CN208722857U - Mechanical grip manipulator - Google Patents
Mechanical grip manipulator Download PDFInfo
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- CN208722857U CN208722857U CN201821463598.8U CN201821463598U CN208722857U CN 208722857 U CN208722857 U CN 208722857U CN 201821463598 U CN201821463598 U CN 201821463598U CN 208722857 U CN208722857 U CN 208722857U
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- block
- shell
- fixed
- connecting shaft
- grip
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Abstract
The utility model provides a kind of mechanical grip manipulator, including shell, cylinder, connecting shaft, grip slipper, gripping block, fixing seat, the first guide clamping block and the second guide clamping block；The shell is spindle rotationally arranged in manipulator upper end；The cylinder is fixedly installed at the enclosure interior；The connecting shaft is telescopic to be arranged in the shell；The piston rod of the cylinder and the connection axis connection, the other end of the connecting shaft are fixed with the grip slipper, and the stretching motion of the piston rod of the cylinder drives the grip slipper mobile.The utility model structure is simple, and design is very ingenious, and clamping is convenient, when high speed carries chip, not will cause chip and slides；Chip is fixed on a robotic arm by way of mechanical grip, and be able to achieve during quickly detection wafer handling whether there is or not falling, prevents chip from falling damage.
Description
Technical field
The utility model relates to semi-conductor device technology field more particularly to a kind of mechanical grip manipulators.
Background technique
In the manufacturing process of semiconductor crystal wafer, in order to reduce the influence of each link manual handling, various equipment, Yi Jishe
It is standby to be required in such a way that chip automatically delivers between equipment, each unit between board and board and inside board
Between join chip, end effector is generally set on a robotic arm, existing end effector by the way of vacuum suction,
Structure is complicated, and difficulty of processing is big, and clamping is inconvenient, when high speed carries chip, chip is be easy to cause to slide fragment.
Utility model content
Technical problems to be solved
Problem to be solved in the utility model is to provide a kind of mechanical grip manipulator, to overcome in the prior art, structure
Complexity, difficulty of processing is big, and clamping is inconvenient, when high speed carries chip, chip is be easy to cause to slide the defect of fragment.
Technical solution
To solve the technical problem, the utility model provides a kind of mechanical grip manipulator, including shell, cylinder, company
Spindle, grip slipper, gripping block, fixing seat, the first guide clamping block and the second guide clamping block；The shell is rotatably arranged
It holds on a robotic arm；The cylinder is fixedly installed at the enclosure interior；The connecting shaft is telescopic to be arranged in the shell
In vivo；The piston rod of the cylinder and the connection axis connection, the other end of the connecting shaft is fixed with the grip slipper, described
The stretching motion of the piston rod of cylinder drives the grip slipper mobile；Two gripping blocks are separately positioned on the grip slipper
One end two sides, the gripping block are used for clamped wafer；Described fixing seat one end is fixed with the shell；First guide clamping
Block and the second guide clamping block are symmetrically arranged on the fixing seat；Clamped chip is arranged in first guide clamping
In cavity between block and the second guide clamping block；The fixing seat lower end surface is bonded with the grip slipper upper surface.
Preferably, the mechanical grip manipulator further includes that link block, linear bearing, the first fixed block and second are fixed
Block；The piston rod of the cylinder is connect with the connecting shaft by the link block, described link block one end and the cylinder
Piston rod is fixed, and the other end is fixed with the connecting shaft；The linear bearing and gasket are equipped in the front end of the shell
In internal cavity；First fixed block is fixedly mounted on the front end of the shell, and the linear bearing is fixed；Described
Two fixed blocks are fixedly mounted on the other end of the grip slipper；The connecting shaft is slidably connected with the linear bearing, the company
Spindle passes through the linear bearing and the first fixed block is fixed with second fixed block；First fixed block and the connection
Shaft clearance cooperation.
Preferably, the mechanical grip manipulator further includes limited block, the limited block pass through the grip slipper with it is described
Fixing seat is fixed, be provided on the grip slipper with the limited block cooperation through-hole, the bottom surface of the grip slipper and be located at institute
The two sides for stating through-hole are provided with the sliding slot cooperated with the limited block.
Preferably, the shape of the limited block is convex shape.
Preferably, the vacuum detecting that bottom whether is fallen on for detecting chip be additionally provided on the second guide clamping block
Mouthful, it is provided with interface channel in the second guide clamping block, the other end of the interface channel is connect with the gas-tpe fitting,
The other end of the gas-tpe fitting is connect by connecting tube with vacuum pressure switch, and the vacuum pressure switch is arranged in the machine
On the cabinet of tool hand.
Preferably, the external structure of the first guide clamping block and the second guide clamping block is identical, second guiding
The bevel angle α of grip block is 45-60 degree.
Preferably, preferably 50 degree of the bevel angle α.
Preferably, the clamping is block-shaped L-shaped.
Preferably, the end cap closed with the case lid is additionally provided on the shell.
Having the beneficial effect that the mechanical grip manipulator of the utility model, structure is simple, and design is very ingenious, and clamping is convenient,
When high speed carries chip, it not will cause chip and slide；Chip is fixed on a robotic arm by way of mechanical grip, and
It is able to achieve during quickly detection wafer handling whether there is or not falling, prevents chip from falling damage.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of mechanical grip manipulator of the utility model；
Fig. 2 is a kind of explosive view of mechanical grip manipulator of the utility model；
Fig. 3 is the structural schematic diagram of shell；
Fig. 4 is the structural schematic diagram of limited block；
Fig. 5 is the structural schematic diagram of grip slipper；
Fig. 6 is the structural schematic diagram that the utility model mechanical grip manipulator removes robot section；
Fig. 7 is the half sectional view that the utility model mechanical grip manipulator removes robot section；
Fig. 8 is the partial enlarged view of A in Fig. 7.
Specific embodiment
With reference to the accompanying drawings and examples, specific embodiment of the present utility model is described in further detail.Below
Embodiment is not intended to limit the scope of the present invention for illustrating the utility model.
As depicted in figs. 1 and 2, a kind of mechanical grip manipulator of the utility model, including shell 1, cylinder 2, connecting shaft
4, grip slipper 8, gripping block 9, fixing seat 10, the first guide clamping block 11 and the second guide clamping block 12；The shell 1 can be rotated
Setting in 22 upper end of manipulator；What the cylinder 2 was screwed is mounted on inside the shell 1；The connecting shaft 4 can
Flexible setting is in the shell 1；The piston rod of the cylinder 2 is connect with the connecting shaft 4, the connecting shaft 4 it is another
End is screwed with the grip slipper 8, and the stretching motion of the piston rod of the cylinder 2 drives the grip slipper 8 mobile；Two
The gripping block 9 is separately positioned on one end two sides of the grip slipper 8, and the gripping block 9 is used for clamped wafer 13；The fixation
10 one end of seat are screwed with the shell 1；The first guide clamping block 11 and the second guide clamping block 12 are symmetrically used
Screw is fixed in the fixing seat 10；The clamped setting of chip 13 is led in the first guide clamping block 11 and second
Into the cavity between grip block 12；10 lower end surface of fixing seat is bonded with 8 upper surface of grip slipper.Two clampings
Block 9 is arranged in 10 two sides of fixing seat.
As shown in Figures 2 and 3, the mechanical grip manipulator further includes link block 3, linear bearing 5, the first fixed block 6
With the second fixed block 7；The piston rod of the cylinder 2 is connect with the connecting shaft 4 by the link block 3, the link block 3 one
It holds and is screwed with the piston rod of the cylinder 2, the other end is screwed with the connecting shaft 4；The linear bearing 5 with
Gasket is equipped in the front end internal cavity 14 of the shell 1；First fixed block 6 be screwed be mounted on it is described
The linear bearing 5 is fixed in the front end of shell 1；Second fixed block 7, which is screwed, is mounted on the grip slipper 8
The other end；The connecting shaft 4 is slidably connected with the linear bearing 5, and the connecting shaft 4 passes through the linear bearing 5 and the
One fixed block 6 is screwed with second fixed block 7；First fixed block 6 and 4 clearance fit of connecting shaft.
As shown in Figure 4 and Figure 5, the mechanical grip manipulator further includes limited block 15, and the limited block 15 passes through described
Grip slipper 8 is screwed with the fixing seat 10, and the through-hole with the limited block 15 cooperation is provided on the grip slipper 8
16, the bottom surface of the grip slipper 8 and be located at the through-hole 16 two sides be provided with the limited block 15 cooperation sliding slot 17.Institute
The shape for stating limited block 15 is convex shape.Limited block 15 plays the role of limiting grip slipper 8.
As shown in figure 4, being provided with screw mounting hole 28 on limited block 15, screw passes through screw mounting hole 28 and the fixation
Seat 10 is fixed.
As shown in Figure 6 to 8, it is additionally provided on the second guide clamping block 12 for detecting whether chip 13 falls on bottom
The vacuum detecting mouth 18 in portion, is provided with interface channel 19 in the second guide clamping block 12, the interface channel 19 it is another
End is connect with the gas-tpe fitting 20, and the other end of the gas-tpe fitting 20 is connect by connecting tube with vacuum pressure switch 21,
The vacuum pressure switch 21 is arranged on the cabinet 23 of the manipulator 22.
As shown in figure 8, the first guide clamping block 11 is identical with the external structure of the second guide clamping block 12, described
24 angle [alpha] of inclined-plane of two guide clamping blocks 12 is 45-60 degree.Preferably 50 degree of 24 angle [alpha] of inclined-plane described in the present embodiment, chip 13 is put
Tiltedly bottom can be slided into automatically.
As shown in Fig. 2, 9 shape of gripping block is L-shaped.Convenient for holding chip 13.
As shown in Fig. 2, being additionally provided with the end cap 25 closed with the shell 1 lid on the shell 1.
The mechanical grip manipulator further includes laser sensor 26 and signal processor 27,26 He of laser sensor
Signal processor 27 is arranged in the shell 1, and the signal processor 27 is for handling what laser sensor 26 passed over
Signal.Laser sensor 26 is used to detect the state of chip 13 in film magazine, and detection has several states: empty, weight piece, inclined tab, normally.
When work, after the positioning of 22 position of manipulator, starts to start end effector, start de-clamping chip 13, utilize
Manipulator 22 grabs chip 13 between first guide clamping block 11 and the second guide clamping block 12, vacuum pressure switch 21
Start to carry out detection work, by the acquisition to 13 vacuum degree data of chip of vacuum detecting mouth 18, detects it has been vacuum
State, that illustrates that chip 13 has been laid flat；Then starting cylinder 2 is shunk, and connecting shaft 4 and grip slipper 8 is driven to move inward, and is pressed from both sides
9 clamped wafer 13 of tight block, is completely fixed chip 13, and manipulator 22 starts next work.Etc. completing the process reset,
Structure design is very ingenious.
In conclusion above embodiment is not the restricted embodiment for being the utility model, the technology of all this fields
The modification or equivalent deformation that personnel are carried out on the basis of the substantive content of the utility model, in the skill of the utility model
Art scope.
Claims (9)
1. a kind of mechanical grip manipulator, it is characterised in that: including shell (1), cylinder (2), connecting shaft (4), grip slipper (8),
Gripping block (9), fixing seat (10), the first guide clamping block (11) and the second guide clamping block (12)；The shell (1) can be rotated
Setting in manipulator (22) upper end；It is internal that the cylinder (2) is fixedly installed at the shell (1)；The connecting shaft (4) can
Flexible setting is in the shell (1)；The piston rod of the cylinder (2) is connect with the connecting shaft (4), the connecting shaft
(4) the other end and the grip slipper (8) is fixed, and the stretching motion of the piston rod of the cylinder (2) drives the grip slipper (8)
It is mobile；Two gripping blocks (9) are separately positioned on one end two sides of the grip slipper (8), and the gripping block (9) is for clamping
Chip (13)；Described fixing seat (10) one end and the shell (1) are fixed；The first guide clamping block (11) and the second guiding
Grip block (12) is symmetrically arranged on the fixing seat (10)；Clamped chip (13) is arranged in first guide clamping
In cavity between block (11) and the second guide clamping block (12)；On fixing seat (10) lower end surface and the grip slipper (8)
End face fitting.
2. mechanical grip manipulator according to claim 1, it is characterised in that: the mechanical grip manipulator further includes connecting
Connect block (3), linear bearing (5), the first fixed block (6) and the second fixed block (7)；The piston rod of the cylinder (2) and the company
Spindle (4) is connected by the link block (3), and described link block (3) one end and the piston rod of the cylinder (2) are fixed, another
End is fixed with the connecting shaft (4)；The linear bearing (5) and gasket are equipped with the front end inner chamber in the shell (1)
In body (14)；First fixed block (6) is fixedly mounted on the front end of the shell (1), and the linear bearing (5) are fixed
Firmly；Second fixed block (7) is fixedly mounted on the other end of the grip slipper (8)；The connecting shaft (4) and the linear axis
It holds (5) to be slidably connected, the connecting shaft (4) passes through the linear bearing (5) and the first fixed block (6) and second fixed block
(7) fixed；First fixed block (6) and the connecting shaft (4) clearance fit.
3. mechanical grip manipulator according to claim 1, it is characterised in that: the mechanical grip manipulator further includes limit
Position block (15), the limited block (15) pass through the grip slipper (8) and the fixing seat (10) and fix, on the grip slipper (8)
It is provided with the through-hole (16) with the limited block (15) cooperation, the bottom surface of the grip slipper (8) and is located at the through-hole (16)
Two sides are provided with the sliding slot (17) with the limited block (15) cooperation.
4. mechanical grip manipulator according to claim 3, it is characterised in that: the shape of the limited block (15) is type
Shape.
5. mechanical grip manipulator according to claim 1, it is characterised in that: on the second guide clamping block (12) also
It is provided with the vacuum detecting mouth (18) for whether falling on bottom for detecting chip (13), is set in the second guide clamping block (12)
It is equipped with interface channel (19), the other end of the interface channel (19) is connect with gas-tpe fitting (20), the gas-tpe fitting (20)
The other end connect with vacuum pressure switch (21) by connecting tube, vacuum pressure switch (21) setting is in the manipulator
(22) on cabinet (23).
6. mechanical grip manipulator according to claim 1, it is characterised in that: the first guide clamping block (11) and
The external structure of two guide clamping blocks (12) is identical, and inclined-plane (24) angle [alpha] of the second guide clamping block (12) is 45-60
Degree.
7. mechanical grip manipulator according to claim 6, it is characterised in that: described preferably 50 degree of inclined-plane (24) angle [alpha].
8. mechanical grip manipulator according to claim 1, it is characterised in that: gripping block (9) shape is L-shaped.
9. mechanical grip manipulator according to any one of claims 1 to 8, it is characterised in that: also set on the shell (1)
It is equipped with the end cap (25) closed with the shell (1) lid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821463598.8U CN208722857U (en) | 2018-09-07 | 2018-09-07 | Mechanical grip manipulator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821463598.8U CN208722857U (en) | 2018-09-07 | 2018-09-07 | Mechanical grip manipulator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208722857U true CN208722857U (en) | 2019-04-09 |
Family
ID=65981306
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821463598.8U Active CN208722857U (en) | 2018-09-07 | 2018-09-07 | Mechanical grip manipulator |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208722857U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114476655A (en) * | 2022-02-21 | 2022-05-13 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Clamping piece mechanism |
-
2018
- 2018-09-07 CN CN201821463598.8U patent/CN208722857U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114476655A (en) * | 2022-02-21 | 2022-05-13 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Clamping piece mechanism |
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