CN208803114U - A kind of gas-heating apparatus of combustion gas annealing furnace - Google Patents
A kind of gas-heating apparatus of combustion gas annealing furnace Download PDFInfo
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- CN208803114U CN208803114U CN201821283416.9U CN201821283416U CN208803114U CN 208803114 U CN208803114 U CN 208803114U CN 201821283416 U CN201821283416 U CN 201821283416U CN 208803114 U CN208803114 U CN 208803114U
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- gas
- annealing furnace
- heating layer
- heating apparatus
- heating
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Abstract
The utility model discloses a kind of gas-heating apparatus of combustion gas annealing furnace, including gas chamber, heating layer, pressurize mouth, oxygen cylinder and fuel gas bottle, heating layer is arranged outside gas chamber, offgas duct is provided with above heating layer right end, offgas duct links together with annealing furnace exhaust pipe, heating layer is internally provided with reciprocal pipeline, reciprocal pipeline is wrapped in outside gas chamber, gas chamber right end is provided with fan, gas chamber left end is provided with pressurization mouth, pressurization mouth is internally provided with heater, pressurization mouth left end is provided with spray head, temperature monitor is provided with below spray head, flue is connected with below heater, flue lower end is connected with oxygen cylinder and fuel gas bottle, flue and oxygen cylinder and fuel gas bottle junction are respectively arranged with gas flow valve, this gas-heating apparatus structure is simple, it is easy to operate, using safe, the temperature of internal gas can be automatically controlled, By reducing the waste of fuel using the heat in tail gas, play the role of it is energy-saving and environment-friendly, especially using applying in the gas heating work of combustion gas annealing furnace.
Description
Technical field
The utility model relates to combustion gas annealing furnace technical fields, heat dress more particularly, to a kind of gas of combustion gas annealing furnace
It sets.
Background technique
Annealing is a kind of metal heating processing technology, refers to for metal being heated slowly to certain temperature, keeps enough time,
Then cooling with Reasonable Speed.Purpose is to reduce hardness, improves machinability；Residual stress is eliminated, stable dimensions reduce and become
Shape and crackle tendency；Crystal grain is refined, tissue is adjusted, eliminates tissue defects.Exactly, annealing is the heat treatment of a kind of pair of material
Technique, including metal material, nonmetallic materials.And also there are the similarities and differences with conventional metals annealing for the annealing purpose of new material.
Annealing furnace is a kind of technique used in semiconductor devices manufacture comprising heats multiple semiconductor wafers with shadow
Ring its electrical property.Heat treatment is designed for different effects.Chip can be heated to activate dopant, film is converted
It is converted into wafer substrates interface at film or by film, makes the film of compact deposits, changes the state of the film of growth, repairs note
The damage entered moves dopant or dopant is transferred to another film from a film or enters wafer substrate from film.
Annealing furnace is desirably integrated into other stove processing steps, such as is aoxidized, or can oneself processing.Annealing furnace be by exclusively for
Heating semiconductor wafer and what the equipment that designs was completed.Annealing furnace is energy-saving periodical furnace, super energy-saving structure.
The exhaust piping and protection feed channel of conventional anneal furnace are two independent pipelines.The exhaust gas temperature that annealing furnace generates
It up to several hundred degrees Celsius, is not effectively utilized.And it will cause in-furnace temperature in the protective atmosphere injection furnace of relative low temperature
It reduces, to keep the condition of high temperature in furnace, can burn more combustion gas, and gas consumption is caused to increase.
Summary of the invention
The technical problems to be solved in the utility model is to overcome the deficiencies of existing technologies, and provides a kind of gas of combustion gas annealing furnace
Body heating device.
To achieve the above object, the utility model provides the following technical solutions: a kind of gas heating dress of combustion gas annealing furnace
It sets, including gas chamber, heating layer, pressurization mouth, oxygen cylinder and fuel gas bottle, the heating layer are arranged outside the gas chamber, it is described to add
It is provided with offgas duct above thermosphere right end, the offgas duct links together with annealing furnace exhaust pipe, sets inside the heating layer
It is equipped with reciprocal pipeline, the reciprocal pipeline is wrapped in outside the gas chamber, and the gas chamber right end is provided with fan, and the gas chamber is left
End is provided with the pressurization mouth, and the pressurization mouth is internally provided with heater, and the pressurization mouth left end is provided with spray head, the spray
Head lower section is provided with temperature monitor, is connected with flue below the heater, the flue lower end is connected with the oxygen
Gas cylinder and the fuel gas bottle, the flue and the oxygen cylinder and the fuel gas bottle junction are respectively arranged with gas flow
Valve.
As a kind of optimal technical scheme of the utility model, there are two the heater settings, is separately positioned on described
Two sides above and below inside pressurization mouth.
As a kind of optimal technical scheme of the utility model, the gas flow valve electrically connects with the temperature monitor
It connects.
As a kind of optimal technical scheme of the utility model, heating layer lateral wall inboard is provided with heat preservation coating.
As a kind of optimal technical scheme of the utility model, the temperature monitor uses infrared temperature detection device collection
At production.
As a kind of optimal technical scheme of the utility model, solenoid valve is provided on the left of the spray head.
Compared with prior art, the utility model has the beneficial effects that this gas-heating apparatus structure is simple, operation side
Just, use is safe, can automatically control the temperature of internal gas, by reducing the waste of fuel using the heat in tail gas,
Play the role of energy-saving and environment-friendly, greatly saved production cost, improved product quality, special use is applied in combustion gas annealing
In the gas heating work of furnace.
Detailed description of the invention
Attached drawing is used to provide a further understanding of the present invention, and constitutes part of specification, practical with this
Novel embodiment is used to explain the utility model together, does not constitute limitations of the present invention.In the accompanying drawings:
Fig. 1 is a kind of gas-heating apparatus structure chart of combustion gas annealing furnace described in the utility model.
In figure: 1, pressurize mouth；2, heater；3, spray head；4, temperature monitor；5, flue；6, gas flow valve；7, wind
Fan；8, offgas duct；9, reciprocal pipeline；10, heating layer；11, gas chamber；12, oxygen cylinder；13, fuel gas bottle.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment, based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
Referring to Fig. 1, the utility model provides a kind of technical solution: a kind of gas-heating apparatus of combustion gas annealing furnace, packet
It includes gas chamber 11, heating layer 10, pressurization mouth 1, oxygen cylinder 12 and fuel gas bottle 13, heating layer 10 to be arranged outside gas chamber 11, heating layer
It is provided with offgas duct 8 above 10 right ends, offgas duct 8 links together with annealing furnace exhaust pipe, and heating layer 10 is internally provided with past
Multiple pipeline 9, reciprocal pipeline 9 are wrapped in outside gas chamber 11, and 11 right end of gas chamber is provided with fan 7, and 11 left end of gas chamber is provided with pressurization
Mouth 1, pressurization mouth 1 are internally provided with heater 2, and pressurization 1 left end of mouth is provided with spray head 1, is provided with temperature monitor below spray head 3
4, flue 5 is connected with below heater 2, and 5 lower end of flue is connected with oxygen cylinder 12 and fuel gas bottle 13, flue 5 and oxygen
Bottle 12 and 13 junction of fuel gas bottle are respectively arranged with gas flow valve 6, and there are two the settings of heater 2, are separately positioned on pressurization mouth 1
Internal two sides up and down, gas flow valve 6 and temperature monitor 4 are electrically connected, and 10 lateral wall inboard of heating layer is provided with heat preservation plating
Layer, temperature monitor 4 make using infrared temperature detection device is integrated, are provided with solenoid valve on the left of spray head 3.
Concrete principle: in use, when starting to work, the air inside gas chamber 11 is added using fuel gas buring first
The gas of preference temperature is blown into combustion gas annealing furnace by fan 7 and is carried out after 4 measuring temperature of temperature monitor is suitable for by heat
Annealing work, the tail gas generated after work of annealing carries out a period of time is discharged from the exhaust pipe of annealing furnace, by discharge
Tail gas accesses heating layer 10 from offgas duct 8, and the reciprocal pipeline 9 in heating layer 10 is wrapped on gas chamber 11, can rationally utilize gas
Heat in body, when temperature monitor 4, which detects medium temperature of coming out of the stove, spends high, control gas flow valve 6 reduces the use of gas, from
And the temperature in gas chamber is reduced, heat is applied in the heating to 11 internal gas of gas chamber, the utilization rate of combustion gas can be reduced,
Reduce the cost input of fuel.
This gas-heating apparatus structure is simple, easy to operate, and use is safe, can automatically control the temperature of internal gas,
By reducing the waste of fuel using the heat in tail gas, play the role of energy-saving and environment-friendly, greatly saved production cost,
Product quality is improved, especially uses and applies in the gas heating work of combustion gas annealing furnace.
Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention, it is not limited to this
Utility model, although the utility model is described in detail with reference to the foregoing embodiments, for those skilled in the art
For, it is still possible to modify the technical solutions described in the foregoing embodiments, or to part of technical characteristic
It is equivalently replaced, within the spirit and principle of the utility model, any modification, equivalent replacement, improvement and so on,
It should be included within the scope of protection of this utility model.
Claims (6)
1. a kind of gas-heating apparatus of combustion gas annealing furnace, including gas chamber (11), heating layer (10), pressurization mouth (1), oxygen cylinder
(12) and fuel gas bottle (13), which is characterized in that heating layer (10) setting is external in the gas chamber (11), the heating layer
(10) it is provided with offgas duct (8) above right end, the offgas duct (8) links together with annealing furnace exhaust pipe, the heating layer
(10) it is internally provided with reciprocal pipeline (9), the reciprocal pipeline (9) is wrapped in the gas chamber (11) outside, the gas chamber (11)
Right end is provided with fan (7), and gas chamber (11) left end is provided with the pressurization mouth (1), and the pressurization mouth (1) is internally provided with
Heater (2), pressurization mouth (1) left end are provided with spray head (3), are provided with temperature monitor (4) below the spray head (3),
It is connected with flue (5) below the heater (2), flue (5) lower end is connected with the oxygen cylinder (12) and described
Fuel gas bottle (13), the flue (5) and the oxygen cylinder (12) and the fuel gas bottle (13) junction are respectively arranged with gas
Flow valve (6).
2. a kind of gas-heating apparatus of combustion gas annealing furnace according to claim 1, which is characterized in that the heater
(2) there are two setting, the internal two sides up and down of the pressurization mouth (1) are separately positioned on.
3. a kind of gas-heating apparatus of combustion gas annealing furnace according to claim 1, which is characterized in that the gas flow
Valve (6) and the temperature monitor (4) are electrically connected.
4. a kind of gas-heating apparatus of combustion gas annealing furnace according to claim 1, which is characterized in that the heating layer
(10) lateral wall inboard is provided with heat preservation coating.
5. a kind of gas-heating apparatus of combustion gas annealing furnace according to claim 1, which is characterized in that the temperature monitoring
Instrument (4) is using the integrated production of infrared temperature detection device.
6. a kind of gas-heating apparatus of combustion gas annealing furnace according to claim 1, which is characterized in that the spray head (3)
Left side is provided with solenoid valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821283416.9U CN208803114U (en) | 2018-08-10 | 2018-08-10 | A kind of gas-heating apparatus of combustion gas annealing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821283416.9U CN208803114U (en) | 2018-08-10 | 2018-08-10 | A kind of gas-heating apparatus of combustion gas annealing furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208803114U true CN208803114U (en) | 2019-04-30 |
Family
ID=66229176
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821283416.9U Expired - Fee Related CN208803114U (en) | 2018-08-10 | 2018-08-10 | A kind of gas-heating apparatus of combustion gas annealing furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208803114U (en) |
-
2018
- 2018-08-10 CN CN201821283416.9U patent/CN208803114U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190430 Termination date: 20210810 |