CN208920851U - A kind of device of centrifugal burning manufacture target - Google Patents
A kind of device of centrifugal burning manufacture target Download PDFInfo
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- CN208920851U CN208920851U CN201821598675.0U CN201821598675U CN208920851U CN 208920851 U CN208920851 U CN 208920851U CN 201821598675 U CN201821598675 U CN 201821598675U CN 208920851 U CN208920851 U CN 208920851U
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- outer housing
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Abstract
The utility model discloses a kind of devices of centrifugal burning manufacture target, including outer housing, the resistance heating set, mold and the driving motor that are set to inside the outer housing, wherein, the mold is set in the inside heating chamber of the resistance heating set, the mold bottom is provided with a rotating base, the driving motor is set to the outer housing bottom, and the rotation axis of the driving motor is connect with the rotating base；The head end of the outer housing is set as folding door, can be realized the folding of the heating chamber by the switching door；The device of centrifugal burning manufacture target provided by the utility model can produce high-density tube target, save raw material, save digging process, improve yield, substantially reduce cost.
Description
Technical field
The utility model relates to rotary target material manufacturing devices, more particularly to a kind of device of centrifugal burning manufacture target.
Background technique
As global electronic information industry is fast-developing, the terminals consumer field such as smart phone, tablet computer, automotive electronics
Demand also sustainable growth, the use of thin-film material is more and more frequent, domestic high-purity target annual compound growth rate sustainable growth, this
Just wide development space is provided for domestic sputtering target material industry.
Currently, target can be divided into rotary target material and planar targets according to shape appearance, and in the classification of rotary target material,
The rotary target materials such as ITO, AZO are bundled on stainless steel or titanium penstock by a section or more piece mother tube.And existing
Mother tube production in, mainly first raw material is sintered or is cast as a solid big spindle, then with diamond drilling machine pair
Material carries out intermediate digging, finally carries out color-buffing finish.This method advantage is that operation strategies are wide, and almost all of material all may be used
Digging is carried out to process by such method；But the processing method of this target has the following deficiencies: at present
1, waste of material is big, since target is high to purity requirement, is difficult to recycle crumble, at high cost；
2, process is tedious, production cycle length, low efficiency；
3, high to requirement on machining accuracy, product yield is relatively difficult to guarantee.
Utility model content
The purpose of the utility model is to provide a kind of devices of centrifugal burning manufacture target, are deposited with solving the above-mentioned prior art
The problem of, can produce high-density tube target, save raw material, save digging process, improve yield, substantially reduce into
This.
To achieve the above object, the utility model provides following scheme:
The utility model provides a kind of device of centrifugal burning manufacture target, including outer housing, is set to the outer housing
Internal resistance heating set, mold and driving motor, wherein the mold is set to the inside heating chamber of the resistance heating set
Interior, the mold bottom is provided with a rotating base, and the driving motor is set to the outer housing bottom, the driving motor
Rotation axis connect with the rotating base；The head end of the outer housing is set as folding door, passes through the switching door energy
Enough realize the folding of the heating chamber.
Preferably, the outer housing bottom is additionally provided with a support base, is circumferentially provided with multiple at the top of the support base
Fagging, the support plate top are welded and fixed with the outer housing bottom.
Preferably, it is additionally provided with a motor housing at the support base top center, is motor room, institute inside the motor housing
Driving motor is stated to be set in the motor room.
Preferably, multiple thermovents are circumferentially provided on the cabinet of the motor housing, and on the cabinet of the motor housing also
It is provided with power supply line.
Preferably, the rotation axis, the rotating base and the mold are concentric.
Preferably, the mould inside top is provided with a temperature sensor.
Preferably, be disposed on the outer housing of the switching door bottom power switch, temperature adjustment knob and
Motor speed adjusting knob.
Preferably, the switching door is an overturning hinge door, described in being set to the hinge of the outer housing side, being set to
The door lock of the outer housing other side and the door body being made of the part outer housing and part the resistance heating set, the hinge
A door handle is additionally provided in the door body of door.
Preferably, the resistance heating set by inside to external successively including resistive heater layer, thermal insulation layer and insulating layer,
Wherein heating electrical filament is inlaid with inside the resistive heater layer.
Preferably, the mold is high-strength porous gap Al2O3Ceramic mold, the rotating base is tungsten alloy pedestal, described
Driving motor is high-speed motor motor.
The utility model achieves following advantageous effects compared with the existing technology:
The device of centrifugal burning manufacture target provided by the utility model, apparatus structure is simple, is hardly damaged, can be according to reality
Border production needs to process various specifications mold, and easy to operate, target slurry all directions uniform force, product uniformity obtains
Guarantee, shaping speed is fast, process is easy, greatly shortens the production cycle, it can be achieved that continuous automatic production, compares hot pressed sintering
Furnace, manufacturing cost is cheap, substantially reduces equipment cost, realizes pressurization by adjusting revolving speed, thus idiosome is more densely cross-linked uniformly, can
High-density tube target is produced, raw material are saved, saves digging process, yield is improved, substantially reduces cost.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Needed in attached drawing be briefly described, it should be apparent that, the accompanying drawings in the following description is only the utility model
Some embodiments for those of ordinary skill in the art without any creative labor, can also basis
These attached drawings obtain other attached drawings.
Fig. 1 is the schematic perspective view for the device that centrifugal burning manufactures target in the utility model；
Fig. 2 is the schematic diagram of internal structure for the device that centrifugal burning manufactures target in the utility model；
The partial sectional view that resistance heating covers in Fig. 3 the utility model；
In figure: 1- support base, 2- power supply line, 3- thermovent, 4- motor speed adjusting knob, 5- hinge, 6- outer housing, 7-
Door handle, 8- temperature adjustment knob, 9- door lock, 10- overturning hinge door, 11- power switch, 12- support plate, 13- motor housing, 14- electricity
Hinder heating mantle, 15- mold, 16- temperature sensor, 17- rotation axis, 18- driving motor, the motor room 19-, 20- rotating base,
21- insulating layer, 22- thermal insulation layer, 23- heat electrical filament, 24- resistive heater layer.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
It is of the existing technology to solve the purpose of the utility model is to provide a kind of device of centrifugal burning manufacture target
Problem.
To keep the above objects, features, and advantages of the utility model more obvious and easy to understand, with reference to the accompanying drawing and have
Body embodiment is described in further detail the utility model.
The present embodiment provides a kind of devices of centrifugal burning manufacture target, as shown in Figs. 1-2, including outer housing 6, are set to
Resistance heating set 14, mold 15 and driving motor 18 inside outer housing 6；Wherein, mold 15 is set to resistance heating set 14
In internal heating chamber, 15 bottom of mold is provided with a rotating base 20, and driving motor 18 is set to 6 bottom of outer housing, driving electricity
The rotation axis 17 of machine 18 is connect with rotating base 20, and rotation axis 17, rotating base 20 and mold 15 are concentric, and driving motor 18 is logical
Crossing rotation axis 17 drives rotating base 20 to tell rotation in mold 15.
In the present embodiment, the head end of outer housing 6 is set as folding door, can be realized opening for heating chamber by switching door
It closes；Specifically, switching door is an overturning hinge door 10, including being set to the hinge 5 of 6 side of outer housing, being set to 6 other side of outer housing
Door lock 9 and by 14 door body that constitute of the resistance heating of the outer housing 6 of half and half set, also set in the door body of overturning hinge door 10
It is equipped with a door handle 7, facilitates folding overturning hinge door 10.
In the present embodiment, 6 bottom of outer housing is additionally provided with a support base 1, and 1 top of support base is circumferential to be provided with multiple supports
Plate 12,12 top of support plate are welded and fixed with 6 bottom of outer housing；A motor housing 13 is additionally provided at 1 top center of support base, electricity
It is motor room 19 inside cabinet 13, driving motor 18 is set in motor room 19.
In order to guarantee the heat dissipation performance of motor, multiple thermovents 3 are circumferentially provided on the cabinet of motor housing 13；Motor housing 13
Cabinet on be additionally provided with power supply line 2, to be connect with external power supply, give whole device power supply.
In the present embodiment, temperature sensor 16 is installed in 15 inner tip of mold, the setting of temperature sensor 16 is convenient
Temperature inside supervision molding 15.
In the present embodiment, power switch 11, temperature adjustment knob are also disposed on the outer housing 6 of switching door bottom
8 and motor speed adjusting knob 4, realize the switch of power supply, the temperature inside heating chamber adjusts and the adjusting of motor speed.
In the present embodiment, resistance heating set 14 can heat its inside heating chamber, specifically, as shown in figure 3, electricity
Hinder heating mantle 14 by inside to external successively including resistive heater layer 24, thermal insulation layer 22 and insulating layer 21, wherein adding thermal resistance
Heating electrical filament 23 is inlaid with inside silk layer 24.
In the present embodiment, mold 15 is high-strength porous gap Al2O3Ceramic mold 15；Rotating base 20 is tungsten alloy pedestal, is made
Obtaining device, the service life is longer；Driving motor 18 is high-speed motor motor, and revolving speed makes device when being greater than 10000r/min
The bigger cast target of density can be fired.
The working principle of the device of centrifugal burning provided by the utility model manufacture target is: can be with by driving motor 18
Rotating base 20 is driven to rotate, the target slurry being placed on 20 surface of rotating base can be got rid of under the influence of centrifugal force to mold
15, and be closely fitted on the surface of mold 15, cavity can be heated by resistance heating set 14, thus to fitting
Target slurry is fired on the surface of mold 15, and then realizes the effect that centrifugation is fired, after eliminating through the above way
The digging program of phase, while reducing the consumption of material, and simplify production process, reduce production cost, simple processing, just
In realizing mechanization continuous production, under the influence of centrifugal force, so that target slurry uniform stressed, product uniformity are available
Guarantee, can change the revolving speed of driving motor 18 by motor speed adjusting knob 4, to change what target slurry splashed away
Speed, and then change the pressure that target slurry generates mold 15, it is convenient to fire the different cast target of density as needed.
The utility model applies specific case and is expounded to the principles of the present invention and embodiment, the above reality
The explanation for applying example is merely used to help understand the method and its core concept of the utility model；Meanwhile for the general of this field
Technical staff, based on the idea of the present invention, there will be changes in the specific implementation manner and application range.To sum up,
The content of the present specification should not be construed as a limitation of the present invention.
Claims (10)
1. a kind of device of centrifugal burning manufacture target, it is characterised in that: including outer housing, be set to inside the outer housing
Resistance heating set, mold and driving motor, wherein the mold is set in the inside heating chamber of the resistance heating set, institute
It states mold bottom and is provided with a rotating base, the driving motor is set to the outer housing bottom, and the driving motor turns
Moving axis is connect with the rotating base；The head end of the outer housing is set as folding door, can be real by the switching door
The folding of the existing heating chamber.
2. the device of centrifugal burning manufacture target according to claim 1, it is characterised in that: the outer housing bottom is also set
It is equipped with a support base, is circumferentially provided with multiple support plates, the support plate top and the outer housing bottom at the top of the support base
Portion is welded and fixed.
3. the device of centrifugal burning manufacture target according to claim 2, it is characterised in that: the support base top center
Place is additionally provided with a motor housing, is motor room inside the motor housing, the driving motor is set in the motor room.
4. the device of centrifugal burning manufacture target according to claim 3, it is characterised in that: on the cabinet of the motor housing
Multiple thermovents circumferentially are provided with, and are additionally provided with power supply line on the cabinet of the motor housing.
5. the device of centrifugal burning manufacture target according to claim 1, it is characterised in that: the rotation axis, the rotation
Turn pedestal and the mold is concentric.
6. the device of centrifugal burning manufacture target according to claim 1, it is characterised in that: the mould inside top is set
It is equipped with a temperature sensor.
7. the device of centrifugal burning manufacture target according to claim 1, it is characterised in that: the institute of the switching door bottom
It states and is disposed with power switch, temperature adjustment knob and motor speed adjusting knob on outer housing.
8. the device of centrifugal burning manufacture target according to claim 1, it is characterised in that: the switching door is a hinge
Door, including being set to the hinge of the outer housing side, being set to the door lock of the outer housing other side and as described in part
Outer housing and the part resistance heating cover the door body constituted, are additionally provided with a door handle in the door body of the overturning hinge door.
9. the device of centrifugal burning manufacture target according to claim 1, it is characterised in that: the resistance heating set is by interior
Portion, successively including resistive heater layer, thermal insulation layer and insulating layer, adds to external wherein being inlaid with inside the resistive heater layer
Thermoelectric wire.
10. the device of centrifugal burning manufacture target according to claim 1, it is characterised in that: the mold is high-strength more
Hole Al2O3Ceramic mold, the rotating base are tungsten alloy pedestal, and the driving motor is high-speed motor motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821598675.0U CN208920851U (en) | 2018-09-29 | 2018-09-29 | A kind of device of centrifugal burning manufacture target |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821598675.0U CN208920851U (en) | 2018-09-29 | 2018-09-29 | A kind of device of centrifugal burning manufacture target |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208920851U true CN208920851U (en) | 2019-05-31 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN201821598675.0U Active CN208920851U (en) | 2018-09-29 | 2018-09-29 | A kind of device of centrifugal burning manufacture target |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108931133A (en) * | 2018-09-29 | 2018-12-04 | 福建阿石创新材料股份有限公司 | A kind of device and method of centrifugal burning manufacture target |
| CN110435166A (en) * | 2019-08-28 | 2019-11-12 | 华南理工大学 | A kind of porous material dynamic rotary sinter molding method and its molding machine |
| CN111238221A (en) * | 2020-01-19 | 2020-06-05 | 许世祥 | Rotary sintering furnace and rotary sintering process for diamond saw blade |
-
2018
- 2018-09-29 CN CN201821598675.0U patent/CN208920851U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108931133A (en) * | 2018-09-29 | 2018-12-04 | 福建阿石创新材料股份有限公司 | A kind of device and method of centrifugal burning manufacture target |
| CN108931133B (en) * | 2018-09-29 | 2024-04-05 | 福建阿石创新材料股份有限公司 | Device and method for manufacturing target material by centrifugal sintering |
| CN110435166A (en) * | 2019-08-28 | 2019-11-12 | 华南理工大学 | A kind of porous material dynamic rotary sinter molding method and its molding machine |
| CN110435166B (en) * | 2019-08-28 | 2021-09-21 | 华南理工大学 | Dynamic rotary sintering forming method and forming device for porous material |
| CN111238221A (en) * | 2020-01-19 | 2020-06-05 | 许世祥 | Rotary sintering furnace and rotary sintering process for diamond saw blade |
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