CN207007876U - Quartz pendulous accelerometer - Google Patents
Quartz pendulous accelerometer Download PDFInfo
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- CN207007876U CN207007876U CN201720351052.2U CN201720351052U CN207007876U CN 207007876 U CN207007876 U CN 207007876U CN 201720351052 U CN201720351052 U CN 201720351052U CN 207007876 U CN207007876 U CN 207007876U
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- bonding region
- electric capacity
- quartz
- flat board
- mass
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Abstract
The utility model discloses a kind of quartz pendulous accelerometer, including top crown, middle plate and bottom crown, the top crown and the bottom crown by bonding region, electric capacity flat board area and contact conductor district's groups into, the bonding region is trapped among the surrounding in the electric capacity flat board area, contact conductor area one end is hanging, the other end is connected through the bonding region with the electric capacity flat board area, and the thickness of the bonding region is more than the thickness in the electric capacity flat board area；The middle plate by bonding region, mass, flexible beam and contact conductor district's groups into, the bonding region is ring-type, the mass is fixedly connected through the flexible beam with the bonding region inner side edge, and contact conductor area one end is hanging, and the other end is connected through the bonding region with the mass；The top crown, middle plate and bottom crown connect into an entirety by the bonding region of three.The utility model is simple in construction, same material, without precision optical machinery assemble, reliability and manufacture type can get a promotion.
Description
Technical field
Technical field of microelectronic mechanical systems is the utility model is related to, especially a kind of quartz pendulous accelerometer.
Background technology
Using microelectromechanical systems (MEMS) technology realize capacitive accelerometer have small volume, it is in light weight and into
Originally it is low to have advantage, there is the application prospect extensively sent out in fields such as military affairs, automobile technology, consumer electronics products.Current electric capacity
Formula accelerometer mainly has three kinds：" sandwich " structure, " broach " structure and quartz flexible pendulum structure.Wherein " sandwich " is tied
Structure and " broach " structure acceleration meter are prepared using silicon materials, are easily worked, but silicon materials belong to semi-conducting material, it is easy to by
Temperature, the influence of impurity pollution, therefore, the stability of device needs further to be improved.Quartz flexible pendulum structure acceleration meter profit
With the excellent mechanical elasticity of quartz material, temperature characterisitic, high quality factor, chemical stability, although measurement accuracy is high, performance is steady
It is fixed, but structure is more complicated, is related to multiple component multiple materials, is combined by precision optical machinery assembling, reliability and
Manufacturing is poor, and faces the problem of permanent magnet degeneration, glue aging and range are difficult to further improve.
The content of the invention
The utility model in view of the shortcomings of the prior art, proposes a kind of quartz pendulous accelerometer, clever structure, user
Just.
In order to realize above-mentioned purpose of utility model, the utility model provides following technical scheme：A kind of quartzy pendulum-type accelerates
Degree meter, including top crown, middle plate and bottom crown, the top crown and the bottom crown are by bonding region one, electric capacity flat board
Area and contact conductor area one form, and the bonding region one is trapped among the surrounding in the electric capacity flat board area, and the contact conductor area is one by one
End is hanging, and the other end is connected through the bonding region one with the electric capacity flat board area, and the thickness of the bonding region one is more than described
The thickness in electric capacity flat board area；The middle plate is made up of bonding region two, mass, flexible beam and contact conductor area two, described
Bonding region two is ring-type, and the mass is fixedly connected through the flexible beam with the inner side edge of bonding region two, and the electrode draws
The one end of line area two is hanging, and the other end is connected through the bonding region two with the mass；The top crown, middle plate and under
Pole plate connects into an entirety by the bonding region of three.
Further, the bonding region two is identical with the mass thickness, and more than the thickness of the flexible beam.
Further, the bonding region one is higher than the electric capacity flat board area 2~5 μm.
A kind of preparation method of quartz pendulous accelerometer as described above, it comprises the following steps：
(1), the preparation of middle plate：
(a) in one layer of etching mask layer of two-sided preparation of quartz substrate；
(b) dual surface lithography, to etching mask layer pattern, the region that quartz corrodes is exposed；
(c) two-sided etch quartz, until break-through；
(d) dual surface lithography, to etching mask layer pattern, the region that quartz corrodes is exposed；
(e) two-sided etch quartz, corrosion depth are the half that substrate thickness subtracts flexible cantilever thickness；
(f) the etching mask layer on etching away quartz substrate；
(g) metal electrode is prepared on the two sides of quartz.
(2), the preparation method of top crown and bottom crown：
(a) in one layer of etching mask layer of two-sided preparation of quartz substrate；
(b) dual surface lithography, to etching mask layer pattern, the region that quartz corrodes is exposed；
(c) two-sided etch quartz, until break-through；
(d) one side photoetching, to etching mask layer pattern, the region that quartz corrodes is exposed；
(e) etch quartz, bonding step is formed；
(f) the etching mask layer on etching away quartz substrate；
(g) metal electrode is prepared in the one side of quartz.
(3) top crown, middle plate and bottom crown are combined by quartzy Direct Bonding.
Further, etching mask is Cr/Au metal masks or polysilicon mask.
Compared with prior art, the utility model has advantages below：Using " sandwich " structure, scratched compared to existing quartz
Property arrangements of accelerometers is simple, same material, assembles without precision optical machinery, reliability and manufacture type can get a promotion；Phase
Than existing silicon " sandwich " structure acceleration meter, using the excellent mechanical elasticity of quartz material, temperature characterisitic, high-quality because
Count, chemical stability, improve the stability of device.
Brief description of the drawings
Fig. 1 is the quartz pendulous accelerometer sectional view of the utility model embodiment；
Fig. 2 is the quartz pendulous accelerometer top crown and bottom crown structural representation of the utility model embodiment；
Fig. 3 is the quartz pendulous accelerometer middle plate structural representation of the utility model embodiment；
Fig. 4 is the quartz pendulous accelerometer operation principle schematic diagram of the utility model embodiment；
Fig. 5 (a)-Fig. 5 (g) is the quartz pendulous accelerometer middle plate preparation technology flow of the utility model embodiment
Figure；
Fig. 6 (a)-Fig. 6 (g) is that the quartz pendulous accelerometer top crown of the utility model embodiment and bottom crown prepare work
Skill flow chart.
Embodiment
The utility model is described in detail below in conjunction with the accompanying drawings, the description of this part be only it is exemplary and explanatory,
There should not be any restriction effect to the scope of protection of the utility model.
As shown in Figure 1, Figure 2, Figure 3 shows, the quartz pendulous accelerometer of the utility model embodiment, it is by top crown 1, centre
Pole plate 2 and bottom crown 3 form；Top crown 1 and bottom crown 3 are by bonding region 1, electric capacity flat board area 12 and contact conductor area 1
Three parts form, and wherein one end of contact conductor area 1 is hanging, and the other end is connected by electric capacity flat board area 12 with bonding region 1；
Middle plate 2 is made up of bonding region 2 21, mass 22, flexible beam 23 and the part of contact conductor area 2 24 4, wherein mass
22 one end are hanging, and the other end is connected by flexible beam 23 with bonding region 2 21, and the one end of contact conductor area 2 24 is hanging, the other end
It is connected with bonding region 2 21；Top crown 1 and bottom crown 3 are respectively by bonding region 1 with the positive and negative of middle plate bonding region 2 21
Connection is combined into whole device.
In order to realize the specific capacitance of bonding region 1 of rational capacitance gap and sensitive acceleration, top crown 1 and bottom crown 3
One 13 high 2~5 μm of flat board area 12 and contact conductor area, bonding region 2 21, mass 22, flexible beam 23 and the electricity of middle plate 2
Pole lead district 2 24 has two faces, and wherein bonding region 2 21, mass 22 and contact conductor area 2 24 has same thickness,
And top and bottom, all in approximately the same plane, other three parts of thickness ratio of flexible beam 23 are small.
The operation principle of the utility model device, as shown in Figure 4：Quality of the electric capacity flat board area of top crown with middle plate
Block upper surface forms electric capacity C1, and the electric capacity flat board area of bottom crown forms electric capacity C2 with the mass lower surface of middle plate.Non-
During measuring state, mass is in an intermediate position, and upper and lower electric capacity is equal in magnitude, output signal 0, when there is upward acceleration
When, mass moves upwards under acceleration effect, and the electric capacity flat board section gap of mass top surface and top crown reduces, electric capacity
Increase, the electric capacity flat board section gap of mass lower surface and bottom crown increase, and electric capacity reduces, similarly, when there is downward acceleration
When, the electric capacity flat board section gap increase of mass top surface and top crown, electric capacity reduces, the electricity of mass lower surface and bottom crown
Hold flat board section gap to reduce, electric capacity increase, the difference of electric capacity is big above and below the already highly developed difference measurement technology measurement of utilization
Small and positive negative direction, it is known that the size and Orientation of acceleration.
The preparation method of the utility model quartz pendulous accelerometer, comprises the following steps：
(1) parent material cuts single crystal quartz, 400 μm of thickness using double Z that throw；
(2) preparation of middle plate, shown in its processing step such as Fig. 5 (a)~Fig. 5 (g)
(a) chromium (Cr), (Au) are sputtered successively in the top and bottom of quartz substrate, thickness is respectivelyForm stone
English corrodes metal mask, as shown in Fig. 5 (a)；
(b) dual surface lithography, it is graphical to metal mask layer, the region of quartz corrosion is exposed, as shown in Fig. 5 (b)；
(c) while etch quartz two-sided using saturation ammonium hydrogen fluoride solution, until break-through, forms mass and wire bonding
Area, as shown in Fig. 5 (c)；
(d) dual surface lithography, it is graphical to metal mask layer, the region of quartz corrosion is exposed, as shown in Fig. 5 (d)；
(e) while etch quartz two-sided using saturation ammonium hydrogen fluoride solution, corrosion depth are that substrate thickness subtracts flexible beam
The half of thickness, flexible beam is formed, as shown in Fig. 5 (e)；
(f) gold, chromium on golden, chromium corrosive liquid etch quartz substrate are utilized respectively, metal mask layer is removed, such as Fig. 5 (f) institutes
Show；
(g) physical mask is utilized, sputters chromium (Cr), (Au) successively on the two sides of quartz, thickness is respectivelyMetal electrode 4 is formed, as shown in Fig. 5 (g).
(3) top crown is identical with the preparation method of bottom crown, shown in its processing step such as Fig. 6 (a)~Fig. 6 (g)
(a) chromium (Cr), (Au) are sputtered successively in the top and bottom of quartz substrate, thickness is respectivelyForm stone
English corrodes metal mask, as shown in Fig. 6 (a)；
(b) dual surface lithography, it is graphical to metal mask layer, the region of quartz corrosion is exposed, as shown in Fig. 6 (b)；
(c) while etch quartz two-sided using saturation ammonium hydrogen fluoride solution, until break-through, forms wire bonding area, such as Fig. 6
(c) shown in；
(d) one side photoetching, it is graphical to metal mask layer, the region of quartz corrosion is exposed, as shown in Fig. 6 (d)；
(e) saturation ammonium hydrogen fluoride solution etch quartz is utilized, 2~5 μm of corrosion depth, forms bonding region and electric capacity flat board
Area, as shown in Fig. 6 (e)；
(f) gold, chromium on golden, chromium corrosive liquid etch quartz substrate are utilized respectively, metal mask layer is removed, such as Fig. 6 (f) institutes
Show；
(g) physical mask is utilized, has the one side in bonding region and electric capacity flat board area to sputter chromium (Cr), (Au) successively in quartz,
Thickness is respectivelyMetal electrode is formed, as shown in Fig. 6 (g).
(4) top crown, middle plate and bottom crown are combined by quartzy Direct Bonding, as shown in Figure 1.
In above-described embodiment, original material cuts single crystal quartz using Z, and its thickness can adjust as needed；Quartz corrosion is covered
Other masking methods also may be selected in film, such as utilize polysilicon mask；It is molten that other corrosion also may be selected in the corrosive liquid of quartz
Liquid, such as HF solution；The chromium of sputtering, golden thickness can also according to circumstances adjust change.
Described above is only preferred embodiment of the present utility model, it is noted that for the common skill of the art
For art personnel, on the premise of the utility model principle is not departed from, some improvements and modifications can also be made, these improve and
Retouching also should be regarded as the scope of protection of the utility model.
Claims (3)
- A kind of 1. quartz pendulous accelerometer, it is characterised in that：Including top crown（1）, middle plate（2）And bottom crown（3）, institute State top crown（1）With the bottom crown（3）By bonding region one（11）, electric capacity flat board area（12）With contact conductor area one（13）Group Into the bonding region one（11）It is trapped among the electric capacity flat board area（12）Surrounding, the contact conductor area one（13）One end is hanging, The other end passes through the bonding region one（11）With the electric capacity flat board area（12）Connection, the bonding region one（11）Thickness be more than The electric capacity flat board area（12）Thickness；The middle plate（2）By bonding region two（21）, mass（22）, flexible beam（23） With contact conductor area two（24）Composition, the bonding region two（21）For ring-type, the mass（22）Through the flexible beam（23） With the bonding region two（21）Inner side edge is fixedly connected, the contact conductor area two（24）One end is hanging, and the other end is described in Bonding region two（21）With the mass（22）It is connected；The bonding region that the top crown, middle plate and bottom crown pass through three Connect into an entirety.
- 2. quartz pendulous accelerometer as claimed in claim 1, it is characterised in that：The bonding region two（21）With the mass （22）Thickness is identical, and is more than the flexible beam（23）Thickness.
- 3. quartz pendulous accelerometer as claimed in claim 1, it is characterised in that：The bonding region one（11）Than the condenser paper Plate area（12）It is high 2~5 μm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720351052.2U CN207007876U (en) | 2017-04-06 | 2017-04-06 | Quartz pendulous accelerometer |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720351052.2U CN207007876U (en) | 2017-04-06 | 2017-04-06 | Quartz pendulous accelerometer |
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| Publication Number | Publication Date |
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| CN207007876U true CN207007876U (en) | 2018-02-13 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201720351052.2U Expired - Fee Related CN207007876U (en) | 2017-04-06 | 2017-04-06 | Quartz pendulous accelerometer |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106841683A (en) * | 2017-04-06 | 2017-06-13 | 中国工程物理研究院电子工程研究所 | Quartz pendulous accelerometer and preparation method thereof |
| CN109541256A (en) * | 2018-11-23 | 2019-03-29 | 中国航空工业集团公司西安飞行自动控制研究所 | A kind of shock proof pendulous accelerometer |
-
2017
- 2017-04-06 CN CN201720351052.2U patent/CN207007876U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106841683A (en) * | 2017-04-06 | 2017-06-13 | 中国工程物理研究院电子工程研究所 | Quartz pendulous accelerometer and preparation method thereof |
| CN106841683B (en) * | 2017-04-06 | 2023-09-01 | 中国工程物理研究院电子工程研究所 | Quartz pendulum accelerometer and preparation method thereof |
| CN109541256A (en) * | 2018-11-23 | 2019-03-29 | 中国航空工业集团公司西安飞行自动控制研究所 | A kind of shock proof pendulous accelerometer |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180213 Termination date: 20190406 |
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| CF01 | Termination of patent right due to non-payment of annual fee |