CN208844174U - A kind of vacuum coating equipment coating operation platform improvement structure - Google Patents
A kind of vacuum coating equipment coating operation platform improvement structure Download PDFInfo
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- CN208844174U CN208844174U CN201821404213.0U CN201821404213U CN208844174U CN 208844174 U CN208844174 U CN 208844174U CN 201821404213 U CN201821404213 U CN 201821404213U CN 208844174 U CN208844174 U CN 208844174U
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Abstract
The utility model discloses a kind of vacuum coating equipment coating operation platforms to improve structure, including vacuum tank, electric driven glass door is separately installed on the vacuum tank, Internet of Things device, open source single-chip microcontroller and conveyer, glass on electric driven glass door is lead glass, and conveyer is configured through vacuum tank, the inside top of the vacuum tank is separately installed with handling equipment and regulating mechanism, the end of regulating mechanism is equipped with electron gun, and the end of handling equipment is equipped with fixed device, this vacuum coating equipment coating operation platform improves structure, electric driven glass door is controlled by open source single-chip microcontroller to open, instrument inside vacuum tank can be safeguarded, its is easy to operate, it is easy to maintain, lead glass on electric driven glass door is to prevent ray from invading human body, it ensure that the personal safety of relevant staff, simultaneously, electric driven glass door can be passed through Coating process is observed, is provided convenience for the work of related personnel.
Description
Technical field
The utility model relates to vacuum coating equipment technical field, specially a kind of vacuum coating equipment coating operation platform improves knot
Structure.
Background technique
In the prior art: the patent of authorization 207608622 U of publication No. CN discloses a kind of vacuum coating equipment coating operation
Platform improve structure, including vaccum case, emptying roller, discharging motor, station, target, cathode, glass protecting cover, material receiving roller and
Rewinding motor, the emptying roller, material receiving roller are respectively arranged on both ends outside vaccum case, the discharging motor, rewinding motor difference
Corresponding driving emptying roller and material receiving roller, the station are set in vaccum case, and the target is arranged on station, the glass
Glass shield is arranged on target, and the cathode is fixed on glass protecting cover, and the vaccum case both ends have charging
Mouth, discharge port, glass protecting cover both ends are respectively equipped with material path, and maintenance is inconvenient, and mechanization degree is low, working efficiency
Low, flexibility is poor, and working ability is poor, and adaptability is poor.
Utility model content
The technical problems to be solved in the utility model is to overcome existing defect, provides a kind of vacuum coating equipment coating operation
Platform improves structure, easy to maintain, and mechanization degree is high, and work efficiency is high, and flexibility is good, and working ability is strong, adaptable, can
Effectively to solve the problems in background technique.
To achieve the above object, the utility model provides the following technical solutions: a kind of vacuum coating equipment coating operation platform changes
Into structure, including vacuum tank, electric driven glass door, Internet of Things device, open source single-chip microcontroller and conveying are separately installed on the vacuum tank
Machine, the glass on electric driven glass door is lead glass, and conveyer is configured through vacuum tank, the inside top of the vacuum tank
It is separately installed with handling equipment and regulating mechanism, the end of regulating mechanism is equipped with electron gun, and the end of handling equipment
Fixed device is installed, the inside bottom of the vacuum tank is equipped with servo motor, behaviour is fixed on the output shaft of servo motor
Make platform, the bottom of the station is fixed with shock bracket, and shock bracket is rotatablely connected by rotating mechanism and vacuum tank, described
The side of station is equipped with telescoping mechanism, and telescoping mechanism is connected with fixture, the defeated of single-chip microcontroller of increasing income by clamping mechanism
Enter end electrical connection external power supply output end, the output end for single-chip microcontroller of increasing income respectively with electric driven glass door, conveyer, electron gun and
The input terminal of servo motor is electrically connected.
As a kind of optimal technical scheme of the utility model, the Internet of Things device includes wireless transceiver, wireless receiving and dispatching
Device is mounted on the side of vacuum tank, and the side of the wireless transceiver is equipped with signal amplifier, the defeated of single-chip microcontroller of increasing income
Outlet is electrically connected the input terminal of signal amplifier, the input terminal of the output end electrical connection wireless transceiver of signal amplifier.
As a kind of optimal technical scheme of the utility model, the handling equipment includes the first motor machine arm,
First motor machine arm is mounted on the inside top of vacuum tank, and the end of the first motor machine arm is fixed with installation
The output end of seat, the open source single-chip microcontroller is electrically connected the input terminal of the first motor machine arm.
As a kind of optimal technical scheme of the utility model, the fixed device has two groups, two groups of fixed devices or so
It is symmetrical arranged.
As a kind of optimal technical scheme of the utility model, the fixed device include the first electric telescopic rod, first
Electric telescopic rod is mounted on the side of mounting base, and the telescopic end of first electric telescopic rod is connected with electronic true by attachment base
Suction disk, input terminal of the output end of the open source single-chip microcontroller respectively with the first electric telescopic rod and Motorized vacuum sucker are electrically connected
It connects.
As a kind of optimal technical scheme of the utility model, the regulating mechanism includes the second motor machine arm, the
Two motor machine arms are mounted on the inside top of vacuum tank, and the end of the second motor machine arm is fixed with mounting rack,
Electron gun is mounted on the bottom of mounting rack, and the output end of the open source single-chip microcontroller is electrically connected the input of the second motor machine arm
End.
As a kind of optimal technical scheme of the utility model, the rotating mechanism includes endless glide, and endless glide is solid
It is scheduled on the inside bottom of vacuum tank, sliding block is slidably connected in the endless glide, sliding block is connected by shock bracket and station
It connects.
As a kind of optimal technical scheme of the utility model, the telescoping mechanism includes the second electric telescopic rod, and second
Electric telescopic rod is mounted on the side of station, and the telescopic end of second electric telescopic rod is fixed with connecting plate, the open source
The output end of single-chip microcontroller is electrically connected the input terminal of the second electric telescopic rod.
As a kind of optimal technical scheme of the utility model, the clamping mechanism includes fastener and locating piece, positioning
Part is fixed on fixture, and the fastener is fixed on connecting plate, and fastener and locating piece are clamped.
As a kind of optimal technical scheme of the utility model, the fixture has four groups, four groups of fixture rotation array settings.
Compared with prior art, the utility model has the beneficial effects that this vacuum coating equipment coating operation platform improves structure,
1, electric driven glass door is controlled by open source single-chip microcontroller to open, the instrument inside vacuum tank can be safeguarded, it is easy to operate,
Easy to maintain, the lead glass on electric driven glass door ensure that the person peace of relevant staff to prevent ray from invading human body
Entirely, meanwhile, coating process can be observed by electric driven glass door, is provided convenience for the work of related personnel.
2, Motorized vacuum sucker is controlled by open source single-chip microcontroller and absorption fixation is carried out to target, pass through open source single-chip microcontroller control
The telescopic end of the work of first electric telescopic rod, the first electric telescopic rod drives Motorized vacuum sucker to be moved by attachment base,
To be moved to the operating position of Motorized vacuum sucker, convenient for various sizes of target is fixed, substantially increase
The ability to work of the vacuum coating equipment controls the work of the first motor machine arm, the first electric manipulator by open source single-chip microcontroller
The end of arm drives fixed device to be moved by mounting base, to target is moved on station from conveyer, machine
Tool degree is high, and convenient transfer substantially increases the efficiency of plated film.
3, servo motor work being controlled by open source single-chip microcontroller, the output shaft of servo motor drives station to be rotated,
Station is slided in endless glide by shock bracket band movable slider, ensure that the stability of rotation, passes through single-chip microcontroller of increasing income
The work of the second motor machine arm is controlled, the end of the second motor machine arm drives electron gun mobile by mounting rack, thus
The operating position of electron gun is adjusted, electron gun work is controlled by open source single-chip microcontroller, electron gun carries out plated film to target,
Its flexibility is good, easy to adjust, convenient for carrying out polygonal plated film to target, substantially increases the working ability of the vacuum coating equipment.
4, the work of the second electric telescopic rod is controlled by open source single-chip microcontroller, the end of the second electric telescopic rod passes through connecting plate
Drive fixture to carry out stretching motion, it is easy to adjust to be gripped to target, convenient for various sizes of target into
Row is fixed, and is clamped by fastener and locating piece, is assembled to fixture and connecting plate, easy for assemble or unload, is convenient for basis
Different targets replaces different fixtures, substantially increases the adaptability of the vacuum coating equipment.
Detailed description of the invention
FIG. 1 is a schematic structural view of the utility model；
Fig. 2 is the utility model cross-sectional view of the structure.
In figure: 1 vacuum tank, 2 conveyers, 3 open source single-chip microcontrollers, 4 wireless transceivers, 5 signal amplifiers, 6 electric driven glass doors,
7 Internet of Things devices, 8 first motor machine arms, 9 mounting bases, 10 fasteners, 11 locating pieces, 12 sliding blocks, 13 endless glides, 14 are watched
Take motor, 15 stations, 16 fixtures, 17 connecting plates, 18 second electric telescopic rods, 19 shock brackets, 20 electron guns, 21 installations
Frame, 22 second motor machine arms, 23 Motorized vacuum suckers, 24 attachment bases, 25 first electric telescopic rods, 26 handling equipments,
27 clamping mechanisms, 28 rotating mechanisms, 29 telescoping mechanisms, 30 regulating mechanisms, 31 fixed devices.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
The utility model provides a kind of technical solution referring to FIG. 1-2: a kind of vacuum coating equipment coating operation platform improvement knot
Structure, including vacuum tank 1 are separately installed with electric driven glass door 6, Internet of Things device 7, open source single-chip microcontroller 3 and conveyer 2 on vacuum tank 1,
Glass on electric driven glass door 6 is lead glass, and conveyer 2 is configured through vacuum tank 1, the medial roof part of vacuum tank 1
Handling equipment 26 and regulating mechanism 30 are not installed, the end of regulating mechanism 30 is equipped with electron gun 20, and handling equipment
26 end is equipped with fixed device 31, and the inside bottom of vacuum tank 1 is equipped with servo motor 14, the output shaft of servo motor 14
On be fixed with station 15, the bottom of station 15 is fixed with shock bracket 19, and shock bracket 19 passes through rotating mechanism 28 and true
Empty van 1 is rotatablely connected, and the side of station 15 is equipped with telescoping mechanism 29, and telescoping mechanism 29 is connected with folder by clamping mechanism 27
Tool 16, open source single-chip microcontroller 3 input terminal electrical connection external power supply output end, increase income single-chip microcontroller 3 output end respectively with it is electronic
The input terminal electrical connection of glass door 6, conveyer 2, electron gun 20 and servo motor 14, target is placed on conveyer 2, is passed through
Single-chip microcontroller 3 of increasing income controls conveyer 2 and works, so that target is moved in vacuum tank 1, substantially increases the efficiency of processing, electricity
Lead glass on dynamic glass door 6 ensure that the personal safety of relevant staff preventing ray from invading human body, meanwhile, it can
To be observed by 6 pairs of coating process of electric driven glass door, electric driven glass door 6 is controlled by open source single-chip microcontroller 3 and is opened, it can be right
Instrument inside vacuum tank 1 is safeguarded, easy to operate, easy to maintain.
Internet of Things device 7 includes wireless transceiver 4, and wireless transceiver 4 is mounted on the side of vacuum tank 1, wireless transceiver 4
Side is equipped with signal amplifier 5, the input terminal of the output end electrical connection signal amplifier 5 of open source single-chip microcontroller 3, signal amplifier
The input terminal of 5 output end electrical connection wireless transceiver 4, the information that open source single-chip microcontroller 3 is handled are amplified by signal amplifier 5,
The signal of amplification is transmitted to remote monitoring end by wireless transceiver 4, and remote control terminal is by wireless transceiver 4 to the Vacuum Deposition
Film machine carries out wireless control, and intelligence degree is high, easy to control, provides convenience for the work of related personnel.
Handling equipment 26 includes the first motor machine arm 8, and the first motor machine arm 8 is mounted on the interior of vacuum tank 1
Lateral roof, the end of the first motor machine arm 8 are fixed with mounting base 9, and the output end electrical connection first of open source single-chip microcontroller 3 is electronic
The input terminal of mechanical arm 8.
Fixed device 31 has two groups, and two groups of fixed devices 31 are symmetrical set, convenient for fixed to target.
Fixed device 31 includes the first electric telescopic rod 25, and the first electric telescopic rod 25 is mounted on the side of mounting base 9, the
The telescopic end of one electric telescopic rod 25 is connected with Motorized vacuum sucker 23, the output end point of open source single-chip microcontroller 3 by attachment base 24
It is not electrically connected, is controlled by single-chip microcontroller 3 of increasing income electronic true with the input terminal of the first electric telescopic rod 25 and Motorized vacuum sucker 23
Suction disk 23 carries out absorption fixation to target, controls the work of the first electric telescopic rod 25 by open source single-chip microcontroller 3, first electronic stretches
The telescopic end of contracting bar 25 drives Motorized vacuum sucker 23 to be moved by attachment base 24, thus to the work of Motorized vacuum sucker 23
It is moved as position, convenient for various sizes of target is fixed, substantially increases the ability to work of the vacuum coating equipment,
The work of the first motor machine arm 8 is controlled by open source single-chip microcontroller 3, the end of the first motor machine arm 8 passes through 9 band of mounting base
Dynamic fixed device 31 is moved, so that target is moved on station 15 from conveyer 2, mechanization degree is high, transfer
It is convenient, substantially increase the efficiency of plated film.
Regulating mechanism 30 includes the second motor machine arm 22, and the second motor machine arm 22 is mounted on the interior of vacuum tank 1
Lateral roof, the end of the second motor machine arm 22 are fixed with mounting rack 21, and electron gun 20 is mounted on the bottom of mounting rack 21, opens
The output end of source single-chip microcontroller 3 is electrically connected the input terminal of the second motor machine arm 22.
Rotating mechanism 28 includes endless glide 13, and endless glide 13 is fixed on the inside bottom of vacuum tank 1, endless glide 13
On slidably connect sliding block 12, sliding block 12 connect by shock bracket 19 with station 15, and the control servo of single-chip microcontroller 3 of increasing income is passed through
Motor 14 works, and the output shaft of servo motor 14 drives station 15 to be rotated, and station 15 is driven by shock bracket 19
Sliding block 12 slides in endless glide 13, ensure that the stability of rotation, controls the second electric manipulator by open source single-chip microcontroller 3
Arm 22 works, and the end of the second motor machine arm 22 drives electron gun 20 mobile by mounting rack 21, thus to electron gun 20
Operating position be adjusted, by open source single-chip microcontroller 3 control electron gun 20 work, electron gun 20 to target carry out plated film,
Flexibility is good, easy to adjust, convenient for carrying out polygonal plated film to target, substantially increases the working ability of the vacuum coating equipment.
Telescoping mechanism 29 includes the second electric telescopic rod 18, and the second electric telescopic rod 18 is mounted on the side of station 15,
The telescopic end of second electric telescopic rod 18 is fixed with connecting plate 17, and the output end of open source single-chip microcontroller 3 is electrically connected the second electric expansion
The input terminal of bar 18 controls the work of the second electric telescopic rod 18 by open source single-chip microcontroller 3, and the end of the second electric telescopic rod 18 is logical
Crossing connecting plate 17 drives fixture 16 to carry out stretching motion, so that target is gripped, it is easy to adjust, convenient for difference
The target of size is fixed.
Clamping mechanism 27 includes fastener 10 and locating piece 11, and locating piece 11 is fixed on fixture 16, and fastener 10 is fixed
On connecting plate 17, fastener 10 and locating piece 11 are clamped, and are clamped by fastener 10 and locating piece 11, to fixture 16 with connect
Plate 17 is assembled, easy for assemble or unload, and convenient for replacing different fixtures 16 according to different targets, it is true to substantially increase this
The adaptability of empty coating machine.
Fixture 16 has four groups, four groups of 16 rotation array of fixture settings, convenient for fixed to target.
Single-chip microcontroller 3 of increasing income control electric driven glass door 6, conveyer 2, electron gun 20 and servo motor 14, wireless transceiver 4,
Signal amplifier 5, the first motor machine arm 8, the first electric telescopic rod 25, the second motor machine arm 22 and second electronic stretch
Contracting bar 18 is method commonly used in the prior art, and open source single-chip microcontroller 3 is SX series monolithic.
When in use: target being placed on conveyer 2, conveyer 2 is controlled by open source single-chip microcontroller 3 and is worked, thus will
Target is moved in vacuum tank 1, the lead glass on electric driven glass door 6 to prevent ray invade human body, meanwhile, electricity can be passed through
Dynamic glass door 6 observes coating process, controls electric driven glass door 6 by open source single-chip microcontroller 3 and opens, can be to vacuum tank 1
Internal instrument is safeguarded.
Motorized vacuum sucker 23 is controlled by open source single-chip microcontroller 3, absorption fixation is carried out to target, controlled by open source single-chip microcontroller 3
The work of the first electric telescopic rod 25 is made, the telescopic end of the first electric telescopic rod 25 drives Motorized vacuum sucker 23 by attachment base 24
It is moved, to move to the operating position of Motorized vacuum sucker 23, the first motor is controlled by open source single-chip microcontroller 3
Tool arm 8 works, and the end of the first motor machine arm 8 drives fixed device 31 to be moved by mounting base 9, thus by target
Material is moved on station 15 from conveyer 2.
The work of the second electric telescopic rod 18 is controlled by open source single-chip microcontroller 3, the end of the second electric telescopic rod 18 passes through company
Fishplate bar 17 drives fixture 16 to carry out stretching motion, to grip to target, is blocked by fastener 10 and locating piece 11
It connects, fixture 16 and connecting plate 17 is assembled.
It controls servo motor 14 by open source single-chip microcontroller 3 to work, the output shaft of servo motor 14 drives station 15 to carry out
Rotation, station 15 are slided with movable slider 12 in endless glide 13 by shock bracket 19, and open source single-chip microcontroller 3 control the is passed through
The end of the work of two motor machine arms 22, the second motor machine arm 22 drives electron gun 20 mobile by mounting rack 21, from
And the operating position of electron gun 20 is adjusted, controlling electron gun 20 by open source single-chip microcontroller 3 works, and electron gun 20 is to target
Carry out plated film.
The information that open source single-chip microcontroller 3 is handled is amplified by signal amplifier 5, and the signal of amplification is passed by wireless transceiver 4
It is delivered to remote monitoring end, remote control terminal carries out wireless control to the vacuum coating equipment by wireless transceiver 4.
The utility model controls electric driven glass door 6 by open source single-chip microcontroller 3 and opens, can be to the instrument inside vacuum tank 1
It is safeguarded, easy to operate, easy to maintain, the lead glass on electric driven glass door 6 ensure that prevent ray from invading human body
The personal safety of relevant staff, meanwhile, it can be observed by 6 pairs of coating process of electric driven glass door, be related personnel
Work provide convenience.
Motorized vacuum sucker 23 is controlled by open source single-chip microcontroller 3, absorption fixation is carried out to target, controlled by open source single-chip microcontroller 3
The work of the first electric telescopic rod 25 is made, the telescopic end of the first electric telescopic rod 25 drives Motorized vacuum sucker 23 by attachment base 24
It is moved, so that the operating position of Motorized vacuum sucker 23 is moved, convenient for various sizes of target is fixed,
The ability to work for substantially increasing the vacuum coating equipment controls the work of the first motor machine arm 8 by open source single-chip microcontroller 3, the
The end of one motor machine arm 8 drives fixed device 31 to be moved by mounting base 9, so that target be moved from conveyer 2
It moves on station 15, mechanization degree is high, and convenient transfer substantially increases the efficiency of plated film.
It controls servo motor 14 by open source single-chip microcontroller 3 to work, the output shaft of servo motor 14 drives station 15 to carry out
Rotation, station 15 are slided in endless glide 13 by shock bracket 19 with movable slider 12, ensure that the stability of rotation, are led to
It crosses open source single-chip microcontroller 3 and controls the work of the second motor machine arm 22, the end of the second motor machine arm 22 passes through mounting rack 21
It is mobile to drive electron gun 20, so that the operating position of electron gun 20 be adjusted, electron gun 20 is controlled by open source single-chip microcontroller 3
Work, electron gun 20 carry out plated film to target, and flexibility is good, easy to adjust, convenient for carrying out polygonal plated film to target, mention significantly
The high working ability of the vacuum coating equipment.
The work of the second electric telescopic rod 18 is controlled by open source single-chip microcontroller 3, the end of the second electric telescopic rod 18 passes through company
Fishplate bar 17 drives fixture 16 to carry out stretching motion, so that target is gripped, it is easy to adjust, convenient for different sizes
Target be fixed, be clamped by fastener 10 and locating piece 11, fixture 16 and connecting plate 17 assembled, installed and tear open
It unloads conveniently, convenient for replacing different fixtures 16 according to different targets, substantially increases the adaptability of the vacuum coating equipment.
While there has been shown and described that the embodiments of the present invention, for the ordinary skill in the art,
It is understood that these embodiments can be carried out with a variety of variations in the case where not departing from the principles of the present invention and spirit, repaired
Change, replacement and variant, the scope of the utility model is defined by the appended claims and the equivalents thereof.
Claims (10)
1. a kind of vacuum coating equipment coating operation platform improves structure, including vacuum tank (1), it is characterised in that: the vacuum tank (1)
On be separately installed with electric driven glass door (6), Internet of Things device (7), open source single-chip microcontroller (3) and conveyer (2), electric driven glass door (6)
On glass be lead glass, and conveyer (2) is configured through vacuum tank (1), the inside top difference of the vacuum tank (1)
Handling equipment (26) and regulating mechanism (30) are installed, the end of regulating mechanism (30) is equipped with electron gun (20), and up and down
The end of material device (26) is equipped with fixed device (31), and the inside bottom of the vacuum tank (1) is equipped with servo motor (14),
It is fixed on the output shaft of servo motor (14) station (15), the bottom of the station (15) is fixed with shock bracket
(19), shock bracket (19) is rotatablely connected by rotating mechanism (28) and vacuum tank (1), the side installation of the station (15)
Have telescoping mechanism (29), telescoping mechanism (29) is connected with fixture (16) by clamping mechanism (27), open source single-chip microcontroller (3)
Input terminal be electrically connected external power supply output end, increase income single-chip microcontroller (3) output end respectively with electric driven glass door (6), conveyer
(2), the input terminal of electron gun (20) and servo motor (14) is electrically connected.
2. a kind of vacuum coating equipment coating operation platform according to claim 1 improves structure, it is characterised in that: the Internet of Things
Device (7) includes wireless transceiver (4), and wireless transceiver (4) is mounted on the side of vacuum tank (1), the wireless transceiver (4)
Side be equipped with signal amplifier (5), it is described open source single-chip microcontroller (3) output end electrical connection signal amplifier (5) input
End, the input terminal of output end electrical connection wireless transceiver (4) of signal amplifier (5).
3. a kind of vacuum coating equipment coating operation platform according to claim 1 improves structure, it is characterised in that: above and below described
Expect that device (26) include the first motor machine arm (8), the first motor machine arm (8) is mounted on the medial roof of vacuum tank (1)
The end in portion, the first motor machine arm (8) is fixed with mounting base (9), and the output end of open source single-chip microcontroller (3) is electrically connected
Connect the input terminal of the first motor machine arm (8).
4. a kind of vacuum coating equipment coating operation platform according to claim 1 improves structure, it is characterised in that: the fixation
Device (31) has two groups, and two groups of fixed devices (31) are symmetrical set.
5. a kind of vacuum coating equipment coating operation platform according to claim 1 improves structure, it is characterised in that: the fixation
Device (31) includes the first electric telescopic rod (25), and the first electric telescopic rod (25) is mounted on the side of mounting base (9), and described the
The telescopic end of one electric telescopic rod (25) is connected with Motorized vacuum sucker (23) by attachment base (24), the open source single-chip microcontroller
(3) output end is electrically connected with the input terminal of the first electric telescopic rod (25) and Motorized vacuum sucker (23) respectively.
6. a kind of vacuum coating equipment coating operation platform according to claim 1 improves structure, it is characterised in that: the adjusting
Mechanism (30) includes the second motor machine arm (22), and the second motor machine arm (22) is mounted on the medial roof of vacuum tank (1)
The end in portion, the second motor machine arm (22) is fixed with mounting rack (21), and electron gun (20) is mounted on mounting rack (21)
Bottom, it is described open source single-chip microcontroller (3) output end be electrically connected the second motor machine arm (22) input terminal.
7. a kind of vacuum coating equipment coating operation platform according to claim 1 improves structure, it is characterised in that: the rotation
Mechanism (28) includes endless glide (13), and endless glide (13) is fixed on the inside bottom of vacuum tank (1), the endless glide
(13) it is slidably connected on sliding block (12), sliding block (12) is connect by shock bracket (19) with station (15).
8. a kind of vacuum coating equipment coating operation platform according to claim 1 improves structure, it is characterised in that: described flexible
Mechanism (29) includes the second electric telescopic rod (18), and the second electric telescopic rod (18) is mounted on the side of station (15), described
The telescopic end of second electric telescopic rod (18) is fixed with connecting plate (17), the output end electrical connection the of open source single-chip microcontroller (3)
The input terminal of two electric telescopic rods (18).
9. a kind of vacuum coating equipment coating operation platform according to claim 1 improves structure, it is characterised in that: the clamping
Mechanism (27) includes fastener (10) and locating piece (11), and locating piece (11) is fixed on fixture (16), the fastener (10)
It is fixed on connecting plate (17), fastener (10) and locating piece (11) are clamped.
10. a kind of vacuum coating equipment coating operation platform according to claim 1 improves structure, it is characterised in that: the folder
Tool (16) has four groups, four groups of fixture (16) rotation array settings.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821404213.0U CN208844174U (en) | 2018-08-29 | 2018-08-29 | A kind of vacuum coating equipment coating operation platform improvement structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821404213.0U CN208844174U (en) | 2018-08-29 | 2018-08-29 | A kind of vacuum coating equipment coating operation platform improvement structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208844174U true CN208844174U (en) | 2019-05-10 |
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ID=66356388
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| Application Number | Title | Priority Date | Filing Date |
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| CN201821404213.0U Active CN208844174U (en) | 2018-08-29 | 2018-08-29 | A kind of vacuum coating equipment coating operation platform improvement structure |
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| Country | Link |
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| CN (1) | CN208844174U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110592547A (en) * | 2019-10-22 | 2019-12-20 | 武汉奥亿特科技有限公司 | Controllable magnetron sputtering coating device of directionality |
| CN113789500A (en) * | 2021-08-04 | 2021-12-14 | 湖北三峡职业技术学院 | Ion plating device and method for automatically adjusting ion beam sputtering angle and incidence angle |
-
2018
- 2018-08-29 CN CN201821404213.0U patent/CN208844174U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110592547A (en) * | 2019-10-22 | 2019-12-20 | 武汉奥亿特科技有限公司 | Controllable magnetron sputtering coating device of directionality |
| CN113789500A (en) * | 2021-08-04 | 2021-12-14 | 湖北三峡职业技术学院 | Ion plating device and method for automatically adjusting ion beam sputtering angle and incidence angle |
| CN113789500B (en) * | 2021-08-04 | 2023-07-25 | 湖北三峡职业技术学院 | Ion plating device and method capable of automatically adjusting sputtering angle and incidence angle of ion beam |
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