CN208953556U - The double vibrating beam accelerometers of integral type quartz - Google Patents
The double vibrating beam accelerometers of integral type quartz Download PDFInfo
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- CN208953556U CN208953556U CN201821855067.3U CN201821855067U CN208953556U CN 208953556 U CN208953556 U CN 208953556U CN 201821855067 U CN201821855067 U CN 201821855067U CN 208953556 U CN208953556 U CN 208953556U
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Abstract
The utility model discloses a kind of double vibrating beam accelerometers of integral type quartz, the double vibrating beam accelerometers of integral type quartz include: integrally formed assembly section, flexible beam, vibration beam, mass block and metal electrode, and mass block is connected to assembly section by flexible beam and vibration beam；The beam that shakes includes the first straight beam and the second straight beam, first straight beam and the second straight beam are set side by side, one end of first straight beam and the second straight beam is connected to assembly section, the other end is connected to mass block, metal electrode is arranged on the first straight beam and the second straight beam, and the polarity of the first straight beam and the metal electrode on the second straight beam is opposite；Flexible beam includes two attachment beams, and two attachment beams are located at the two sides of vibration beam, and one end of flexible beam is connected to assembly section, and the other end is connected to mass block.The double vibrating beam accelerometers of integral type quartz are integrally formed, compared to it is split type have the characteristics that it is compact-sized, exempt from assembly, easy processing, can be more reliable and more stable in use to avoid Vacuum Package in addition using double beams that shake.
Description
Technical field
The utility model relates to microelectromechanical systems, and in particular to a kind of double vibrating beam accelerometers of integral type quartz.
Background technique
Quartz vibration beam accelerometer is a kind of power-frequency characteristic sensitivity inertia force MEMS inertia sensing using quartz vibration beam
Device has many advantages, such as that Direct Digital output, bias stability is good, scale factor stability is good, range flexible design, can use extensively
In tactical missile gesture stability, inertial navigation, the fields such as earth resource exploration, there are important Military value and name value.
Current quartz vibration beam accelerometer is broadly divided into integral type and split type, and split type structure Typical Representative is
The RBA500 of Honeywell company is made of with metallic gauge block quartzy twin beams vibration beam, needs precision assembly, face different materials
The problem of thermal mismatching and glue aging, long-time stability and reliability are poor.The structure that integral structure is designed with French ONERA
For Typical Representative, the beam that shakes all is made of quartz material with quality structure, has the advantages of compact-sized, integrated molding, but adopt
With Dan Zhenliang, Vacuum Package is needed, the change of vacuum degree will affect the performance of device in use.
Utility model content
The purpose of the utility model is to provide a kind of double vibrating beam accelerometers of integral type quartz, the double vibration beams of integral type quartz
Accelerometer is integrally formed, compared to it is split type have the characteristics that it is compact-sized, exempt from assembly, easy processing, can in addition using double beams that shake
It is more reliable and more stable in use to avoid Vacuum Package.
To achieve the goals above, a kind of double vibrating beam accelerometer packets of integral type quartz are provided according to the utility model
Include: integrally formed assembly section, flexible beam, vibration beam, mass block and metal electrode, the mass block pass through the flexible beam and institute
It states vibration beam and is connected to the assembly section；
Wherein, the vibration beam includes the first straight beam and the second straight beam, and first straight beam and second straight beam are set side by side
It sets, one end of first straight beam and second straight beam is connected to the assembly section, and the other end is connected to the mass block, institute
It states metal electrode to be arranged on first straight beam and second straight beam, the metal on first straight beam and second straight beam
The polarity of electrode is opposite；
Wherein, the flexible beam includes two attachment beams, and two attachment beams are located at the two sides of the vibration beam, the flexible beam
One end be connected to the assembly section, the other end is connected to the mass block.
Preferably, the assembly section and the mass block are concave shape, and the notch of the concave shape is depressed area, the matter
Gauge block is located in the depressed area of the assembly section, and the depressed area of the mass block is towards the depressed area of the mass block.
Preferably, the assembly section is in a straight line with the mass block middle line, makes the double vibrations of integral type quartz
Beam accelerometer axisymmetricly structure.
Preferably, one end of the vibration beam is connected to the depressed area of the mass block, and the other end is connected to the assembly section,
First straight beam and second straight beam are arranged by axisymmetrical of the middle line of mass block.
Preferably, one end of the flexible beam is connected to the protruding portion that the mass block is concave shape, and the other end is connected to
The two sides of the vibration beam are arranged in using the middle line of the assembly section as axisymmetrical for the assembly section, two attachment beams.
Preferably, the thickness of the flexible beam and the beam that shakes is identical, and the thickness of the flexible beam and the beam that shakes is less than the assembly
The thickness of area and the mass block.
Preferably, one end of the flexible beam is connected to the lower surface of the assembly section, and the other end is connected to the quality
One end of the lower surface of block, the vibration beam is connected to the upper surface of the assembly section, and the other end is connected to the upper of the mass block
Surface.
Preferably, the metal electrode includes first electrode, second electrode and lead；
Wherein, the first electrode includes electrode, the first right electrode in the first left electrode, first；The second electrode packet
Include the second left electrode, electrode, the second right electrode in second；The lead includes first lead and the second lead；
Wherein, the first electrode is arranged on first straight beam, and the second electrode is arranged in second straight beam
On；
Wherein, the described first left electrode is located in described first on the left of electrode, and the first right electrode is located at described first
On the right side of middle electrode；The second left electrode is located in described second on the left of electrode, and the second right electrode is located in described second
On the right side of electrode；
Wherein, the described first left electrode is connected to the described first right electrode, is then connected to electrode in described second, described
Second left electrode is connected to the described second right electrode, is then connected to electrode in described first；
Wherein, the first lead is connected to the described first left electrode, and second lead is connected in described first electric
Pole and the second right electrode.
The utility model has the beneficial effects that:
1) the double vibrating beam accelerometers of integral type quartz of the utility model are integrally formed, and have structure tight compared to split type
It gathers, exempt from the characteristics of assembly, easy processing.
2) the double vibrating beam accelerometers of integral type quartz of the utility model are using double vibration beams, can to avoid Vacuum Package,
It is more reliable and more stable in use.
Detailed description of the invention
Fig. 1 shows the schematic knot of the double vibrating beam accelerometers of one embodiment integral type quartz according to the present utility model
Composition；
Fig. 2 shows the motor distributions of the double vibrating beam accelerometers of one embodiment integral type quartz according to the present utility model
Schematic diagram；
Fig. 3 shows the schematic diagram of one embodiment metal electrode according to the present utility model；
Fig. 4 a- Fig. 4 h shows the system of the double vibrating beam accelerometers of one embodiment integral type quartz according to the present utility model
Standby process flow chart；
Fig. 5 shows one embodiment quartz substrate penetration corrosion schematic diagram according to the present utility model；
Fig. 6 shows one embodiment quartz substrate partial corrosion schematic diagram according to the present utility model.
Wherein:
The assembly section 1-, 2- flexible beam, 3- vibration beam, 4- mass block, 5- first electrode, 6- second electrode, 7- lead；
Electrode in 501- first, the left electrode of 502- first, the right electrode of 503- first, electrode in 601- second, 602- second
Left electrode, the right electrode of 603- second, 701- first lead, the second lead of 702-.
Specific embodiment
For the purpose of this utility model, technical solution and advantage is more clearly understood, below in conjunction with the utility model
The technical solution in the utility model embodiment is clearly and completely described in attached drawing in embodiment, it is clear that institute
The embodiment of description is only a part of embodiment of the utility model, rather than whole embodiments.It is practical based on this
Embodiment in novel, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment is fallen within the protection scope of the utility model.In the absence of conflict, the embodiment in the utility model and
Feature in embodiment can mutual any combination.
A kind of double vibrating beam accelerometers of integral type quartz are provided according to the utility model, the double vibration beams of integral type quartz add
Speedometer includes: integrally formed assembly section, flexible beam, vibration beam, mass block and metal electrode, and the mass block is scratched by described
Property beam and the vibration beam are connected to the assembly section；
Wherein, the vibration beam includes the first straight beam and the second straight beam, and first straight beam and second straight beam are set side by side
It sets, one end of first straight beam and second straight beam is connected to the assembly section, and the other end is connected to the mass block, institute
It states metal electrode to be arranged on first straight beam and second straight beam, the metal on first straight beam and second straight beam
The polarity of electrode is opposite；
Wherein, the flexible beam includes two attachment beams, and two attachment beams are located at the two sides of the vibration beam, the flexible beam
One end be connected to the assembly section, the other end is connected to the mass block.
Specifically, in use, the first straight beam and the second straight beam polarity of electrode are on the contrary, the beam that shakes under the action of driving voltage rises
Vibration, the beam that causes to shake in X-direction bending vibration, two straight beams of each pair of vibration beam in vibration direction of vibration on the contrary, can offset
The power being applied on the pinboard of assembly section obtains high Q value, does not need Vacuum Package.When acceleration effect, this is practical new
The double vibrating beam accelerometer sensitivities of integral type quartz of type are converted acceleration by mass block to the acceleration change of Z-direction
For inertia force, due to power-frequency characteristic of quartz crystal, the intrinsic frequency for the beam that shakes can change, when the beam that shakes is by compression,
Intrinsic frequency increases, and when the beam that shakes is by tensile stress, intrinsic frequency reduces, so that the variation according to frequency obtains the big of acceleration
It is small.Alternatively, it is also possible to which two accelerometers to be combined into the accelerometer of a difference form, i.e., a pair of one accelerometer
Beam shake by compression, the vibration beam of another accelerometer is believed by tensile stress by the frequency difference of two accelerometers of detection
Number, so that it may realize the detection of accelerometer sensitive axis direction acceleration.
Specifically, which uses double vibration beams, and is same material, is integrally formed, can be to avoid current quartz
Thermal mismatching effect between double vibrating beam accelerometer different materials can need to avoid current integral type Dan Zhenliang quartz accelerometer
The problem of wanting Vacuum Package, it is more reliable and more stable in use.
Further, the assembly section and the mass block are concave shape, and the notch of the concave shape is depressed area, described
Mass block is located in the depressed area of the assembly section, and the depressed area of the mass block is towards the depressed area of the mass block.
Further, the assembly section is in a straight line with the mass block middle line, keeps the integral type quartz double
Vibrating beam accelerometer axisymmetricly structure.
Further, one end of the vibration beam is connected to the depressed area of the mass block, and the other end is connected to the assembly
Area, first straight beam and second straight beam are arranged by axisymmetrical of the middle line of mass block.
Further, one end of the flexible beam is connected to the protruding portion that the mass block is concave shape, other end connection
In the assembly section, the two sides of the vibration beam are arranged in using the middle line of the assembly section as axisymmetrical for two attachment beams.
Further, the thickness of the flexible beam and the beam that shakes is identical, and the thickness of the flexible beam and the beam that shakes is less than the dress
Thickness with area and the mass block.
Further, one end of the flexible beam is connected to the lower surface of the assembly section, and the other end is connected to the matter
One end of the lower surface of gauge block, the vibration beam is connected to the upper surface of the assembly section, and the other end is connected to the mass block
Upper surface.
Further, the metal electrode includes first electrode, second electrode and lead；
Wherein, the first electrode includes electrode, the first right electrode in the first left electrode, first；The second electrode packet
Include the second left electrode, electrode, the second right electrode in second；The lead includes first lead and the second lead；
Wherein, the first electrode is arranged on first straight beam, and the second electrode is arranged in second straight beam
On；
Wherein, the described first left electrode is located in described first on the left of electrode, and the first right electrode is located at described first
On the right side of middle electrode；The second left electrode is located in described second on the left of electrode, and the second right electrode is located in described second
On the right side of electrode；
Wherein, the described first left electrode is connected to the described first right electrode, is then connected to electrode in described second, described
Second left electrode is connected to the described second right electrode, is then connected to electrode in described first；
Wherein, the first lead is connected to the described first left electrode, and second lead is connected in described first electric
Pole and the second right electrode.
Specifically the preparation method of the double vibrating beam accelerometers of integral type quartz may include:
1) cutting obtains quartz substrate；
2) mask is sputtered in the upper and lower surface of the quartz substrate；
3) region is removed by calibration mask, penetration corrosion removes the vibration beam, mass block and the flexible beam side wall
Crystal edge；
4) region is removed by calibration mask, partial corrosion cuts down the thickness of the vibration beam and the flexible beam；
5) it is laid with metal electrode on the vibration beam, obtains the double vibrating beam accelerometers of integral type quartz.
Further, the preparation method includes:
1) original material cuts single crystal quartz using double Z that throw, and obtains the quartz substrate with a thickness of 400 μm of -600 μ m thick；
2) chromium and gold are successively sputtered on the surface of the quartz substrate, forms quartz in the upper and lower surface of the quartz substrate
Corrode metal mask；
3) pass through double spread and be exposed on the chromium gold mask and appear the first mask removal region；
4) the chromium gold mask on the first mask of removal removal region, and remove photoresist；
5) two-sided corrosion on region is removed in the first mask by corrosive liquid and runs through the quartz substrate, remove the vibration
The crystal edge of beam, mass block and the flexible beam side wall；
6) the second mask is appeared by two-sided glue spraying and being exposed on the chromium metal mask and removes region；
7) the chromium gold mask on the second mask of removal removal region, and remove photoresist；
8) quartz substrate described in single side partial corrosion on region is removed in the second mask by corrosive liquid, so that the vibration beam
And the flexible beam with a thickness of required thickness.
9) the quartz corrosion metal mask on quartz substrate, the splash-proofing sputtering metal electrode on the vibration beam are removed.
Specifically, corrosive liquid can be HF solution or ammonium hydrogen fluoride solution, and quartzy etching mask also may be selected to utilize polycrystalline
Silicon exposure mask.
Specifically, quartz substrate described in single side partial corrosion on region is removed in the second mask by corrosive liquid, so that institute
State vibration beam and the flexible beam with a thickness of required thickness.
Embodiment
Fig. 1 shows the schematic knot of the double vibrating beam accelerometers of one embodiment integral type quartz according to the present utility model
Composition；Fig. 2 shows the motor distributions of the double vibrating beam accelerometers of one embodiment integral type quartz according to the present utility model to show
It is intended to；Fig. 3 shows the schematic diagram of one embodiment metal electrode according to the present utility model；Fig. 4 a- Fig. 4 h is shown
The preparation technology flow chart of the double vibrating beam accelerometers of one embodiment integral type quartz according to the present utility model；Fig. 5 is shown
One embodiment quartz substrate penetration corrosion schematic diagram according to the present utility model；Fig. 6 shows according to the present utility model
One embodiment quartz substrate partial corrosion schematic diagram.
As shown in figs 1 to 6,
The double vibrating beam accelerometers of integral type quartz include: integrally formed assembly section 1, flexible beam 2, vibration beam 3, mass block
4 and metal electrode, the mass block 4 is connected to the assembly section 4 by the flexible beam 2 and the vibration beam 3；
Wherein, the vibration beam 3 includes the first straight beam and the second straight beam, and first straight beam and second straight beam are set side by side
It sets, one end of first straight beam and second straight beam is connected to the assembly section 1, and the other end is connected to the mass block 4,
The metal electrode is arranged on first straight beam and second straight beam, the gold on first straight beam and second straight beam
The polarity for belonging to electrode is opposite；
Wherein, the flexible beam 2 includes two attachment beams, and two attachment beams are located at the two sides of the vibration beam 3, the flexibility
One end of beam is connected to the assembly section 1, and the other end is connected to the mass block 4.
Further, the assembly section 1 and the mass block 4 are concave shape, and the notch of the concave shape is depressed area, institute
It states mass block 4 to be located in the depressed area of the assembly section 1, the recess of the depressed area of the mass block 4 towards the assembly section 1
Area.
Further, the assembly section 1 is in a straight line with 4 middle line of mass block, makes the integral type quartz
Double vibrating beam accelerometers axisymmetricly structure.
Further, one end of the vibration beam 3 is connected to the depressed area of the mass block 4, and the other end is connected to the dress
With area 1, states the first straight beam and second straight beam and be arranged by axisymmetrical of the middle line of mass block 4.
Further, one end of the flexible beam 2 is connected to the protruding portion that the mass block 4 is concave shape, and the other end connects
It is connected to the assembly section 1, the vibration beam 3 is arranged in by axisymmetrical of 1 middle line of the assembly section in two attachment beams
Two sides.
Further, the thickness of the flexible beam 2 and the beam 3 that shakes is identical, and the thickness of the flexible beam 2 and the beam 3 that shakes is less than institute
State the thickness of assembly section 1 and the mass block 4.
Further, one end of the flexible beam 2 is connected to the lower surface of the assembly section 1, and the other end is connected to described
One end of the lower surface of mass block 4, the vibration beam 3 is connected to the upper surface of the assembly section 1, and the other end is connected to the quality
The upper surface of block 4.
Further, the metal electrode includes first electrode 5, second electrode 6 and lead 7；
Wherein, the first electrode 5 includes electrode 501, the first right electrode 503 in the first left electrode 502, first；It is described
Second electrode 6 includes electrode 601, the second right electrode 603 in the second left electrode 602, second；The lead 7 includes first lead
701 and second lead 702；
Wherein, the first electrode 5 is arranged on first straight beam, and the setting of second electrode 6 is straight described second
Liang Shang；
Wherein, the described first left electrode 502 is located at 501 left side of electrode, the first right electrode 503 in described first and is located at
501 right side of electrode in described first；The second left electrode 602 is located at 601 left side of electrode, the second right electricity in described second
Pole 603 is located at 601 right side of electrode in described second；
Wherein, the described first left electrode 502 is connected to the described first right electrode 503, is then connected in described second electric
Pole 601, the second left electrode 602 are connected to the described second right electrode 603, are then connected to electrode 501 in described first；
Wherein, the first lead connects 701 and is connected to the described first left electrode 502, and second lead 702 is connected to described
Electrode 501 and the second right electrode 603 in first.
The double vibrating beam accelerometers of integral type quartz the preparation method comprises the following steps:
1) original material cuts single crystal quartz using double Z that throw, and obtains the quartz substrate with a thickness of 400 μm of -600 μ m thick；
2) chromium and gold are successively sputtered on the surface of the quartz substrate, forms quartz in the upper and lower surface of the quartz substrate
Corrode metal mask；
3) pass through double spread and be exposed on the chromium gold mask and appear the first mask removal region；
4) the chromium gold mask on the first mask of removal removal region, and remove photoresist；
5) two-sided corrosion on region is removed in the first mask by corrosive liquid and runs through the quartz substrate, remove the vibration
The crystal edge of beam, mass block and the flexible beam side wall；
6) the second mask is appeared by two-sided glue spraying and being exposed on the chromium metal mask and removes region；
7) the chromium gold mask on the second mask of removal removal region, and remove photoresist；
8) quartz substrate described in single side partial corrosion on region is removed in the second mask by corrosive liquid, so that the vibration beam
And the flexible beam with a thickness of required thickness.
9) the quartz corrosion metal mask on quartz substrate, the splash-proofing sputtering metal electrode on the vibration beam are removed.
Specifically, quartz substrate described in single side partial corrosion on region is removed in the second mask by corrosive liquid, so that institute
State vibration beam and the flexible beam with a thickness of 100 μm.
Above are merely preferred embodiments of the utility model, it is noted that above-mentioned preferred embodiment should not regard
For limitations of the present invention, the protection scope of the utility model should be defined by the scope defined by the claims..For
For those skilled in the art, without departing from the spirit and scope of the utility model, it can also make several
Improvements and modifications, these improvements and modifications also should be regarded as the protection scope of the utility model.
Claims (8)
1. a kind of double vibrating beam accelerometers of integral type quartz, which is characterized in that the double vibrating beam accelerometers of integral type quartz include:
Integrally formed assembly section, flexible beam, vibration beam, mass block and metal electrode, the mass block pass through the flexible beam and described
Vibration beam is connected to the assembly section；
Wherein, the vibration beam includes the first straight beam and the second straight beam, and first straight beam and second straight beam are set side by side, institute
The one end for stating the first straight beam and second straight beam is connected to the assembly section, and the other end is connected to the mass block, the gold
Belong to electrode to be arranged on first straight beam and second straight beam, the metal electrode on first straight beam and second straight beam
Polarity it is opposite；
Wherein, the flexible beam includes two attachment beams, and two attachment beams are located at the two sides of the vibration beam, and the one of the flexible beam
End is connected to the assembly section, and the other end is connected to the mass block.
2. the double vibrating beam accelerometers of integral type according to claim 1 quartz, which is characterized in that the assembly section and described
Mass block is concave shape, and the notch of the concave shape is depressed area, and the mass block is located in the depressed area of the assembly section, institute
The depressed area of mass block is stated towards the depressed area of the assembly section.
3. the double vibrating beam accelerometers of integral type according to claim 2 quartz, which is characterized in that the assembly section with it is described
Mass block middle line is in a straight line, and makes the double vibrating beam accelerometers of integral type quartz axisymmetricly structure.
4. the double vibrating beam accelerometers of integral type quartz according to claim 2, which is characterized in that one end of the vibration beam connects
It is connected to the depressed area of the mass block, the other end is connected to the assembly section, and first straight beam and second straight beam are with matter
The middle line of gauge block is axisymmetrical setting.
5. the double vibrating beam accelerometers of integral type quartz according to claim 2, which is characterized in that one end of the flexible beam
It is connected to the protruding portion that the mass block is concave shape, the other end is connected to the assembly section, and two attachment beams are with described
The middle line of assembly section is the two sides that the vibration beam is arranged in axisymmetrical.
6. the double vibrating beam accelerometers of integral type quartz according to claim 1, which is characterized in that the flexible beam and vibration beam
Thickness it is identical, the thickness of the flexible beam and the beam that shakes is less than the thickness of the assembly section and the mass block.
7. the double vibrating beam accelerometers of integral type quartz according to claim 6, which is characterized in that one end of the flexible beam
It is connected to the lower surface of the assembly section, the other end is connected to the lower surface of the mass block, and one end of the vibration beam is connected to
The upper surface of the assembly section, the other end are connected to the upper surface of the mass block.
8. the double vibrating beam accelerometers of integral type according to claim 1 quartz, which is characterized in that the metal electrode includes
First electrode, second electrode and lead；
Wherein, the first electrode includes electrode, the first right electrode in the first left electrode, first；The second electrode includes the
Two left electrodes, electrode, the second right electrode in second；The lead includes first lead and the second lead；
Wherein, the first electrode is arranged on first straight beam, and the second electrode is arranged on second straight beam；
Wherein, the described first left electrode is located in described first on the left of electrode, and the first right electrode is located at electricity in described first
Ultra-Right side；The second left electrode is located in described second on the left of electrode, and the second right electrode is located at electrode in described second
Right side；
Wherein, the described first left electrode is connected to the described first right electrode, is then connected to electrode in described second, and described second
Left electrode is connected to the described second right electrode, is then connected to electrode in described first；
Wherein, the first lead is connected to the described first left electrode, second lead be connected in described first electrode and
The second right electrode.
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| CN201821855067.3U CN208953556U (en) | 2018-11-12 | 2018-11-12 | The double vibrating beam accelerometers of integral type quartz |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109239400A (en) * | 2018-11-12 | 2019-01-18 | 中国工程物理研究院电子工程研究所 | The double vibrating beam accelerometers of integral type quartz and preparation method |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109239400A (en) * | 2018-11-12 | 2019-01-18 | 中国工程物理研究院电子工程研究所 | The double vibrating beam accelerometers of integral type quartz and preparation method |
| CN109239400B (en) * | 2018-11-12 | 2024-02-09 | 中国工程物理研究院电子工程研究所 | Integrated quartz double-vibration beam accelerometer and preparation method thereof |
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