CN209000887U - It is sintered chip pin-connected panel moulds of industrial equipment and graphite tube - Google Patents
It is sintered chip pin-connected panel moulds of industrial equipment and graphite tube Download PDFInfo
- Publication number
- CN209000887U CN209000887U CN201821607363.1U CN201821607363U CN209000887U CN 209000887 U CN209000887 U CN 209000887U CN 201821607363 U CN201821607363 U CN 201821607363U CN 209000887 U CN209000887 U CN 209000887U
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- China
- Prior art keywords
- graphite
- ladder
- circular groove
- groove
- round boss
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model relates to a kind of sintering chip pin-connected panel moulds of industrial equipment, including graphite boat and the graphite tube being mounted on graphite boat；The graphite tube is successively stacked together from bottom to up by a graphite base and more than one graphite cannula bowl；The graphite cannula bowl is collar plate shape, its upper surface is equipped with the ladder-like circular groove of a concentric, the groove bottom of the ladder-like circular groove is for placing molybdenum sheet, the upper surface of the molybdenum sheet is higher than the first order step surface of the ladder-like circular groove, and the first order step surface is equipped with annular groove；The lower surface of the graphite cannula bowl is equipped with the round boss of concentric, and the opening of the round boss and the ladder-like circular groove matches；The graphite base is equipped with the groove to match with the round boss, for stacking graphite cannula bowl.The utility model generates dust pollution when can be to avoid piece installing, improve sintering effect, reduces rejection rate；And also avoid the influence that aluminium is flowed when sintering.
Description
Technical field
The utility model belongs to sintering moulds of industrial equipment technical field, and in particular to a kind of sintering chip pin-connected panel tooling mould
Tool.
Background technique
Graphite boat moulds of industrial equipment are usually used in sintering chip, generally there is two rows of tooling positions, each tooling position on graphite boat
On graphite tube is installed, graphite tube as shown in Figure 5 includes cylinder and cylinder bottom.When being sintered chip, in order by molybdenum sheet-aluminium foil-silicon
Piece (figure is upward)-molybdenum sheet-aluminium foil-silicon wafer-... .. is overlayed in the graphite tube on graphite boat, sturdy mutually, then by graphite boat
Entirety is put into heating in vacuum in quartz ampoule, and aluminium foil melts at high temperature sticks together molybdenum sheet and silicon wafer.Due to molybdenum sheet, aluminium foil,
Gap between silicon wafer and graphite tube is small, generally only 0.1-0.2mm, during stacking molybdenum sheet, aluminium foil and silicon wafer be easy from
Scratched on graphite tube lower graphite powder between molybdenum sheet and silicon wafer, cause poor attachment become waste product；Sometimes aluminium foil fusing is from side
Will lead to graphite tube rupture when outflow, or by finished product and graphite tube (or/and graphite boat) pour it is glutinous together, after the completion of causing sintering
Take difficulty living；And rupture of colliding with also is easy between graphite tube and graphite boat.
Utility model content
In view of the above technical problems, the purpose of this utility model is to provide a kind of sintering chip pin-connected panel tooling moulds
Tool, the utility model generate dust pollution when can be to avoid piece installing, improve sintering effect, reduce rejection rate；And it also avoids
The influence of aluminium is flowed when sintering.
To achieve the above object, technical solution adopted in the utility model is:
A kind of sintering chip pin-connected panel moulds of industrial equipment, including graphite boat and the graphite tube being mounted on graphite boat；It is special
Sign is: the graphite tube is successively stacked together from bottom to up by a graphite base and more than one graphite cannula bowl, described
Graphite base is mounted on graphite boat；The graphite cannula bowl is collar plate shape, and upper surface is equipped with the ladder-like circle of a concentric
Connected in star, the groove bottom of the ladder-like circular groove are higher than described ladder-like for placing molybdenum sheet, the upper surface of the molybdenum sheet
The first order step surface of circular groove, the first order step surface are equipped with annular groove；The lower surface of the graphite cannula bowl is set
There is the round boss of concentric, the opening of the round boss and the ladder-like circular groove matches；The graphite base
It is equipped with the groove to match with the round boss, for stacking graphite cannula bowl.
Preferably, the graphite boat is equipped with several graphite tubes, several described graphite tubes are in two on graphite boat
Row is evenly arranged.
Preferably, the tail end of the graphite boat is equipped with push-and-pull hooked scarf.
A kind of graphite tube is successively stacked together from bottom to up by a graphite base and more than one graphite cannula bowl；Institute
Stating graphite cannula bowl is collar plate shape, and upper surface is equipped with the ladder-like circular groove of a concentric, the ladder-like circular groove
Groove bottom for placing molybdenum sheet, the upper surface of the molybdenum sheet is higher than the first order step surface of the ladder-like circular groove, institute
First order step surface is stated equipped with annular groove；The lower surface of the graphite cannula bowl is equipped with the round boss of concentric, the circle
Shape boss and the opening of the ladder-like circular groove match；The graphite base is equipped with to match with the round boss
Groove, for stacking graphite cannula bowl.
The utility model has the following beneficial effects:
1, dust pollution is generated when the utility model can be to avoid piece installing (i.e. dress molybdenum sheet, aluminium foil, silicon wafer), improves sintering effect
Fruit reduces rejection rate.The influence for flowing aluminium when sintering is also avoided simultaneously, and prevents colliding with.
2, the structure type of the utility model is suitable for first being sintered the process cut afterwards, reduces chip from graphite cannula bowl
The probability that edge is collided with when taking-up, qualification rate are higher.
Detailed description of the invention
Fig. 1 is the schematic top plan view for being sintered chip pin-connected panel moulds of industrial equipment.
Fig. 2 is the side schematic view for being sintered chip pin-connected panel moulds of industrial equipment.
Fig. 3 is the enlarged diagram of graphite tube in Fig. 2.
Fig. 4 is the schematic diagram of graphite cannula bowl.
Fig. 5 is the schematic diagram of graphite tube in the prior art.
In figure: 1, graphite boat, 2, graphite tube, 3, push-and-pull hooked scarf, 4, graphite cannula bowl, 5, graphite base, 6, groove bottom, 7, the
Level-one step surface, 8, annular groove, 9, round boss, 10, silicon wafer, 11, aluminium foil, 12, molybdenum sheet, 13, cylinder, 14, cylinder bottom.
Specific embodiment
The utility model in order to better understand does the technical solution of the utility model below with reference to embodiment and attached drawing
Further instruction (as shown in Figs 1-4).
A kind of sintering chip pin-connected panel moulds of industrial equipment, including graphite boat 1 and the graphite tube 2 being mounted on graphite boat 1；Institute
It states graphite tube 2 successively to be stacked together from bottom to up by a graphite base 5 and more than one graphite cannula bowl 4, the graphite bottom
Seat 5 is mounted on graphite boat 1；The graphite cannula bowl 4 is collar plate shape, and the ladder-like circle that upper surface is equipped with a concentric is recessed
Slot (it is ladder-like for two-stage, i.e., the concentric circular grooves of one with 10 diameter matches of silicon wafer are first opened up in 4 upper surface of graphite cannula bowl
One, then the concentric circular grooves two of one with 12 diameter matches of molybdenum sheet are opened up in the slot bottom of the circular groove one), it is described ladder-like
For the groove bottom 6 of circular groove for placing molybdenum sheet 12, the upper surface of the molybdenum sheet 12 is higher than the of the ladder-like circular groove
(molybdenum sheet 12 is sequentially placed aluminium foil 11 and silicon wafer 10 to level-one step surface 7, and the total depth of the ladder-like circular groove is greater than molybdenum
The overall thickness of piece 12 plus aluminium foil 11 plus silicon wafer 10), the first order step surface 7 is equipped with the (annular groove 8 of annular groove 8
Aluminium is flowed for collecting)；The lower surface of the graphite cannula bowl 4 be equipped with concentric round boss 9, the round boss 9 with it is described
The opening of ladder-like circular groove matches, and (round boss 9 of the upper layer graphite cannula bowl 4 is placed on lower layer's graphite cannula bowl 4
In the opening of ladder-like circular groove)；The graphite base 5 is equipped with the groove to match with the round boss 9, for folding
Put graphite cannula bowl 4.The graphite boat 1 is equipped with several graphite tubes 2, several described graphite tubes 2 are on graphite boat 1 in two rows
It is evenly arranged.The tail end of the graphite boat 1 is equipped with push-and-pull hooked scarf 3.
Application method and principle: when (1) being sintered chip, molybdenum sheet 12 is first put into the groove bottom 6 of graphite cannula bowl 4, then in molybdenum
Aluminium foil 11 and silicon wafer 10 are successively stacked on piece 12, are mutually affixed.(2) since the ladder-like circular groove on graphite cannula bowl 4 is than shallower,
The stroke of molybdenum sheet 12, aluminium foil 11 and silicon wafer 10 in placement process is shorter, and the probability for scratching lower graphite powder is smaller, therefore mentions
High yield rate.(3) by the graphite cannula bowl 4 for having put molybdenum sheet 12, aluminium foil 11 and silicon wafer 10 in layer overlay graphite boat 1
Graphite base 5 on, reach the height of design i.e. only.(4) whole again to be put into heating in vacuum in quartz ampoule, aluminium foil melts at high temperature
Change sticks together molybdenum sheet and silicon wafer.(5) since the opening of ladder-like circular groove is bigger than base diameter, so placing silicon wafer
10 diameter can also be bigger than molybdenum sheet 12 and aluminium foil 11, therefore can first be sintered chip, cuts to the silicon wafer on the chip
It cuts, reduces the probability that chip edge is collided with, qualification rate is higher.
It is described above be only the utility model Application Example, certainly cannot with this come limit the utility model it
Interest field, therefore equivalence changes made according to the patent scope of the utility model, still belong to the protection scope of the utility model.
Claims (4)
1. a kind of sintering chip pin-connected panel moulds of industrial equipment, including graphite boat (1) and the graphite tube being mounted on graphite boat (1)
(2)；It is characterized by: the graphite tube (2) by a graphite base (5) and more than one graphite cannula bowl (4) from bottom to up
It successively stacks together, the graphite base (5) is mounted on graphite boat (1)；The graphite cannula bowl (4) is collar plate shape, thereon table
Face is equipped with the ladder-like circular groove of a concentric, and the groove bottom (6) of the ladder-like circular groove is for placing molybdenum sheet
(12), the upper surface of the molybdenum sheet (12) is higher than the first order step surface (7) of the ladder-like circular groove, the first order platform
Terrace (7) is equipped with annular groove (8)；The lower surface of the graphite cannula bowl (4) is equipped with the round boss (9) of concentric, described
Round boss (9) and the opening of the ladder-like circular groove match；The graphite base (5) is equipped with convex with the circle
The groove that platform (9) matches, for stacking graphite cannula bowl (4).
2. sintering chip pin-connected panel moulds of industrial equipment according to claim 1, it is characterised in that: on the graphite boat (1)
Equipped with several graphite tubes (2), several described graphite tubes (2) are evenly arranged on graphite boat (1) in two rows.
3. sintering chip pin-connected panel moulds of industrial equipment according to claim 1, it is characterised in that: the graphite boat (1)
Tail end is equipped with push-and-pull hooked scarf (3).
4. a kind of graphite tube, it is characterised in that: from bottom to up by a graphite base (5) and more than one graphite cannula bowl (4)
Successively stack together；The graphite cannula bowl (4) is collar plate shape, and upper surface is equipped with the ladder-like circular groove of a concentric,
For the groove bottom (6) of the ladder-like circular groove for placing molybdenum sheet (12), the upper surface of the molybdenum sheet (12) is higher than the rank
The first order step surface (7) of scalariform circular groove, the first order step surface (7) are equipped with annular groove (8)；The graphite cannula
The lower surface of bowl (4) is equipped with the round boss (9) of concentric, and the round boss (9) is opened with the ladder-like circular groove
Mouth matches；The graphite base (5) is equipped with the groove to match with the round boss (9), for stacking graphite cannula bowl
(4)。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821607363.1U CN209000887U (en) | 2018-09-29 | 2018-09-29 | It is sintered chip pin-connected panel moulds of industrial equipment and graphite tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821607363.1U CN209000887U (en) | 2018-09-29 | 2018-09-29 | It is sintered chip pin-connected panel moulds of industrial equipment and graphite tube |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209000887U true CN209000887U (en) | 2019-06-18 |
Family
ID=66803043
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821607363.1U Expired - Fee Related CN209000887U (en) | 2018-09-29 | 2018-09-29 | It is sintered chip pin-connected panel moulds of industrial equipment and graphite tube |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209000887U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112050622A (en) * | 2020-09-04 | 2020-12-08 | 汨罗市福缘新材料有限公司 | Splicing-molded large-size graphite boat and splicing-assembling method thereof |
-
2018
- 2018-09-29 CN CN201821607363.1U patent/CN209000887U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112050622A (en) * | 2020-09-04 | 2020-12-08 | 汨罗市福缘新材料有限公司 | Splicing-molded large-size graphite boat and splicing-assembling method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190618 Termination date: 20200929 |