CN208803119U - A kind of combustion gas annealing furnace gas heating device - Google Patents
A kind of combustion gas annealing furnace gas heating device Download PDFInfo
- Publication number
- CN208803119U CN208803119U CN201821283397.XU CN201821283397U CN208803119U CN 208803119 U CN208803119 U CN 208803119U CN 201821283397 U CN201821283397 U CN 201821283397U CN 208803119 U CN208803119 U CN 208803119U
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- China
- Prior art keywords
- spray head
- gas
- feeding tube
- combustion gas
- fuel gas
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Abstract
The utility model discloses a kind of combustion gas annealing furnace gas heating devices, including main body and spray head, spray head is arranged in main body left end, spray head is provided with retainer plate, retainer plate is extend into main body, locating slot is provided on retainer plate, mixed gas spout is provided on spray head, main body is divided into water pipe, fuel gas conduit and oxygen feeding tube, combustion gas tube end is provided with combustion gas flange, oxygen feeding tube end is provided with into oxygen flange, oxygen feeding tube setting is in fuel gas conduit periphery, water pipe setting is in oxygen feeding tube periphery, water pipe is divided into water inlet pipe and outlet pipe, outlet pipe setting is in water inlet pipe periphery, fuel gas conduit is provided with air-dispersing room close to spray head one end, air-dispersing is provided with fuel gas hole on room, this heating plant structure is simple, gas mixing is uniform, gas burning is very abundant, combustion gas resource can be saved, improve annealing efficiency, reduce entreprise cost, cooling capacity is strong simultaneously, it protects The safety of annealing operation is demonstrate,proved.
Description
Technical field
The utility model relates to combustion gas annealing furnace technical fields, fill more particularly, to a kind of combustion gas annealing furnace gas heating
It sets.
Background technique
Annealing is a kind of metal heating processing technology, refers to for metal being heated slowly to certain temperature, keeps enough time,
Then cooling with Reasonable Speed.Purpose is to reduce hardness, improves machinability；Residual stress is eliminated, stable dimensions reduce and become
Shape and crackle tendency；Crystal grain is refined, tissue is adjusted, eliminates tissue defects.Exactly, annealing is the heat treatment of a kind of pair of material
Technique, including metal material, nonmetallic materials.And also there are the similarities and differences with conventional metals annealing for the annealing purpose of new material.
Annealing furnace is a kind of technique used in semiconductor devices manufacture comprising heats multiple semiconductor wafers with shadow
Ring its electrical property.Heat treatment is designed for different effects.Chip can be heated to activate dopant, film is converted
It is converted into wafer substrates interface at film or by film, makes the film of compact deposits, changes the state of the film of growth, repairs note
The damage entered moves dopant or dopant is transferred to another film from a film or enters wafer substrate from film.
Annealing furnace is desirably integrated into other stove processing steps, such as is aoxidized, or can oneself processing.Annealing furnace be by exclusively for
Heating semiconductor wafer and what the equipment that designs was completed.Annealing furnace is energy-saving periodical furnace, super energy-saving structure.
For general annealing furnace in the process of running due to offering question, temperature-controlled precision is low, and working efficiency is low, since sealing is set
That sets is bad, so that fuel consumption is high, and heat-resisting effect is poor, brings some potential safety problems to work.
Summary of the invention
The utility model overcomes the deficiencies of existing technologies, and provides a kind of combustion gas annealing furnace gas heating device.
To achieve the above object, the utility model provides the following technical solutions: a kind of combustion gas annealing furnace gas heating device,
Including main body and spray head, the spray head is arranged in the main body left end, and the spray head is provided with retainer plate, and the retainer plate protrudes into
Into the main body, it is provided with locating slot on the retainer plate, mixed gas spout, the main body point are provided on the spray head
For water pipe, fuel gas conduit and oxygen feeding tube, the combustion gas tube end is provided with combustion gas flange, and the oxygen feeding tube end is provided with into oxygen method
Orchid, oxygen feeding tube setting in the fuel gas conduit periphery, the water pipe setting in the oxygen feeding tube periphery, the water pipe be divided into
Water pipe and outlet pipe, the water inlet tube end are provided with water-in flange, and the water outlet tube end is provided with water-output flange, it is described go out
In water inlet pipe periphery, the fuel gas conduit is provided with air-dispersing room close to described spray head one end for water pipe setting, on the air-dispersing room
It is provided with fuel gas hole, the oxygen feeding tube and the fuel gas conduit right end are sealed set.
As a kind of optimal technical scheme of the utility model, the mixed gas spout is back taper setting, and taper exists
Between 1:10-1:20.
As a kind of optimal technical scheme of the utility model, the water pipe is not communicated with the oxygen feeding tube, the water inlet
Pipe is communicated with the outlet pipe close to the nozzle position.
As a kind of optimal technical scheme of the utility model, the air-dispersing room is spherical setting, is had a diameter larger than described
Combustion gas pipe diameter.
As a kind of optimal technical scheme of the utility model, the combustion gas hole number is 6-8.
As a kind of optimal technical scheme of the utility model, the spray head is connect with the subject activity.
Compared with prior art, the utility model has the beneficial effects that this gas heating device structure is simple, user
Just, novel in design, construction is ingenious, combustion gas is just sufficiently combined with oxygen before spraying from main body, then by adjusting fuel gas conduit
Ratio of gas mixture is controlled with the radius of oxygen feeding tube, so that the ratio of combustion gas and oxygen is preferably controlled in mixed gas
System, further improves the combustion rate of combustion gas, efficiency of combustion is made to reach maximization, can carry out to the temperature of annealing furnace abundant
Control, reduce annealing cost to the greatest extent, be greatly saved process time, alleviate the labor intensity of workpeople,
Meanwhile dismountable sprinkler design is but also the maintenance and replacement of this heating plant are more convenient, reduce certain maintenance at
Sheet and equipment cost, while cooling capacity is strong, improves the heat resistance of device, ensure that the safety of annealing operation.
Detailed description of the invention
Attached drawing is used to provide a further understanding of the present invention, and constitutes part of specification, practical with this
Novel embodiment is used to explain the utility model together, does not constitute limitations of the present invention.In the accompanying drawings:
Fig. 1 is a kind of combustion gas annealing furnace gas heating device structure chart described in the utility model；
Fig. 2 is spray head part described in the utility model detail view.
In figure: 1, locating slot；2, water-in flange；3, oxygen feeding tube；4, combustion gas flange；5, main body；6, fuel gas hole；7, go out water law
It is blue；8, retainer plate；9, mixed gas spout；10, spray head；11, into oxygen flange；12, air-dispersing room；13, fuel gas conduit；14, water inlet pipe；
15, water pipe；16, outlet pipe.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment, based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
The utility model provides a kind of technical solution referring to FIG. 1-2: a kind of combustion gas annealing furnace gas heating device, packet
Main body 5 and spray head 10 are included, spray head 10 is arranged in 5 left end of main body, and spray head 10 is provided with retainer plate 8, and retainer plate 8 extend into main body 5
It is interior, it is provided with locating slot 1 on retainer plate 8, mixed gas spout 9 is provided on spray head 10, main body 5 is divided for water pipe 15, fuel gas conduit
13 and oxygen feeding tube 3,13 end of fuel gas conduit be provided with combustion gas flange 4,3 end of oxygen feeding tube is provided with into oxygen flange 11, and oxygen feeding tube 3 is set
It sets in 13 periphery of fuel gas conduit, the setting of water pipe 15 divides in 3 periphery of oxygen feeding tube, water pipe 15 for water inlet pipe 14 and outlet pipe 16, water inlet pipe
14 ends are provided with water-in flange 2, and 16 end of outlet pipe is provided with water-output flange 7, and the setting of outlet pipe 16 is peripheral in water inlet pipe 14,
Fuel gas conduit 13 is provided with air-dispersing room 12 close to 10 one end of spray head, and fuel gas hole 6, oxygen feeding tube 3 and fuel gas conduit are provided on air-dispersing room 12
13 right ends are sealed set, and mixed gas spout 9 is that back taper is arranged, and taper is between 1:10-1:20, and water pipe 15 is not and into oxygen
Pipe 3 communicates, and water inlet pipe 14 is communicated with outlet pipe 16 close to 10 position of spray head, and air-dispersing room 12 is spherical setting, has a diameter larger than
13 diameter of fuel gas conduit, 6 quantity of fuel gas hole are 6-8, and spray head 10 is flexibly connected with main body 5.
Concrete principle: in use, this gas heating device to be mounted on to the corresponding position of annealing furnace, fuel gas conduit 13 is passed through
Combustion gas flange 4 connects on gas supply system, by oxygen feeding tube 3 by turning in oxygen supply arrangement into oxygen flange 11, intakes
Pipe 14 and outlet pipe 16 connect in corresponding cooling system also by water-in flange 2 and water-output flange 7, by the fixation on spray head 10
Circle 8 is extend into inside main body 5, by locating slot 1 that spray head 10 is fixed, and when starting to work, the alignment of mixed gas spout 9 is moved back
Inside stove, due to the ingehious design of fuel gas hole 6 on air-dispersing room 12, combustion gas before being ejected spray head 10, just with setting
Oxygen in the oxygen feeding tube 3 of periphery is sufficiently mixed, the deal of oxygen needed for the main component burning further according to combustion gas, design
The radius of corresponding fuel gas conduit 13 and oxygen feeding tube 3, so that the ratio of combustion gas and oxygen reaches most preferably, to maximumlly be fired
Efficiency is burnt, the energy is saved, reduces cost.
This gas heating device structure is simple, easy to use, novel in design, and construction is ingenious, and combustion gas is sprayed from main body
It is just sufficiently combined with oxygen before, then controls ratio of gas mixture by adjusting the radius of fuel gas conduit and oxygen feeding tube, so that mixed
It closes the ratio of combustion gas and oxygen in gas to be controlled better, further improves the combustion rate of combustion gas, make efficiency of combustion
Reach maximization, can the temperature to annealing furnace adequately controlled, reduce annealing cost to the greatest extent, greatly save
Saved process time, alleviated the labor intensity of workpeople, meanwhile, dismountable sprinkler design but also this heating plant dimension
It is more convenient to repair and replace, and reduces certain maintenance cost and equipment cost, while cooling capacity is strong, improves the heat-resisting of device
Property, it ensure that the safety of annealing operation.
Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention, it is not limited to this
Utility model, although the utility model is described in detail with reference to the foregoing embodiments, for those skilled in the art
For, it is still possible to modify the technical solutions described in the foregoing embodiments, or to part of technical characteristic
It is equivalently replaced, within the spirit and principle of the utility model, any modification, equivalent replacement, improvement and so on,
It should be included within the scope of protection of this utility model.
Claims (6)
1. a kind of combustion gas annealing furnace gas heating device, including main body (5) and spray head (10), which is characterized in that the spray head
(10) it is arranged in the main body (5) left end, the spray head (10) is provided with retainer plate (8), and the retainer plate (8) extend into described
In main body (5), it is provided with locating slot (1) on the retainer plate (8), is provided with mixed gas spout (9) on the spray head (10),
The main body (5) is divided into water pipe (15), fuel gas conduit (13) and oxygen feeding tube (3), and fuel gas conduit (13) end is provided with combustion gas method
Blue (4), oxygen feeding tube (3) end are provided with into oxygen flange (11), oxygen feeding tube (3) setting the fuel gas conduit (13) outside
It encloses, in the oxygen feeding tube (3) periphery, the water pipe (15) is divided into water inlet pipe (14) and outlet pipe for water pipe (15) setting
(16), water inlet pipe (14) end is provided with water-in flange (2), and outlet pipe (16) end is provided with water-output flange (7),
In the water inlet pipe (14) periphery, the fuel gas conduit (13) is arranged close to the spray head (10) one end for outlet pipe (16) setting
Have air-dispersing room (12), be provided with fuel gas hole (6) on the air-dispersing room (12), the oxygen feeding tube (3) and the fuel gas conduit (13) are right
End is sealed set.
2. a kind of combustion gas annealing furnace gas heating device according to claim 1, which is characterized in that the mixed gas spray
Mouth (9) is back taper setting, and taper is between 1:10-1:20.
3. a kind of combustion gas annealing furnace gas heating device according to claim 1, which is characterized in that the water pipe (15) is no
It is communicated with the oxygen feeding tube (3), the water inlet pipe (14) communicates with the outlet pipe (16) close to the spray head (10) position.
4. a kind of combustion gas annealing furnace gas heating device according to claim 1, which is characterized in that the air-dispersing room (12)
For spherical shape setting, the fuel gas conduit (13) diameter is had a diameter larger than.
5. a kind of combustion gas annealing furnace gas heating device according to claim 1, which is characterized in that the fuel gas hole (6)
Quantity is 6-8.
6. a kind of combustion gas annealing furnace gas heating device according to claim 1, which is characterized in that the spray head (10) with
The main body (5) is flexibly connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821283397.XU CN208803119U (en) | 2018-08-10 | 2018-08-10 | A kind of combustion gas annealing furnace gas heating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821283397.XU CN208803119U (en) | 2018-08-10 | 2018-08-10 | A kind of combustion gas annealing furnace gas heating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208803119U true CN208803119U (en) | 2019-04-30 |
Family
ID=66229115
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821283397.XU Expired - Fee Related CN208803119U (en) | 2018-08-10 | 2018-08-10 | A kind of combustion gas annealing furnace gas heating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208803119U (en) |
-
2018
- 2018-08-10 CN CN201821283397.XU patent/CN208803119U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190430 Termination date: 20210810 |