CN208493283U - The system that organic component in stripper is recycled in hypergravity rectifying - Google Patents
The system that organic component in stripper is recycled in hypergravity rectifying Download PDFInfo
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- CN208493283U CN208493283U CN201820818933.5U CN201820818933U CN208493283U CN 208493283 U CN208493283 U CN 208493283U CN 201820818933 U CN201820818933 U CN 201820818933U CN 208493283 U CN208493283 U CN 208493283U
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Abstract
The utility model relates to the systems of organic component in a kind of hypergravity rectifying recycling stripper, the system comprises head tanks, adsorption tank, first pressure pump, first order hypergravity rectifier, the first condenser, the first drainer, second pressure pump, second level hypergravity rectifier, subsider, filter, third pressure pump, the second condenser, the second drainer, the 4th pressure pump, third level hypergravity rectifier, the 5th pressure pump, third condenser, finished pot and the 6th pressure pump.The system of the utility model solves photoresist influence mass-transfer efficiency by the linkage of three-level hypergravity rectifier and easily residual attaches to the problems in hypergravity rectifier, the low-boiling point materials such as moisture can be effectively removed simultaneously, realize the separation for having multicomponent organic principle, and equipment volume is small, simple process, energy consumption and at low cost, cycle operation is high-efficient, and the organic component rate of recovery is high.
Description
Technical field
The utility model relates to the recyclable device of organic component in stripper, in particular to a kind of hypergravity rectifying recycling stripping
The system of organic component in chaotropic.
Background technique
Stripper is widely used in the Display panels industry such as semiconducter IC and TFT-LCD, OLED, is mainly used for photoetching process
The removing of rear end photoresist.With the high speed development of display industry, the dosage of the wet electronic chemical product such as stripper is also sharply increased,
It copes with and shows the growth of plate demand in large scale, high-resolution, advanced lines line is constantly gone into operation, and multiplication is presented in the dosage of stripper
Trend.And a large amount of stripper application can also generate a large amount of stripper waste liquid, these waste liquid direct emissions not only can be serious dirty
Environment is contaminated, and it is high to will lead to stripper cost.
Nippon Refine Co., Ltd. discloses a kind of method and regenerating unit by stripper spent solution regeneration stripper,
And having applied for 101424889 A of patent CN in China, Dongjiang Environmental Co., Ltd., which discloses, discloses a kind of useless stripper
Recyclable device, and applied for Chinese patent CN204022491U, it is directed to thin film evaporator in both methods, although process
Compare it is easy, but using thin film evaporator evaporation dissolving agent process in, photoetching gum concentration reache a certain level after its heat and mass
Efficiency rapid decrease is greatly lowered solvent recovery efficiency, and processing energy consumption significantly increases.
The prosperous auspicious sign Chemical Co., Ltd. in Anqing has applied for that Chinese patent CN105523598 A discloses one kind in 2016
The method of interim variable-pressure rectification tower recycling photoresist lift off liquid, the method includes negative pressure, the conjunction of three kinds of normal pressure, positive pressure methods
It uses, can not only cope with low-boiling solvent, high boiling solvent can also be directed to, the solvent close for boiling point can also be with
Reply, reaches good separating effect, however the set equipment volume is big, energy consumption is high, complex process.
Hypergravity rectifying is the reinforcing mass transfer to grow up in recent years, mixing and reaction new technology.Hypergravity essence
The gas-liquid mass transfer evaporated is carried out in several super gravity fields for decupling gravity, and gas-liquid infinitesimal is torn under super gravity field
At micron or nanoscale liquid film and brin, the surface area largely quickly updated is generated, significantly reinforcing mass transfer and mixed process,
Mass-transfer efficiency is set to improve the 1-3 order of magnitude than traditional tower.Hypergravity rectifier have equipment volume is small, energy consumption is small, stop when
Between it is short, convenient for driving and parking, the incomparable advantage of traditional rectifying device such as convenient to install and maintain, operating flexibility is big.
Beijing University of Chemical Technology discloses the super-gravity device for rectification under vacuum, and has applied for Chinese patent
Phenomena such as CN103394210 A, which can make oxidation in rectifying, polymerization, coking, is substantially reduced, and makes high viscous heat sensitive material etc.
Product quality is higher.Sinopec Group discloses a kind of light dydrocarbon using hypergravity extracting rectifying device and evaporates
Divide separation method, and applied for 102485708 A of Chinese patent CN, the production of isoprene product has can be improved in the method
Amount and yield reduce energy consumption.Both the above device volume is small, can greatly improve mass-transfer efficiency, and it is organic to be suitable for part at present
The separation of object.However it is not related to photoresist in the object handled by it, and photoresist its heat transfer after reaching a certain level passes
Matter efficiency rapid decrease, last part photoresist can be also attached on hypergravity rectifier, cause the decline and equipment damage of efficiency
Consumption, increases cost.
Utility model content
Utility model aims to solve equipment volumes in prior art stripper removal process big, energy consumption and cost
High problem, provides a kind of system that organic component in stripper is recycled in hypergravity rectifying, which passes through three-level hypergravity essence
It evaporates machine linkage and solves that photoresist influences mass-transfer efficiency and easily residual attaches to the problems in hypergravity rectifier, while can have
Effect removes the low-boiling point materials such as moisture removal, realizes the separation of multicomponent organic principle, and equipment volume is small, simple process, energy consumption and
At low cost, cycle operation is high-efficient, and the organic component rate of recovery is high.
The technical scheme adopted by the utility model to solve the technical problem is as follows:
The system that organic component in stripper is recycled in hypergravity rectifying, the system comprises head tank, adsorption tanks, the first pressure
Power pump, first order hypergravity rectifier, the first condenser, the first drainer, second pressure pump, second level hypergravity rectifier,
Subsider, filter, third pressure pump, the second condenser, the second drainer, the 4th pressure pump, third level hypergravity rectifier,
5th pressure pump, third condenser, finished pot and the 6th pressure pump；
The head tank is connected by pipeline with adsorption tank, and the outlet of adsorption tank is pumped overweight with the first order by first pressure
Power rectifier is connected, and the gaseous phase outlet of the first order hypergravity rectifier is connected with the first condenser inlet, and described first is cold
Condenser outlet is connected by pipeline with the first drainer entrance, and the first drainer outlet passes through second pressure pump and the second level
Hypergravity rectifier is connected, and the kettle liquid outlet of the first order hypergravity rectifier is connected with the entrance of subsider, the sedimentation
The outlet of slot is connected by the entrance of pipe-and-filter, and the outlet of the filter passes through pipeline and third pressure pump and absorption
Slot is connected, and the gaseous phase outlet of the second level hypergravity rectifier is connected with the second condenser inlet, and second condenser goes out
Mouth is connected by pipeline with the second drainer entrance, and the second drainer outlet passes through the 4th pressure pump and third level hypergravity
Rectifier is connected, and the kettle liquid outlet of the second level hypergravity rectifier passes through pipeline and the 5th pressure pump and the first drainer phase
Even, the gas phase entrance of third level hypergravity rectifier is connected with third condenser inlet, and the third condensator outlet passes through pipe
Road is connected with finished pot entrance, and the kettle liquid entrance of third level hypergravity rectifier passes through pipeline and the 6th pressure pump and the second condensation
Tank is connected.
Preferably, the revolving speed of the first order hypergravity rectifier is 800-1200rmin-1, second level hypergravity rectifying
The revolving speed of machine is 300-600rmin-1, the revolving speed of third level hypergravity rectifier is 600-1000rmin-1。
It is furthermore preferred that the revolving speed of first order hypergravity rectifier is 900-1000rmin-1；Second level hypergravity rectifier
Revolving speed be 300-450rmin-1；The revolving speed of third level hypergravity rectifier is 800-1000rmin-1。
Preferably, the micro-filtration filter that the filter is 0.8-1 μm of precision.
The beneficial effects of the utility model are:
The system of the utility model by three-level hypergravity rectifier linkage solve photoresist influence mass-transfer efficiency and easily
Residual attaches to the problems in hypergravity rectifier, while can effectively remove the low-boiling point materials such as moisture, and realization has multicomponent
The separation of organic principle, and equipment volume is small, simple process, energy consumption and at low cost, cycle operation is high-efficient, organic component recycling
Rate is high.
Detailed description of the invention
Fig. 1 is the schematic diagram of the utility model.
In figure: 1- head tank, 2- adsorption tank, 3- first pressure pump, 4- first order hypergravity rectifier, 5- first are condensed
Device, the first drainer of 6-, 7- second pressure pump, the second level 8- hypergravity rectifier, 9- subsider, 10- filter, 11- third
Pressure pump, the second condenser of 12-, the second drainer of 13-, the 4th pressure pump of 14-, 15- third level hypergravity rectifier, 16-
Five pressure pumps, 17- third condenser, 18- finished pot, the 6th pressure pump of 19-.
Specific embodiment
Below by specific embodiment, and in conjunction with attached drawing, the technical solution of the utility model is made further specifically
It is bright.
Embodiment 1:
15kg photoresist is added in 1000kg organic system stripper and is configured to simulated waste, as shown in Figure 1, the simulation is useless
Liquid is passed through in head tank 1, and head tank 1 is connected by pipeline with adsorption tank 2, and the outlet of adsorption tank 2 pumps 3 and the by first pressure
Level-one hypergravity rectifier 4 is connected, and the gaseous phase outlet of the first order hypergravity rectifier 4 is connected with 5 entrance of the first condenser,
The outlet of first condenser 5 is connected by pipeline with 6 entrance of the first drainer, and the outlet of the first drainer 6 passes through second
Pressure pump 7 is connected with second level hypergravity rectifier 8, kettle liquid outlet and the subsider 9 of the first order hypergravity rectifier 4
Entrance is connected, and the outlet of the subsider 9 is connected by the entrance of pipe-and-filter 10, and the outlet of the filter 10 passes through
Pipeline and third pressure pump 11 are connected with adsorption tank 2.The gaseous phase outlet and the second condenser of the second level hypergravity rectifier 8
12 entrances are connected, and the outlet of the second condenser 12 is connected by pipeline with 13 entrance of the second drainer, second drainer
13 outlets are connected by the 4th pressure pump 14 with third level hypergravity rectifier 15, the kettle of the second level hypergravity rectifier 8
Liquid outlet is connected by pipeline and the 5th pressure pump 16 with the first drainer 6.The gas phase entrance of third level hypergravity rectifier 15
It is connected with 17 entrance of third condenser, the outlet of third condenser 17 is connected by pipeline with 18 entrance of finished pot.The third level
The kettle liquid entrance of hypergravity rectifier 15 is connected by pipeline and the 6th pressure pump 19 with the second drainer 13.Wherein for absorption
Slot 2, adsorbent is supplemented from upper end feeding inlet, and absorption residue is exported from lower mouth.For subsider 9, concentrated acid (60% sulfuric acid)
From upper end, feeding inlet is supplemented, pH adjustment about 4.5.For filter 10, filter residue is discharged from diagram right side outlet.First
The revolving speed of grade hypergravity rectifier 4 is to be set as 1000rmin-1.The revolving speed of second level hypergravity rectifier 8 is 350r
min-1.The revolving speed of third level hypergravity rectifier is 1000rmin-1.The waste liquid gross weight 1015kg, 15kg containing photoresist,
Remaining 1000kg recycles organic component 929.2kg in end product tank, and the organic component rate of recovery is about 92.9%.
Embodiment 2:
Organic system stripper waste liquid is fetched from factory's producing line, as shown in Figure 1, the waste liquid is passed through in head tank 1, head tank
1 is connected by pipeline with adsorption tank 2, and the outlet of adsorption tank is connected by first pressure pump 3 with first order hypergravity rectifier 4,
The gaseous phase outlet of the first order hypergravity rectifier 4 is connected with 5 entrance of the first condenser, and the outlet of the first condenser 5 is logical
Piping is connected with 6 entrance of the first drainer, and the outlet of the first drainer 6 passes through second pressure pump 7 and second level hypergravity
Rectifier 8 is connected, and the kettle liquid outlet of the first order hypergravity rectifier 4 is connected with the entrance of subsider 9, the subsider 9
Outlet be connected by the entrance of pipe-and-filter 10, the outlet of the filter 10 by pipeline and third pressure pump 11 with
Adsorption tank 2 is connected.The gaseous phase outlet of the second level hypergravity rectifier 8 is connected with 12 entrance of the second condenser, and described second
The outlet of condenser 12 is connected by pipeline with 13 entrance of the second drainer, and the outlet of the second drainer 13 passes through the 4th pressure pump
14 are connected with third level hypergravity rectifier 15, and the kettle liquid outlet of the second level hypergravity rectifier 8 passes through pipeline and the 5th
Pressure pump 16 is connected with the first drainer 6.The gas phase entrance of third level hypergravity rectifier 15 and 17 entrance phase of third condenser
Even, the outlet of third condenser 17 is connected by pipeline with 18 entrance of finished pot.The kettle liquid of third level hypergravity rectifier 15
Entrance is connected by pipeline and the 6th pressure pump 19 with the second drainer 13.Wherein for adsorption tank 2, adsorbent is from upper end pan feeding
Mouth is supplemented, and absorption residue is exported from lower mouth.For subsider 9, concentrated acid (99.9% acetic acid) is mended from upper end feeding inlet
It fills, pH adjustment about 5.For filter 10, filter residue is discharged from diagram right side outlet.First order hypergravity rectifier 4 turns
Speed is to be set as 950rmin-1.The revolving speed of second level hypergravity rectifier 8 is 450rmin-1.Third level hypergravity rectifying
The revolving speed of machine is 800rmin-1.Early period imports organic system stripper waste liquid 1028.7kg, and wherein photoresist content is about
18kg, remaining 1010.7kg recycle organic component 921.9kg in end product tank, and the organic component rate of recovery is about 91.2%.
Embodiment 3:
15kg photoresist is added in 1000kg water system stripper and is configured to simulation water system stripper waste liquid, as shown in Figure 1,
The simulated waste 1 is passed through in head tank 1, and head tank 1 is connected by pipeline with adsorption tank 2, and the outlet of adsorption tank 2 passes through the first pressure
Power pump 3 is connected with first order hypergravity rectifier 4, the gaseous phase outlet and the first condenser 5 of the first order hypergravity rectifier 4
Entrance is connected, and the outlet of the first condenser 5 is connected by pipeline with 6 entrance of the first drainer, and first drainer 6 exports
7 be connected with second level hypergravity rectifier 8 by second pressure pump, the kettle liquid outlet of the first order hypergravity rectifier 4 and
The entrance of subsider 9 is connected, and the outlet of the subsider 9 is connected by the entrance of pipe-and-filter 10, the filter 10
Outlet be connected by pipeline and third pressure pump 11 with adsorption tank 2.The gaseous phase outlet of the second level hypergravity rectifier 8 with
Second condenser, 12 entrance is connected, and the outlet of the second condenser 12 is connected by pipeline with 13 entrance of the second drainer, described
The outlet of second drainer 13 is connected by the 4th pressure pump 14 with third level hypergravity rectifier 15, the second level hypergravity essence
The kettle liquid outlet for evaporating machine 8 is connected by pipeline and the 5th pressure pump 16 with the first drainer 6.Third level hypergravity rectifier 15
Gas phase entrance is connected with 17 entrance of third condenser, and the outlet of third condenser 17 passes through pipeline and 18 entrance phase of finished pot
Even.The kettle liquid entrance of third level hypergravity rectifier 15 is connected by pipeline and the 6th pressure pump 19 with the second drainer 13.Its
In for adsorption tank 2, adsorbent is supplemented from upper end feeding inlet, absorption residue exported from lower mouth.For subsider 9, oxalic acid
From upper end, feeding inlet is supplemented, pH adjustment about 4.5.For filter 10, filter residue is discharged from diagram right side outlet.First
The revolving speed of grade hypergravity rectifier 4 is to be set as 900rmin-1.The revolving speed of second level hypergravity rectifier 8 is 450r
min-1.The revolving speed of third level hypergravity rectifier is 950rmin-1.Import simulation water system stripper waste liquid 1015kg early period,
Wherein photoresist 15kg, moisture 290kg, remaining 710kg recycle organic component 650.8kg in end product tank, and organic component returns
Yield is about 91.7%.
Embodiment 4:
Water system stripper waste liquid is fetched from factory's producing line, as shown in Figure 1, the waste liquid is passed through in head tank 1, head tank 1
It is connected by pipeline with adsorption tank 2, the outlet of adsorption tank is connected by first pressure pump 3 with first order hypergravity rectifier 4, institute
The gaseous phase outlet for stating first order hypergravity rectifier 4 is connected with 5 entrance of the first condenser, and the outlet of the first condenser 5 passes through
Pipeline is connected with 6 entrance of the first drainer, and the outlet of the first drainer 6 passes through second pressure pump 7 and second level hypergravity essence
It evaporates machine 8 to be connected, the kettle liquid outlet of the first order hypergravity rectifier 4 is connected with the entrance of subsider 9, the subsider 9
Outlet is connected by the entrance of pipe-and-filter 10, and the outlet of the filter 10 by pipeline and third pressure pump 11 and is inhaled
Attached slot 2 is connected.The gaseous phase outlet of the second level hypergravity rectifier 8 is connected with 12 entrance of the second condenser, and described second is cold
The outlet of condenser 12 is connected by pipeline with 13 entrance of the second drainer, and the outlet of the second drainer 13 passes through the 4th pressure pump 14
It is connected with third level hypergravity rectifier 15, the kettle liquid outlet of the second level hypergravity rectifier 8 passes through pipeline and the 5th pressure
Power pump 16 is connected with the first drainer 6.The gas phase entrance of third level hypergravity rectifier 15 is connected with 17 entrance of third condenser,
The outlet of third condenser 17 is connected by pipeline with 18 entrance of finished pot.The kettle liquid entrance of third level hypergravity rectifier 15
It is connected by pipeline and the 6th pressure pump 19 with the second drainer 13.Wherein for adsorption tank 2, adsorbent from upper end feeding inlet into
Row supplement, absorption residue are exported from lower mouth.For subsider 9, concentrated acid (60% sulfuric acid) is supplemented from upper end feeding inlet, pH tune
Whole about 4.For filter 10, filter residue is discharged from diagram right side outlet.The revolving speed of first order hypergravity rectifier 4 is setting
For 950rmin-1.The revolving speed of second level hypergravity rectifier 8 is 400rmin-1.The revolving speed of third level hypergravity rectifier
For 1000rmin-1.Early period imports stripper waste liquid 1043.5kg, wherein photoresist about 19kg, moisture 301kg, remaining
723.5kg recycles organic component 658.9kg in end product tank, and the organic component rate of recovery is about 91.1%.
Embodiment described above is a kind of preferable scheme of the utility model, is not made to the utility model any
Formal limitation, there are also other variations and modifications on the premise of not exceeding the technical scheme recorded in the claims.
Claims (4)
1. the system that organic component in stripper is recycled in hypergravity rectifying, which is characterized in that
The system comprises head tank (1), adsorption tank (2), first pressure pump (3), first order hypergravity rectifier (4), first
Condenser (5), the first drainer (6), second pressure pump (7), second level hypergravity rectifier (8), subsider (9), filter
(10), third pressure pump (11), the second condenser (12), the second drainer (13), the 4th pressure pump (14), third level hypergravity
Rectifier (15), the 5th pressure pump (16), third condenser (17), finished pot (18) and the 6th pressure pump (19)；
The head tank (1) is connected by pipeline with adsorption tank (2), and the outlet of adsorption tank (2) pumps (3) and the by first pressure
Level-one hypergravity rectifier (4) is connected, and gaseous phase outlet and the first condenser (5) of the first order hypergravity rectifier (4) enter
Mouth is connected, and the first condenser (5) outlet is connected by pipeline with the first drainer (6) entrance, first drainer (6)
Outlet is connected by second pressure pump (7) with second level hypergravity rectifier (8), the first order hypergravity rectifier (4)
Kettle liquid outlet is connected with the entrance of subsider (9), and the outlet of the subsider (9) passes through the entrance phase of pipe-and-filter (10)
Even, the outlet of the filter (10) is connected by pipeline and third pressure pump (11) with adsorption tank (2), and the second level is overweight
The gaseous phase outlet of power rectifier (8) is connected with the second condenser (12) entrance, and the second condenser (12) outlet passes through pipeline
It is connected with the second drainer (13) entrance, the second drainer (13) outlet is overweight by the 4th pressure pump (14) and the third level
Power rectifier (15) is connected, and the kettle liquid outlet of the second level hypergravity rectifier (8) passes through pipeline and the 5th pressure pump (16)
It is connected with the first drainer (6), the gas phase entrance of third level hypergravity rectifier (15) is connected with third condenser (17) entrance,
Third condenser (17) outlet is connected by pipeline with finished pot (18) entrance, the kettle of third level hypergravity rectifier (15)
Liquid entrance is connected by pipeline and the 6th pressure pump (19) with the second drainer (13).
2. the system of organic component in hypergravity rectifying recycling stripper according to claim 1, it is characterised in that: described
The revolving speed of first order hypergravity rectifier (4) is 800-1200rmin-1, the revolving speed of second level hypergravity rectifier (8) is
300-600r·min-1, the revolving speed of third level hypergravity rectifier (15) is 600-1000rmin-1。
3. the system of organic component in hypergravity rectifying recycling stripper according to claim 2, it is characterised in that: first
The revolving speed of grade hypergravity rectifier (4) is 900-1000rmin-1；The revolving speed of second level hypergravity rectifier (8) is 300-
450r·min-1；The revolving speed of third level hypergravity rectifier (15) is 800-1000rmin-1。
4. the system of organic component in hypergravity rectifying recycling stripper according to claim 1, it is characterised in that: described
The micro-filtration filter that filter (10) is 0.8-1 μm of precision.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820818933.5U CN208493283U (en) | 2018-05-30 | 2018-05-30 | The system that organic component in stripper is recycled in hypergravity rectifying |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820818933.5U CN208493283U (en) | 2018-05-30 | 2018-05-30 | The system that organic component in stripper is recycled in hypergravity rectifying |
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| Publication Number | Publication Date |
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| CN208493283U true CN208493283U (en) | 2019-02-15 |
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| CN201820818933.5U Active CN208493283U (en) | 2018-05-30 | 2018-05-30 | The system that organic component in stripper is recycled in hypergravity rectifying |
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