CN209113100U - A kind of silicon single crystal rod turnover device - Google Patents

A kind of silicon single crystal rod turnover device Download PDF

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Publication number
CN209113100U
CN209113100U CN201821564112.XU CN201821564112U CN209113100U CN 209113100 U CN209113100 U CN 209113100U CN 201821564112 U CN201821564112 U CN 201821564112U CN 209113100 U CN209113100 U CN 209113100U
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China
Prior art keywords
single crystal
silicon single
crystal rod
tooling
elevator
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CN201821564112.XU
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Chinese (zh)
Inventor
叶欣
汪辉
金光前
朱国旺
吕斌龙
洪昀
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Hangzhou Zhongwei Photoelectricity Co Ltd
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Hangzhou Zhongwei Photoelectricity Co Ltd
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Abstract

The utility model provides a kind of silicon single crystal rod turnover device, for solving the technical problem difficult in production scene movement of silicon rod in the prior art.A kind of silicon single crystal rod described in the utility model has enough to meet the need device, including transition platform, charging elevator, cache lines, discharging elevator, tooling and AGV trolley, empty tooling is placed on transition platform, silicon single crystal rod is placed in by hand in the empty tooling on transition platform, it feeds elevator and the tooling for being placed with silicon rod on transition platform is moved to cache lines, after silicon single crystal rod performs corresponding processing on cache lines, by discharging elevator, by buffered line, treated that silicon single crystal rod moves to AGV trolley, and is transferred to corresponding position by AGV trolley.This programme is middle compared with the existing technology to have silicon rod conveniently moving using transfer silicon rod by hand, and, reduce the manual intervention in silicon single crystal rod moving process, the labor intensity of operator is reduced, is not easy to be collided in silicon single crystal rod moving process, optimizes the performance of silicon single crystal rod turnover device.

Description

A kind of silicon single crystal rod turnover device
Technical field
The utility model relates to silicon rod process equipment accessories more particularly to a kind of silicon single crystal rod to have enough to meet the need device, belong to semiconductor Manufacture field.
Background technique
Silicon wafer is the proprietary material of photovoltaic art, and silicon wafer is formed after being cut by silicon rod using multi-wire cutting technology.Silicon Stick needs repeatedly to be transported in production scene before processing, to perform corresponding processing to silicon rod.
Silicon rod is mobile by way of moving by hand in transport process in the prior art, and this move mode is on the one hand It causes labor intensity of operating staff big, on the other hand is easy to make there are security risk using the mobile silicon rod of the method for manual handling It is damaged at silicon rod.
Utility model content
The utility model provides a kind of silicon single crystal rod turnover device, mobile in production scene for solving silicon rod in the prior art Difficult technical problem.
The utility model solves technical solution used by above-mentioned technical problem:
A kind of silicon single crystal rod has enough to meet the need device, including transition platform, charging elevator, cache lines, discharging elevator, tooling and AGV trolley;Wherein, the tooling is placed on the transition platform, and the charging elevator is by the work on the transition platform Dress moves into the cache lines, and the tooling on the cache lines is moved into the AGV trolley, the tooling packet by the discharging elevator Frame is included, is bonded with the buffer layer for avoiding frame damage silicon single crystal rod on said frame.
A kind of silicon single crystal rod described in the utility model has enough to meet the need device, including transition platform, charging elevator, cache lines, goes out Material elevator, tooling and AGV trolley, empty tooling are placed on transition platform, and silicon single crystal rod is placed on transition platform by hand In empty tooling, elevator is fed by the tooling for being placed with silicon rod on transition platform and is moved to cache lines, silicon single crystal rod is in cache lines On perform corresponding processing after, by discharging elevator, by buffered line, treated that silicon single crystal rod moves to AGV trolley, and by AGV Trolley is transferred to corresponding position.This programme is middle compared with the existing technology to have silicon rod conveniently moving using transfer silicon rod by hand, Also, reduces the manual intervention in silicon single crystal rod moving process, reduce the labor intensity of operator, silicon single crystal rod is mobile It is not easy to be collided in the process, optimizes the performance of silicon single crystal rod turnover device.
Preferably, tooling is sent to discharging elevator side by charging elevator direction including at least one layer of by the cache lines To fully loaded line and by tooling by discharging elevator direction be sent to charging elevator direction non-loaded line.
The fully loaded line of at least one layer allows cache lines to cache more silicon single crystal rods, optimizes silicon single crystal rod turnover device Performance.
The setting of non-loaded line is mainly used for for empty tooling being transported to close to one end of charging elevator, and empty tooling is not necessarily to Transmission by hand, reduces the labor intensity of operator.
Preferably, the cache lines include cache shelf, and the fully loaded line and the non-loaded line are to be set to the caching Rotary conveyer on frame.
The structure for simplifying cache lines reduces the manufacturing cost of cache lines.
Preferably, the charging elevator includes rack, and charge transport mechanism, the charging are provided in the rack Transport mechanism is moved up and down relative to the rack, and the charge transport mechanism extends to the cache lines, will feed lifting Tooling on machine is transferred to the cache lines.
Feeding mechanism extends in cache lines, simplifies the structure of silicon single crystal rod turnover device, reduces silicon single crystal rod turnover The processing cost of device.
Preferably, the discharging elevator includes frame body, and discharging transport mechanism, the discharging are provided on the frame body Transport mechanism is moved up and down relative to the frame body, and the discharging transport mechanism extends to the cache lines, will be on cache lines Tooling be sent to the AGV trolley.
The structure for simplifying silicon single crystal rod turnover device thereby reduces the use cost of silicon single crystal rod turnover device.
Preferably, the charge transport mechanism includes the conveyer frames being slidably connected in the rack, in the conveyer frames On be provided with conveyer belt, be provided with guide rail in the rack, be provided on the conveyer frames with the guide rail cooperation cunning Slot is provided with the transmission chain for driving the conveyer frames to move along the guide rail in the rack, is provided in the rack With drive sprocket, the driven sprocket of transmission chain cooperation, the drive sprocket is rotated by the motor driven being fixed on the rack.
The setting of guide rail and sliding slot optimizes silicon single crystal rod turnover device so that conveyer frames mobile accuracy with higher Performance.
It drives conveyer frames mobile using chain conveyer, reduces the manufacturing cost of charge transport mechanism.
Preferably, it is provided with identification label on the frame body, the identification identification label is provided on the AGV trolley Identifier, the identifier identifies the identification label to correct position of the AGV trolley relative to the frame body.
The setting of identification label and identifier improves the position precision of AGV trolley, and then improves silicon single crystal rod turnover The precision of device.
Preferably, the buffer layer is to be adhered to PVC board on frame.
Tool structure is reasonable, efficiently avoids silicon single crystal rod and is detached from tooling, improves the stabilization of silicon single crystal rod turnover device Property.
Preferably, the transition platform includes rack and feet, and the feet is set to the rack by screw rod On, the feet is an integral structure with the screw rod, the screw hole with screw rod cooperation is provided on the rack, Locking nut is additionally provided on the screw rod, the locking nut pushes against the rack so that the screw rod is locked at the spiral shell In hole.
The height of transition platform is adjustable, optimizes the performance of transition platform.
The setting of locking nut improves the stability of transition platform.
Preferably, integral type is provided with convenient for rotating the handle of the locking nut, described on the locking nut Rubber sleeve is arranged on handle.
Locking nut locking operation is convenient, optimizes the operating characteristics of transition platform.
The utility model compared with the existing technology has the following advantages that and effect:
1, the setting of elevator, discharge elevator, cache lines is fed so that silicon single crystal rod did not needed in moving process More manual interventions thereby reduces the labor intensity of operator, also, due to reducing manual intervention, is effectively prevented from Silicon single crystal rod in moving process causes silicon single crystal rod to damage due to operator's operation error.
2, tooling damage silicon single crystal rod can be effectively avoided in the setting of buffer layer, optimizes the performance of tooling.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only It is some embodiments of the utility model, for those of ordinary skill in the art, before not making the creative labor property It puts, is also possible to obtain other drawings based on these drawings.
Fig. 1 is the structural schematic diagram of the utility model.
Fig. 2 is the schematic diagram after transition platform and charging elevator assembly.
Fig. 3 is the schematic diagram of discharging elevator.
Label declaration:
1, transition platform, 2, charging elevator, 3, cache lines, 4, discharging elevator, 5, tooling, 6, AGV trolley, 7, fully loaded Line, 8, non-loaded line, 9, cache shelf, 10, rack, 11, feeding conveyor frame, 12, frame body, 13, discharging transport mechanism, 14, placement Frame, 15, feet, 16, screw rod.
Specific embodiment
The utility model is described in further detail below with reference to embodiment, following embodiment is to the utility model Explanation and the utility model is not limited to following embodiment.
Embodiment 1
Such as Fig. 1, a kind of silicon single crystal rod turnover device, including transition platform 1, charging elevator 2, cache lines 3, discharging elevator 4, tooling 5 and AGV trolley 6;Wherein, the tooling 5 is placed on the transition platform 1, and the charging elevator 2 is by the mistake The tooling 5 crossed on platform 1 moves into the cache lines 3, and the discharging elevator 4 moves into the tooling 5 on the cache lines 3 described AGV trolley 6, the tooling 5 include frame, are bonded with the buffer layer for avoiding frame damage silicon single crystal rod on said frame.
The circular flow of silicon single crystal rod is as follows in the present embodiment:
A, empty tooling 5 is placed on transition platform 1.
B, silicon single crystal rod is placed in the empty tooling 5 on transition platform 1 by operator by hand.
C, the tooling 5 that silicon rod is housed on transition platform 1 is transferred on cache lines 3 by charging elevator 2,3 pairs of cache lines dresses There is the tooling 5 of silicon rod to perform corresponding processing, such as increases the temperature of silicon single crystal rod etc..The processing mode of silicon single crystal rod is existing There is the routine techniques in technology, herein not reinflated narration.
D, buffered line 3 treated silicon single crystal rod is moved to one end close to discharging elevator 4 by cache lines 3.
E, treated that silicon single crystal rod is transferred to AGV trolley 6 by buffered line 3 for discharging elevator 4, is shifted by AVG trolley To corresponding position.Complete the turnover of silicon single crystal rod.
It can be obtained by the circular flow of above-mentioned silicon single crystal rod, above-mentioned technical proposal greatly reduces monocrystalline compared with the existing technology The manual intervention of silicon rod circular flow, so as to be effectively reduced the labor intensity of operator, also, in silicon single crystal rod week Due to reducing manual intervention during turning, silicon single crystal rod is less likely to be damaged in circular flow, optimizes silicon single crystal rod turnover The performance of device.
This programme mainly solving the technical problems that silicon single crystal rod turnover, be not related to the processing mode of silicon single crystal rod, The processing mode of silicon single crystal rod is routine techniques in the prior art, herein not reinflated narration.
Embodiment 2
The present embodiment in conjunction with the embodiments 1, introduces the structure of cache lines 3.
Such as Fig. 1, tooling 5 is sent to discharging elevator by 2 direction of charging elevator including at least one layer by the cache lines 3 The fully loaded line 7 in 4 directions and the non-loaded line 8 that tooling 5 is sent to charging 2 direction of elevator by 4 direction of discharging elevator.
The cache lines 3 include cache shelf 9, and the fully loaded line 7 and the non-loaded line 8 are to be set to the cache shelf 9 On rotary conveyer.
That is, the cache lines 3 include at least one layer of fully loaded line 7 and one layer of non-loaded line 8, line 7 is fully loaded with for shifting dress It is loaded with the tooling 5 of silicon single crystal rod, non-loaded line 8 is mainly used for the empty tooling 5 of transfer.Thus fully loaded line 7 and non-loaded line 8, which should have, holds The function of silicon single crystal rod, tooling 5 is carried, and also has the function of shifting silicon single crystal rod, tooling 5.
Fully loaded line 7, non-loaded line 8 can meet above-mentioned function using rotary conveyer.Rotary conveyer is existing skill Conventional structure in art, herein not reinflated narration, rotary conveyer should include helicoid conveyer belt and drive the transmission The motor of the revolution of band.
Rotary conveyer can also be using other mechanism substitutions with transmitting function, specific structure art technology Personnel can be rationally arranged, and no longer describe herein.
Embodiment 3
The present embodiment in conjunction with the embodiments 1 or embodiment 2, introduces the structure of charging elevator 2, the elevator 4 that discharges.
As shown in Figure 1, Figure 2, Fig. 3, the charging elevator 2 include rack 10, and rack 10 can be spliced to form by rod piece, in institute It states and is provided with charge transport mechanism 11 in rack 10, the charge transport mechanism 11 is moved up and down relative to the rack 10, institute It states charge transport mechanism 11 and extends to the cache lines 3, the tooling 5 fed on elevator 2 is transferred to the cache lines 3.
The charge transport mechanism 11 includes the conveyer frames being slidably connected in the rack 10, is set on the conveyer frames It is equipped with conveyer belt, is provided with guide rail in the rack 10, the sliding slot with guide rail cooperation is provided on the conveyer frames, It is provided with the transmission chain for driving the conveyer frames to move along the guide rail in the rack 10, is provided in the rack 10 With drive sprocket, the driven sprocket of transmission chain cooperation, the drive sprocket is turned by the motor driven being fixed in rack 10 It is dynamic.
Charge transport mechanism 11 extends to cache lines 3 and refers to, the fully loaded line 7 of cache lines 3 is equipped with to charge transport mechanism 11 The resigning breach of resigning.Specifically, charge transport mechanism 11 is by the tooling 5 equipped with silicon single crystal rod with concordant with fully loaded line 7 Height moves to the notch, is overlapped in the tooling 5 equipped with silicon single crystal rod on fully loaded line 7, is shifted by fully loaded line 7.
Transition platform 1, discharging elevator 4 shift the mode and feeding conveyor of tooling 5 or the tooling 5 equipped with silicon single crystal rod 5 mode of tooling that the transfer of structure 11 is mounted with silicon single crystal rod is similar, is the lifting function using charging elevator 2, the elevator 4 that discharges It can be carried out transfer, be not repeated to describe herein.
The discharging elevator 4 includes frame body 12, and discharging transport mechanism 13, the discharging are provided on the frame body 12 Transport mechanism 13 is moved up and down relative to the frame body 12, and the discharging transport mechanism 13 extends to the cache lines 3, will be delayed It deposits the tooling 5 on line 3 and is sent to the AGV trolley 6.
The moving up and down relative to rack 10 of charge transport mechanism 11 in the present embodiment is the band in the way of chain return Dynamic charge transport mechanism 11 is mobile.But other structures substitution can also be used in actual design by those skilled in the art, such as But be not limited to screw pair, linear motor, hydraulic system, pneumatic system etc., export straight reciprocating motion structure,
Embodiment 4
The present embodiment introduces the positioning method of AGV trolley 6.
Be provided with identification label on the frame body 12, identification label be can identified structure, the AGV trolley 6 On be provided with the identifier for identifying the identification label, the identifier identifies the identification label to correct the AGV trolley 6 Position relative to the frame body 12.
Identifier identification is located at the identification label on frame body 12, determines 6 position of AGV trolley in place after identifying correctly, by This, can slide from AGV trolley 6 to avoid the tooling 5 for being mounted with silicon single crystal rod, improve the turnover essence of silicon single crystal rod turnover device Degree.
Embodiment 5
The present embodiment introduces buffer layer.
The buffer layer is the PVC board being adhered on the frame.Buffer layer can also be made of other materials.
Without limitation, those skilled in the art can shape according to silicon single crystal rod, Sizes for the specific structure of tooling 5 Design.
Embodiment 6
The present embodiment introduces transition platform 1.
Such as Fig. 2, the transition platform 1 includes rack 14 and feet 15, and the feet 15 is set to institute by screw rod 16 State on rack 14, the feet 15 is an integral structure with the screw rod 16, be provided on the rack 14 with it is described The screw hole that screw rod 16 cooperates, is additionally provided with locking nut on the screw rod 16, and the locking nut pushes against the rack 14 The screw rod 16 to be locked in the screw hole.
Integral type is provided with convenient for rotating the handle of the locking nut on the locking nut, covers on the handle Equipped with rubber sleeve.
Adjusting screw rod 16 is the height that transition platform 1 is adjusted relative to the position of rack 14, to optimize transition platform 1 Operating characteristics.
Locking nut is mainly used for for screw rod 16 being locked on rack 14, loosens to avoid screw rod 16, improves transition The stability of platform 1.
PLC controller can be used in the control of silicon single crystal rod turnover device in this programme, can also use computer control system Control, alternatively, being controlled by the way of hand-guided, specific control mode is not specifically limited, and those skilled in the art can It reasonably selects as needed.
In addition, it should be noted that, the specific embodiments described in this specification, the shape of parts and components are named Title etc. can be different.All equivalent or simple changes done according to structure, feature and principle described in the concept of the patent of the utility model, It is included in the protection scope of the utility model patent.Those skilled in the art of the present invention can be to being retouched The specific embodiment stated does various modifications or additions or is substituted in a similar manner, without departing from the utility model Structure or beyond the scope defined by this claim, all should belong to the protection range of the utility model.

Claims (10)

1. a kind of silicon single crystal rod has enough to meet the need device, it is characterized in that: including transition platform (1), charging elevator (2), cache lines (3), going out Expect elevator (4), tooling (5) and AGV trolley (6);Wherein, the tooling (5) is placed on the transition platform (1), described It feeds elevator (2) and the tooling (5) on the transition platform (1) is moved into the cache lines (3), the discharging elevator (4) Tooling (5) on the cache lines (3) is moved into the AGV trolley (6), the tooling (5) includes frame, on said frame It is bonded with the buffer layer for avoiding frame damage silicon single crystal rod.
2. a kind of silicon single crystal rod according to claim 1 has enough to meet the need device, it is characterized in that: the cache lines (3) include at least one Layer by tooling (5) by charging elevator (2) direction be sent to discharging elevator (4) direction fully loaded line (7) and by tooling (5) by Discharging elevator (4) direction is sent to the non-loaded line (8) in charging elevator (2) direction.
3. a kind of silicon single crystal rod according to claim 2 has enough to meet the need device, it is characterized in that: the cache lines (3) include cache shelf (9), the fully loaded line (7) and the non-loaded line (8) are the rotary conveyer being set on the cache shelf (9).
4. a kind of silicon single crystal rod according to claim 1 has enough to meet the need device, it is characterized in that: the charging elevator (2) includes machine Frame (10) is provided with charge transport mechanism (11) on the rack (10), and the charge transport mechanism (11) is relative to described Rack (10) moves up and down, and the charge transport mechanism (11) extends to the cache lines (3), will feed on elevator (2) Tooling (5) be transferred to the cache lines (3).
5. a kind of silicon single crystal rod according to claim 1 has enough to meet the need device, it is characterized in that: the discharging elevator (4) includes frame Body (12) is provided with discharging transport mechanism (13) on the frame body (12), and the discharging transport mechanism (13) is relative to described Frame body (12) moves up and down, and the discharging transport mechanism (13) extends to the cache lines (3), by the work on cache lines (3) Dress (5) is sent to the AGV trolley (6).
6. a kind of silicon single crystal rod according to claim 4 has enough to meet the need device, it is characterized in that: the charge transport mechanism (11) includes The conveyer frames being slidably connected on the rack (10), are provided with conveyer belt on the conveyer frames, on the rack (10) It is provided with guide rail, the sliding slot with guide rail cooperation is provided on the conveyer frames, is provided with band on the rack (10) The transmission chain that the conveyer frames are moved along the guide rail is moved, the master with transmission chain cooperation is provided on the rack (10) Movable sprocket, driven sprocket, the drive sprocket are rotated by the motor driven being fixed on rack (10).
7. a kind of silicon single crystal rod according to claim 5 has enough to meet the need device, it is characterized in that: being arranged on the frame body (12) insighted Distinguishing label, the identifier for identifying the identification label is provided on the AGV trolley (6), and the identifier identifies the identification Label is to correct position of the AGV trolley (6) relative to the frame body (12).
8. a kind of silicon single crystal rod according to claim 1 has enough to meet the need device, it is characterized in that: the buffer layer is to be adhered to the frame PVC board on frame.
9. a kind of silicon single crystal rod according to claim 1 has enough to meet the need device, it is characterized in that: the transition platform (1) includes placing Frame (14) and feet (15), the feet (15) are set on the rack (14) by screw rod (16), the feet (15) It is an integral structure with the screw rod (16), the screw hole with the screw rod (16) cooperation is provided on the rack (14), It is additionally provided with locking nut on the screw rod (16), the locking nut pushes against the rack (14) with by the screw rod (16) it is locked in the screw hole.
10. a kind of silicon single crystal rod according to claim 9 has enough to meet the need device, it is characterized in that: the integral type on the locking nut It is provided with convenient for rotating the handle of the locking nut, is arranged rubber sleeve on the handle.
CN201821564112.XU 2018-09-24 2018-09-24 A kind of silicon single crystal rod turnover device Active CN209113100U (en)

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CN201821564112.XU CN209113100U (en) 2018-09-24 2018-09-24 A kind of silicon single crystal rod turnover device

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Application Number Priority Date Filing Date Title
CN201821564112.XU CN209113100U (en) 2018-09-24 2018-09-24 A kind of silicon single crystal rod turnover device

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109205313A (en) * 2018-09-24 2019-01-15 杭州中为光电技术有限公司 Silicon single crystal rod has enough to meet the need device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109205313A (en) * 2018-09-24 2019-01-15 杭州中为光电技术有限公司 Silicon single crystal rod has enough to meet the need device

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