CN208570554U - A kind of chip exfactory inspection device - Google Patents

A kind of chip exfactory inspection device Download PDF

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Publication number
CN208570554U
CN208570554U CN201821269278.9U CN201821269278U CN208570554U CN 208570554 U CN208570554 U CN 208570554U CN 201821269278 U CN201821269278 U CN 201821269278U CN 208570554 U CN208570554 U CN 208570554U
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China
Prior art keywords
chip
body pedestal
material strip
inspection device
exfactory inspection
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CN201821269278.9U
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Chinese (zh)
Inventor
崔超
林伟斌
匡晓云
杨祎巍
李舟
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China Southern Power Grid Co Ltd
Research Institute of Southern Power Grid Co Ltd
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China Southern Power Grid Co Ltd
Research Institute of Southern Power Grid Co Ltd
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Abstract

The utility model discloses a kind of chip exfactory inspection device, it including body pedestal, is set to the both ends of the body pedestal and drives charging tray synchronous rotary with the horizontal support driving mechanism for sending out chip material strip, the testing agency for being set on the body pedestal and being used for the outgoing parameter of detection chip in the transportational process of the chip material strip, and connect with testing agency's signal, the control host for controlling its testing process according to plug-in.Chip exfactory inspection device provided by the utility model, the rotation of both ends charging tray is driven by support driving mechanism, chip material strip is wound, to realize the transport effect to chip, and the detection to the outgoing parameter of each chip is realized in the winding process of chip material strip by testing agency, it is aided with control host in detection process whole process simultaneously to carry out automatically controlling, it rapidly and efficiently completes to examine the batch outgoing of chip, quality testing precision is improved, manual labor amount and human cost are reduced.

Description

A kind of chip exfactory inspection device
Technical field
The utility model relates to chip technology field, in particular to a kind of chip exfactory inspection device.
Background technique
With the continuous improvement of social intelligenceization level, semiconductor chip be widely used to smart home, Intelligent hardware, The fields such as information communication, intelligent transportation, public safety.
For the manufacturing quality for guaranteeing chip, chip producer needs to carry out the factory of chip in chip factory before sales Inspection process, the chip semi-finished product good to braid carry out outgoing parameter and detect, which generally comprises Quantity, position sequence, appearance, material strip pulling force, deletion condition etc. exclude underproof chip with this, to ensure the outgoing of chip Meet industry sale standard.
Currently, traditional method is the manually-operated mode of whole process when carrying out chip exfactory inspection.Specifically, first The material strip equipped with chip is loaded in disk by producers from chip first and is pulled out, by magnifying glass with the naked eye by observation material strip Chip, judge whether chip position sequence, appearance comply with standard, check material strip in whether there is chip deficient phenomena.It then will material Whether correct the reversed recycling of band checks number of chips in each chip loading disk.Finally observe the patch of carrier band and lid band in material strip Situation is closed, the abnormal conditions such as material strip separation, quick-fried band are judged whether there is.
According to manual operation check system in the prior art, a disc core piece (based on 2500 chips) is examined need to spend about The time of 30min, efficiency is more low, and aforesaid way needs manually to pull out material strip from braid disk, in drawing process Material strip can inevitably be distorted metaboly, it is easy to quick-fried band (lid band and carrier band point occur in material strip pulling force lower From) phenomenon, cause chip to be scattered missing.Simultaneously as the quantity of whole chips is needed by manually being checked, in number of chips Mistake of statistics is also easy to happen when more, the problems such as product is obscured.And the quality test results of desk checking are with certain subjective Property, judge entirely with worker's experience, accuracy is lower, and the amount of labour is big, the inefficiency of entire exfactory inspection process, in core Piece market demand is under the increasing overall situation of the number of chips of growth trend year by year and chip supplier's factory, existing skill Traditional-handwork check system in art has been difficult to adapt to the needs in market.
Therefore, how efficiently to complete to examine the batch outgoing of chip, improve quality testing precision, reduce artificial labor Momentum and human cost are those skilled in the art's technical problems urgently to be resolved.
Utility model content
The purpose of the utility model is to provide a kind of chip exfactory inspection devices, can efficiently complete the batch of chip Factory's quality inspection improves quality testing precision, reduces manual labor amount and human cost.
In order to solve the above technical problems, the utility model provides a kind of chip exfactory inspection device, including body pedestal, set It is placed in the both ends of the body pedestal and drives charging tray synchronous rotary with the horizontal support driving mechanism for sending out chip material strip, setting In the detection on the body pedestal and for the outgoing parameter of detection chip in the transportational process of the chip material strip Mechanism, and connect with testing agency's signal, the control host for controlling its testing process according to plug-in.
Preferably, the support driving mechanism is set to the end positions on the length direction of the body pedestal, and institute Support driving mechanism is stated for driving the charging tray synchronous rotary, by the chip material strip along being parallel to the body pedestal Length direction horizontal transport.
Preferably, the support driving mechanism includes the both ends being set on the length direction of the body pedestal, is used for The charging tray is fixed on to the support frame of predeterminated position, and support frame as described above is scalable.
Preferably, support driving mechanism further includes being set to support frame as described above top, for driving the charging tray to rotate Driving motor, and the shaft of the driving motor is inserted in the centre bore of the charging tray.
Preferably, it is provided at the end positions on the length direction of the body pedestal for compressing the chip material The edge of band is so that it keeps horizontal pinch roller on the body pedestal.
Preferably, the testing agency includes being set up on the body pedestal, carrying out for the surface to each chip Imaging is to detect the whether complete imager of its contour structures, and the imager is connect with the control host signal.
Preferably, the testing agency further includes being set up on the body pedestal, for the side with the chip material strip The counting gear for the rack gear engagement rotation being arranged on edge, and for the rotating cycle calculating core by detecting the counting gear The counting module of piece number, and the counting module is connect with the control host signal.
Preferably, the testing agency further includes being set up on the body pedestal, for the table to the chip material strip Face predetermined position transmitting ultrasonic wave is visited with the whether correct ultrasonic wave of arragement direction for judging each chip by echo delay Head, and the ultrasonic probe is connect with the control host signal.
Preferably, the testing agency further includes being set up on the body pedestal, for the table to the chip material strip Face predetermined position emission detection light, to judge whether chip lacks in place by the reception condition to the probing light Probe, and the probe in place is connect with the control host signal.
Preferably, the testing agency further includes being set up on the body pedestal and for clamping the chip material strip Carrier band carrier band folder, be set up on the body pedestal and the lid band folder for clamping lid band on the chip material strip, with It is described to cover with the connected connection hose of folder, the slide bar being horizontally placed on the body pedestal, be slidably disposed in the cunning Stayed mast on bar, linear motor and one end for driving the stayed mast to slide along the length direction of the slide bar connect It connects on the side wall of the body pedestal, the other end is connected to reset spring on the body of rod of the stayed mast, the stayed mast End be connected with the end of the connection hose, and be provided on the end of the stayed mast for detecting the lid with pressing from both sides institute By the tension sensor of pulling force, the tension sensor is connect with the control host signal.
Chip exfactory inspection device provided by the utility model mainly includes body pedestal, support driving mechanism, detection Mechanism and control host.Wherein, body pedestal is the main structure of chip exfactory inspection device, is mainly used for installing and carries it Remaining components, while being also the primary operational place of checking chip outgoing.Support driving mechanism is set on body pedestal, For driving the charging tray synchronous rotary for being set to body pedestal both ends, it will be wound on charging tray, loaded according to certain sequence, specification The chip material strip of chip from one end charging tray gradually on other end charging tray, and in the winding process of chip material strip, thereon The each chip loaded gradually passes through body susceptor surface, it is believed that forms transport effect to each chip.Testing agency is Core institution is arranged on body pedestal, is mainly used in the winding process of chip material strip, to passing through in body susceptor surface Each chip for crossing carries out outgoing parameter detecting, with judge each chip or this batch of chip outgoing parameter whether It is qualified.Control host is connect with testing agency's signal, is mainly used for controlling testing agency according to plug-in to chip progress respectively The relevant outgoing parameter detecting of item, to realize the outgoing detection to chip automatically, in an orderly manner.In conclusion this Chip exfactory inspection device provided by utility model drives the rotation of both ends charging tray by support driving mechanism, to chip material strip It is wound, to realize to the transport effect of chip, and is realized in the winding process of chip material strip pair by testing agency The detection of the outgoing parameter of each chip, while being aided with control host in detection process whole process and carrying out automatically controlling, fastly Speed is efficiently completed to examine the batch outgoing of chip, improves quality testing precision, reduce manual labor amount and manpower at This.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only It is the embodiments of the present invention, for those of ordinary skill in the art, without creative efforts, also Other attached drawings can be obtained according to the attached drawing of offer.
Fig. 1 is a kind of overall structure diagram of specific embodiment provided by the utility model.
Wherein, in Fig. 1:
Body pedestal -1, chip material strip -2 control host -3, charging tray -4, support frame -5, driving motor -6, pressure Belt wheel -7, imager -8, counting gear -9, ultrasonic probe -10, probe -11 in place, carrier band folder -12, lid band folder - 13, connect hose -14, slide bar -15, stayed mast -16, linear motor -17, reset spring -18, tension sensor -19.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work Every other embodiment obtained, fall within the protection scope of the utility model.
Referring to FIG. 1, Fig. 1 is a kind of overall structure diagram of specific embodiment provided by the utility model.
In a kind of specific embodiment provided by the utility model, chip exfactory inspection device mainly includes body bottom Seat 1, support driving mechanism, testing agency and control host 3.
Wherein, body pedestal 1 is the main structure of chip exfactory inspection device, is mainly used for installing and carrying remaining zero Part, while being also the primary operational place of checking chip outgoing.Support driving mechanism is separately positioned on the two of body pedestal 1 End position.Herein preferably, which can be separately positioned on the position of the both ends on the length direction of body pedestal 1 It sets.
Support driving mechanism is mainly used for 4 synchronous rotary of charging tray that driving is set to 1 both ends of body pedestal, will be wound in material The chip material strip 2 of chip is loaded gradually from one end charging tray 4 gradually wound on other end charging tray on disk 4, according to certain sequence, specification On 4, and in the winding process of chip material strip 2, each chip loaded thereon gradually passes through 1 surface of body pedestal, can recognize To form transport effect to each chip.
Testing agency is core institution, is arranged on body pedestal 1, is mainly used for the winding process in chip material strip 2 In, outgoing parameter detecting is carried out to each chip passed through on 1 surface of body pedestal, to judge each chip or this batch Whether the outgoing parameter of chip is qualified.Control host 3 is connect with testing agency's signal, is mainly used for according to plug-in control Testing agency processed carries out every relevant outgoing parameter detecting to chip, thus automatically, realize chip in an orderly manner Factory's quality testing.
Therefore, chip exfactory inspection device provided by the present embodiment, by the charging tray 4 at both ends to the volume of chip material strip 2 The transport effect to chip on body pedestal 1 is realized around driving, and through testing agency in the winding process of chip material strip 2 It realizes the detection to factory's mass parameter of each chip, while being aided with control host 3 in detection process whole process and being controlled automatically System quickly, is efficiently completed to examine the batch outgoing of chip, improves quality testing precision, reduce manual labor amount and people Power cost.
In the present embodiment, chip exfactory inspection device is laid out using integral type, and whole includes support drive part, check portion Point, tensile test part, display control section be grouped as.Support drive part drives for fixing charging tray 4, and by driving motor 6 Dynamic charging tray 4 rotates, steady to send out chip material strip 2.Test portion is used to verify the quantity of chip, position in the chip material strip 2 sent out Whether sequence, contour structures etc. comply with standard, and export inspection result.Tensile test part is for proofing chip material strip 2 (carrier band and lid Band) pulling force whether comply with standard, and carry out graphic software platform, export test result.Display control section is for running chip Exfactory inspection program, each component of control device correctly act, realize equipment start-stop, equipment control, as the result is shown, parameter setting function Energy.
In a kind of preferred embodiment about support driving mechanism, which is mainly arranged in body bottom End positions on the length direction of seat 1 mainly include support frame 5, driving motor 6 and pinch roller 7.
Wherein, the charging tray 4 being loaded on support driving mechanism is general rounded, and there are a cylindrical hole, through-hole in center It is fluted on side wall, it can be stably fixed in the shaft of driving motor 6.Support frame 5 is generally pylindrical, and one end is fixed on machine On body pedestal 1, the other end is connected with the outer wall of driving motor 6, is used to support charging tray 4 and driving motor 6.Meanwhile the support frame 5 Telescopic length, angular adjustment can also be carried out, to adapt to fix various sizes of charging tray 4, so that charging tray 4 is fixed on default position Set place (such as preset height position, default spacing).
Driving motor 6 is arranged in the end of support frame 5, and the through-hole groove with charging tray 4 is provided in the shaft of driving motor 6 The card slot mutually agreed with, so that the chip material strip 2 in one end charging tray 4 steadily be pulled out, makes for fixing and driving charging tray 4 to rotate It rewinds after the detection of intermediate testing agency to other end charging tray 4.The one ends wound of chip material strip 2 is in body On the charging tray 4 of 1 one end of pedestal, the other end is wrapped on the charging tray 4 of 1 other end of body pedestal, and middle section is in winding process Mean level is suspended on the surface of body pedestal 1.Pinch roller 7 is fixed on two side positions of body pedestal 1, inside have rolling Axis is mainly used for pushing down the chip material strip 2 of submitting, so that chip material strip 2 is maintained at horizontal transport state on body pedestal 1.
When carrying out depositing feeding operation, first the charging tray 4 for being mounted with chip material strip 2 is fixed on one end of body pedestal 1 Support frame 5 on, while the charging tray 4 of unloaded chip material strip 2 being fixed on the support frame 5 of 1 other end of body pedestal.So Afterwards, the chip material strip 2 in charging tray 4 is pulled out one section, after sequentially passing through pinch roller 7, test portion, tensile test part, fixed In on the charging tray 4 of the other end.When being detected, the charging tray 4 that the driving motor 6 at both ends respectively drives both ends revolves in the same direction Turn, so that the chip material strip 2 in one end charging tray 4 be sent out, and completes the quantity verification of each chip, position sequence during transportation The processes such as inspection, appearance test, missing inspection, tensile test.
In a kind of preferred embodiment about test portion, which is mainly arranged in body pedestal 1 Between position, mainly include imager 8, counting gear 9, counting module, ultrasonic probe 10, probe 11 in place etc..
Wherein, imager 8 is erected at 1 top of body pedestal, and imaging mouth faces the arrangement of chip material strip 2, for examining Whether the contour structures such as silk-screen, pin of each chip on chip material strip 2 situation is complete.In general, the imager 8 can be height Clear video camera etc..
Counting gear 9 is generally erected at two side positions of body pedestal 1, the gear teeth is provided on its outer ring, while in core The marginal position of piece material strip 2 is provided with rack gear along its length, when chip material strip 2 is in travel position, rack gear thereon with Counting gear 9 forms engaged transmission.
Ultrasonic probe 10 is erected at the top of body pedestal 1, and probe faces the arrangement of chip material strip 2, is mainly used for Whether the position sequence (arragement direction) of each chip is consistent in detection chip material strip 2.
Probe 11 in place is erected on body pedestal 1, is mainly used for being sentenced according to the through-hole circumstance of occlusion on chip material strip 2 Whether the chip in disconnected chip material strip 2 has deficient phenomena.In general, the 11 concretely infrared sensor etc. of probe in place.
Specifically, when carrying out chip inspection, according to above-mentioned imager 8, counting gear 9, counting module, ultrasonic probe 10, the installation site of probe 11 in place is generally successively examined according to contour structures inspection, inspection of quantity, position sequence, missing is examined Step is carried out.
When carrying out contour structures inspection, a standard chips photo can be imported in control host 3 first, imager 8 It takes pictures one by one to each chip on the chip material strip 2 of submitting, with the shapes such as chip silk-screen, size, pin in standard photographs Structural information is compared, and returns to comparison result.
It, can be first by the rotating cycle input control host 3 of the corresponding counting gear 9 of single chip when carrying out inspection of quantity In, counting gear 9 rotates under the driving of chip material strip 2, after chip material strip 2 is wound, counting module statistical counting tooth Wheel 9 rotation circle numbers, control host 3 can calculate the chip count amount in chip material strip 2, while can transmit to display into Row visualization display.
When carrying out the inspection of position sequence, the ultrasound of certain frequency can be issued to 2 surface of chip material strip by ultrasonic probe 10 Wave can postpone to return when echo encounters the groove dot on chip surface, and ultrasonic probe 10 can be by capturing each prolong The echo returned late judges whether the arrangement situation of each chip is accurate, to realize that a sequence is examined, while can be by judging result It feeds back to display and carries out visualization display.
When carrying out missing inspection, one of them probe 11 in place for being located at 1 top of body pedestal launches probing light (generally infrared ray), if there is chip missing in chip material strip 2, the material strip through-hole on chip material strip 2 is not blocked, is located at core Another probe 11 in place of 2 bottom of piece material strip receives probing light, then there are quantity deletion conditions for judgement, while can will sentence Disconnected result is back to display and carries out visualization display.
In a kind of preferred embodiment about tensile test part, which is distributed mainly on body bottom 1 medium position of seat, and be located at after aforementioned test portion the transporting direction of chip material strip 2 (be subject to), it mainly include straight line Motor 17, tension sensor 19, connection hose 14, lid band folder 13, carrier band folder 12, slide bar 15, stayed mast 16,18 groups of reset spring At.
Wherein, linear motor 17 is arranged in body pedestal 1, and output shaft is connected with stayed mast 16, can be used for driving drawing Power bar 16 carries out horizontal linear sliding on slide bar 15.Tension sensor 19 is arranged in the apical position of stayed mast 16, for surveying The value of thrust that amount lid is born with folder 13, and transmitted as control host 3.Connection hose 14 is flexible material, one End is connected with tension sensor 19, and the other end is connected with lid band folder 13, and the pulling force for bearing lid with folder 13 passes to pulling force Sensor 19.Lid band folder 13 is arranged in connection 14 end of hose, for clamping the lid band in chip material strip 2.12 arrangement of carrier band folder In on the right end face of body pedestal 1, for clamping the carrier band in chip material strip 2.18 one end of reset spring and stayed mast 16 The body of rod is connected, and the other end is connected with the side wall of body pedestal 1, for stayed mast 16 to be retracted original position after tensile test.
When carrying out tensile test, the lid band of chip material strip 2 is first clamped with folder 13 with lid, then clamp chip with carrier band folder 12 The carrier band of material strip 2 starts tensile test program later.Linear motor 17 pulls stayed mast 16 to move on slide bar 15, lid band folder 13 synchronizing movings tear the lid band and carrier band being bonded together in chip material strip 2.Tension sensor 19 becomes the pulling force received Change value passes to control host 3, judges that the value of thrust of monitoring whether in defined critical field, and can carry out pulling force number simultaneously The visual presentation of value.After analysis, linear motor 17 discharges driving force, and stayed mast 16 is retracted original position by reset spring 18, Wait for tensile test next time.
It is also additionally arranged display control section in the present embodiment, mainly includes display, interactive keyboard, operation button and control Host 3 etc..Display generally can be disposed at the side of body pedestal 1, for carrying out number of chips, test result, yields etc. The real-time display of data.Interactive keyboard is generally disposed at the underface of display, for rate of testing, Check-Out Time, inspection Test the setting of mode, inspection parameter.Operation button can be disposed at the lower right of body pedestal 1, including starting, stopping, pause three A control button, for carrying out the operation such as switch control, start and stop to device.Control host can by data line or wireless telecommunications with 1 signal of body pedestal connection, for control test program, records tests log, export inspection result etc..
In conclusion chip exfactory inspection device provided by the present embodiment be able to achieve automatically deposit feeding, quantity verification, The functions such as position sequence inspection, appearance test, missing inspection, tensile test, statistics setting, effectively prevent efficiency when manual operations Low, the problems such as error rate is high, greatly improve chip exfactory inspection efficiency and inspection quality.Chip exfactory inspection is realized simultaneously Programming count in the process, result export, Classifying Sum function, to UPH, yield rate, number of chips, material strip pulling force, operation day The information such as will carry out Classifying Sum, display, export, and whole process is not necessarily to manual intervention, avoid and carry out data statistics point by hand Triviality and high error rate when analysis, reliability with higher.Also, the chip exfactory inspection device in the present embodiment uses Integral type layout, sound construction is reliable, and occupied area is smaller, and part reliability is higher, can flexibly apply to different spaces, difference The workplace of environment, in chip exfactory inspection field application value with higher.In addition, the chip in the present embodiment Exfactory inspection device can also be according to the practical specification and packing forms of chip, to depositing feed section, test portion, tensile test portion Point carry out personal settings, make it is suitable for different size, different packing forms, different factory calibration requirements chip, have Higher flexibility and scalability.
The foregoing description of the disclosed embodiments can be realized professional and technical personnel in the field or using originally practical new Type.Various modifications to these embodiments will be readily apparent to those skilled in the art, and determine herein The General Principle of justice can be realized in other embodiments without departing from the spirit or scope of the present utility model.Cause This, the present invention will not be limited to the embodiments shown herein, and is to fit to and principles disclosed herein The widest scope consistent with features of novelty.

Claims (10)

1. a kind of chip exfactory inspection device, which is characterized in that including body pedestal (1), be set to the body pedestal (1) Both ends simultaneously are used to drive charging tray (4) rotation to send out the support driving mechanism of chip material strip (2), be set to the body pedestal (1) testing agency on and for the outgoing parameter of detection chip in the transportational process of the chip material strip (2), and It is connect with testing agency's signal, the control host (3) for controlling its testing process according to plug-in.
2. chip exfactory inspection device according to claim 1, which is characterized in that the support driving mechanism is set to institute The end positions on the length direction of body pedestal (1) are stated, and the support driving mechanism is for driving the charging tray (4) synchronous Rotation, by the chip material strip (2) along the length direction horizontal transport for being parallel to the body pedestal (1).
3. chip exfactory inspection device according to claim 2, which is characterized in that the support driving mechanism includes setting In the both ends on the length direction of the body pedestal (1), the support frame for the charging tray (4) to be fixed on to predeterminated position (5), and support frame as described above (5) is scalable.
4. chip exfactory inspection device according to claim 3, which is characterized in that the support driving mechanism further includes setting It is placed in support frame as described above (5) top, the driving motor (6) for driving the charging tray (4) to rotate, and the driving motor (6) Shaft be inserted in the centre bore of the charging tray (4).
5. chip exfactory inspection device according to claim 4, which is characterized in that the length side of the body pedestal (1) The edge for compressing the chip material strip (2) is provided at upward end positions so that it is in the body pedestal (1) It is upper to keep horizontal pinch roller (7).
6. chip exfactory inspection device according to claim 1-5, which is characterized in that the testing agency includes Be set up on the body pedestal (1), be imaged for the surface to each chip it is whether complete to detect its contour structures Imager (8), and the imager (8) is connect with control host (3) signal.
7. chip exfactory inspection device according to claim 6, which is characterized in that the testing agency further includes being set up in On the body pedestal (1), for the counting gear with the rack gear engagement rotation being arranged on the edge of the chip material strip (2) (9), and for passing through the counting module for detecting the rotating cycle computing chip number of the counting gear (9), and the meter Digital-to-analogue block is connect with control host (3) signal.
8. chip exfactory inspection device according to claim 7, which is characterized in that the testing agency further includes being set up in On the body pedestal (1), for at the surface programming position of the chip material strip (2) emit ultrasonic wave, to pass through echo Delay judges the whether correct ultrasonic probe (10) of the arragement direction of each chip, and the ultrasonic probe (10) with it is described Control the connection of host (3) signal.
9. chip exfactory inspection device according to claim 8, which is characterized in that the testing agency further includes being set up in On the body pedestal (1), for emission detection light at the surface programming position of the chip material strip (2), with by pair The reception condition of the probing light judges the probe (11) in place whether chip lacks, and the probe (11) in place with it is described Control the connection of host (3) signal.
10. chip exfactory inspection device according to claim 9, which is characterized in that the testing agency further includes setting up (12) are pressed from both sides in the carrier band on the body pedestal (1) and for clamping the carrier band on the chip material strip (2), are set up in the machine Lid band on body pedestal (1) and for clamping the lid band on the chip material strip (2) presss from both sides (13), is connected with the lid band folder (13) Connection hose (14), be horizontally placed on the body pedestal (1) slide bar (15), be slidably disposed in the slide bar (15) stayed mast (16) on, the straight-line electric for driving the stayed mast (16) to slide along the length direction of the slide bar (15) Machine (17) and one end are connected on the side wall of the body pedestal (1), the other end is connected to the bodies of rod of the stayed mast (16) Reset spring (18) upper, for resetting the stayed mast (16), the end of the stayed mast (16) and the connection hose (14) end is connected, and is provided on the end of the stayed mast (16) for detecting the lid with pulling force suffered by folder (13) Tension sensor (19), the tension sensor (19) connect with control host (3) signal.
CN201821269278.9U 2018-08-07 2018-08-07 A kind of chip exfactory inspection device Active CN208570554U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109003924A (en) * 2018-08-07 2018-12-14 南方电网科学研究院有限责任公司 A kind of chip exfactory inspection device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109003924A (en) * 2018-08-07 2018-12-14 南方电网科学研究院有限责任公司 A kind of chip exfactory inspection device
CN109003924B (en) * 2018-08-07 2023-08-15 南方电网科学研究院有限责任公司 Chip delivery inspection device

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