CN208843297U - A kind of high speed and super precision feeding mechanism of semiconductor thin-sheet material - Google Patents
A kind of high speed and super precision feeding mechanism of semiconductor thin-sheet material Download PDFInfo
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- CN208843297U CN208843297U CN201821599419.3U CN201821599419U CN208843297U CN 208843297 U CN208843297 U CN 208843297U CN 201821599419 U CN201821599419 U CN 201821599419U CN 208843297 U CN208843297 U CN 208843297U
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Abstract
The utility model discloses a kind of high speed and super precision feeding mechanisms of semiconductor thin-sheet material, including pedestal, first substrate slideway, the second substrate slideway, the traversing platform of Y-axis, Y-axis guide rail, Y-axis sliding block, Y-axis cross sliding driving device, X-axis guide rail, X-axis slide block, electromagnetic type clamping jaw and X-axis cross sliding driving device, the traversing platform of Y-axis is slidably connected by Y-axis sliding block with the Y-axis guide rail being installed at the top of pedestal, first substrate slideway is installed on the base, the second substrate slideway is installed on the traversing platform of Y-axis, Y-axis cross sliding driving device can drive the traversing platform of Y-axis transverse shifting along the y axis, electromagnetic type clamping jaw is slidably connected by X-axis slide block with the X-axis guide rail for being installed in the traversing table top of Y-axis, X-axis cross sliding driving device can drive electromagnetic type clamping jaw transverse shifting along the x axis.The utility model can quickly material folding and feeding, the distance between two substrate slideways are adjusted to adapt to various sizes of substrate, versatile, high production efficiency in accurate positioning.
Description
Technical field
The utility model relates to semiconductor automation equipment technical fields, are to be related to a kind of semiconductor film more specifically
The high speed and super precision feeding mechanism of sheet material.
Background technique
Semiconductor industry has important strategic importance for the Information Technology Development of country, wherein, semiconductor equipment industry
It is the core of entire industry.With the development of technology, the size of semiconductor devices is smaller and smaller, and thickness is also more and more thinner, causes
The raw material substrate for producing semiconductor devices is also more and more thinner.Subsidiary body-the feeding mechanism important as semiconductor equipment,
Pushing precision, feeding speed etc. all directly affect the stability and efficiency of semiconductor equipment operation.
Existing feeding mechanism needs mating different type when being directed to different substrates, versatile, and in feeding
When the flatness of substrate cannot be controlled well, be easy to cause product cumulative errors when dispensing die bond to become larger.Meanwhile
The substrate of different in width cannot be adjusted well.
Utility model content
The purpose of the utility model is to overcome drawbacks described above in the prior art, provide one kind can quickly material folding feeding,
Accurate positioning, be suitable for various sizes of substrate, be versatile, the high speed and super precision of high production efficiency semiconductor thin-sheet material gives
Expect mechanism.
To achieve the above object, the utility model provides a kind of high speed and super precision feeding mechanism of semiconductor thin-sheet material,
Including pedestal, first substrate slideway, the second substrate slideway, the traversing platform of Y-axis, Y-axis guide rail, Y-axis sliding block, the traversing driving dress of Y-axis
It sets, X-axis guide rail, X-axis slide block, several electromagnetic type clamping jaws and at least one X-axis cross sliding driving device, the traversing platform of Y-axis
Bottom be slidably connected with the Y-axis guide rail being installed at the top of pedestal by Y-axis sliding block, the first substrate slideway is installed in pedestal
Top, the second substrate slideway is installed in the side of the traversing platform of Y-axis, the first substrate slideway and the second substrate slideway
Setting and parallel to each other, the Y-axis cross sliding driving device and the traversing platform transmission connection of Y-axis along the x axis, and it is able to drive Y
The traversing platform of axis transverse shifting along the y axis, the bottom of the electromagnetic type clamping jaw is by X-axis slide block and to be installed in Y-axis traversing flat
X-axis guide rail at the top of platform is slidably connected, and each X-axis cross sliding driving device is driven with corresponding electromagnetic type clamping jaw respectively to be connected
It connects, and is able to drive the independent transverse shifting along the x axis of corresponding electromagnetic type clamping jaw or the traversing driving dress of the X-axis
It sets and is connect with all electromagnetic type clamping jaw Synchronous Transmissions, and be able to drive the synchronous transverse shifting along the x axis of all electromagnetic type clamping jaws,
The second substrate slideway passes through the material folding position of all electromagnetic type clamping jaws.
Preferably, the Y-axis cross sliding driving device includes y-axis motor, the output shaft of the y-axis motor passes through Y-axis
Screw rod is sequentially connected with the Y-axis feed screw nut's seat for being installed in the traversing mesa base of Y-axis.
Preferably, the X-axis cross sliding driving device includes X-axis motor, the output shaft of the X-axis motor passes through X-axis
Screw rod is sequentially connected with the electromagnetic type clamping jaw for being equipped with threaded hole or X-axis feed screw nut's seat.
Preferably, the electromagnetic type clamping jaw includes clamping jaw pedestal, clamping jaw clamping plate, stop screw, electromagnet and spring,
The electromagnet is installed in top one end of clamping jaw pedestal, and one end of the clamping jaw clamping plate passes through stop screw and clamping jaw pedestal phase
Connection, the clamping jaw clamping plate are located at the top of electromagnet and can move up and down relative to clamping jaw pedestal, and the spring is located at folder
Between pawl pedestal and clamping jaw clamping plate, material folding one end of the clamping jaw pedestal is equipped with base pinch material head, the material folding of the clamping jaw clamping plate
One end is equipped with clamping plate material folding head.
Preferably, material folding one end of the clamping jaw pedestal is equipped with the slideway loose slot passed through for the second substrate slideway,
The slideway loose slot is located at the inside of base pinch material head.
Compared with prior art, the utility model has the beneficial effects that:
The Y-axis cross sliding driving device of the utility model can drive the traversing platform of Y-axis to drive the second base mounted thereto
Plate slideway moves in the Y-axis direction, automatically adjusts the distance between first substrate slideway and the second substrate slideway to adapt to difference
The substrate of size, versatile, electromagnetic type clamping jaw uses electromagnetic clamp, has ultrafast response speed to realize Quick-clamped,
X-axis cross sliding driving device can realize the quick feeding and precise positioning of X-axis simultaneously, and the utility model is being directed to various sizes of base
Different feeding mechanism model that no replacement is required when plate, material folding and feeding speed are fast, and placement location is accurate, effectively improve production effect
Rate.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is this
Some embodiments of utility model, for those of ordinary skill in the art, without creative efforts, also
Other drawings may be obtained according to these drawings without any creative labor.
Fig. 1 is the structural schematic diagram of the high speed and super precision feeding mechanism of semiconductor thin-sheet material provided by the utility model；
Fig. 2 is the part-structure side view of the high speed and super precision feeding mechanism of semiconductor thin-sheet material provided by the utility model
Figure；
Fig. 3 is the installation diagram of Y-axis cross sliding driving device provided by the utility model, Y-axis traversing platform and electromagnetic type clamping jaw；
Fig. 4 is the disassembly diagram of electromagnetic type clamping jaw provided by the utility model；
Fig. 5 is the structural schematic diagram of X-axis cross sliding driving device provided by the utility model.
Specific embodiment
It is practical new below in conjunction with this to keep the objectives, technical solutions, and advantages of the embodiments of the present invention clearer
Attached drawing in type embodiment, the technical scheme in the utility model embodiment is clearly and completely described, it is clear that is retouched
The embodiment stated is the utility model a part of the embodiment, instead of all the embodiments.Based on the implementation in the utility model
Example, every other embodiment obtained by those of ordinary skill in the art without making creative efforts belong to
The range of the utility model protection.
Referring to FIG. 1, the embodiments of the present invention provide a kind of high speed and super precision feeder of semiconductor thin-sheet material
Structure, including the traversing platform 4 of pedestal 1, first substrate slideway 2, the second substrate slideway 3, Y-axis, Y-axis guide rail 5, Y-axis sliding block 6, Y-axis are horizontal
Driving device 7, X-axis guide rail 8, X-axis slide block 9, electromagnetic type clamping jaw 10 and X-axis cross sliding driving device 11 are moved, it is right with reference to the accompanying drawing
The present embodiment is described in detail.
As depicted in figs. 1 and 2, the bottom of the traversing platform 4 of Y-axis is led by Y-axis sliding block 6 with the Y-axis for being installed in 1 top of pedestal
Rail 5 is slidably connected, and first substrate slideway 2 is installed in the top of pedestal 1, and the second substrate slideway 3 is installed in the traversing platform 4 of Y-axis
Side, first substrate slideway 2 and the second substrate slideway 3 are arranged and parallel to each other along the x axis, and semiconductor film plate base can be put
It sets on first substrate slideway 2 and the second substrate slideway 3, Y-axis cross sliding driving device 7 and the traversing platform 4 of Y-axis are sequentially connected, and
It is able to drive the traversing platform 4 of Y-axis transverse shifting along the y axis.
In the present embodiment, as shown in figure 3, Y-axis cross sliding driving device 7 may include y-axis motor 71, y-axis motor 71
Output shaft is sequentially connected by Y-axis screw rod 72 with the Y-axis feed screw nut seat 73 for being installed in traversing 4 bottom of platform of Y-axis, wherein Y-axis
Screw rod 72 is threadedly coupled with Y-axis feed screw nut seat 73.Y-axis motor 71 is able to drive the rotation of Y-axis screw rod 72 when working, to pass through
Y-axis feed screw nut seat 73 drives the traversing platform 4 of Y-axis mobile, to adjust between first substrate slideway 2 and the second substrate slideway 3
Distance adapts to various sizes of substrate.Certainly, according to actual needs, in other embodiments, the Y-axis cross sliding driving device 7
It can be set to that cylinder, straight line mould group, servo slide table etc. are various to be capable of providing linearly moving driving equipment, non-the present embodiment is
Limit.
As depicted in figs. 1 and 2, the bottom of electromagnetic type clamping jaw 10 by X-axis slide block 9 and is installed in traversing 4 top of platform of Y-axis
X-axis guide rail 8 be slidably connected.In the present embodiment, as shown in figure 4, electromagnetic type clamping jaw 10 includes clamping jaw pedestal 101, clamping jaw folder
Plate 102, stop screw 103, electromagnet 104 and spring 105, electromagnet 104 are installed in the recessed of top one end of clamping jaw pedestal 101
In slot, electromagnet 104 is connected by conducting wire with controller, is controlled its energization by controller or is powered off, the one of clamping jaw clamping plate 102
End is connected by stop screw 103 with clamping jaw pedestal 101, and clamping jaw clamping plate 102 is located at the top of electromagnet 104 and can be opposite
It is moved up and down in clamping jaw pedestal 101, spring 105 is between clamping jaw pedestal 101 and clamping jaw clamping plate 102, the folder of clamping jaw pedestal 101
Expect that one end is equipped with base pinch material head 106, material folding one end of clamping jaw clamping plate 102 is equipped with clamping plate material folding head 107.
In addition, material folding one end of clamping jaw pedestal 101 is equipped with the slideway loose slot 108 passed through for the second substrate slideway 3, slideway
Loose slot 108 is located at the inside of base pinch material head 106, and the second substrate slideway 3 passes through the slideway activity of all electromagnetic type clamping jaws 10
Slot 108.
When electromagnet 104 powers off, clamping jaw clamping plate 102 can generate flexible deformation (i.e. under the elastic force effect of spring 105
Up dig at the material folding end of clamping jaw clamping plate 102), it is increased at this time with the gap at the material folding end of clamping jaw pedestal 101, in opening clip-like
State.After the energization of electromagnet 104, the electromagnetic attraction that electromagnet 104 generates is greater than spring 105 to the thrust of clamping jaw clamping plate 102, inhales
Firmly clamping jaw clamping plate 102 is drawn close toward clamping jaw pedestal 101, is clamped base pinch material head 106 and clamping plate material folding head 107 and is located at substrate slideway
On substrate.
In the present embodiment, X-axis cross sliding driving device 11 and electromagnetic type clamping jaw 10 are respectively equipped with four, and each X-axis is traversing
Driving device 11 is sequentially connected with corresponding electromagnetic type clamping jaw 10 respectively, and is able to drive corresponding electromagnetic type clamping jaw
10 independent transverse shiftings along the x axis.As shown in figure 5, X-axis cross sliding driving device 11 may include X-axis motor 111, X-axis motor
111 output shaft is sequentially connected by X-axis screw rod 112 and electromagnetic type clamping jaw 10.Wherein, X-axis screw rod 112 can be with clamping jaw pedestal
The threaded hole 109 or X-axis feed screw nut's seat being arranged on 101 are threadedly coupled.
Certainly, according to actual needs, X-axis cross sliding driving device 11 can also only be arranged one, press from both sides with all electromagnetic types
The connection of 10 Synchronous Transmission of pawl, and be able to drive the synchronous transverse shifting along the x axis of all electromagnetic type clamping jaws 10 (such as with X-axis electricity
The X-axis screw rod 112 that the output shaft of machine 111 is connected passes through the threaded hole 109 on all clamping jaw pedestals 101).In addition, at other
In embodiment, which may be set to be that cylinder, straight line mould group, servo slide table etc. are various to be capable of providing
Linearly moving driving equipment, non-the present embodiment are limited.
In conclusion the Y-axis cross sliding driving device of the utility model can drive the traversing platform drive of Y-axis mounted thereto
The second substrate slideway move in the Y-axis direction, automatically adjust the distance between first substrate slideway and the second substrate slideway with
Various sizes of substrate is adapted to, versatile, electromagnetic type clamping jaw uses electromagnetic clamp, and it is fast to realize to have ultrafast response speed
Speed clamps, while X-axis cross sliding driving device can realize the quick feeding and precise positioning of X-axis, and the utility model is for difference
Different feeding mechanism model that no replacement is required when the substrate of size, material folding and feeding speed are fast, and placement location is accurate, effectively improve
Production efficiency.
It should be noted that each motor and electromagnet in the present embodiment can pass through computer, control cabinet, control
Common any one controller is controlled touch screen etc. on the market at present, but the present embodiment is not related to the knot of the controller
The improvement of structure and circuit, those skilled in the art can be selected in existing controller it is a kind of properly with the high speed and super precision feeding
Mechanism arranges in pairs or groups.
Above-described embodiment is the preferable embodiment of the utility model, but the embodiments of the present invention is not by above-mentioned
The limitation of embodiment, it is made under other any spiritual essence and principles without departing from the utility model to change, modify, replacing
In generation, simplifies combination, should be equivalent substitute mode, is included within the protection scope of the utility model.
Claims (5)
1. a kind of high speed and super precision feeding mechanism of semiconductor thin-sheet material, it is characterised in that: sliding including pedestal (1), first substrate
Road (2), the second substrate slideway (3), the traversing platform of Y-axis (4), Y-axis guide rail (5), Y-axis sliding block (6), Y-axis cross sliding driving device
(7), X-axis guide rail (8), X-axis slide block (9), several electromagnetic type clamping jaws (10) and at least one X-axis cross sliding driving device (11),
The bottom of the traversing platform of Y-axis (4) is connected by Y-axis sliding block (6) with Y-axis guide rail (5) sliding being installed at the top of pedestal (1)
It connects, the first substrate slideway (2) is installed in the top of pedestal (1), and it is traversing flat that the second substrate slideway (3) is installed in Y-axis
The side of platform (4), the first substrate slideway (2) and the second substrate slideway (3) are arranged along the x axis and parallel to each other, the Y
Axis cross sliding driving device (7) and the traversing platform of Y-axis (4) are sequentially connected, and it is horizontal along the y axis to be able to drive the traversing platform of Y-axis (4)
To movement, the bottom of the electromagnetic type clamping jaw (10) passes through X-axis slide block (9) and the X-axis being installed at the top of the traversing platform of Y-axis (4)
Guide rail (8) is slidably connected, and each X-axis cross sliding driving device (11) is driven with corresponding electromagnetic type clamping jaw (10) respectively to be connected
It connects, and is able to drive independent transverse shifting or the traversing drive of the X-axis along the x axis of corresponding electromagnetic type clamping jaw (10)
Dynamic device (11) are connect with all electromagnetic type clamping jaw (10) Synchronous Transmissions, and are able to drive the synchronous edge of all electromagnetic type clamping jaws (10)
X-direction transverse shifting, the second substrate slideway (3) pass through the material folding position of all electromagnetic type clamping jaws (10).
2. the high speed and super precision feeding mechanism of semiconductor thin-sheet material according to claim 1, it is characterised in that: the Y-axis
Cross sliding driving device (7) includes y-axis motor (71), and the output shaft of the y-axis motor (71) passes through Y-axis screw rod (72) and is installed in
Y-axis feed screw nut's seat (73) transmission connection of the traversing platform of Y-axis (4) bottom.
3. the high speed and super precision feeding mechanism of semiconductor thin-sheet material according to claim 1, it is characterised in that: the X-axis
Cross sliding driving device (11) includes X-axis motor (111), and the output shaft of the X-axis motor (111) passes through X-axis screw rod (112) and sets
There is electromagnetic type clamping jaw (10) transmission connection of threaded hole (109) or X-axis feed screw nut's seat.
4. the high speed and super precision feeding mechanism of semiconductor thin-sheet material according to claim 1, it is characterised in that: the electromagnetism
Formula clamping jaw (10) includes clamping jaw pedestal (101), clamping jaw clamping plate (102), stop screw (103), electromagnet (104) and spring
(105), the electromagnet (104) is installed in top one end of clamping jaw pedestal (101), and one end of the clamping jaw clamping plate (102) is logical
It crosses stop screw (103) to be connected with clamping jaw pedestal (101), the clamping jaw clamping plate (102) is located at the top of electromagnet (104) simultaneously
It can be moved up and down relative to clamping jaw pedestal (101), the spring (105) is located at clamping jaw pedestal (101) and clamping jaw clamping plate (102)
Between, material folding one end of the clamping jaw pedestal (101) is equipped with base pinch material head (106), the material folding one of the clamping jaw clamping plate (102)
End is equipped with clamping plate material folding head (107).
5. the high speed and super precision feeding mechanism of semiconductor thin-sheet material according to claim 4, it is characterised in that: the clamping jaw
Material folding one end of pedestal (101) is equipped with the slideway loose slot (108) passed through for the second substrate slideway (3), the slideway loose slot
(108) it is located at the inside of base pinch material head (106).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821599419.3U CN208843297U (en) | 2018-09-28 | 2018-09-28 | A kind of high speed and super precision feeding mechanism of semiconductor thin-sheet material |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821599419.3U CN208843297U (en) | 2018-09-28 | 2018-09-28 | A kind of high speed and super precision feeding mechanism of semiconductor thin-sheet material |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110349746A (en) * | 2019-08-01 | 2019-10-18 | 浙江田中精机股份有限公司 | A kind of right angle reclaimer system |
| CN110349746B (en) * | 2019-08-01 | 2024-05-31 | 浙江田中精机股份有限公司 | Right-angle material taking system |
-
2018
- 2018-09-28 CN CN201821599419.3U patent/CN208843297U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110349746A (en) * | 2019-08-01 | 2019-10-18 | 浙江田中精机股份有限公司 | A kind of right angle reclaimer system |
| CN110349746B (en) * | 2019-08-01 | 2024-05-31 | 浙江田中精机股份有限公司 | Right-angle material taking system |
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