CN209056508U - A kind of flexible CIGS thin film solar battery - Google Patents

Abstract

The utility model discloses a kind of flexible CIGS thin film solar battery, including flexible substrates, and flexible substrates top surface is sequentially laminated with back electrode, CIGS thin film, buffer layer, resistive formation, Window layer and anti-reflection layer from the bottom to top；Back electrode includes the alloy film layer stacked gradually from the bottom to top, ZnAl film layer, drop resistance metallic diaphragm, anticorrosion film and Mo film layer；Alloy film layer is CuAl, CuZn, TiAl or TiCu film；Drop resistance metallic diaphragm is Ti, Al, Ag or Cu film layer；Anticorrosion film is MoN, MoO, Al₂O₃, TiN or TiON film layer；Buffer layer is ZnS or InS film；Resistive formation is intrinsic ZnO film；Window layer is GZO or IGZO film；Anti-reflection layer is MgF₂Or ZnS film；The battery does not need that barrier layer, back electrode is relatively thin and has many advantages, such as preferable vacuum technology compatibility, indeformable, anticorrosive, the good chemical stability of later period high temperature selenizing.

Description

A kind of flexible CIGS thin film solar battery

Technical field

The utility model relates to technical field of thin-film solar, specifically a kind of flexible CIGS thin film sun It can battery.

Background technique

Copper indium gallium selenide (CIGS) thin-film solar cells just rapidly develops at present, but most is substrate of glass, flexible CIGS Thin-film solar cells just starts, foldable due to its light weight, flexible, easy to carry, therefore can use circulating type Sputtering sedimentation is advantageously implemented large-scale production, and significantly reduces cost, can be widely used in portable emergency charging back Packet, photovoltaic tent, photovoltaic curtain, photovoltaic roof, solar telephone etc. have wide application space, improve flexible CIGS film Solar battery efficiency and service life are conducive to the sustainable and healthy development of China's photovoltaic industry.

Utility model content

The purpose of this utility model is to provide a kind of flexible CIGS thin film solar battery, which is not needed Barrier layer, back electrode is relatively thin and has preferable vacuum technology compatibility, later period high temperature selenizing indeformable, anticorrosive, good The advantages that chemical stability, in addition multi-layer film structure and substrate adhesive strength are high, have good Ohmic contact with CIGS.

The technical scheme adopted by the utility model to solve the technical problem is as follows:

A kind of flexible CIGS thin film solar battery, including flexible substrates, flexible substrates top surface from the bottom to top according to It is secondary to be laminated with back electrode, CIGS thin film, buffer layer, resistive formation, Window layer and anti-reflection layer；

The back electrode includes the alloy film layer stacked gradually from the bottom to top, ZnAl film layer, drop resistance metallic diaphragm, anticorrosion Film layer and Mo film layer；The alloy film layer is CuAl, CuZn, TiAl or TiCu film；Drop resistance metallic diaphragm be Ti, Al, Ag or Cu film layer；The anticorrosion film is MoN, MoO, Al₂O₃, TiN or TiON film layer；

The buffer layer is ZnS or InS film；

The resistive formation is intrinsic ZnO film；

The Window layer is GZO or IGZO film；

The anti-reflection layer is MgF₂Or ZnS film；

In the back electrode alloy film layer with a thickness of 60~120nm, ZnAl film layer with a thickness of 40~80nm, drop resistance gold Belong to film layer with a thickness of 20~40nm, anticorrosion film with a thickness of 15~60nm, Mo film layer with a thickness of 55~75nm；

The CIGS thin film with a thickness of 1300~2200nm；

The buffer layer with a thickness of 40~120nm；

The resistive formation with a thickness of 40~120nm；

The Window layer with a thickness of 600~900nm；

The anti-reflection layer with a thickness of 30~110nm.

Further, the flexible substrates use polymeric substrates or metal flexible substrate.

The beneficial effects of the utility model are:

One, using polymeric substrates or metal flexible substrate as flexible substrates, light weight is foldable, flexible, is convenient for It carries, therefore circulating type sputtering sedimentation can be used, be advantageously implemented large-scale production, and significantly reduce cost.

Two, back electrode uses multi-layer film structure, and the addition of alloy film layer and drop resistance film layer can effectively improve back electrode Electric conductivity, ZnAl film layer are well bonded alloy film layer to drop resistance film layer, reduce and answer in the film of whole back electrode Power, drop resistance film layer can relative reduction ZnAl film layer to the resistivity of anticorrosion film, anticorrosion film can prevent later period selenizing Corrosion of the selenium to alloy film layer in the process, Mo film layer make selenium react appropriate and controllable with Mo, and with the CIGS as absorbed layer Film forms good Ohmic contact, beneficial to CIGS thin film solar battery efficiency raising, back electrode reduce barrier layer and The number of plies of Mo, and the thickness of Mo is reduced, back electrode integral thickness reduces, and cost reduces.

Three, buffer layer is ZnS or InS film, and unconventional CdS, had not only reduced cost simultaneously but also had reduced environmental pollution.

Four, Window layer is GZO or IGZO film, and the film thickness sputtered needed for relatively traditional AZO film is lower and has There are better electric conductivity and transmitance.

Five, anti-reflection layer allows absorbed layer to be collected into more sunlights, improves the efficiency of light absorption of battery.

Detailed description of the invention

The present invention will be further described with reference to the accompanying drawings and examples:

Fig. 1 is the structural schematic diagram of the utility model.

Specific embodiment

As shown in Figure 1, the utility model provides a kind of flexible CIGS thin film solar battery, including flexible substrates 1, flexible substrates 1 use polymeric substrates or metal flexible substrate, and polymeric substrates can be polyimides, polybenzimidazoles Deng metal flexible substrate can be iron-nickel alloy, titanium foil, molybdenum foil, aluminium foil, copper foil etc.；

1 top surface of flexible substrates is sequentially laminated with back electrode 2, CIGS thin film 3, buffer layer 4, resistive formation 5, window from the bottom to top Layer 6 and anti-reflection layer 7；

The back electrode 2 includes the alloy film layer 21 stacked gradually from the bottom to top, ZnAl film layer 22, drop resistance metallic diaphragm 23, anticorrosion film 24 and Mo film layer 25；The alloy film layer 21 is CuAl, CuZn, TiAl or TiCu film；The drop resistance gold Category film layer 23 is Ti, Al, Ag or Cu film layer；The anticorrosion film 24 is MoN, MoO, Al₂O₃, TiN or TiON film layer；

The buffer layer 4 is ZnS or InS film；

The resistive formation 5 is intrinsic ZnO film；

The Window layer 6 is GZO or IGZO film；

The anti-reflection layer 7 is MgF₂Or ZnS film；

In the back electrode 2 alloy film layer 21 with a thickness of 60~120nm, ZnAl film layer 22 with a thickness of 40~80nm, Drop resistance metallic diaphragm 23 with a thickness of 20~40nm, anticorrosion film 24 with a thickness of 15~60nm, Mo film layer 25 with a thickness of 55~75nm；

The CIGS thin film 3 with a thickness of 1300~2200nm；

The buffer layer 4 with a thickness of 40~120nm；

The resistive formation 5 with a thickness of 40~120nm；

The Window layer 6 with a thickness of 600~900nm；

The anti-reflection layer 7 with a thickness of 30~110nm.

The above descriptions are merely preferred embodiments of the present invention, not makees in any form to the utility model Limitation；Anyone skilled in the art, it is all available in the case where not departing from technical solutions of the utility model ambit The methods and technical content of the disclosure above makes many possible changes and modifications to technical solutions of the utility model, or is revised as The equivalent embodiment of equivalent variations.Therefore, all contents without departing from technical solutions of the utility model, according to the utility model Technical spirit any simple modification, equivalent replacement, equivalence changes and modification made to the above embodiment are still fallen within practical In the range of the protection of new technique scheme.

Claims (2)

1. a kind of flexible CIGS thin film solar battery, which is characterized in that including flexible substrates, flexible substrates top surface by Under supreme be sequentially laminated with back electrode, CIGS thin film, buffer layer, resistive formation, Window layer and anti-reflection layer；

The back electrode includes the alloy film layer stacked gradually from the bottom to top, ZnAl film layer, drop resistance metallic diaphragm, anticorrosion film With Mo film layer；The alloy film layer is CuAl, CuZn, TiAl or TiCu film；Drop resistance metallic diaphragm be Ti, Al, Ag or Cu film layer；The anticorrosion film is MoN, MoO, Al₂O₃, TiN or TiON film layer；

The buffer layer is ZnS or InS film；

The resistive formation is intrinsic ZnO film；

The Window layer is GZO or IGZO film；

The anti-reflection layer is MgF₂Or ZnS film；

In the back electrode alloy film layer with a thickness of 60~120nm, ZnAl film layer with a thickness of 40~80nm, drop resistance metal film Layer with a thickness of 20~40nm, anticorrosion film with a thickness of 15~60nm, Mo film layer with a thickness of 55~75nm；

The CIGS thin film with a thickness of 1300~2200nm；

The buffer layer with a thickness of 40~120nm；

The resistive formation with a thickness of 40~120nm；

The Window layer with a thickness of 600~900nm；

The anti-reflection layer with a thickness of 30~110nm.

2. a kind of flexible CIGS thin film solar battery according to claim 1, which is characterized in that the flexibility Substrate uses polymeric substrates or metal flexible substrate.