump.When constituting, pending gas can be discharged from exhaust pump for this reason.
As pending gas, for example comprise silane as semiconductor material gas; The NF that purge gas when in the airtight chamber with article on plasma body CVD devices such as plasma etc. for example, cleaning uses 3, CF 4, C 2F 6, SF 6, CHF 3, CF 6In gas shape fluoride.
The invention effect
Among the present invention; Through adopting above-mentioned formation; For example in factory, silane or Nitrogen trifluoride are carried out when innoxious as pending gas, as by combustion decomposition product can produce SiO 2 powder or fluoric acid, the remove the evil washing control of dust of device of the water-cooled combustion-type that is positioned at the pipe arrangement upper reaches through utilization carries out the capture of fluoric acid; The concentration that flows into the fluoric acid of pipe arrangement is suppressed in below the TLV value (safe level), thereby the inner face of pipe arrangement needn't be implemented corrosion-resistance treatment.In addition, through utilizing the water-cooled combustion-type washing control of dust in the device of removing the evil, the processing gas after the combustion decomposition is cooled, thereby very little the getting final product of air output in the pipe arrangement, there is no need to adopt major diameter and solid pipe arrangement.Minor diameter such as the minor diameter pitch tube that resins such as the small diameter metal tube whose that the metals such as stainless steel that therefore, can adopt inner face not implement corrosion-resistance treatment constitute, vinyl chloride constitute and simple structure, cheap pipe arrangement.And, because very little the getting final product of air quantity in the pipe arrangement, thus also can to should air quantity with factory's washer device miniaturization, can realize containing low price, the miniaturization of the whole gas handling system of pipe arrangement.
And then; Among the present invention; Owing to adopt through the remove the evil washing control of dust of device of water-cooled combustion-type SiO 2 powder dissolved in the mode that draining is reclaimed; Thereby the amount that flows into the SiO 2 powder of factory's washer equipment significantly reduces and carry out the capture of fluoric acid through the remove the evil washing control of dust of device of water-cooled combustion-type; Therefore following situation can not take place: fluoric acid and SiO 2 powder react, produce silicon tetrafluoride gas in factory's washer equipment, and silicon tetrafluoride gas and the water that is perhaps generated reacts, SiO 2 powder is regenerated in factory's washer equipment, thereby make the maintenance of factory's washer equipment become easy.
Description of drawings
[Fig. 1] will be for being applicable to system's pie graph of the example of semiconductor fabrication factory as the gas handling system of an embodiment of the present invention.
[Fig. 2] is system's pie graph of one of the gas handling system of representing semiconductor fabrication factory in the past or flat-panel monitor factory or solar panel factory example.
The specific embodiment
Following one side is at length explained the best mode that is used for embodiment of the present invention on one side with reference to accompanying drawing.
Fig. 1 will be for being applicable to system's pie graph of the example of semiconductor fabrication factory as the gas handling system of an embodiment of the present invention.
In the semiconductor fabrication factory of Fig. 1, at the C1 of each airtight chamber, C2 ... Carry out for example processing such as CVD (chemical vapour deposition (CVD), Chemical Vapor Deposition), etching in the Cn.The gas shape material that by-product generates in processing gas such as the silane that uses in these processing or the processing through with the C1 of airtight chamber, C2 ... The not shown exhaust pump that Cn connects is vented to the C1 of airtight chamber, C2 ... The outside of Cn.And then, at the C1 of airtight chamber, C2 ... The purge gas such as Nitrogen trifluoride that the plasma of Cn uses in cleaning automatically are vented to the C1 of airtight chamber, C2 too ... The outside of Cn.So, by the C1 of airtight chamber, C2 ... Cn passes through in the gas handling system 1 of pending gas in factory of exhaust pump exhaust by innoxious.
Gas handling system 1 possesses by the said C1 of airtight chamber, C2 ... The pending gas of Cn exhaust carries out remove the evil device 2 and to combustion decomposition with the processing gas of washing behind the control of dust carries out the electric dust collecting means 3 of electric precipitation and the pipe arrangement 4 that the processing gas behind the electric precipitation is delivered to factory's washer equipment 5 (original washer equipment in the factory) of combustion decomposition and the water-cooled combustion-type of washing control of dust.
The water-cooled combustion-type device 2 of removing the evil possesses: have by the C1 of airtight chamber, C2 ... The combustion furnace 20 of the combustion chamber 20A that the said pending gas of Cn exhaust can flow into, be built in combustion furnace 20 washing process chamber (below be called " the built-in washing process chamber of combustion furnace 20B "), be arranged at water washing device 21, the displacement can 22 in combustion furnace 20 downstream to reclaiming and store from the draining of combustion furnace built-in washing process chamber 20B or water washing device 21, and constitute in the following manner: by the C1 of airtight chamber, C2 ... The said pending gas of Cn exhaust moves to said electric dust collecting means 3 through combustion chamber 20A, the built-in washing process chamber of combustion furnace 20B, displacement can 22, water washing device 21 in order.
Among the 20A of combustion chamber, at high temperature will be by the C1 of airtight chamber, C2 ... The said pending gas combustion of Cn exhaust is decomposed.The mode that flows into the built-in washing process chamber of combustion furnace 20B according to the processing gas after the combustion decomposition constitutes.
Among the built-in washing process chamber of the combustion furnace 20B; Through shower water being sprayed, the processing gas after the combustion decomposition being fed this shower water spray area; Utilize shower water will handle gas componant that dust in the gas (for example the SiO 2 powder that produces of the combustion decomposition through silane etc.) captures or utilize shower water will be easy to be dissolved in to handle the water in the gas (for example as the C1 of airtight chamber, C2 ... The fluoric acid that combustion decomposition produced of the Nitrogen trifluoride that the purge gas of Cn uses) captures etc., removing the processing gas of harmful components after combustion decomposition.The harmful components of being removed flow into displacement can 22 with the draining of shower water.In addition, the built-in washing process chamber of this combustion furnace 20B is also as through the gas-cooled cooling device performance of the processing of shower water after with combustion decomposition function.
Water washing device 21 has the shower water zone 21B of portion in the inboard of tubular washer packaging shell 21A, be provided with the gas contacting region territory 21C of portion of the ring packing of having considered that surface area increases, simultaneously according to the gas of handling through combustion chamber 20A and the built-in washing process chamber of combustion furnace 20B (combustion decomposition and wash control of dust after processing gas) mode that flows into inside from the bottom of tubular washer packaging shell 21A constitutes.The shower water of the shower water zone 21B of portion also is conducted to the gas contacting region territory 21C of portion through dripping.As stated, flow into interior combustion decomposition of tubular washer packaging shell 21A and the processing gas behind the washing control of dust flow into the top through the gas contacting region territory 21C of portion the shower water zone 21B of portion.At this moment, the dust in the processing gas is through being captured with the part of the ring packing that is provided with the surface area increase of having considered the gas contacting region territory 21C of portion or the contacting of shower water of the shower water zone 21B of portion.In addition, this water washing device 21 also has the function as the cooling device that combustion decomposition and the processing gas of washing behind the control of dust is further cooled off through shower water.
Displacement can 22 forms the structure that the draining of draining and the water washing device 21 of the built-in washing process chamber of combustion furnaces 20B flows into and makes on the interior water surface of this displacement can 22 and is the structure of gas flow path.Constitute: when the processing gas of handling through the built-in washing process chamber of combustion furnace 20B moves to said water washing device 21 on through the water surface displacement can 22 in, can be cooled off by cold air from the water surface.That is, this displacement can 22 is also as handling gas-cooled cooling device performance function.
Structure below electric dust collecting means 3 adopts: the structure that produces the film that forms current on the structure of potential difference, the inner face 30A between the inner face 30A of the metal bar 31 that is arranged at control of dust tube 30 inner central section and this control of dust tube 30 at control of dust tube 30 and will through the water-cooled combustion-type remove the evil the gas that device 2 handled (combustion decomposition and wash control of dust after processing gas) be directed into the structure of inside from control of dust tube 30 tops.The dust according to flowing in the inner processing gas of control of dust tube 30 constitutes because of thereby potential difference is attracted to the mode that the inner face 30A of control of dust tube 30, the film that flow through the current of inner face caught and washed the displacement can 32 that flows into control of dust tube 30 bottoms.Utilize this electric precipitation to remove processing gas behind the dust through flowing in the pipe arrangement 4 on the water surface in the displacement can 32.That is, the remove the evil displacement can 22 of device 2 of the displacement can of this electric dust collecting means 3 32 and water-cooled combustion-type is same, also as the cooling device performance function of handling gas.In addition, the inner space of control of dust tube 30 is owing to utilizing the current flow through its inner face to form the environment of cold air, thereby this control of dust tube 30 is also as the cooling device performance function of handling gas.
For pipe arrangement 4, the pipe arrangement that can adopt the metal tube etc. of the minor diameter that the pitch tube of the minor diameter that resin such as vinyl chloride constitutes or metals such as stainless steel that inner face is not implemented corrosion-resistance treatment constitute to have minor diameter and simple structure, can obtain at an easy rate.Its reason is of the back.
When having moisture in the pipe arrangement 4, owing to can't can be adhered to and be deposited in the inner face of pipe arrangement 4 by the micro-dust that electric dust collecting means 3 captures, thereby the maintenance of the pipe arrangement 4 that need carry out continually this deposit is removed.Therefore, in this embodiment, adopt following formation:, make in the pipe arrangement 4 to remain on below the constant humidity through with air blast 4A dry air being conducted near the inlet of pipe arrangement 4 always.
Then, the gas treatment action to said gas handling system describes.Explaining, is example with silane and Nitrogen trifluoride in the following gas treatment action specification, and the situation of these gases are removed the evil (innoxious) is described.In addition, these gases pass through exhaust pump from the C1 of airtight chamber, C2 ... Cn flows into the water-cooled combustion-type device 2 of removing the evil.
" removing the evil of silane "
Flow into the water-cooled combustion-type remove the evil device 2 silane at first in combustion furnace 20 by combustion decomposition.When utilizing combustion decomposition to carry out removing the evil of silane, produce SiO 2 powder as product.The SiO 2 powder of this generation is captured by shower water along with the gas (processing gas) that produces through combustion decomposition flows in the built-in washing process chamber of the combustion furnace 20B together, flows into the water-cooled combustion-type through its current and removes the evil in the displacement can 22 of device 2.
Remove the evil to contain in the processing gas in the displacement can 22 of device 2 and fail the SiO 2 powder of being caught by the built-in washing process chamber of combustion furnace 20B moving to the water-cooled combustion-type.The processing gas that contains this SiO 2 powder is through via being cooled on the water surface in the displacement can 22, flows into simultaneously in the water washing device 21 and moves to electric dust collecting means 3 through the gas contacting region territory 21C of portion and the shower water zone 21B of portion.At this moment, the SiO 2 powder of handling in the gas mainly is captured through contacting with shower water.This SiO 2 powder that is captured also flows in the displacement can 22 through the current of shower water.
In the processing gas behind combustion decomposition that moves to electric dust collecting means 3 and washing control of dust, contain the SiO 2 powder that is not captured by combustion furnace built-in washing process chamber 20B or the shower water zone 21B of portion etc.The SiO 2 powder in this processing gas is because of thereby potential difference is attracted to the inner face of control of dust tube 30, the film of current through flowing through inner face is hunted down and wash in the displacement can 32 that flows into control of dust tube 30 bottoms.
From the water-cooled combustion-type remove the evil that combustion furnace built-in washing process chamber 20B or water washing device 21 and the electric dust collecting means 3 of device 2 flows into displacement cans 22,32 and the SiO 2 powder that is recovered because particle diameter is about 1 μ, thereby in the water in displacement can 22 of can swimming, can not precipitate.
" removing the evil of Nitrogen trifluoride "
Flow into water-cooled combustion-type the remove the evil Nitrogen trifluoride of device 2 or the F that forms by plasma 2Same with the silane of explaining before, at first in combustion furnace 20 by combustion decomposition.When utilizing combustion decomposition to carry out removing the evil of Nitrogen trifluoride, produce fluoric acid as product.The fluoric acid that is produced flows in the displacement can 22 through the built-in washing process chamber of combustion furnace 20B, but because fluoric acid dissolves in the shower water, the concentration that flows into the fluoric acid in the displacement can 22 can reduce greatly.Thereby, even if fluoric acid flows in the displacement can 22, the SiO 2 powder and the fluoric acids that are recovered in the displacement can 22 can not react yet.Explain that the shower water (sour draining) that is dissolved with fluoric acid flows in the displacement can 22.
Flowing into residue fluoric acid in the displacement can 22 (not being dissolved in the part in the shower water of the built-in washing process chamber of combustion furnace 20B) through via being cooled on the water surface in the displacement can 22, flow in the water washing device 21 simultaneously.The fluoric acid that flows into moves to electric dust collecting means 3 through the gas contacting region territory 21C of portion and the shower water zone 21B of portion.At this moment, the major part of fluoric acid contacts through the shower water with the shower water zone 21B of portion dissolves in the shower water, thereby the concentration of fluoric acid reduces greatly.This shower water (sour draining) that is dissolved with fluoric acid also flows in the displacement can 22.In addition, fluoric acid is also through being captured in the flowing water that is dissolved in electric dust collecting means 3.The flowing water (sour draining) that is dissolved with fluoric acid flows in the displacement can 32 of electric dust collecting means 3.
The fluoric acid of the trace of in the built-in washing process chamber of combustion furnace 20B, the shower water zone 21B of portion and electric dust collecting means 3, failing to be removed is through flowing into pipe arrangement 4 on the water surface in the displacement can 32, and is interior and move to factory's washer equipment 5 through pipe arrangement 4.In factory's washer equipment 5, through to the fluoric acid of this trace spraying shower water, remove the evil thereby fluoric acid is dissolved in the shower water.
Explain that the sour draining of displacement can 22,32 for example also can be conducted to displacement can 22,32 as supplementing water after utilizing heat exchanger to carry out adjusting that heat removed, carried out PH to handle and utilize filter to carry out the recycling of SiO 2 powder.
Utilize this gas handling system 1 of above explanation, pipe arrangement 4 can adopt by inner face do not implement metal tube that the metals such as stainless steel of corrosion-resistance treatment constitute, minor diameter such as the pitch tube that constitutes by resins such as vinyl chloride and simple structure, cheap pipe arrangement.It the reasons are as follows said.
(1) through carrying out the capture of fluoric acid at the shower water zone of the water washing device 21 that is arranged in pipe arrangement 4 upper reaches 21B of and the built-in washing process chamber of combustion furnace 20B; The concentration that flows into the fluoric acid of pipe arrangement 4 can be suppressed to below the TLV value, thereby need not implement corrosion-resistance treatment to the inner face of pipe arrangement 4.
(2) owing to remove the evil control of dust tube 30 or its displacement can 32 of the built-in washing process chamber of water washing device 21, combustion furnace 20B, displacement can 22 and electric dust collecting means 3 of device 2 with the processing gas cooled after the combustion decomposition at the water-cooled combustion-type that is arranged in pipe arrangement 4 upper reaches, thereby the air quantity in the pipe arrangement is 9m 3Get final product about/min, need not adopt large diameter pipe arrangement.
In addition, according to this gas handling system 1, as stated owing to the air quantity in the pipe arrangement 4 seldom get final product, thereby also can be according to the miniaturization of its air quantity realization factory washer equipment 5.
And then; In this gas handling system 1; Owing to remove the evil and reclaim in the draining of displacement can 32 of displacement can 22 or electric dust collecting means 3 of device 2 through SiO 2 powder being dissolved in the water-cooled combustion-type, thereby the amount that flows into the SiO 2 powder of factory's washer equipment 5 sides significantly reduces; And owing to carry out the capture of fluoric acid at the shower water zone 21B of portion and the built-in washing process chamber of the combustion furnace 20B of the water washing device 21 that is arranged in factory washer equipment 5 upper reaches, thereby following situation can not take place: fluoric acid and SiO 2 powder react and produce silicon tetrafluoride gas in factory's washer equipment 5; Or the silicon tetrafluoride gas that is generated and shower water react and cause SiO 2 powder regeneration, thereby the maintenance of factory's washer equipment 5 becomes easy.
Gas handling system involved in the present invention also can be used as semiconductor fabrication factory other factory in addition of Fig. 1, and for example the gas handling system of flat-panel monitor factory or solar panel factory adopts.
Symbol description
1 gas handling system
The 2 water-cooled combustion-types device of removing the evil
20 combustion furnaces
The 20A combustion chamber
The built-in washing process chamber of 20B combustion furnace
21 water washing devices
21A tubular washer packaging shell
21B shower water zone portion
21C gas contacting region territory portion
22 displacement cans
3 electric dust collecting means
30 control of dust tubes
The inner face of 30A control of dust tube
31 metal bars
32 displacement cans
4 pipe arrangements
The 4A air blast
5 factory's washer equipment
The 6 combustion-types device of removing the evil
C1, C2 ... Cn airtight chamber
The BF filter bag

Claims (3)

1. gas handling system, its function is characterized in that in factory, pending gas is carried out harmless treatment, possesses:
To said pending gas carry out combustion decomposition with the washing control of dust the water-cooled combustion-type remove the evil device and
To said combustion decomposition and the processing gas of washing behind the control of dust carry out electric precipitation electric dust collecting means and
Processing gas behind the said electric precipitation is delivered to the pipe arrangement of original washer equipment in the said factory.
2. gas handling system according to claim 1 is characterized in that, said pipe arrangement comprises by inner face not to be implemented metal tube that the metals such as stainless steel of corrosion-resistance treatment constitute, or comprise the pitch tube that is made up of resins such as vinyl chloride.
3. gas handling system according to claim 1 and 2 is characterized in that said gas handling system possesses exhaust pump.
CN2011800038338A 2010-06-21 2011-04-27 Gas processing system Pending CN102612626A (en)

Applications Claiming Priority (3)

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JP2010-140384 2010-06-21
JP2010140384 2010-06-21
PCT/JP2011/060255 WO2011162023A1 (en) 2010-06-21 2011-04-27 Gas processing system

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CN102612626A true CN102612626A (en) 2012-07-25

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US (1) US20130064730A1 (en)
EP (1) EP2584263A1 (en)
JP (1) JPWO2011162023A1 (en)
KR (1) KR20130086925A (en)
CN (1) CN102612626A (en)
WO (1) WO2011162023A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105333444A (en) * 2015-10-28 2016-02-17 苏州仕净环保科技股份有限公司 Silane tail gas combusting dust removing and purifying system
CN107106976A (en) * 2014-11-14 2017-08-29 埃地沃兹日本有限公司 Remove the evil device
CN111167266A (en) * 2018-11-12 2020-05-19 长鑫存储技术有限公司 Exhaust gas treatment system and method

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103706208B (en) * 2012-10-04 2015-08-19 姚智夫 A kind of air purification functional module
JP6322502B2 (en) * 2014-07-08 2018-05-09 大陽日酸株式会社 Exhaust gas treatment equipment
US20160042916A1 (en) * 2014-08-06 2016-02-11 Applied Materials, Inc. Post-chamber abatement using upstream plasma sources
MA40912A (en) * 2014-11-06 2017-09-12 Starklab DEVICE FOR THE PRODUCTION AND TREATMENT OF A GAS FLOW THROUGH A VOLUME OF LIQUID, INSTALLATION AND PROCESS IMPLEMENTING THIS DEVICE
GB2535528A (en) 2015-02-23 2016-08-24 Edwards Ltd Apparatus for treating gas
WO2016153096A1 (en) 2015-03-26 2016-09-29 한국에너지기술연구원 Energy-saving combustion apparatus for incineration disposal of non-degradable noxious gases, and operation method thereof
US10744456B2 (en) * 2017-01-13 2020-08-18 EnviroEnergy Solutions, Inc. Wet electrostatic gas cleaning system with non-thermal plasma for NOx reduction in exhaust
US20180200671A1 (en) * 2017-01-13 2018-07-19 EnviroEnergy Solutions, Inc. WET ELECTROSTATIC GAS CLEANING SYSTEM WITH NON-THERMAL PLASMA FOR NOx REDUCTION IN EXHAUST
CN110291611B (en) * 2017-02-09 2022-05-17 应用材料公司 Plasma abatement technique using water vapor and oxygen reagents
KR102177129B1 (en) 2018-05-04 2020-11-10 엠에이티플러스 주식회사 Apparatus for treating waste gas
CN109925834A (en) * 2019-04-16 2019-06-25 韩继鹏 A kind of Chemical Manufacture vent gas treatment environmental protection equipment
KR102508353B1 (en) * 2022-08-29 2023-03-13 주식회사 원익홀딩스 Gas processing device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004044887A (en) * 2002-07-11 2004-02-12 Babcock Hitachi Kk Monosilane combustion device and semiconductor flue gas treatment system
JP2007307556A (en) * 2007-06-04 2007-11-29 Hitachi Ltd Pfc gas treatment method and apparatus
JP2010063951A (en) * 2008-09-08 2010-03-25 Taiyo Nippon Sanso Corp Method and apparatus for treating exhaust gas

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5123836A (en) * 1988-07-29 1992-06-23 Chiyoda Corporation Method for the combustion treatment of toxic gas-containing waste gas
US6099808A (en) * 1993-10-05 2000-08-08 Texas Instruments Incorporated Particulate removal from point of use exhaust scrubbers
JP3994605B2 (en) * 1999-11-26 2007-10-24 株式会社日立製作所 PFC gas processing method and processing apparatus
JP2003024741A (en) * 2001-07-17 2003-01-28 Babcock Hitachi Kk Combustion type semiconductor exhaust gas treatment apparatus
US7736599B2 (en) * 2004-11-12 2010-06-15 Applied Materials, Inc. Reactor design to reduce particle deposition during process abatement
JP2007232308A (en) 2006-03-02 2007-09-13 Toshiba Matsushita Display Technology Co Ltd Gas treating apparatus
GB0709502D0 (en) * 2007-05-18 2007-06-27 Boc Group Plc Apparatus for treating gas

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004044887A (en) * 2002-07-11 2004-02-12 Babcock Hitachi Kk Monosilane combustion device and semiconductor flue gas treatment system
JP2007307556A (en) * 2007-06-04 2007-11-29 Hitachi Ltd Pfc gas treatment method and apparatus
JP2010063951A (en) * 2008-09-08 2010-03-25 Taiyo Nippon Sanso Corp Method and apparatus for treating exhaust gas

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107106976A (en) * 2014-11-14 2017-08-29 埃地沃兹日本有限公司 Remove the evil device
US10618004B2 (en) 2014-11-14 2020-04-14 Edwards Japan Limited Abatement device
CN107106976B (en) * 2014-11-14 2020-09-25 埃地沃兹日本有限公司 Pest control device
CN105333444A (en) * 2015-10-28 2016-02-17 苏州仕净环保科技股份有限公司 Silane tail gas combusting dust removing and purifying system
CN111167266A (en) * 2018-11-12 2020-05-19 长鑫存储技术有限公司 Exhaust gas treatment system and method
CN111167266B (en) * 2018-11-12 2024-03-29 长鑫存储技术有限公司 Exhaust gas treatment system and method

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US20130064730A1 (en) 2013-03-14
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WO2011162023A1 (en) 2011-12-29
KR20130086925A (en) 2013-08-05

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Application publication date: 20120725