CN208984546U - A kind of optic element damage detection device based on optically erasing - Google Patents
A kind of optic element damage detection device based on optically erasing Download PDFInfo
- Publication number
- CN208984546U CN208984546U CN201821413437.8U CN201821413437U CN208984546U CN 208984546 U CN208984546 U CN 208984546U CN 201821413437 U CN201821413437 U CN 201821413437U CN 208984546 U CN208984546 U CN 208984546U
- Authority
- CN
- China
- Prior art keywords
- light
- nonlinear crystal
- detection device
- positive lens
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
The optic element damage detection device based on optically erasing that the utility model discloses a kind of.Nonlinear crystal is normally incident in after the delayed system of pump light;Signal light impinges perpendicularly on sample, scatters at sample rear surface impaired loci, and positive lens I is imaged sample and scattering light is become directional light, is incident in nonlinear crystal and carries out optically erasing with pump light, generates amplified signal;Amplified signal enters through positive lens II receives CCD, to obtain the damage information of detected element.The optic element damage detection device based on optically erasing of the utility model improves damage check size, at low cost, structure is simple, advantage easy to adjust.
Description
Technical field
The utility model belongs to optic element damage detection technique field, and in particular to a kind of light based on optically erasing
Learn element damage detection device.
Background technique
It is former that traditional ultraviolet section of optic element damage detection technique of large-scale high power solid-state laser device is based on dark-field imaging
Situations such as reason, which can intuitively, completely reflect optical elements of large caliber surface damage point size, distribution.It is Chinese special
" optical elements of large caliber damage on-line measuring device " entitled disclosed in sharp document databse patent of invention (application number:
03129347.6) after for the neodymium glass in a kind of main amplification system of large-scale high power solid-state laser device by Irradiation of High
Degree of impairment detection method;" Multi-degree-of-freedom on-line checking dress entitled disclosed in Chinese patent literature library
Set " patent of invention (application number: 201110435830.3), the patent application is in order to observe large-scale high power solid-state laser device
In degree of impairment by the ultraviolet segment element after Irradiation of High, devise what a kind of multidimensional that can carry imaging system was adjusted
Mechanical structure.But both technologies are disadvantageous in that, the optic element damage feelings after can only detecting by laser irradiation
Condition, can not damage dynamics feature in exploring laser light irradiation process;It another when impaired loci is smaller the disadvantage is that, issue
Brightness it is too dark and detect less than.
Summary of the invention
The optic element damage inspection based on optically erasing that the technical problem to be solved by the utility model is to provide a kind of
Survey device.
The optic element damage detection device based on optically erasing of the utility model, its main feature is that: the detection
Device is divided into pump light optical path and signal light optical path two parts;In pump light incident direction, it is sequentially placed delayer and non-thread
Property crystal C1;Pump light is impinged perpendicularly on after delayer in nonlinear crystal C1;In signal light incident direction, quilt is placed
Survey element S1;Signal light is scattered when passing through the rear surface impaired loci of sample S1;In scattering light optical path, place just
Lens I;Sample S1 is imaged in positive lens I, and scattering light is become directional light, while being incident on by phase matching angle
In nonlinear crystal C1;Pump light and signal light generate light amplification signal in nonlinear crystal C1;In amplified signal outgoing side
It is sequentially placed positive lens II upwards and receives CCD;The effect of positive lens II is to assemble directional light, and by I pair of quilt of positive lens
Sample S1 at Image relaying to receive CCD on;The external computer of reception CCD, it is most laggard from the signal for receiving CCD
Enter computer and carries out data processing.
The nonlinear crystal C1 uses 90 ° of I type-Ⅱphase matchings of non-colinear, is selected according to laser wavelength of incidence non-linear
Crystal, the nonlinear crystal include BBO, KDP, LBO.
The delayer includes reflecting mirror I and reflecting mirror II, and reflecting mirror I and pump light incident direction are in 45 °, reflecting mirror
II with through reflecting mirror I reflection after reflected light be in 45 °.
The basic principle of the optic element damage detection device based on optically erasing of the utility model is: using in quilt
Seed light of the scattering light as optically erasing generated at sample rear surface impaired loci, by positive lens to sample at
Picture, and post-concentration is collected to scattering light and is incident in nonlinear crystal at directional light, it is non-by the second order of nonlinear crystal
Linear effect generates optically erasing process with pump light in nonlinear crystal, realizes the amplification to optical signal, then by connecing
CCD realization is received to the damage Image Acquisition of detected element.
The optic element damage detection device based on optically erasing of the utility model has the advantage that
1. at low cost, structure is simple and can easily be accommodated.
2. light is scattered at impaired loci using signal light as the signal light of optically erasing, without being inserted into other illumination lights
Source reduces the complexity of optical path.
3. realizing the detection of impaired loci damage dynamics in a manner of optically erasing.
4. be effectively exaggerated the scattered light intensity at optic element damage point in a manner of optically erasing, realize pair
The detection of microlesion point.
The optic element damage detection device based on optically erasing of the utility model solves existing optical element damage
Triage survey technology has at low cost, structure simply and is easy in detection damage dynamics and to the deficiency of microlesion point detection
The advantages of adjusting.
Detailed description of the invention
Fig. 1 is the optic element damage detection device schematic diagram based on optically erasing of the utility model;
Fig. 2 is the delay system signal in the optic element damage detection device based on optically erasing of the utility model
Figure;
In figure, 1. delay system, 2. nonlinear crystal C1,3. sample S1,4. positive lens, I 5. positive lens II 6.
Receive 101. reflecting mirror of CCD, I 102. reflecting mirror II.
Specific embodiment
The utility model is described in detail with reference to the accompanying drawings and examples.
Following embodiment is merely to illustrate the utility model, and is not limitation of the utility model.Related technical field
Personnel in the case where not departing from the spirit and scope of the utility model, can also make a variety of changes, replacement and variant, because
This same technical solution also belongs to the scope of the utility model.
Embodiment 1
As shown in Figure 1, the optic element damage detection device based on optically erasing of the utility model is divided into pump light
Optical path and signal light optical path two parts;In pump light incident direction, it is sequentially placed delayer 1 and nonlinear crystal C12;Pumping
Light is impinged perpendicularly on after delayer 1 in nonlinear crystal C12;In signal light incident direction, sample S13 is placed;
Signal light is scattered when passing through the rear surface impaired loci of sample S13;In scattering light optical path, positive lens I 4 is placed;
I 4 couples of sample S13 of positive lens are imaged, and scattering light are become directional light, while being incident on by phase matching angle non-thread
In property crystal C12;Pump light and signal light generate light amplification signal in nonlinear crystal C12;In amplified signal exit direction
On be sequentially placed positive lens II 5 and receive CCD6;The effect of positive lens II 5 is to assemble directional light, and by I 4 pairs of positive lens
Sample S13 at Image relaying to receive CCD6 on;The external computer of reception CCD6, from the signal for receiving CCD6
It finally enters computer and carries out data processing.
The nonlinear crystal C12 uses 90 ° of I type-Ⅱphase matchings of non-colinear, is selected according to laser wavelength of incidence non-thread
Property crystal, the nonlinear crystal includes BBO, KDP, LBO.
As shown in Fig. 2, the delayer 1 includes reflecting mirror I 101 and reflecting mirror II 102, reflecting mirror I 101 and pump light
Incident direction is in 45 °, and reflecting mirror II 102 is in 45 ° with the reflected light after the reflection of reflecting mirror I 101.
The specific work process of the present embodiment is as follows:
Pumping center wavelength of light is 527nm, and width is about 150ps;Flashlight centre wavelength is 800nm, and width is about
15ps.Nonlinear crystal C1 2 uses KDP material, using 90 ° of I type-Ⅱphase matchings of non-colinear.3 rear surface of sample S1 damage
Scattering light at wound point is converged to directional light by positive lens I 4, and is mapped to nonlinear crystal C1 2 so that 10.799 ° of angle is oblique
Surface;Since pump light impinges perpendicularly on nonlinear crystal C1 2, the nonlinear angle of pump light and seed light is
10.799°;After seed light after being amplified is emitted by nonlinear crystal C12, enters after the convergence of positive lens II 5 and receive CCD
6, the darkfield image that the image that CCD 6 is recorded is 3 impaired loci of sample S1 is received at this time;Pump light, signal light numerical value press
Crystalline material handbook obtains, and carries out data processing by above-mentioned principle finally by computer, obtains the phase of optically erasing process
Close parameter.
Nonlinear crystal C1 2 may be replaced by bbo crystal, lbo crystal.
Claims (3)
1. a kind of optic element damage detection device based on optically erasing, it is characterised in that: the detection device is divided into
Pump light optical path and signal light optical path two parts;In pump light incident direction, it is sequentially placed delayer (1) and nonlinear crystal
C1(2);Pump light impinges perpendicularly on nonlinear crystal C1(2 after delayer (1)) in;In signal light incident direction, put
Set sample S1(3);Signal light scatters when through the rear surface impaired loci of sample S1(3);In scattering light light
In road, place positive lens I (4);Sample S1(3) is imaged in positive lens I (4), and scattering light is become directional light, together
When by phase matching angle be incident on nonlinear crystal C1(2) in;Pump light and signal light generate light in nonlinear crystal C1(2)
Amplified signal;It is sequentially placed positive lens II (5) in amplified signal exit direction and receives CCD(6);Positive lens II (5) effect
Be directional light is assembled, and by positive lens I (4) to sample S1(3) at Image relaying to receive CCD(6) on;It is described
Reception CCD(6) external computer, from receiving CCD(6) signal finally enter computer and carry out data processing.
2. the optic element damage detection device according to claim 1 based on optically erasing, it is characterised in that: described
Nonlinear crystal C1(2) use 90 ° of I type-Ⅱphase matchings of non-colinear, according to laser wavelength of incidence select nonlinear crystal, it is described
Nonlinear crystal include BBO, KDP, LBO.
3. the optic element damage detection device according to claim 1 based on optically erasing, it is characterised in that: described
Delayer (1) include reflecting mirror I (101) and reflecting mirror II (102), reflecting mirror I (101) and pump light incident direction are in 45 °,
Reflecting mirror II (102) is in 45 ° with the reflected light after reflecting mirror I (101) reflection.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201821413437.8U CN208984546U (en) | 2018-08-30 | 2018-08-30 | A kind of optic element damage detection device based on optically erasing |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201821413437.8U CN208984546U (en) | 2018-08-30 | 2018-08-30 | A kind of optic element damage detection device based on optically erasing |
Publications (1)
Publication Number | Publication Date |
---|---|
CN208984546U true CN208984546U (en) | 2019-06-14 |
Family
ID=66782867
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201821413437.8U Expired - Fee Related CN208984546U (en) | 2018-08-30 | 2018-08-30 | A kind of optic element damage detection device based on optically erasing |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN208984546U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109270083A (en) * | 2018-08-30 | 2019-01-25 | 中国工程物理研究院激光聚变研究中心 | A kind of optic element damage detection device based on optically erasing |
-
2018
- 2018-08-30 CN CN201821413437.8U patent/CN208984546U/en not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109270083A (en) * | 2018-08-30 | 2019-01-25 | 中国工程物理研究院激光聚变研究中心 | A kind of optic element damage detection device based on optically erasing |
CN109270083B (en) * | 2018-08-30 | 2023-08-04 | 中国工程物理研究院激光聚变研究中心 | Optical element damage detection device based on optical parametric amplification |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US20150070699A1 (en) | Method and particle analyzer for determining a broad particle size distribution | |
TW202129267A (en) | System for wafer inspection | |
CN203965344U (en) | For the optical checking equipment of the discontinuous defect of searching surface | |
KR101317947B1 (en) | Apparatus for inspecting cylinder | |
CN102841083A (en) | Method and system of laser scanning phase-microscope imaging | |
CN105738384A (en) | Glass surface defect detector | |
CN103105403A (en) | Method and device for detecting surface defect of transparent optical component | |
CN102520509A (en) | photonic crystal optical fiber splicing imaging system | |
CN203069531U (en) | Device for detecting surface defect of transparent optical element | |
CN208984546U (en) | A kind of optic element damage detection device based on optically erasing | |
CN104568984A (en) | Apparatus for measuring defect of surface pattern of transparent substrate | |
CN206618705U (en) | A kind of optical film defect detecting device | |
CN101076720B (en) | Apparatus for inspecting backlight unit | |
US7023542B2 (en) | Imaging method and apparatus | |
CN208207350U (en) | microscope illumination system | |
CN109270083A (en) | A kind of optic element damage detection device based on optically erasing | |
US10782455B2 (en) | Optical system using camera and light source of handheld device | |
WO2019099285A1 (en) | Methods and apparatus for detecting surface defects on glass sheets | |
CN211478808U (en) | Substrate glass defect detection device | |
CN211652599U (en) | Image acquisition system for acquiring standard images | |
CN212694050U (en) | Lidar and lidar system | |
CN105372816A (en) | Light uniforming method of optical fiber coupling type semiconductor laser | |
CN209784216U (en) | Liquid crystal display surface detection device based on polarized light | |
CN210572027U (en) | OLED screen polarization detection device | |
CN102445418A (en) | Method and system for inspecting beveled objects |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190614 Termination date: 20200830 |
|
CF01 | Termination of patent right due to non-payment of annual fee |