CN208758185U - A kind of graphite boat cleaning toter - Google Patents
A kind of graphite boat cleaning toter Download PDFInfo
- Publication number
- CN208758185U CN208758185U CN201821223118.0U CN201821223118U CN208758185U CN 208758185 U CN208758185 U CN 208758185U CN 201821223118 U CN201821223118 U CN 201821223118U CN 208758185 U CN208758185 U CN 208758185U
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- CN
- China
- Prior art keywords
- rinse bath
- graphite boat
- pull rod
- flat car
- duplex pull
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Abstract
The utility model discloses a kind of graphite boats to clean toter comprising: rinse bath, the card slot equipped with the rinse bath operating side inner wall；It further include the flat car positioned at the bottom of rinse bath, the head of the hinged duplex pull rod with the flat car one end, the duplex pull rod is equipped with hook, and when the duplex pull rod is laid flat, the hook engages with the card slot.The utility model is used as carrier in rinse bath, can once clean more graphite boat, cleaning efficiency is much improved.Bottom of rinse bath is equipped with guide rail, in addition the height of flat car, so that it is more convenient manually to bend over to pick and place graphite boat, reduces manipulation strength, uses cart in addition, graphite boat and rinse bath are not likely to produce friction and damage, and yields is much improved.It is artificial only to be operated in rinse bath one end, operating space is reduced, the lesser workshop in operating space is applicable in.
Description
Technical field
The utility model relates to the slot type cleaning equipments of solar silicon wafers and black silicon etching device more particularly to one kind to be used for
Silicon chip film-coated load-bearing part-graphite boat cleans toter.
Background technique
In the silicon nitride anti-reflecting film depositing operation of silicon chip of solar cell, generally used using graphite boat or graphite frame
Make the carrier of silicon wafer.But in technical process, the graphite boat as carrier can also be deposited to silicon nitride film.The film arrives
After certain thickness, it is necessary to do the cleaning treatment washed after first pickling to graphite boat.The cleaning side that industry generallys use at present
Method is first to be cleaned using HF/HCL mixed liquor wet method groove type, i.e., it is small that graphite boat is immersed in in the rinse bath for have HF/HCL 4 ~ 8
When, then the medical fluid in the snap shot trough, it is then rinsed with clear water, final high temperature baking oven, which dries 4 ~ 8 hours, dries.But it is existing clear
The mode of washing has the disadvantage in that 1, due to the limitation of operating space, can only put every time a graphite boat one end of rinse bath into
Row cleaning, the inner space of the rinse bath far from operating post cannot make full use of, and cleaning efficiency is lower；And need every time by
Graphite boat is placed in bottom of rinse bath, manually pick and place it is relatively difficult so that graphite boat and rinse bath are also easy to produce friction and damage.
Therefore, how to overcome existing graphite boat to carry out the defect that cleaning efficiency is low, yields is low and manipulation strength is big is industry
Boundary's urgent problem to be solved.
Utility model content
The utility model mentions to solve the problems, such as that existing graphite boat cleaning efficiency is low, yields is low and manipulation strength is big
A kind of this graphite boat that cleaning efficiency is high, yields height is low with manipulation strength cleans toter out.
The utility model proposes a kind of graphite boat clean toter comprising: rinse bath, be equipped with the rinse bath operate
Hold the card slot of inner wall；It further include the flat car positioned at the bottom of rinse bath, the hinged duplex pull rod with the flat car one end should
The head of duplex pull rod is equipped with hook, and when the duplex pull rod is laid flat, the hook engages with the card slot.
Preferably, the bottom of rinse bath is equipped with guide rail, and the wheel of the flat car rolls on the guideway.
Preferably, the sheet width of the flat car is adapted to the bottom of rinse bath width, and the plate of flat car is long
Length and bottom of rinse bath length adaptation when degree is laid flat plus the duplex pull rod.
The utility model by flat car for first drawing to rinse bath operating side, graphite boat being piled flat when cleaning graphite boat
Then flat car is pushed to a distant place for rinse bath, and duplex pull rod is laid flat buckle and is fixed by wooden handcart, then place graphite in the duplex pull rod
Boat.Start pickling and cleaning, so can once clean more graphite boat, cleaning efficiency is much improved.Due to rinse bath bottom
Portion is equipped with guide rail, in addition the height of flat car reduces manipulation strength, adopt so that manually pick-and-place graphite boat is more convenient in addition
With cart, graphite boat and rinse bath are not likely to produce friction and damage, and yields is much improved.Artificial need to be in rinse bath one end
Operation, reduces operating space, is applicable in the lesser workshop in operating space.
Detailed description of the invention
Fig. 1 is the schematic diagram of the utility model preferred embodiment.
Specific embodiment
The utility model is described further with reference to the accompanying drawings and examples.
As shown in Figure 1, being the utility model preferred embodiment, the graphite boat cleans toter comprising: cleaning
Slot 1, the card slot 2 equipped with the 1 operating side inner wall of rinse bath；It further include the flat car 3 positioned at 1 bottom of rinse bath, with this
The head of the hinged duplex pull rod 4 in flat car one end, the duplex pull rod is equipped with hook 5, when the duplex pull rod is laid flat, hook 5 and cleaning
The card slot 2 of 1 inner wall of slot engages.In the present embodiment, 1 bottom of rinse bath is equipped with guide rail 6, and the wheel 7 of flat car 3 can be led at this
It is rolled on rail 6.The sheet width of flat car 3 is adapted to the width of 1 bottom of rinse bath as far as possible, and the slab length of flat car 3 adds
Length and bottom of rinse bath length adaptation when upper duplex pull rod 4 is laid flat.
Referring to FIG. 1, the utility model is used as the slidable carrier of graphite boat 8 in cleaning 1, when cleaning graphite boat 8, first
Flat car 3 is drawn and arrives 1 operating side of rinse bath, graphite boat 8 is piled into flat car 3, then flat car is pushed to a distant place for rinse bath,
And duplex pull rod 4 is laid flat buckle and is fixed, positioning action is played, prevents carrier from continuing to move, then places graphite boat in the duplex pull rod,
Start pickling and cleaning.More graphite boat can be once so cleaned, cleaning efficiency is much improved.Since bottom of rinse bath is set
There is guide rail 6, in addition the height of flat car, so that it is more convenient manually to bend over to pick and place graphite boat 8, reduces manipulation strength, in addition
Using cart, graphite boat and rinse bath are not likely to produce friction and damage, and yields is much improved.Artificial need to be in rinse bath one
End operation, reduces operating space, is applicable in the lesser workshop in operating space.
The utility model carrier can be trolley, and carrier is the material that friction is small, and graphite boat and carrier is avoided to occur
It rubs and damages.Carrier and rinse bath by way of idler wheel and guide rail mechanism cooperation, can also by other means, such as
The side wall of rinse bath opens up sliding groove, and in carrier two sides, setting slide key slide also possible, preferably idler wheel and guide rail
Sliding friction is become rolling friction by the mode of mechanism, and frictional force is smaller, and operation controllability is stronger.Carrier is connect with support rod
One end is equipped with shackle, and support rod is equipped with hook, and hook, which is hooked, can be realized promotion carrier in shackle, certainly by other means
It is also possible.The present invention is unrestricted to this, as long as carrier can be pushed.
Embodiment described above is primarily to illustrate the creating conception of the utility model, it is noted that for this
For the those of ordinary skill in field, without departing from the concept of the premise utility, several deformations can also be made and changed
Into these are all within the protection scope of the present invention.
Claims (3)
1. a kind of graphite boat cleans toter, which is characterized in that including rinse bath, equipped with the rinse bath operating side inner wall
Card slot；It further include the flat car positioned at the bottom of rinse bath, the hinged duplex pull rod with the flat car one end, the head of the duplex pull rod
Portion is equipped with hook, and when the duplex pull rod is laid flat, the hook engages with the card slot.
2. graphite boat as described in claim 1 cleans toter, which is characterized in that the bottom of rinse bath is equipped with and leads
The wheel of rail, the flat car rolls on the guideway.
3. graphite boat as described in claim 1 cleans toter, which is characterized in that the sheet width of the flat car and institute
Bottom of rinse bath width adaptation is stated, and the slab length of flat car adds length and bottom of rinse bath when the duplex pull rod is laid flat
Length adaptation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821223118.0U CN208758185U (en) | 2018-07-31 | 2018-07-31 | A kind of graphite boat cleaning toter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821223118.0U CN208758185U (en) | 2018-07-31 | 2018-07-31 | A kind of graphite boat cleaning toter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208758185U true CN208758185U (en) | 2019-04-19 |
Family
ID=66130955
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821223118.0U Active CN208758185U (en) | 2018-07-31 | 2018-07-31 | A kind of graphite boat cleaning toter |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208758185U (en) |
-
2018
- 2018-07-31 CN CN201821223118.0U patent/CN208758185U/en active Active
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