CN205984916U - Washing tail gas processor - Google Patents
Washing tail gas processor Download PDFInfo
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- CN205984916U CN205984916U CN201621038955.7U CN201621038955U CN205984916U CN 205984916 U CN205984916 U CN 205984916U CN 201621038955 U CN201621038955 U CN 201621038955U CN 205984916 U CN205984916 U CN 205984916U
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- washing
- storehouse
- bin
- water
- exhaust gas
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Abstract
The utility model discloses a washing tail gas processor, bin in locating the casing, the bin is three for at least, is equipped with the baffle between the bin, and the baffle forms the gas passage of turning back and communicates the bin in proper order, and first bin is the storehouse of admitting air, and all the other bins are the washing storehouse, and the upside in every washing storehouse is equipped with spray set, is equipped with the filler in every washing storehouse. This kind of washing tail gas processor is through the setting of the gas passage of turning back, make full use of the space in the casing, make gas passage lengthization that is used for the washing in the finite space, even also can carry out the abundant purification of washing in succession to tail gas when the casing is less, reduced the space limitation that washing tail gas processor received, simultaneously, the setting up of turn back passageway and filler between the at least three bin can guarantee that water is more of a specified duration with the contact time of tail gas, and the harmful gas in the tail gas can dissolve more fully to guarantee the effect of washing purification.
Description
Technical field
This utility model is related to general technical field of manufacturing semiconductors, particularly to a kind of washing exhaust gas treating device.
Background technology
The general semiconductor manufacturing industry such as quasiconductor, liquid crystal panel, photovoltaic solar, in production manufacture process, meeting
Produce multiple poisonous and harmful industrial waste gases being dissolved in water, to process such waste gas typically by washing exhaust gas treating device at present,
Make the pollutant value in gas meet the requirement of relevant laws and regulations, be then discharged into air again.
In a kind of typical washing exhaust gas treating device, wash storehouse including multilamellar, can be cleaned multiple times, however, this kind of
The gas passage of washing exhaust gas treating device is straight, and the number of plies in the washing storehouse that can arrange can be limited by space.
Therefore, how to reduce while ensureing water washing effect washing exhaust gas treating device by space limited, be ability
The current technical issues that need to address of field technique personnel.
Utility model content
In view of this, the purpose of this utility model is to provide a kind of washing exhaust gas treating device, can ensure water washing effect
While reduce washing exhaust gas treating device by space limited.
For achieving the above object, this utility model provides following technical scheme：
A kind of washing exhaust gas treating device, including the bin in housing, described bin is at least three, described bin it
Between be provided with dividing plate, described dividing plate forms the gas passage turned back and is simultaneously sequentially communicated described bin, and first described bin is air inlet
Storehouse, remaining described bin is washing storehouse, and the upside in each described washing storehouse is provided with spray equipment, is provided with each described washing storehouse
Filler.
Preferably, described bin is set gradually by preset direction, and described gas passage is gas passage of turning back up and down.
Preferably, described washing storehouse include one-stage water wash storehouse and two grades washing storehouses, described one-stage water wash storehouse located at described enter
Between gas storehouse and described two grades of washing storehouses, the described spray equipment in described one-stage water wash storehouse is connected for accessing entering of external source
Water pipe, the downside in described washing storehouse is provided with the water storehouse washing the water after gas for storing described one-stage water wash storehouse, described storage
It is provided with the circulating pump of the described spray equipment for the water in described water storehouse being evacuated to described two grades of washing storehouses in sump.
Preferably, described two grades of washing storehouses include washing storehouse described at least three.
Preferably, described water inlet pipe is provided with flow switch, and described flow switch is connected to prompting and no intakes or intake
The not enough alarm device of amount.
Preferably, last described washing storehouse is also associated with dryness storehouse, and air vent is located at described dryness storehouse, described drying
It is provided with filler in storehouse.
Preferably, air inlet and described air vent are equipped with vacuum table.
Preferably, described enter gas storehouse be provided with and enter nitrogen mouth for what nitrogen entered, described enter nitrogen mouth be provided with for shell
The suspended body flowmeter of internal inertia protection.
Preferably, the bottom of described housing is provided with the proximity switch reported to the police for liquid leakage.
Preferably, described filler is Pall ring.
The washing exhaust gas treating device that this utility model provides includes the bin in housing, and bin is at least three, storehouse
It is provided with dividing plate, dividing plate forms the gas passage turned back and is sequentially communicated bin, and first bin is into gas storehouse, remaining storehouse between room
Room is washing storehouse, and the upside in each washing storehouse is provided with spray equipment, is provided with filler in each washing storehouse.
When being washed, tail gas is entered by entering gas storehouse, sequentially passes through each according to gas passage and washes storehouse, spray dress
Put and sprayed water, to carry out water washing cleaning to tail gas, meanwhile, the filler being soaked can effectively increase gas-to-liquid contact face
Long-pending, so that the harmful gass in tail gas is dissolved in water.
It can be seen that, the setting of the gas passage by turning back for this kind of washing exhaust gas treating device, take full advantage of the sky in housing
Between, make the gas passage being used for washing in the confined space longest, even if also fully can be connected to tail gas when housing is less
Continuous water washing cleaning, reduce washing exhaust gas treating device by space limited；Meanwhile, the reentrant pathway between at least three bins
And the setting of filler can ensure that water is more long with the time of contact of tail gas, the harmful gass in tail gas can be more fully hereinafter molten
Solution, to ensure the effect of water washing cleaning.
Brief description
In order to be illustrated more clearly that this utility model embodiment or technical scheme of the prior art, below will be to embodiment
Or in description of the prior art the accompanying drawing of required use be briefly described it should be apparent that, drawings in the following description are only
It is embodiment of the present utility model, for those of ordinary skill in the art, on the premise of not paying creative work, also
Other accompanying drawings can be obtained according to the accompanying drawing providing.
Fig. 1 is provided the sectional view of washing exhaust gas treating device specific embodiment by this utility model；
Fig. 2 is provided the top view of washing exhaust gas treating device specific embodiment by this utility model.
In Fig. 1 to Fig. 2,1 is air inlet, and 2 is dividing plate, and 3 is four washing storehouses, and 4 is three washing storehouses, and 5 is gas supply control
Valve, 6 bring down stocks for secondary water, and 7 is once to wash storehouse, and 8 is into gas storehouse, and 9 is QI invigorating pipeline, and 10 is access hole, and 11 is housing, and 12 are
Liquid-level switch, 13 is flow switch, and 14 is filler, and 15 is dryness storehouse, and 16 is spray equipment, and 17 is QI invigorating ball valve, and 18 is aerofluxuss
Mouthful, 19 is circulating pump, and 20 is negative pressure pressure transducer.
Specific embodiment
Below in conjunction with the accompanying drawing in this utility model embodiment, the technical scheme in this utility model embodiment is carried out
Clearly and completely description is it is clear that described embodiment is only a part of embodiment of this utility model rather than whole
Embodiment.Based on the embodiment in this utility model, those of ordinary skill in the art are not under the premise of making creative work
The every other embodiment being obtained, broadly falls into the scope of this utility model protection.
Core of the present utility model is to provide a kind of washing exhaust gas treating device, can reduce while ensureing water washing effect
Washing exhaust gas treating device by space limited.
Refer to Fig. 1 and Fig. 2, Fig. 1 is provided the sectional view of washing exhaust gas treating device specific embodiment by this utility model；
Fig. 2 is provided the top view of washing exhaust gas treating device specific embodiment by this utility model.
This utility model is provided in a kind of specific embodiment of washing exhaust gas treating device, including the storehouse in housing 11
Room, bin is at least three, is provided with dividing plate 2 between bin, and dividing plate 2 forms the gas passage turned back and is sequentially communicated bin, that is,
The flow direction of one storehouse indoor gas is contrary with the flow direction of previous or rear storehouse indoor gas, and a bin
Air inlet side only connects a bin, and side of giving vent to anger also only connects a bin, and wherein, first bin is into gas storehouse 8, and remaining
Bin be washing storehouse, each washing storehouse upside be provided with spray equipment 16, each washing storehouse in be provided with filler 14.Wherein,
One bin refers to the bin that gas enters at first.
When being washed, tail gas is entered by entering gas storehouse 8, sequentially passes through each according to gas passage and washes storehouse, spray
Device 16 is sprayed water, to carry out water washing cleaning to tail gas, meanwhile, the filler 14 being soaked can effectively increase gas-liquid and connect
Contacting surface is amassed, and so that the harmful gass in tail gas is dissolved in water.
It can be seen that, the setting of the gas passage by turning back for this kind of washing exhaust gas treating device, take full advantage of in housing 11
Space, makes the gas passage being used for washing in the confined space longest, even if also can fill to tail gas when housing 11 is less
Point continuous washing purifies, reduce washing exhaust gas treating device by space limited；Meanwhile, turning back between at least three bins
The setting of passage and filler 14 can ensure that water is more long with the time of contact of tail gas, and the harmful gass in tail gas can be more abundant
Ground dissolving, to ensure the effect of water washing cleaning.
In above-described embodiment, bin can be set gradually by preset direction, and preset direction can be the length side of housing 11
To, the width of housing 11 or other directions, and gas passage is gas passage of turning back up and down.That is, a storehouse
Room is passed through the dividing plate 2 that a top edge, left hand edge and right hand edge are all sealed with housing 11 and lower limb and housing 11 separate and is formed
Underside gas passage, and all sealed with housing 11 and top edge and housing 11 by another lower limb, left hand edge and right hand edge
The dividing plate 2 of cut-off forms upside gas passage, and in washing, the gas flow in a washing storehouse is identical with water (flow) direction, phase
Gas flow in adjacent upper one or next washing storehouse is contrary with water (flow) direction, is conducive to raising water washing effect.Certainly,
Gas passage gas passage it can also be provided that turning back in left and right, that is, bin pass through a top edge, lower limb and up and down
Right hand edge between edge is all tightly connected with housing 11 and left hand edge is led to the dividing plate 2 formation left gas of housing 11 cut-off
Road, and be all tightly connected and right hand edge with housing 11 by the left hand edge between a top edge, lower limb and lower edges
Form Top right gas passage with the dividing plate 2 of housing 11 cut-off, turned back flowing with realizing gas, certainly, the setting of gas passage of turning back
Put mode not limited to this.
In each embodiment above-mentioned, washing storehouse specifically can be included located at one-stage water wash storehouse and two grades of washing storehouses, one-level, two
Depending on level is the water source according to spray equipment 16, the quantity in every grade of washing storehouse can set as needed, and one-stage water wash storehouse sets
In enter gas storehouse 8 and two grades washing storehouses between, the water inlet pipe for accessing external source connected by the spray equipment 16 in one-stage water wash storehouse,
The downside in washing storehouse is provided with the water storehouse washing the water after gas for storing one-stage water wash storehouse, is provided with for storing up in water storehouse
Water in sump is evacuated to the circulating pump 19 of the spray equipment 16 in two grades of washing storehouses, and circulating pump 19 can make the water circulation in water storehouse
Flowing.Tail gas flows through one-stage water wash storehouse and two grades of washing storehouses successively by entering gas storehouse 8, carries out the first order and locate in advance in one-stage water wash storehouse
Reason, current direction water storehouse, the water of storage is passed through circulating pump 19 and is delivered to each the two grades shower nozzles washing storehouses by water storehouse, and two
Level washing is washed in storehouse at least one times, is conducive to making full use of water resource, reduces water consumption.Certainly, spray equipment 16
Water source arranges not limited to this.
In each embodiment above-mentioned, two grades of washing storehouses specifically can include at least three washing storehouses, each two grades washing storehouses
Water be all from water storehouse, tail gas can sequentially pass through each washing storehouse and repeatedly be washed, the process tail gas flowing through and water
It is fully contacted dissolving, effectively remove the harmful gass being dissolved in water in tail gas, be conducive to thorough water washing cleaning tail gas.To arrange one
As a example one-stage water wash storehouse, three two grades washing storehouses, one-stage water wash storehouse is once to wash storehouse 7, and two grades of washing storehouses are followed successively by secondary water
Bring down stocks 6, three times and wash storehouses 4 and four washing storehouses 3, tail gas sequentially passes through once washing storehouse 7, secondary water is brought down stocks 6, three times washes storehouses
4 and four times washing storehouses 3 carry out four times washing.Certainly, the quantity setting not limited to this in two grades of washing storehouses.
In each embodiment above-mentioned, water inlet pipe can be provided with flow switch 13, flow switch 13 is connected to prompting no
Water inlet or the alarm device of inflow deficiency, when no water inlet or inflow provide alarm signal when not enough, so that inflow is reached will
Ask the spray all standing it is ensured that spray equipment 16.Specifically, water inlet pipe can arrange suspended body flowmeter and carry out regulating pondage, if
It is convenient and cheap to put.
In each embodiment above-mentioned, last washing storehouse is also associated with dryness storehouse 15, and the tail gas after washing is from last
Individual washing storehouse enters dryness storehouse 15 after flowing out and is dried, and air vent 18 is provided with filler 14 in dryness storehouse 15, dryness storehouse 15, makes to glue
The water smoke microgranule being attached to gas surface is retained down when by filler 14 gap, thus ensureing the tail gas of discharge housing 11 relatively
It is dried, to reduce the impact to the exhaust duct after washing exhaust gas treating device.
In each embodiment above-mentioned, the air vent 18 of the air inlet 1 of housing 11 can be equipped with vacuum table, such that it is able to reality
When show air inlet 1 and the pressure differential of air vent 18, be easy to control.
In each embodiment above-mentioned, enter can be provided with gas storehouse 8 and enter nitrogen mouth for what nitrogen entered, enter nitrogen mouth and be provided with
Suspended body flowmeter for inertia protection in housing 11.According to the vacuum table show value of air inlet 1, control suspended body flowmeter and adjust
Section enters nitrogen flow into gas storehouse 8, thus effectively replaced it is ensured that inertia ring in housing 11 to the air in housing 11
Border, makes to react safety in housing 11；Meanwhile, being passed through of nitrogen can be diluted in right amount to process tail gas and be purged, and according to
Enter the keying to automatically control nitrogen intake valve for the negative pressure value of the negative pressure pressure transducer 20 of gas storehouse 8 installation.
In each embodiment above-mentioned, the bottom of housing 11 can be provided with the proximity switch reported to the police for liquid leakage, with
Ensure the safety of washing, be easy to on-call maintenance.
In each embodiment above-mentioned, filler 14 is specifically as follows Pall ring, and application is relatively wide, is easy to select.Certainly, filler 14
Can also be cascade ring or other fillers 14.
In each embodiment above-mentioned, water storehouse can install three liquid-level switches 12, by the outlet within housing 11
And the automatic drain valve of bottom, it is possible to achieve the effective control to the liquid level of water storehouse.
In each embodiment above-mentioned, gas supply control valve 5, QI invigorating pipeline 9 and QI invigorating ball valve 17 can be set in housing 11
The gas in housing 11 is regulated and controled.
In each embodiment above-mentioned, can access hole 10 can also be set above, be easy to the dimension of housing 11 various components inside
Repair.
It should be noted that in description of the present utility model, the orientation of the instruction such as upper and lower, left and right or position relationship are
Based on orientation shown in the drawings or position relationship, it is for only for ease of description this utility model and simplifies description, rather than instruction
Or the hint device of indication or element must have specific orientation, with specific azimuth configuration and operation, be not therefore understood that
It is to restriction of the present utility model.
In this specification, each embodiment is described by the way of going forward one by one, and what each embodiment stressed is and other
The difference of embodiment, between each embodiment identical similar portion mutually referring to.
Above washing exhaust gas treating device provided by the utility model is described in detail.Used herein specifically
Individual example is set forth to principle of the present utility model and embodiment, and the explanation of above example is only intended to help understand this
The method of utility model and its core concept.It should be pointed out that for those skilled in the art, without departing from
On the premise of this utility model principle, this utility model can also be carried out with some improvement and modify, these improve and modify
Fall in this utility model scope of the claims.
Claims (10)
1. a kind of washing exhaust gas treating device, including the bin in housing (11) it is characterised in that described bin is at least three
Individual, it is provided with dividing plate (2) between described bin, described dividing plate (2) forms the gas passage turned back and is sequentially communicated described bin, the
One described bin is into gas storehouse (8), and remaining described bin is washing storehouse, and the upside in each described washing storehouse is provided with spray equipment
(16), it is provided with filler (14) in each described washing storehouse.
2. washing exhaust gas treating device according to claim 1 is it is characterised in that described bin is set successively by preset direction
Put, and described gas passage is gas passage of turning back up and down.
3. according to claim 2 washing exhaust gas treating device it is characterised in that described washing storehouse include one-stage water wash storehouse and
Two grades washing storehouses, described one-stage water wash storehouse located at described enter gas storehouse (8) and described two grades washing storehouses between, described one-stage water wash storehouse
Described spray equipment (16) connect water inlet pipe for accessing external source, the downside in described washing storehouse is provided with for storing
State the water storehouse of the water after gas is washed in one-stage water wash storehouse, be provided with described water storehouse for being evacuated to the water in described water storehouse
The circulating pump (19) of the described spray equipment (16) in described two grades of washing storehouses.
4. washing exhaust gas treating device according to claim 3 is it is characterised in that described two grades of washing storehouses include at least three
Described washing storehouse.
5. washing exhaust gas treating device according to claim 4 is it is characterised in that described water inlet pipe is provided with flow switch
(13), described flow switch (13) is connected to the alarm device pointing out no to intake or inflow is not enough.
6. the washing exhaust gas treating device according to claim 1 to 5 any one is it is characterised in that last described water
Bring down stocks and be also associated with dryness storehouse (15), air vent (18) is provided with filler in described dryness storehouse (15), described dryness storehouse (15)
(14).
7. washing exhaust gas treating device according to claim 6 is it is characterised in that air inlet (1) and described air vent (18)
It is equipped with vacuum table.
8. according to claim 7 washing exhaust gas treating device it is characterised in that described enter gas storehouse (8) be provided with for nitrogen
What gas entered enters nitrogen mouth, described enter nitrogen mouth be provided with the suspended body flowmeter for inertia protection in housing.
9. according to claim 8 washing exhaust gas treating device it is characterised in that the bottom of described housing (11) be provided with for
The proximity switch that liquid leakage is reported to the police.
10. washing exhaust gas treating device according to claim 9 is it is characterised in that described filler (14) is Pall ring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621038955.7U CN205984916U (en) | 2016-09-06 | 2016-09-06 | Washing tail gas processor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621038955.7U CN205984916U (en) | 2016-09-06 | 2016-09-06 | Washing tail gas processor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205984916U true CN205984916U (en) | 2017-02-22 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621038955.7U Active CN205984916U (en) | 2016-09-06 | 2016-09-06 | Washing tail gas processor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205984916U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114887461A (en) * | 2022-04-29 | 2022-08-12 | 上海至纯系统集成有限公司 | Circulating water tail gas treatment device |
-
2016
- 2016-09-06 CN CN201621038955.7U patent/CN205984916U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114887461A (en) * | 2022-04-29 | 2022-08-12 | 上海至纯系统集成有限公司 | Circulating water tail gas treatment device |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |