CN208933462U - A kind of feeding mechanism of continuous coating device - Google Patents
A kind of feeding mechanism of continuous coating device Download PDFInfo
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- CN208933462U CN208933462U CN201821559966.9U CN201821559966U CN208933462U CN 208933462 U CN208933462 U CN 208933462U CN 201821559966 U CN201821559966 U CN 201821559966U CN 208933462 U CN208933462 U CN 208933462U
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Abstract
The utility model discloses a kind of feeding mechanisms of continuous coating device, including feeding warehouse, the first substrate frame and feeding mechanism are provided in feeding warehouse, feeding mechanism is that three axis feed manipulator, it includes charging manipulator X-axis chain that three axis, which feed mechanical hand, feed manipulator Y-axis chain, feed manipulator Z axis chain, feed manipulator running track, vacuum chuck, feed driving mechanism, feed manipulator X-axis chain, feed manipulator Y-axis chain, charging manipulator Z axis chain is respectively arranged in charging manipulator running track, and charging manipulator X-axis chain is driven by charging driving mechanism, feed manipulator Y-axis chain, charging manipulator Z axis chain slides in charging manipulator running track, vacuum chuck is set to the output end of charging manipulator Z axis chain, vacuum chuck is ndfeb disk to be transferred in the first substrate frame.Ndfeb disk can be placed in substrate frame by the utility model automatically, have the characteristics that high degree of automation, work efficiency is high.
Description
Technical field
The utility model relates to magnet preparation technical field, in particular to a kind of feeding mechanism of continuous coating device.
Background technique
Neodymium iron boron (Nd2Fe14B) permanent magnet has high remanence, high coercivity and high magnetic energy product, is synthesis known now
The highest rare earth permanent-magnetic material of performance promotes the miniaturization of magnetic component, the development of lightness, so that in wind-power electricity generation, becoming
The high-end popular domain such as frequency compressor and new energy passenger car is widely used.
In order to obtain the addition that high performance sintered Nd-Fe-B permanent magnet mainly applies to the elements such as heavy rare earth, grain boundary decision
The hot spot that addition heavy rare earth element becomes Recent study makes heavy rare earth element diffuse into magnetic using the method for grain boundary decision
Body crystal boundary and main phase grain fringe region can achieve the purpose that improve anisotropy field and reduce remanent magnetism and magnetic
Energy product, while the micro increase of cost.
Magnetron sputtering is one of the method for grain boundary decision addition rare earth element, and magnetron sputtering is to pass through magnetron sputtering
Equipment sputters heavy rare earth metal at neodymium iron boron magnetic body surface, magnetron sputtering, and first ndfeb disk is placed in substrate frame,
It is cooling later to make a face sputter coating, then carries out turn-over, then sputter to another side, but in the prior art, pass through
Manually ndfeb disk is placed in substrate frame, this undoubtedly increases the time of sputtering, reduces production efficiency.
Summary of the invention
In view of the deficiencies of the prior art and defect, a kind of feeding mechanism of continuous coating device is provided, it can be automatically by neodymium
Iron boron magnetic sheet is placed in substrate frame, has the characteristics that high degree of automation, work efficiency is high.
To achieve the above object, the utility model provides following technical scheme.
A kind of feeding mechanism of continuous coating device, including feeding warehouse are provided with the first substrate frame and charging in feeding warehouse
Mechanism, feeding mechanism are that three axis feed manipulator, and it includes charging manipulator X-axis chain, charging manipulator Y-axis that three axis, which feed mechanical hand,
Chain, charging manipulator Z axis chain, charging manipulator running track, vacuum chuck, charging driving mechanism, charging manipulator X-axis chain,
Charging manipulator Y-axis chain, charging manipulator Z axis chain are respectively arranged in charging manipulator running track, and pass through charging driving
Mechanism drives charging manipulator X-axis chain, charging manipulator Y-axis chain, charging manipulator Z axis chain in charging manipulator running track
Sliding, vacuum chuck are set to the output end of charging manipulator Z axis chain, and vacuum chuck is connected with vacuum generator, vacuum chuck
Ndfeb disk to be transferred in the first substrate frame.
Further, feeding warehouse is connected with vacuum system.
Further, charging driving mechanism be driving motor, driving motor by gear drive charger tool hand X-axis chain,
Charging manipulator Y-axis chain, charging manipulator Z axis chain slide in charging manipulator running track.
Further, the output end of motor is also connected with speed reducer.
The utility model has the following beneficial effects: the filming equipment of the utility model, in use, ndfeb disk will be equipped with
Magazine is put into feeding warehouse, then drives charging manipulator X-axis chain, charging manipulator Y-axis chain, charging manipulator by driving mechanism
Z axis chain slides into above magazine in charging manipulator running track, and vacuum chuck adsorbs the ndfeb disk in magazine, then
Drive charging manipulator X-axis chain, charging manipulator Y-axis chain, charging manipulator Z axis chain in charging manipulator fortune by driving mechanism
It is slid on row track in the first substrate frame, ndfeb disk is piled up to the first substrate frame, wait be carried out again after the completion of piling up
Ndfeb disk can be placed in substrate frame by coating film treatment automatically, have high degree of automation, the spy that work efficiency is high
Point.
Detailed description of the invention
Fig. 1 is the overall structure diagram of the utility model.
Fig. 2 is the three axis charging manipulator structural schematic diagram of the utility model.
In figure, 1. feeding warehouses；2. three axis feed manipulator；3. feeding manipulator X-axis chain；4. feeding manipulator Y-axis chain；5.
Feed manipulator Z axis chain；6. feeding manipulator running track；7. vacuum chuck.
Specific embodiment
The utility model is further illustrated in conjunction with attached drawing.
Referring to Fig. 1 to a kind of feeding mechanism of continuous coating device shown in Fig. 2, including feeding warehouse 1, connect in feeding warehouse 1
It is connected to vacuum system, to avoid ndfeb disk from being oxidized to vacuumizing in feeding warehouse 1.Furthermore in feeding warehouse 1 respectively into
Row nitrogen filled protection, is oxidized to avoid ndfeb disk, and the first substrate frame and three axis charging manipulator 2 are provided in feeding warehouse 1,
It includes charging manipulator X-axis chain 3, charging manipulator Y-axis chain 4, charging manipulator Z axis chain 5, charger that three axis, which feed manipulator 2,
Tool hand running track 6, vacuum chuck, charging driving mechanism, charging manipulator X-axis chain 3, charging manipulator Y-axis chain 4, charger
Tool hand Z axis chain 5 is respectively arranged in charging manipulator running track 6, and drives charging manipulator X-axis by charging driving mechanism
Chain 3, charging manipulator Y-axis chain 4, charging manipulator Z axis chain 5 slide in charging manipulator running track 6, vacuum chuck setting
In the output end of charging manipulator Z axis chain 5, vacuum chuck is connected with vacuum generator, and charging driving mechanism is driving motor, drives
Dynamic motor drives charger tool hand X-axis chain 3, charging manipulator Y-axis chain 4, charging manipulator Z axis chain 5 in charger by gear
It is slided in tool hand running track 6, the output end of motor is also connected with speed reducer, can increase the output torque of motor.
The filming equipment of the utility model in use, the magazine equipped with ndfeb disk is put into feeding warehouse 1, then leads to
Mechanism of overdriving drives charging manipulator X-axis chain 3, charging manipulator Y-axis chain 4, charging manipulator Z axis chain 5 in charging manipulator
It is slid into running track 6 above magazine, vacuum chuck adsorbs the ndfeb disk in magazine, then is driven by driving mechanism
Charging manipulator X-axis chain 3, charging manipulator Y-axis chain 4, charging manipulator Z axis chain 5 slide in charging manipulator running track 6
To the first substrate frame, ndfeb disk is piled up to the first substrate frame, after the completion of piling up, then carries out coating film treatment, energy
It is enough that ndfeb disk is placed in substrate frame automatically, have the characteristics that high degree of automation, work efficiency is high.
The above description is only a preferred embodiment of the present invention, therefore all according to described in the utility model patent application range
The equivalent change or modification done of structure, feature and principle, be included in the scope of the utility model patent application.
Claims (4)
1. a kind of feeding mechanism of continuous coating device, including feeding warehouse (1), it is characterised in that: be provided with the in feeding warehouse (1)
One substrate frame and feeding mechanism, feeding mechanism are that three axis feed manipulator (2), and it includes that charging is mechanical that three axis, which feed manipulator (2),
Hand X-axis chain (3), charging manipulator Y-axis chain (4), charging manipulator Z axis chain (5), charging manipulator running track (6), vacuum are inhaled
Disk (7), charging driving mechanism, charging manipulator X-axis chain (3), charging manipulator Y-axis chain (4), charging manipulator Z axis chain (5) point
It is not set in charging manipulator running track (6), and drives charging manipulator X-axis chain (3), charging mechanical by driving mechanism
Hand Y-axis chain (4), charging manipulator Z axis chain (5) are slided in charging manipulator running track (6), and vacuum chuck (7) is set to
The output end of manipulator Z axis chain (5) is fed, vacuum chuck (7) is connected with vacuum generator, and vacuum chuck (7) is to by neodymium iron
Boron magnetic sheet is transferred in the first substrate frame.
2. a kind of feeding mechanism of continuous coating device according to claim 1, it is characterised in that: connect in feeding warehouse (1)
It is connected to vacuum system.
3. a kind of feeding mechanism of continuous coating device according to claim 1, it is characterised in that: driving mechanism is driving
Motor, driving motor drive charger tool hand X-axis chain (3), charging manipulator Y-axis chain (4), charging manipulator Z axis by gear
Chain (5) slides in charging manipulator running track (6).
4. a kind of feeding mechanism of continuous coating device according to claim 1, it is characterised in that: the output end of motor is also
It is connected with speed reducer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821559966.9U CN208933462U (en) | 2018-09-25 | 2018-09-25 | A kind of feeding mechanism of continuous coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821559966.9U CN208933462U (en) | 2018-09-25 | 2018-09-25 | A kind of feeding mechanism of continuous coating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208933462U true CN208933462U (en) | 2019-06-04 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821559966.9U Active CN208933462U (en) | 2018-09-25 | 2018-09-25 | A kind of feeding mechanism of continuous coating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208933462U (en) |
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2018
- 2018-09-25 CN CN201821559966.9U patent/CN208933462U/en active Active
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