CN209117912U - 一种硅光波导端面耦合器 - Google Patents
一种硅光波导端面耦合器 Download PDFInfo
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- CN209117912U CN209117912U CN201821844696.6U CN201821844696U CN209117912U CN 209117912 U CN209117912 U CN 209117912U CN 201821844696 U CN201821844696 U CN 201821844696U CN 209117912 U CN209117912 U CN 209117912U
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- optical waveguide
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- silicon
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- 230000003287 optical effect Effects 0.000 title claims abstract description 282
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 81
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 81
- 239000010703 silicon Substances 0.000 title claims abstract description 81
- 230000008878 coupling Effects 0.000 title claims abstract description 37
- 238000010168 coupling process Methods 0.000 title claims abstract description 37
- 238000005859 coupling reaction Methods 0.000 title claims abstract description 37
- 230000006835 compression Effects 0.000 claims abstract description 82
- 238000007906 compression Methods 0.000 claims abstract description 82
- 230000005540 biological transmission Effects 0.000 claims abstract description 52
- 239000013307 optical fiber Substances 0.000 claims abstract description 28
- 239000000758 substrate Substances 0.000 claims abstract description 20
- 239000010410 layer Substances 0.000 claims description 242
- 239000000463 material Substances 0.000 claims description 54
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 20
- 239000000377 silicon dioxide Substances 0.000 claims description 17
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 16
- 229910052681 coesite Inorganic materials 0.000 claims description 15
- 229910052906 cristobalite Inorganic materials 0.000 claims description 15
- 229910052682 stishovite Inorganic materials 0.000 claims description 15
- 229910052905 tridymite Inorganic materials 0.000 claims description 15
- 239000012792 core layer Substances 0.000 claims description 9
- 238000004891 communication Methods 0.000 abstract description 10
- 239000000835 fiber Substances 0.000 abstract description 6
- 239000004065 semiconductor Substances 0.000 abstract description 5
- 238000000926 separation method Methods 0.000 description 26
- 238000000034 method Methods 0.000 description 15
- 238000000151 deposition Methods 0.000 description 12
- 238000005530 etching Methods 0.000 description 12
- 238000001259 photo etching Methods 0.000 description 10
- 230000008021 deposition Effects 0.000 description 9
- 235000012431 wafers Nutrition 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000003989 dielectric material Substances 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 239000002070 nanowire Substances 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000012827 research and development Methods 0.000 description 2
- 239000002210 silicon-based material Substances 0.000 description 2
- 241000220479 Acacia Species 0.000 description 1
- 235000010643 Leucaena leucocephala Nutrition 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- XZWYZXLIPXDOLR-UHFFFAOYSA-N metformin Chemical compound CN(C)C(=N)NC(N)=N XZWYZXLIPXDOLR-UHFFFAOYSA-N 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- OVSQVDMCBVZWGM-QSOFNFLRSA-N quercetin 3-O-beta-D-glucopyranoside Chemical compound O[C@@H]1[C@@H](O)[C@H](O)[C@@H](CO)O[C@H]1OC1=C(C=2C=C(O)C(O)=CC=2)OC2=CC(O)=CC(O)=C2C1=O OVSQVDMCBVZWGM-QSOFNFLRSA-N 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- Optical Integrated Circuits (AREA)
- Optical Couplings Of Light Guides (AREA)
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CN201821844696.6U CN209117912U (zh) | 2018-11-09 | 2018-11-09 | 一种硅光波导端面耦合器 |
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CN201821844696.6U CN209117912U (zh) | 2018-11-09 | 2018-11-09 | 一种硅光波导端面耦合器 |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109324372A (zh) * | 2018-11-09 | 2019-02-12 | 昆明理工大学 | 一种硅光波导端面耦合器 |
CN111239895A (zh) * | 2020-02-26 | 2020-06-05 | 北京邮电大学 | 一种波导耦合结构及光发射器系统 |
CN114935794A (zh) * | 2022-06-16 | 2022-08-23 | 珠海光库科技股份有限公司 | 模斑转换器、光芯片和光通信器件 |
CN116643350A (zh) * | 2023-07-27 | 2023-08-25 | 之江实验室 | 端面耦合器及光芯片系统 |
-
2018
- 2018-11-09 CN CN201821844696.6U patent/CN209117912U/zh active Active
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109324372A (zh) * | 2018-11-09 | 2019-02-12 | 昆明理工大学 | 一种硅光波导端面耦合器 |
CN109324372B (zh) * | 2018-11-09 | 2024-02-09 | 熠谱(上海)半导体制造有限公司 | 一种硅光波导端面耦合器 |
CN111239895A (zh) * | 2020-02-26 | 2020-06-05 | 北京邮电大学 | 一种波导耦合结构及光发射器系统 |
CN114935794A (zh) * | 2022-06-16 | 2022-08-23 | 珠海光库科技股份有限公司 | 模斑转换器、光芯片和光通信器件 |
CN114935794B (zh) * | 2022-06-16 | 2023-03-07 | 珠海光库科技股份有限公司 | 模斑转换器、光芯片和光通信器件 |
CN116643350A (zh) * | 2023-07-27 | 2023-08-25 | 之江实验室 | 端面耦合器及光芯片系统 |
CN116643350B (zh) * | 2023-07-27 | 2023-10-10 | 之江实验室 | 端面耦合器及光芯片系统 |
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Effective date of registration: 20200724 Address after: No.1 building, science and innovation headquarters, Shenzhen (Harbin) Industrial Park, 288 Zhigu street, Songbei District, Harbin, Heilongjiang Province Patentee after: Harbin Zhongda Electronic Co., Ltd Address before: 650093 Kunming, Yunnan, Wuhua District Road, No. 253 Patentee before: Kunming University of Science and Technology |
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Effective date of registration: 20210723 Address after: 201306 building C, No. 888, Huanhu West 2nd Road, Lingang New Area, Pudong New Area, Shanghai Patentee after: Yipu (Shanghai) semiconductor manufacturing Co.,Ltd. Address before: Building 1, science and innovation headquarters, Shenzhen (Harbin) Industrial Park, 288 Zhigu street, Songbei District, Harbin City, Heilongjiang Province Patentee before: Harbin Zhongda Electronic Co., Ltd |