CN209082015U - A kind of copper foil warpage annealing device - Google Patents

A kind of copper foil warpage annealing device Download PDF

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Publication number
CN209082015U
CN209082015U CN201822025390.4U CN201822025390U CN209082015U CN 209082015 U CN209082015 U CN 209082015U CN 201822025390 U CN201822025390 U CN 201822025390U CN 209082015 U CN209082015 U CN 209082015U
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China
Prior art keywords
baking oven
copper foil
air
warpage
wind
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CN201822025390.4U
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Inventor
王冠毅
杜冠明
董国飞
李伟
周赞雄
焦新波
葛赞博
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Shaanxi Han Ho New Mstar Technology Ltd
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Shaanxi Han Ho New Mstar Technology Ltd
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Abstract

The utility model discloses a kind of copper foil warpage annealing devices, pass through the combination settings of baking oven, circulation wind apparatus, heating device;Heat in hot wind is transferred in copper foil through the first end of baking oven to be played heat effect and partial heat is lost, cold wind is pumped into heating device through the second end of baking oven by air draft pipe under the action of recycling wind apparatus and is entered in baking oven again after heating, a closed circuit circulatory system is formed;Can ensure that for exhaust column can quickly comprehensively take the cold wind inside the second end for being located at baking oven away;The collocation of circulating fan, air supply pipeline, air draft pipeline can ensure that the generation of circulated air;It is completed by temp probe to the temperature detection in baking oven, temperature detection result feeds back to temperature digital display controller, adjusts temperature digital display controller to quickly, precisely, efficiently realize the temperature control to copper foil in baking oven.

Description

A kind of copper foil warpage annealing device
Technical field
The utility model belongs to electrolytic copper foil production technical field, and in particular to a kind of copper foil warpage annealing device.
Background technique
Electrolytic copper foil is to be deposited on cathode titanium roller by electrochemical method by copper ion to generate, since copper foil is in growth In the process as the thickness of copper foil is continuously increased, variation constantly occurs for electrochemical environment, forms the size and shape of copper foil crystal grain For looks also with change, crystal grain composition of the copper foil from bright face to hair side slowly becomes column crystal, crystal grain by initial equiax crystal With becoming larger;In subsequent wrapup procedure, since with the presence of winding tension, the intercrystalline of different size and pattern is produced in copper foil Raw internal stress is also different, and internal stress has a timeliness, i.e., internal stress will slowly change the arrangement of crystal grain in copper foil, shape and big Small, macroscopically copper foil is shown as from the bright warpage towards hair side.
On the one hand copper foil warpage influences the convenience for rolling up operation;Slurry point when tourist family is coated under the influence of another aspect The uniformity of cloth influences the quality of lithium battery, brings about great losses to company.Production technology generally takes heating method at present Copper foil warpage is reduced, but due to the limitation of production technology and equipments, along with rare experience can be used for reference, its work is caused to be imitated Rate is low, and treatment effect is not ideal enough, and cumbersome, use and maintenance cost are higher.
Summary of the invention
The purpose of this utility model is that solve the above-mentioned problems and provides a kind of copper foil warpage annealing device.
The utility model achieves the above object through the following technical schemes:
A kind of copper foil warpage annealing device, comprising:
For placing the baking oven of copper foil;
For being blown into wind from the first end of baking oven, from the circulation wind apparatus of the second end of baking oven extraction wind;
For being blown into the heating device of the heating of the wind in baking oven to circulation wind apparatus;Heating device is mounted on circulation wind apparatus Air supply pipeline on.
According to the second law of thermodynamics (heat can the spontaneously object low to temperature from the high object transfer of temperature, but Can not the spontaneously object high to temperature from the low object transfer of temperature), the heat in hot wind is transmitted through the first end of baking oven Play heat effect into copper foil and partial heat be lost, under the action of recycling wind apparatus by air draft pipe through baking oven the Cold wind is pumped into heating device after heating and enters in baking oven by two ends, forms a closed circuit circulatory system.
Specifically, the second end of baking oven is provided with operation port, is sealed at operation port by the way that a sealing device is arranged.
Taking-up copper foil can be put by operation port;And setting sealing device may insure that baking oven is in during the work time Sealing state.
Specifically, circulation wind apparatus includes:
Circulating fan;
Air supply pipeline;The air outlet of circulating fan is connected to by air supply pipeline with the first end of baking oven;
Air draft pipeline;
Exhaust column;Exhaust column is mounted on oven interior, and exhaust column includes the open sub- exhaust column of more first ends, sub- exhausting The first end of pipe is located inside the second end of baking oven, the air inlet of circulating fan by air draft pipeline respectively with more root exhaust columns Second end connection.
The Unique physical design of exhaust column, which can ensure that, quickly comprehensively to be taken out the cold wind inside the second end for being located at baking oven It walks;The collocation of circulating fan, air supply pipeline, air draft pipeline can ensure that the generation of circulated air.
Specifically, heating device is heater box.
Specifically, copper foil warpage annealing device further include:
Multiple temp probes for being used to acquire each point temperature in baking oven;
Temperature digital display controller;The data signal input of temperature digital display controller data with multiple temp probes respectively Signal output end connection;The control signal output of temperature digital display controller and the control signal input of heating device connect.
It is completed by temp probe to the temperature detection in baking oven, temperature detection result feeds back to temperature digital display controller, Temperature digital display controller is adjusted to quickly, precisely, efficiently realize the temperature control to copper foil in baking oven.
Specifically, it is provided in baking oven and puts foil frame for place copper foil, putting foil frame includes upper, middle and lower-ranking, and is put The bottom of foil frame is provided with movable pulley.
It puts foil frame and is divided into upper, middle and lower-ranking, can make full use of oven interior working space, and bottom design installation There is movable pulley, it is small and exquisite, it is convenient for operation, mobility strong, efficient work.
Specifically, air supply pipeline connection is provided in the corresponding position of oven interior and is used in the first end lower part of baking oven Allow hot wind that can uniformly be efficiently diffused into the flow-stopping plate of baking oven bottom, flow-stopping plate is for stopping hot wind directly to blow to copper foil.
Specifically, three-way control valve is provided in air supply pipeline and air draft pipeline.
The design of three-way control valve is convenient to later period expansion working space, it is only necessary to which connecting three-way control valve can be most Limits widen working space.
Specifically, one layer of setting is wrapped up by silica gel in the outside of circulating fan, heater box, air supply pipeline and air draft pipeline Heat preservation, the fire prevention, corrosion-resistant component of cotton, glass fiber, cement, nylon wire composition.
To greatest extent reduce heat energy consumption, improve high efficiency of energy utilize while extend equipment use the longevity Life.
A kind of processing method of copper foil warpage annealing device, comprising the following steps:
(1) according to place size, the baking oven of suitable dimension, reasonable utilization space are made;
(2) operation port is made and installs in the second end of baking oven, operation port is designed using door-opening type, to greatest extent side Just it operates;
(3) air port is made in the bear of baking oven first end and three-way control valve is installed;
(4) flow-stopping plate is installed in front of the bottom tuyeres of baking oven first end, expands the hot wind into baking oven uniformly effectively It is scattered to baking oven bottom;
(5) at the top of baking oven first end, punching makes air port and installs three-way control valve;
(6) exhaust column is installed at the top air port of baking oven first end, takes out cold wind by the first end inside top of baking oven Out;
(7) with the three-way control valve and circulating fan suction opening in air draft pipeline connection baking oven air port, enter baking oven cold wind To circulating fan;
(8) heater box is made, the two sides of heater box are respectively kept with air inlet and air outlet, and heater box interior arrangement has Multiple electric heating groups;
(9) with air supply pipeline connection circulating fan air outlet and heater box air port;
(10) with the three-way control valve of air supply pipeline connection heater box air outlet and baking oven air inlet;
(11) temperature digital display controller is installed, and temp probe, real-time control oven temperature are being installed at the top of baking oven;
(12) make suitable dimension puts foil frame;
(13) finished copper foil that is heat-treated will be needed to put to putting on foil frame, and then will be placed with putting foil frame neatly and having for copper foil Sequence is placed in baking oven, and has closed operation port;
(14) start circulating fan after mixing up the three-way control valve at baking oven air inlet and suction opening, by oven interior gas Stream completely reaches job requirement by air filter filtering;
(15) temperature digital display controller is set to target temperature;
(16) it is heated under the conditions of marking temperature and takes out finished copper foil after a certain period of time;
(17) in suitable working environment it is with method appropriate that finished copper foil after heat treatment is cooling, pack.
The utility model has the beneficial effects that:
1, pass through the combination settings of baking oven, circulation wind apparatus, heating device;And (heat can according to the second law of thermodynamics With object spontaneously low to temperature from the high object transfer of temperature, but can not be spontaneously from the low object transfer of temperature to temperature Spend high object), the heat in hot wind is transferred in copper foil through the first end of baking oven to be played heat effect and is lost partial heat, Under the action of recycling wind apparatus by air draft pipe after cold wind is pumped into and to heat in heating device by the second end of baking oven again It enters in baking oven, forms a closed circuit circulatory system;The Unique physical design of exhaust column can ensure that can be quickly comprehensively by position Cold wind inside the second end of baking oven is taken away;The collocation of circulating fan, air supply pipeline, air draft pipeline can ensure that the production of circulated air It is raw;It is completed by temp probe to the temperature detection in baking oven, temperature detection result feeds back to temperature digital display controller, adjusts number Aobvious temperature controller is to quickly, precisely, efficiently realize the temperature control to copper foil in baking oven.
2, using unique copper foil processing method, so that the processing of copper foil is more environmentally-friendly energy saving, simple, convenient fast Victory is expanded space greatly.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of copper foil warpage annealing device in the utility model.
In figure: 1, temperature digital display controller;2, three-way control valve;3, circulating fan;4, heater box;5, flow-stopping plate;6, warm Degree probe;7, exhaust column;8, sealing device;9, operation port;10, baking oven;11, foil frame is put.
Specific embodiment
The utility model is described in further detail with reference to the accompanying drawing:
Embodiment 1, as shown in Figure 1:
A kind of copper foil warpage annealing device, comprising:
For placing the baking oven 10 of copper foil;
For being blown into wind from the first end of baking oven 10, from the circulation wind apparatus of the second end of baking oven 10 extraction wind;
For being blown into the heating device of the heating of the wind in baking oven 10 to circulation wind apparatus;Heating device is mounted on circulated air dress In the air supply pipeline set.
According to the second law of thermodynamics (heat can the spontaneously object low to temperature from the high object transfer of temperature, but Can not the spontaneously object high to temperature from the low object transfer of temperature), the heat in hot wind is passed through the first end of baking oven 10 It is handed in copper foil and plays heat effect and partial heat is lost, by exhaust column 7 through baking oven under the action of recycling wind apparatus Cold wind is pumped into heating device after heating and enters in baking oven 10 by 10 second end, forms a closed circuit circulatory system.
Embodiment 2, as shown in Figure 1:
The present embodiment the difference from embodiment 1 is that:
The second end of baking oven 10 is provided with operation port 9, is sealed at operation port 9 by the way that a sealing device 8 is arranged.
Taking-up copper foil can be put by operation port 9;And setting sealing device 8 may insure baking oven 10 during the work time In sealing state.
Embodiment 3, as shown in Figure 1:
The present embodiment the difference from embodiment 1 is that: circulation wind apparatus include:
Circulating fan 3;
Air supply pipeline;The air outlet of circulating fan 3 is connected to by air supply pipeline with the first end of baking oven 10;
7 tunnel of exhaust column;
Exhaust column 7;Exhaust column 7 is mounted on inside baking oven 10, and exhaust column 7 includes the open sub- exhaust column 7 of more first ends, The first end of sub- exhaust column 7 is located inside the second end of baking oven 10, the air inlet of circulating fan 3 by 7 tunnel of exhaust column respectively with The second end of more root exhaust columns 7 is connected to.
The Unique physical design of exhaust column 7 can ensure that can be quickly comprehensively by the cold wind inside the second end for being located at baking oven 10 It takes away;The collocation of circulating fan 3, air supply pipeline, 7 tunnel of exhaust column can ensure that the generation of circulated air.
Embodiment 4, as shown in Figure 1:
The present embodiment the difference from embodiment 1 is that: heating device be heater box 4.
Embodiment 5, as shown in Figure 1:
The present embodiment and the difference of embodiment 1 or embodiment 4 are: copper foil warpage annealing device further include:
Multiple temp probes 6 for being used to acquire each point temperature in baking oven 10;
Temperature digital display controller 1;The data signal input of temperature digital display controller 1 respectively with multiple temp probes 6 Data signal output connection;The control signal output of temperature digital display controller 1 and the control signal input of heating device Connection.
It is completed by temp probe 6 to the temperature detection in baking oven 10, temperature detection result feeds back to temperature digital display control Instrument 1 adjusts temperature digital display controller 1 to quickly, precisely, efficiently realize the temperature control to copper foil in baking oven 10.It is multiple Temp probe 6 respectively corresponds multiple electric heating groups in above-mentioned heater box 4, and independent operating cooperates;
Embodiment 6, as shown in Figure 1:
The present embodiment the difference from embodiment 1 is that: be provided in baking oven 10 and put foil frame 11 for place copper foil, put Foil frame 11 includes upper, middle and lower-ranking, and the bottom for putting foil frame 11 is provided with movable pulley.
It puts foil frame 11 to divide for upper, middle and lower-ranking, can make full use of 10 internal working volume of baking oven, and bottom is designed Movable pulley is installed, it is small and exquisite, it is convenient for operation, mobility strong, efficient work.
Embodiment 7, as shown in Figure 1:
The present embodiment the difference from embodiment 1 is that: air supply pipeline be connected in the first end lower part of baking oven 10, in baking oven 10 Internal corresponding position is provided with the flow-stopping plate 5 for allowing hot wind that can uniformly be efficiently diffused into 10 bottom of baking oven, flow-stopping plate 5 For stopping hot wind directly to blow to copper foil.Flow-stopping plate 5 and the direction that is blown into of hot wind are mutually perpendicular to.
Embodiment 8, as shown in Figure 1:
The present embodiment the difference from example 2 is that: be provided with three-way control valve on 7 tunnel of air supply pipeline and exhaust column 2。
The design of three-way control valve 2 is convenient to later period expansion working space, it is only necessary to which connecting three-way control valve 2 can Working space is widened to greatest extent.
Embodiment 9:
The present embodiment the difference from embodiment 1 is that: circulating fan 3,7 tunnel of heater box 4, air supply pipeline and exhaust column it is outer Wrap up one layer of heat preservation, fire prevention, corrosion-resistant component being made of silica gel cotton, glass fiber, cement, nylon wire of setting in portion.
To greatest extent reduce heat energy consumption, improve high efficiency of energy utilize while extend equipment use the longevity Life.
Embodiment 10:
The present embodiment the difference from embodiment 1 is that: above-mentioned 10 material therefor of baking oven is by wrapping up silica gel among double-layer plate Cotton is made, and seamless welding, can effectively ensure that the loss of 10 internal heat of baking oven, improves energy utilization rate;
Embodiment 11:
The difference of the present embodiment and any one of embodiment 1-10 is: a kind of processing side of copper foil warpage annealing device Method, comprising the following steps:
1, according to place size, the baking oven 10 of suitable dimension, reasonable utilization space are made;
2, the second end in baking oven 10 makes and installs operation port 9, and operation port 9 is designed using door-opening type, to greatest extent Facilitate operation;
3, air port is made in the bear of 10 first end of baking oven and three-way control valve 2 is installed;
4, flow-stopping plate 5 is installed in front of the bottom tuyeres of 10 first end of baking oven, keeps the hot wind into baking oven 10 uniformly effective Ground is diffused into 10 bottom of baking oven;
5, at the top of 10 first end of baking oven, punching makes air port and installs three-way control valve 2;
6, exhaust column 7 is installed at the top air port of 10 first end of baking oven, makes cold wind by the first end medial roof of baking oven 10 Portion's extraction;
7, with the three-way control valve 2 and 3 suction opening of circulating fan in 7 tunnel of exhaust column connection 10 air port of baking oven, keep baking oven 10 cold Wind enters circulating fan 3;
8, heater box 4 is made, the two sides of heater box 4 are respectively kept with air inlet and air outlet, and 4 interior arrangement of heater box There are multiple electric heating groups;
9,3 air outlet of circulating fan and 4 air port of heater box are connected with air supply pipeline;
10, with the three-way control valve 2 of air supply pipeline connection 4 air outlet of heater box and 10 air inlet of baking oven;
11, temperature digital display controller 1 is installed, and temp probe 6,10 temperature of real-time control baking oven are being installed at the top of baking oven 10 Degree;
12, make suitable dimension puts foil frame 11;
13, the finished copper foil that is heat-treated will be needed to put to putting on foil frame 11, then by be placed with copper foil to put foil frame 11 whole It is orderly together to be placed in baking oven 10, and closed operation port 9;
14, start circulating fan 3 after mixing up the three-way control valve 2 at 10 air inlet of baking oven and suction opening, by baking oven 10 Internal gas flow completely reaches job requirement by air filter filtering, and air filter can play working air current and remove Dirt, dehumidifying effect;
15, temperature digital display controller 1 is set to target temperature;
16, it is heated under the conditions of marking temperature and takes out finished copper foil after a certain period of time;
17, in suitable working environment it is with method appropriate that finished copper foil after heat treatment is cooling, pack.
The annealing device of the utility model, its working principle is that:
Circulating fan 3 is by the cold air in airtight oven 10 by exhaust column 7 by extracting out at the top of baking oven 10 (in baking oven 10 Inside forms air-flow), it is then fed into after being heated in heater box 4, is entered inside baking oven 10 by air supply duct, in baking oven 10 Working air current uses whole machine balancing formula Design of ventilation, and being mounted on the flow-stopping plate 5 in front of 10 air inlet of baking oven will can effectively enter The hot wind of baking oven 10 is evenly distributed to 10 bottom of baking oven, and according to the second law of thermodynamics, (heat can be spontaneously high from temperature The object transfer object low to temperature, but can not the spontaneously object high to temperature from the low object transfer of temperature), in hot wind Heat transfer play heat effect into copper foil and partial heat be lost, further according to air flow principles (always from heat one A Fang Liuxiang cold side), loss partial heat becomes cold wind again at 10 top of hot blast flow direction baking oven of 10 bottom of baking oven, is then following It enters in heater box 4 under the action of ring blower 3 again by exhaust column 7 and is entered in baking oven 10 again after heating, form one A closed circuit circulatory system;According to the zeroth law of thermodynamics (law of thermal equilibrium), temperature digital display controller 1 is adjusted to quick, essence It is quasi-, efficiently realize temperature control to copper foil in baking oven 10;Air filter in heater box 4 plays pair in the process The effect of working air current dedusting, dehumidifying is capable of the working environment of effective guarantee system, scientific and efficient.
The advantages of this item utility model is compared with the copper foil warpage heat treatment process now used is:
(1) environmental protection and energy saving.The utility model in the actual operation process, only consumes electric energy, disappears without other supplementary energies Consumption, and multiple heating groups are controlled by temperature digital display controller 1, can also be cooperated with independent operating, along with entirely setting Standby to be in sealed envelope state, working air current is in self-loopa state again, reduces the loss of thermal energy to greatest extent, saves Energy consumption reduces production cost.Running its seal degree by one month actual load completely can be with vacuum drying oven 10 It matches in excellence or beauty, and average daily electricity consumption is only 85 ° or so, is the 30-40% of traditional equipment power consumption;
(2) efficiently advanced.Temperature can be increased to 90 by room temperature in one hour to the utility model in the actual operation process DEG C, and whole machine balancing formula Design of ventilation, efficient work can be controlled accurately along with temperature digital display controller 1 controls precision height Copper foil temperature processed, the copper foil warpage through Overheating Treatment can be reduced to 5mm hereinafter, with heating time compared with traditional handicraft Short, operation precision height, the advantages such as treatment effect is obvious, performance is brilliant;
(3) simple, convenient quick.In the actual operation process, staff only needs to be arranged the target of baking oven 10 Temperature can be realized and carry out heated in real-time to finished copper foil, save the cumbersome process of traditional operation, and dapper wheel is added Formula puts foil frame 11, and mobility strong, space utilization rate are high, and heat treatment amount by 3 tons or so of traditional handicraft is promoted to 7 tons to copper foil daily Left and right, working efficiency improve 2-3 times, and effect is obvious;
(4) ingenious in design, scientific arrangement.Working air current uses whole machine balancing formula Design of ventilation in baking oven 10, in baking oven 10 Air inlet, flow-stopping plate 5, suction opening and exhaust column 7 are with their own characteristics, additional temperature digital display controller 1, air filter none It is convenient and intelligent for our brings that science and technology is not embodied;
(5) it expands space big.The design of three-way control valve 2 at 10 air inlet of baking oven and suction opening is to add a crucial touch Pen, the later period can expand working space according to actual needs, extremely convenient, and can select any one by the adjusting of valve (or two) baking oven 10 works, strong operability;
(6) Zhi Jiangben is saved.The utility model has successfully built a single for my company and has heated 7 tons of copper foil or more More than 50 cubes of heated oven 10 alleviates market to the supply of material pressure of low warpage copper foil demand, and the utility model can be complete Full substitution vacuum drying oven 10, saves 200,000 yuan of expense or more in contrast, expands space, know micro- along with the later period is immeasurable See work.
The basic principles and main features and advantage of the utility model have been shown and described above.The technical staff of the industry It should be appreciated that the present utility model is not limited to the above embodiments, the above embodiments and description only describe this The principle of utility model, on the premise of not departing from the spirit and scope of the utility model, the utility model also has various change And improvement, these various changes and improvements fall within the scope of the claimed invention.The utility model requires protection scope It is defined by appending claims and equivalents.

Claims (9)

1. a kind of copper foil warpage annealing device characterized by comprising for placing the baking oven of copper foil;For from baking oven First end is blown into wind, from the circulation wind apparatus of the second end of baking oven extraction wind;For being blown into the wind in baking oven to circulation wind apparatus The heating device of heating;Heating device is mounted in the air supply pipeline of circulation wind apparatus.
2. a kind of copper foil warpage annealing device according to claim 1, it is characterised in that: the second end of baking oven is provided with Operation port is sealed at operation port by the way that a sealing device is arranged.
3. a kind of copper foil warpage annealing device according to claim 1, which is characterized in that circulation wind apparatus includes: to follow Ring blower;Air supply pipeline;The air outlet of circulating fan is connected to by air supply pipeline with the first end of baking oven;Air draft pipeline;Exhausting Pipe;Exhaust column is mounted on oven interior, and exhaust column includes the open sub- exhaust column of more first ends, the first end position of sub- exhaust column Inside the second end of baking oven, the air inlet of circulating fan is connected with the second end of more root exhaust columns respectively by air draft pipeline It is logical.
4. a kind of copper foil warpage annealing device according to claim 1, it is characterised in that: heating device is heater box.
5. a kind of copper foil warpage annealing device according to claim 1 or 4, which is characterized in that the heat treatment of copper foil warpage Device further include: multiple for acquiring the temp probe of each point temperature in baking oven;Temperature digital display controller;Temperature digital display controller Data signal input connect respectively with the data signal output of multiple temp probes;The control of temperature digital display controller is believed The control signal input of number output end and heating device connects.
6. a kind of copper foil warpage annealing device according to claim 1, it is characterised in that: be provided with and be used in baking oven That places copper foil puts foil frame, and putting foil frame includes upper, middle and lower-ranking, and the bottom for putting foil frame is provided with movable pulley.
7. a kind of copper foil warpage annealing device according to claim 1, it is characterised in that: air supply pipeline is connected in baking oven First end lower part, be provided in the corresponding position of oven interior for allowing hot wind that can uniformly be efficiently diffused into baking oven bottom Flow-stopping plate, flow-stopping plate is for stopping hot wind directly to blow to copper foil.
8. a kind of copper foil warpage annealing device according to claim 2, it is characterised in that: in air supply pipeline and exhaust column Road is provided with three-way control valve.
9. a kind of copper foil warpage annealing device according to claim 1, it is characterised in that: circulating fan, is sent heater box It wraps up one layer of heat preservation being made of silica gel cotton, glass fiber, cement, nylon wire of setting, prevent in the outside of air pipe line and air draft pipeline Fiery, corrosion-resistant component.
CN201822025390.4U 2018-12-04 2018-12-04 A kind of copper foil warpage annealing device Active CN209082015U (en)

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Application Number Priority Date Filing Date Title
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109385648A (en) * 2018-12-04 2019-02-26 陕西汉和新材料科技有限公司 A kind of copper foil warpage annealing device and method
CN113151759A (en) * 2021-04-28 2021-07-23 广东嘉元科技股份有限公司 Reduce electric heat treatment device of copper foil warpage

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109385648A (en) * 2018-12-04 2019-02-26 陕西汉和新材料科技有限公司 A kind of copper foil warpage annealing device and method
CN113151759A (en) * 2021-04-28 2021-07-23 广东嘉元科技股份有限公司 Reduce electric heat treatment device of copper foil warpage

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