CN208933466U - A kind of turnover mechanism of continuous coating device - Google Patents
A kind of turnover mechanism of continuous coating device Download PDFInfo
- Publication number
- CN208933466U CN208933466U CN201821559980.9U CN201821559980U CN208933466U CN 208933466 U CN208933466 U CN 208933466U CN 201821559980 U CN201821559980 U CN 201821559980U CN 208933466 U CN208933466 U CN 208933466U
- Authority
- CN
- China
- Prior art keywords
- turning manipulator
- turnover mechanism
- substrate frame
- axis chain
- feeding warehouse
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The utility model discloses a kind of turnover mechanisms of continuous coating device, including feeding warehouse, transitional storehouse and coating chamber, coating chamber is connected between feeding warehouse and transitional storehouse, target is set in coating chamber, shielding power supply and transport mechanism, the first substrate frame is provided in feeding warehouse, the second substrate frame and turnover mechanism are equipped in transitional storehouse, first substrate frame and the second substrate frame are respectively used to place ndfeb disk, turnover mechanism is three axis turning manipulators, turnover mechanism includes turning manipulator X-axis chain, turning manipulator Y-axis chain, turning manipulator Z axis chain, turning manipulator running track, rotating arm, clamping cylinder and turnover driving mechanism, rotating arm is set to the output end of turning manipulator Z axis chain, clamping cylinder is set on rotating arm, turnover mechanism is overturning the ndfeb disk in the first substrate frame to the second substrate frame.The utility model is improved work efficiency ndfeb disk turn-over by automation equipment, and ndfeb disk is not easy to be oxidized.
Description
Technical field
The utility model relates to magnet preparation technical field, in particular to a kind of turnover mechanism of continuous coating device.
Background technique
Neodymium iron boron (Nd2Fe14B) permanent magnet has high remanence, high coercivity and high magnetic energy product, is synthesis known now
The highest rare earth permanent-magnetic material of performance promotes the miniaturization of magnetic component, the development of lightness, so that in wind-power electricity generation, becoming
The high-end popular domain such as frequency compressor and new energy passenger car is widely used.
In the prior art, the elements such as heavy rare earth are mainly applied in order to obtain high performance sintered Nd-Fe-B permanent magnet
Addition, grain boundary decision, which adds heavy rare earth element, becomes the hot spot of Recent study, using the method for grain boundary decision, keeps heavy rare earth first
Element diffuses into magnet crystal boundary and main phase grain fringe region, can achieve the purpose that improve anisotropy field and
Reduce remanent magnetism and magnetic energy product, while the micro increase of cost.
Magnetron sputtering is one of the method for grain boundary decision addition rare earth element, and magnetron sputtering is to pass through magnetron sputtering
Equipment sputters heavy rare earth metal on neodymium iron boron magnetic body surface, but existing magnetron sputtering is to lie in magnet on pallet, is made
It is cooling after one face sputter coating, then carry out manual turn-over, then sputter to another side, this undoubtedly increase sputtering when
Between, production efficiency is reduced, and manual turn-over is easy to cause neodymium iron boron magnetic body to aoxidize, and influence the property of neodymium iron boron magnetic body
Energy.
Summary of the invention
In view of the deficiencies of the prior art and defect, a kind of turnover mechanism of continuous coating device is provided, it can be by automatic
Change equipment to improve work efficiency ndfeb disk turn-over, and ndfeb disk is made to be not easy to be oxidized.
To achieve the above object, the utility model provides following technical scheme.
A kind of turnover mechanism of continuous coating device, including feeding warehouse, transitional storehouse and at least one coating chamber, coating chamber connect
It is connected between feeding warehouse and transitional storehouse, setting target, shielding power supply and transport mechanism, shielding power supply and the target in coating chamber
Electrical connection is provided with the first substrate frame, is equipped with the second base in transitional storehouse to export sputtering power to the target in feeding warehouse
Horse and turnover mechanism, the first substrate frame and the second substrate frame are respectively used to place ndfeb disk, and turnover mechanism is that three axis turn over
Turn manipulator, turnover mechanism includes turning manipulator X-axis chain, turning manipulator Y-axis chain, turning manipulator Z axis chain, turning mechanical
Hand running track, rotating arm, clamping cylinder and turnover driving mechanism, turning manipulator X-axis chain, turning manipulator Y-axis chain, overturning
Manipulator Z axis chain is all set in turning manipulator running track, and drives turning manipulator X-axis by turnover driving mechanism
Chain, turning manipulator Y-axis chain, turning manipulator Z axis chain into overturning tool hand running track on slide, rotating arm is set to overturning
The output end of manipulator Z axis chain, clamping cylinder are set on rotating arm, and turnover mechanism is to by the neodymium iron in the first substrate frame
Boron magnetic sheet is overturn to the second substrate frame.
Further, transport mechanism is the intermediate transport roller that servo motor is driven by magnetic fluid.
Further, the interior transfer roller docked with intermediate transport roller, interior transfer roller are respectively equipped in feeding warehouse and transitional storehouse
It is realized by the chain conveyer of external synchronous belt mechanism or inside.
Further, it is equipped with feed space between coating chamber and feeding warehouse, discharge chamber is equipped between coating chamber and transitional storehouse.
Further, vacuum flap valve is respectively equipped between feed space and feeding warehouse and between discharge chamber and transitional storehouse
Door.
Further, vacuum system is respectively connected in feeding warehouse, transitional storehouse and coating chamber.
Further, charging driving mechanism be driving motor, driving motor by gear drive charger tool hand X-axis chain,
Charging manipulator Y-axis chain, charging manipulator Z axis chain slide in charging manipulator running track.
Further, the output end of motor is also connected with speed reducer.
Further, automatic code-disc machine is additionally provided in feeding warehouse.
The utility model has the following beneficial effects: the filming equipment of the utility model, in use, by ndfeb disk pile up to
In first substrate frame, after the completion of piling up, the first substrate frame is transferred in coating chamber by interior transfer roller and intermediate transport roller again
Plated film is carried out by target, after the completion of one face plated film of ndfeb disk, then middle transition storehouse is transferred to, passes through overturning again at this time
Driving mechanism drives turning manipulator X-axis chain, turning manipulator Y-axis chain, turning manipulator Z axis chain to run rail along turning manipulator
Road is moved in the second substrate frame, and is clamped the second substrate frame by clamping cylinder and overturn 180 degree by rotating arm, then will
The opening of second substrate frame fits with the first substrate frame, then by clamping cylinder simultaneously by the first substrate frame and the second substrate
Frame clamps, and overturns 180 degree again by flip-arm, and the ndfeb disk in the first substrate frame will be in the effect of gravity at this time
It is lower to overturn to the second substrate frame, then the second substrate frame is moved in coating chamber, target is passed through to ndfeb disk another side
Plated film is carried out, is moved in feeding warehouse again after the completion of plated film.The utility model can be by automation equipment by ndfeb disk
Turn-over improves work efficiency, and ndfeb disk is made to be not easy to be oxidized.
Detailed description of the invention
Fig. 1 is the overall structure diagram of the utility model.
Fig. 2 is the overall structure diagram (vertical view) of the utility model.
Fig. 3 is the three axis turning manipulator structural schematic diagrams of the utility model.
Fig. 4 is another embodiment overall structure diagram of the utility model.
In figure, 1. feeding warehouses；2. transitional storehouse；3. coating chamber；4. target；Transfer roller in 5.；6. feed space；7. discharge chamber；
8. vacuum flap valve door；9. three axis turning manipulators；10. turning manipulator X-axis chain；11. turning manipulator Y-axis chain；12. overturning
Manipulator Z axis chain；13. turning manipulator running track；14. rotating arm；15. clamping cylinder.
Specific embodiment
The utility model is further illustrated in conjunction with attached drawing.
A kind of turnover mechanism of continuous coating device referring to FIG. 1 to FIG. 4, including feeding warehouse 1, transitional storehouse 2 and one
Coating chamber 3, coating chamber 3 are connected between feeding warehouse 1 and transitional storehouse 2, setting target 4, shielding power supply and transmission in coating chamber 3
Mechanism, shielding power supply are electrically connected with the target 4, and to export sputtering power to the target 4, transport mechanism is servo motor
The intermediate transport roller driven by magnetic fluid, is equipped with feed space 6 between coating chamber 3 and feeding warehouse 1, coating chamber 3 and transitional storehouse 2 it
Between be equipped with discharge chamber 7, be respectively equipped with the interior transfer roller 5 docked with intermediate transport roller, intermediate transport in feeding warehouse 1 and transitional storehouse 2
Roller passes through feed space 6 and discharge chamber 7 is connect with interior transfer roller 5.Interior transfer roller passes through external synchronous belt mechanism or the chain of inside
Transmission is realized.It is respectively connected with vacuum system in feeding warehouse 1, transitional storehouse 2 and coating chamber 3, to feeding warehouse 1, transitional storehouse 2 and plated film
It is vacuumized in room 3, ndfeb disk is avoided to be oxidized.Furthermore feeding warehouse 1, carry out nitrogen filled protection respectively in transitional storehouse 2, with
Ndfeb disk is avoided to be oxidized.Vacuum is respectively equipped between feed space 6 and feeding warehouse 1 and between discharge chamber 7 and transitional storehouse 2
Turning plate valve 8 avoids nitrogen from entering in coating chamber 3 by the way that vacuum flap valve door 8 is arranged.
It is provided with the first substrate frame in feeding warehouse 1, is equipped with the second substrate frame and turnover mechanism, the first substrate in transitional storehouse 2
Frame and the second substrate frame are respectively used to place ndfeb disk, and turnover mechanism is three axis turning manipulators 9, and turnover mechanism includes turning over
Turn manipulator X-axis chain 10, turning manipulator Y-axis chain 11, turning manipulator Z axis chain 12, turning manipulator running track 13, rotation
Arm 14, clamping cylinder 15 and turnover driving mechanism, turning manipulator X-axis chain 10, turning manipulator Y-axis chain 11, turning manipulator Z
Axis chain 12 is all set in turning manipulator running track 13, and by turnover driving mechanism drive turning manipulator X-axis chain 10,
Turning manipulator Y-axis chain 11, turning manipulator Z axis chain 12 into overturning tool hand running track on slide, rotating arm 14 is set to
The output end of turning manipulator Z axis chain 12, clamping cylinder 15 are set on rotating arm 14, and turnover mechanism is to by the first substrate frame
On ndfeb disk overturn to the second substrate frame.
The filming equipment of the utility model is completed in use, piling up ndfeb disk to the first substrate frame wait pile up
Afterwards, the first substrate frame is transferred in coating chamber 3 by interior transfer roller 5 and intermediate transport roller carries out plated film plated film by target 4 again,
After the completion of one face plated film of ndfeb disk, then it is transferred to middle transition storehouse 2, is driven overturn by turnover driving mechanism again at this time
Manipulator X-axis chain 10, turning manipulator Y-axis chain 11, turning manipulator Z axis chain 12 are moved to along turning manipulator running track 13
In second substrate frame, and second substrate frame is clamped by clamping cylinder 15 and passes through the overturning 180 degree of rotating arm 14, then by second
The opening of substrate frame fits with the first substrate frame, then by clamping cylinder 15 simultaneously by the first substrate frame and the second substrate frame
It clamps, and overturns 180 degree again by flip-arm, the ndfeb disk in the first substrate frame will be under gravity at this time
It overturns to the second substrate frame, then the second substrate frame is moved in coating chamber 3 by interior transfer roller 5 and intermediate transport roller, it is right
Ndfeb disk another side carries out plated film by target 4, is moved in feeding warehouse 1 again after the completion of plated film.The utility model passes through
Automation carries out turn-over plated film to ndfeb disk, improves the degree of automation, greatly improves work efficiency, and avoids
Ndfeb disk is oxidized, and automatic code-disc machine is additionally provided in feeding warehouse 1, after the completion of the plated film of ndfeb disk two sides, then leads to
It crosses automatic code-disc machine to stack the second substrate frame together, is taken out with concentrating, reduce and take out frequency, save the time.
Further, two or more coating chamber 3 in parallel between feeding warehouse 1, transitional storehouse 2, when one of coating chamber 3
Plated film, another plated film are carried out to ndfeb disk one side during to enter transitional storehouse 2 through feeding warehouse 1 to the first substrate frame
Room 3 to the second substrate frame by transitional storehouse 2 enter feeding warehouse 1 during to ndfeb disk another side carry out plated film, shape
It can be that substrate frame is again introduced into coating chamber 3, so that ndfeb disk can be continuous after the completion of a face plated film at circulation
Constantly enter coating chamber 3 and carry out plated film, improves work efficiency.
The above description is only a preferred embodiment of the present invention, therefore all according to described in the utility model patent application range
The equivalent change or modification done of structure, feature and principle, be included in the scope of the utility model patent application.
Claims (7)
1. a kind of turnover mechanism of continuous coating device, including feeding warehouse (1), transitional storehouse (2) and at least one coating chamber (3),
Coating chamber (3) is connected between feeding warehouse (1) and transitional storehouse (2), setting target (4), shielding power supply and transmission in coating chamber (3)
Mechanism, shielding power supply are electrically connected with the target (4), to export sputtering power to the target (4), it is characterised in that: into
It is provided with the first substrate frame in feed bin (1), is equipped with the second substrate frame and turnover mechanism in transitional storehouse (2), the first substrate frame and the
Two substrate frames are respectively used to place ndfeb disk, and turnover mechanism is three axis turning manipulators (9), and turnover mechanism includes tipper
Tool hand X-axis chain (10), turning manipulator Y-axis chain (11), turning manipulator Z axis chain (12), turning manipulator running track (13),
Rotating arm (14), clamping cylinder (15) and turnover driving mechanism, turning manipulator X-axis chain (10), turning manipulator Y-axis chain
(11), turning manipulator Z axis chain (12) is all set on turning manipulator running track (13), and passes through turnover driving mechanism band
Dynamic turning manipulator X-axis chain (10), turning manipulator Y-axis chain (11), turning manipulator Z axis chain (12) are run into overturning tool hand
It is slided on track, rotating arm (14) is set to the output end of turning manipulator Z axis chain (12), and clamping cylinder (15) is set to rotation
On arm (14), turnover mechanism is overturning the ndfeb disk in the first substrate frame to the second substrate frame.
2. a kind of turnover mechanism of continuous coating device according to claim 1, it is characterised in that: transport mechanism is servo
The intermediate transport roller that motor is driven by magnetic fluid.
3. a kind of turnover mechanism of continuous coating device according to claim 2, it is characterised in that: feeding warehouse (1) and mistake
It crosses in storehouse (2) and is respectively equipped with the interior transfer roller (5) docked with intermediate transport roller.
4. a kind of turnover mechanism of continuous coating device according to claim 1, it is characterised in that: coating chamber (3) and into
Feed space (6) are equipped between feed bin (1), are equipped with discharge chamber (7) between coating chamber (3) and transitional storehouse (2).
5. a kind of turnover mechanism of continuous coating device according to claim 1, it is characterised in that: feed space (6) and into
It is respectively equipped with vacuum flap valve door (8) between feed bin (1) and between discharge chamber (7) and transitional storehouse (2).
6. a kind of turnover mechanism of continuous coating device according to claim 1, it is characterised in that: feeding warehouse (1), transition
Vacuum system is respectively connected in storehouse (2) and coating chamber (3).
7. a kind of turnover mechanism of continuous coating device according to claim 1, it is characterised in that: in feeding warehouse (1) also
Equipped with automatic code-disc machine.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821559980.9U CN208933466U (en) | 2018-09-25 | 2018-09-25 | A kind of turnover mechanism of continuous coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821559980.9U CN208933466U (en) | 2018-09-25 | 2018-09-25 | A kind of turnover mechanism of continuous coating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208933466U true CN208933466U (en) | 2019-06-04 |
Family
ID=66722263
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821559980.9U Active CN208933466U (en) | 2018-09-25 | 2018-09-25 | A kind of turnover mechanism of continuous coating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208933466U (en) |
-
2018
- 2018-09-25 CN CN201821559980.9U patent/CN208933466U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108950512A (en) | A kind of continuous coating device | |
| CN208933467U (en) | A kind of continuous coating device | |
| CN209118919U (en) | A kind of yard of material storing transloading equipment | |
| CN208933466U (en) | A kind of turnover mechanism of continuous coating device | |
| CN208933463U (en) | A kind of parallel continuous coating device | |
| CN208933462U (en) | A kind of feeding mechanism of continuous coating device | |
| CN110010326B (en) | Full-automatic magnetizer based on PLC control | |
| CN108806918A (en) | Sintered Nd-Fe-B permanent magnetic material automatic magnetism-charging system | |
| CN217902828U (en) | Magnetizing tool | |
| CN109378154A (en) | The multipole magnetization equipment and magnetization method of multi-station mobile | |
| CN210325394U (en) | Manufacturing equipment for continuous sintered magnet | |
| CN115295273A (en) | Magnetic material production system that magnetizes | |
| CN210310319U (en) | Multifunctional transmission device of rail transit shielding door | |
| CN209401422U (en) | A kind of multipole magnetization equipment of multi-station mobile | |
| CN205057056U (en) | Automatic change neodymium iron boron orientation moulding press device | |
| CN211197848U (en) | Unloading mechanism on electricity core | |
| CN208771750U (en) | A kind of full automatic line glue laminating iron of punctuating supports body machine | |
| CN207788469U (en) | A kind of ndfeb magnet circle product external self-acting grinding machine system | |
| CN203134549U (en) | Device used for R-T-B-M-C system sintered magnet | |
| CN207682098U (en) | A kind of neodymium iron boron embryo material process equipment | |
| CN216686486U (en) | Full-coverage type electric permanent magnet feeding and discharging device | |
| CN109055905B (en) | Horizontal moving cathode film coating machine | |
| CN112179137B (en) | Vacuum sintering furnace for processing neodymium iron boron magnet | |
| CN114684582B (en) | Turning device, feeding and turning system and method | |
| CN216443889U (en) | Mechanism capable of overturning round product and taking materials from two sides |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |