CN208748188U - 磁控溅射装置 - Google Patents
磁控溅射装置 Download PDFInfo
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- CN208748188U CN208748188U CN201821176207.4U CN201821176207U CN208748188U CN 208748188 U CN208748188 U CN 208748188U CN 201821176207 U CN201821176207 U CN 201821176207U CN 208748188 U CN208748188 U CN 208748188U
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CN201821176207.4U CN208748188U (zh) | 2018-07-24 | 2018-07-24 | 磁控溅射装置 |
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WO2023090835A1 (ko) * | 2021-11-18 | 2023-05-25 | 한국핵융합에너지연구원 | 플라즈마 스퍼터링 장치 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2023090835A1 (ko) * | 2021-11-18 | 2023-05-25 | 한국핵융합에너지연구원 | 플라즈마 스퍼터링 장치 |
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GR01 | Patent grant | ||
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CP01 | Change in the name or title of a patent holder |
Address after: No. 2002, Konggang 4th Road, Shuangliu District, Chengdu, Sichuan 610200 Patentee after: CHENGDU DONGTENG FILM SOLAR Co.,Ltd. Address before: No. 2002, Konggang 4th Road, Shuangliu District, Chengdu, Sichuan 610200 Patentee before: HUAFENGYUAN (CHENGDU) NEW ENERGY TECHNOLOGY Co.,Ltd. |
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CP01 | Change in the name or title of a patent holder | ||
TR01 | Transfer of patent right |
Effective date of registration: 20210114 Address after: 101400 Yanqi Street, Yanqi Economic Development Zone, Huairou District, Beijing Patentee after: Beijing Huihong Technology Co.,Ltd. Address before: No. 2002, Konggang 4th Road, Shuangliu District, Chengdu, Sichuan 610200 Patentee before: CHENGDU DONGTENG FILM SOLAR Co.,Ltd. |
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TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20211027 Address after: No.31 Yanqi street, Yanqi Economic Development Zone, Huairou District, Beijing Patentee after: Dongjun new energy Co.,Ltd. Address before: 101400 Yanqi Street, Yanqi Economic Development Zone, Huairou District, Beijing Patentee before: Beijing Huihong Technology Co.,Ltd. |
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TR01 | Transfer of patent right |