CN209010592U - Cathode arc source with pneumatic baffle - Google Patents
Cathode arc source with pneumatic baffle Download PDFInfo
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- CN209010592U CN209010592U CN201821728876.8U CN201821728876U CN209010592U CN 209010592 U CN209010592 U CN 209010592U CN 201821728876 U CN201821728876 U CN 201821728876U CN 209010592 U CN209010592 U CN 209010592U
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- arc source
- cathode arc
- flange seat
- cathode
- pneumatic baffle
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Abstract
The utility model discloses the cathode arc sources with pneumatic baffle, belong to cathode arc source domain, cathode arc source with pneumatic baffle includes flange seat and cathode arc source ontology, cathode arc source ontology is fixed on flange seat, it further include pneumatic baffle, pneumatic baffle includes cradling piece, the rotary cylinder of driving arm bar rotation, sealing element, and shielding upper plate, cradling piece passes through flange seat, and it can be rotated relative to flange seat, one end of cradling piece is fixedly connected with rotary cylinder, the other end of cradling piece is fixedly connected with the outer edge of shielding upper plate, shielding upper plate is located at the top of cathode arc source ontology, the contact position of cradling piece and flange seat is sealed by sealing element.The cathode arc source with pneumatic baffle of the utility model is not necessarily to empty furnace and is coated with cleaning target, saves the time.
Description
Technical field
The utility model belongs to cathode arc source domain more particularly to a kind of cathode arc source with pneumatic baffle.
Background technique
Cathodic arc ion plating is invented by the former Soviet Union, and the multi sphere company in the U.S. is applied to industry, is being decorated later
The industries such as plated film, tool and mould plated film are flourished.The film layer plated out has deposition velocity is fast, consistency is high, and binding force is good etc.
Feature.
Cathode arc source is the main parts size of vacuum coating equipment, and current cathode arc source is primarily present following ask
Topic: plating industry in decoration, be coated with black film layer using cathodic arc ion plating, because joined acetylene gas, cathode
Target material surface can adsorb carbon atom or acetylene gas, this makes cathode targets surface that can black.And the cathode targets to black are plating
When making next furnace black product, meeting preferential combustion is coated on product, and product can generate film since bottom is not clean
The problem of.So it is then not put product after being coated with a furnace and refire cathode arc that existing cathode arc, which is coated with black, yin
The burning of pole electrical arc surface is clean, then is coated with next furnace product, this methods greatly wastes the time, wastes electric power,
Reduce production efficiency.
Utility model content
In order to overcome the drawbacks of the prior art, the technical problem to be solved by the utility model is to propose that a kind of band is pneumatic
The cathode arc of baffle is coated with cleaning target without empty furnace, saves the time.
For this purpose, the utility model uses following technical scheme:
Cathode arc source provided by the utility model with pneumatic baffle, including flange seat and cathode arc source ontology, yin
Pole electrical arc source ontology is fixed on flange seat, further includes pneumatic baffle, and pneumatic baffle includes that cradling piece, driving arm bar rotate
Rotary cylinder, sealing element and shielding upper plate, cradling piece passes through flange seat, and can rotate relative to flange seat, the one of cradling piece
End is fixedly connected with rotary cylinder, and the other end of cradling piece is fixedly connected with the outer edge of shielding upper plate, and shielding upper plate is located at yin
The contact position of the top of pole electrical arc source ontology, cradling piece and flange seat is sealed by sealing element.
The utility model preferably technical solution is that cathode arc source ontology includes cathode block, adjusting set and permanent magnetism
Body, cathode block are fixed on flange seat, and adjusting set is fixed on the side of flange seat by cathode block, and the middle part of cathode block is solid
Surely there is magnetic receiver, and magnetic receiver is located at the other side of flange seat, some or all of permanent magnet are located in magnetic receiver, and with
Magnetic receiver is slidably matched, and shielding upper plate is located at the top of adjusting set.
The utility model preferably technical solution is, sealing element includes two copper rings and two cushion rubbers, two copper rings and
Two cushion rubbers are interspersed.
The utility model preferably technical solution is, further includes solenoid valve, relay and PLC, solenoid valve and rotation
Cylinder is electrically connected, and relay and solenoid valve are electrically connected, and PLC and relay are electrically connected.
The utility model preferably technical solution is, further includes touch screen, and touch screen and PLC are electrically connected.
The utility model preferably technical solution is, cathode arc source ontology further includes shielding insulation pad and housing,
Shielding insulation pad is fixed between adjusting set and flange seat, housing is embedded in adjusting set.
The utility model preferably technical solution is that cathode arc source ontology further includes polytetrafluoro felt pad, cathode block
Polytetrafluoro felt pad is fixed between flange seat.
The utility model preferably technical solution is that cathode arc source ontology further includes magnetic field trimming piece, magnetic field fine tuning
Part is fixedly connected with permanent magnet.
The utility model preferably technical solution is, magnetic field trimming piece includes that magnetic is stifled and magnetic bar, one end of magnetic bar with forever
Magnet is fixedly connected, and the other end of magnetic bar is blocked up with magnetic to be fixedly connected.
The utility model preferably technical solution is, permanent magnet and the concentric setting of adjusting set.
The utility model has the following beneficial effects:
Cathode arc source provided by the utility model with pneumatic baffle, by rotary cylinder drive shielding upper plate rotate into
Row opens and closes, and the nigrescence substance above cathode targets can be burned out and then be coated on shielding upper plate, rather than plate
It makes on product, the bottom of product is not polluted by atrament, protects the bottom of product.Saved once vacuumize when
Between, the saving of time also creates the saving of the electricity charge, while improving production efficiency.By copper ring to cushion rubber and compression, improve
The sealing effect of cushion rubber.Control rotary cylinder movement by PLC, and on the touchscreen can the state modulators PLC such as defeated time,
It is more convenient.It is shielded by shielding insulation pad and housing, plays good anti-jamming effectiveness.Polytetrafluoro felt pad it is exhausted
Edge performance is stablized, and rigidity is good.
Detailed description of the invention
Fig. 1 is the schematic view of the front view of the utility model；
Fig. 2 is the configuration schematic diagram of the utility model；
Fig. 3 is the control principle drawing of the utility model rotary cylinder.
In figure:
1, flange seat；100, cathode arc source ontology；2, cathode block；3, adjusting set；4, permanent magnet；5, pneumatic baffle；51,
Cradling piece；52, rotary cylinder；53, sealing element；531, copper ring；532, cushion rubber；54, upper plate is shielded；6, solenoid valve；7, relay；
8,PLC；9, touch screen；10, shielding insulation pad；11, housing；12, polytetrafluoro felt pad；13, magnetic field trimming piece；131, magnetic
It is stifled；132, magnetic bar；14, magnetic receiver.
Specific embodiment
Further illustrate the technical solution of the utility model below with reference to the accompanying drawings and specific embodiments.
As shown in Figure 1 to Figure 3, the cathode arc source with pneumatic baffle provided in the present embodiment, including flange seat 1, gas
Dynamic baffle 5 and cathode arc source ontology 100, cathode arc source ontology 100 are fixed on flange seat 1, and pneumatic baffle 5 includes bracket
Rotary cylinder 52, sealing element 53 and the shielding upper plate 54 that bar 51, driving arm bar 51 rotate, cradling piece 51 is metallic support
Bar, 52 model Japan SMC CRB2BW10-90S of rotary cylinder, cradling piece 51 pass through flange seat 1, and can be with respect to flange seat 1
Rotation, one end of cradling piece 51 are fixedly connected with rotary cylinder 52, the other end of cradling piece 51 and the outer edge of shielding upper plate 54
It is fixedly connected, shielding upper plate 54 is located at the top of cathode arc source ontology 100, and cradling piece 51 and the contact position of flange seat 1 pass through
Sealing element 53 seals, and sealing element 53 plays sealing function, and cathode arc source ontology 100 includes cathode block 2, adjusting set 3, Yi Jiyong
Magnet 4, cathode block 2 are fixed on flange seat 1, and adjusting set 3 is fixed on the side of flange seat 1, cathode block by cathode block 2
2 middle part is fixed with magnetic receiver 14, and magnetic receiver 14 is located at the other side of flange seat 1, some or all positions of permanent magnet 4
It in magnetic receiver 14, and is slidably matched with magnetic receiver 14, shielding upper plate 54 is located at the top of adjusting set 3, general after being coated with a furnace
Other that the product being coated with is needed to be placed in workspace, rotary cylinder 52 rotates, and drives shielding upper plate 54 to rotate by cradling piece 51
180 ° of gears first light cathode targets, cathode targets are made to burn before cathode targets, and the nigrescence substance above cathode targets can quilt
Burning is come out and then is coated on shielding upper plate 54, rather than is coated on product, and the bottom of product is not by atrament dirt
Dye, protects the bottom of product.After equal cathode targets burning a period of time, rotary cylinder 52 rotates again, drives shielding upper plate
Cathode targets are left in 54 180 ° of rotations, then carry out being coated with for product.Conventional cathode arc source production procedure: about 20 are vacuumized
Minute-being coated with black product target completely about 20 minutes-vacuumizes about 20 minutes-cleaning pollution target target and blacks about 5 points
Clock-vacuumize about 20 minutes-be coated with black product target completely about 20 minutes, using the cathode arc source with pneumatic baffle 5
Production procedure: it vacuumizes about 20 minutes-being coated with black product target completely about 20 minutes-and vacuumizes about 20 minutes-cleaning dirt
It contaminates target target nigrescence about 5 minutes-is coated with black product target completely about 20 minutes, it follows that using band pneumatic baffle 5
Cathode arc source be coated with black product and saved the time once vacuumized, the saving of time also creates the saving of the electricity charge,
Production efficiency is improved simultaneously.
In order to improve sealing effect, further, sealing element 53 includes two copper rings 531 and two cushion rubbers 532, two copper
Ring 531 and two cushion rubbers 532 are interspersed, and by copper ring 531 to cushion rubber 532 with compression, the sealing for improving cushion rubber 532 is imitated
Fruit.
It further include solenoid valve 6, relay 7 and PLC8 further for the movement of automatic control type rotating cylinder 52,
Solenoid valve 6 is two-position-five-way solenoid valve, and model Ya De visitor 4V410-15DC24V, and relay 7 is 24V relay, and model
Mitsubishi FX3U-128M is selected for Japan and spring IDEC RJ1S-CL-D24, PLC8, solenoid valve 6 and rotary cylinder 52 are electrically connected,
Relay 7 and solenoid valve 6 are electrically connected, and PLC8 and relay 7 are electrically connected, and rotary cylinder 52 can be carried out by compressed air
The rotation of 180 degree, and then the 180 degree for controlling shielding upper plate 54 rotates control.And the control of compressed air is controlled by solenoid valve 6
The on-off of compressed air processed.And solenoid valve 6 is by 7 control switch of relay, relay 7 is connected on PLC8, PLC8
Control relay 7.
It for operating easily, further, further include touch screen 9, touch screen 9 and PLC8 are electrically connected, 9 model of touch screen
For TPC1561Hi, by touch screen 9 can the state modulators PLC8 such as defeated time, it is more convenient.
In order to reduce the interference between adjusting set 3 and flange seat 1, further, cathode arc source ontology 100 further includes screen
Felt pad 10 and housing 11 are covered, shielding insulation pad 10 is fixed between adjusting set 3 and flange seat 1, housing 11 is embedded at tune
In section set 3, is shielded by shielding insulation pad 10 and housing 11, play good anti-jamming effectiveness.
In order to improve insulation performance, further, cathode arc source ontology 100 further includes polytetrafluoro felt pad 12, cathode
Polytetrafluoro felt pad 12 is fixed between seat 2 and flange seat 1, the stable insulation of polytetrafluoro felt pad 12 is rigid good.
In order to be finely adjusted to permanent magnet 4, further, cathode arc source ontology 100 further includes magnetic field trimming piece 13, magnetic
Trimming piece 13 is fixedly connected with permanent magnet 4, and magnetic field trimming piece 13 includes magnetic stifled 131 and magnetic bar 132, one end of magnetic bar 132 and
Permanent magnet 4 is fixedly connected, and the other end of magnetic bar 132 is fixedly connected with magnetic stifled 131, by magnetic block up 131 and magnetic bar 132 can drive forever
The movement of magnet 4 is finely adjusted.
In order to improve magnetic field's regularity, further, permanent magnet 4 and the concentric setting of adjusting set 3 help to improve magnetic
The uniformity of field.
The utility model is described with reference to the preferred embodiments, and those skilled in the art know, is not departing from this reality
It, can be to carry out various changes or equivalence replacement to these features and embodiment in the case where with novel spirit and scope.This
Utility model is not limited to the particular embodiment disclosed, other fall into the embodiment in claims hereof all
Belong to the range of the utility model protection.
Claims (10)
1. the cathode arc source with pneumatic baffle, including flange seat (1) and cathode arc source ontology (100), the cathode arc
Source ontology (100) is fixed on the flange seat (1), it is characterised in that:
It further include pneumatic baffle (5)；
The pneumatic baffle (5) includes rotary cylinder (52), the sealing element of cradling piece (51), driving cradling piece (51) rotation
(53) and upper plate (54) are shielded；
The cradling piece (51) passes through the flange seat (1), and can rotate relative to the flange seat (1)；
One end of the cradling piece (51) is fixedly connected with the rotary cylinder (52)；
The other end of the cradling piece (51) is fixedly connected with the outer edge of shielding upper plate (54)；
Shielding upper plate (54) is located at the top of the cathode arc source ontology (100)；
The contact position of the cradling piece (51) and the flange seat (1) is sealed by the sealing element (53).
2. the cathode arc source according to claim 1 with pneumatic baffle, it is characterised in that:
The cathode arc source ontology (100) includes cathode block (2), adjusting set (3) and permanent magnet (4), the cathode block
(2) it is fixed on flange seat (1), the adjusting set (3) is fixed on the side of flange seat (1) by cathode block (2), described
It is fixed in the middle part of cathode block (2) magnetic receiver (14), and the magnetic receiver (14) is located at the other side of the flange seat (1), institute
It states some or all of permanent magnet (4) to be located in the magnetic receiver (14), and is slidably matched with the magnetic receiver (14)；
Shielding upper plate (54) is located at the top of the adjusting set (3).
3. the cathode arc source according to claim 1 with pneumatic baffle, it is characterised in that:
The sealing element (53) includes two copper rings (531) and two cushion rubbers (532)；
Two copper rings (531) and two cushion rubbers (532) are interspersed.
4. the cathode arc source according to claim 1 with pneumatic baffle, it is characterised in that:
It further include solenoid valve (6), relay (7) and PLC (8)；
The solenoid valve (6) and the rotary cylinder (52) are electrically connected；
The relay (7) and the solenoid valve (6) are electrically connected；
The PLC (8) and the relay (7) are electrically connected.
5. the cathode arc source according to claim 4 with pneumatic baffle, it is characterised in that:
It further include touch screen (9)；
The touch screen (9) and the PLC (8) are electrically connected.
6. the cathode arc source according to claim 2 with pneumatic baffle, it is characterised in that:
The cathode arc source ontology (100) further includes shielding insulation pad (10) and housing (11)；
The shielding insulation pad (10) is fixed between the adjusting set (3) and the flange seat (1)；
The housing (11) is embedded in the adjusting set (3).
7. the cathode arc source according to claim 1 with pneumatic baffle, it is characterised in that:
The cathode arc source ontology (100) further includes polytetrafluoro felt pad (12)；
The polytetrafluoro felt pad (12) is fixed between the cathode block (2) and the flange seat (1).
8. the cathode arc source according to claim 2 with pneumatic baffle, it is characterised in that:
The cathode arc source ontology (100) further includes magnetic field trimming piece (13)；
The magnetic field trimming piece (13) is fixedly connected with the permanent magnet (4).
9. the cathode arc source according to claim 8 with pneumatic baffle, it is characterised in that:
The magnetic field trimming piece (13) includes that magnetic blocks up (131) and magnetic bar (132)；
One end of the magnetic bar (132) is fixedly connected with the permanent magnet (4)；
The other end of the magnetic bar (132) blocks up (131) with the magnetic and is fixedly connected.
10. the cathode arc source according to claim 2 with pneumatic baffle, it is characterised in that:
The permanent magnet (4) and the adjusting set (3) concentric setting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821728876.8U CN209010592U (en) | 2018-10-24 | 2018-10-24 | Cathode arc source with pneumatic baffle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821728876.8U CN209010592U (en) | 2018-10-24 | 2018-10-24 | Cathode arc source with pneumatic baffle |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209010592U true CN209010592U (en) | 2019-06-21 |
Family
ID=66839808
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821728876.8U Active CN209010592U (en) | 2018-10-24 | 2018-10-24 | Cathode arc source with pneumatic baffle |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209010592U (en) |
-
2018
- 2018-10-24 CN CN201821728876.8U patent/CN209010592U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210827 Address after: 362000 Jiumu Industrial Park, Nanan Economic Development Zone, Quanzhou City, Fujian Province Patentee after: JOMOO KITCHEN & BATH Co.,Ltd. Address before: 361021 401-4, No. 598, Guankou South Road, Jimei District, Xiamen City, Fujian Province Patentee before: JINSHAN LAIBAO (XIAMEN) TECHNOLOGY Co.,Ltd. |
|
| TR01 | Transfer of patent right |