CN212623575U - Environment-friendly efficient regeneration device - Google Patents
Environment-friendly efficient regeneration device Download PDFInfo
- Publication number
- CN212623575U CN212623575U CN202021374381.7U CN202021374381U CN212623575U CN 212623575 U CN212623575 U CN 212623575U CN 202021374381 U CN202021374381 U CN 202021374381U CN 212623575 U CN212623575 U CN 212623575U
- Authority
- CN
- China
- Prior art keywords
- film evaporator
- condenser
- water
- thin film
- reboiler
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Abstract
The utility model discloses an environmental protection high efficiency regenerating unit, include: a dehydration system, a thin film evaporation system and a solid-liquid separation and purification system; the outlet of the water storage tank is connected to the top of the thin film evaporator through a second delivery pump to wash the corrosion inhibitor attached on the thin film evaporator and dissolve out high-boiling point water-soluble compounds. The utility model uses the recycled light component water to wash the film evaporator, reduces the adhesion of resist and the like on the film evaporator, improves the evaporation efficiency, and can dissolve the water-soluble high boiling point substances therein to recycle 0-10%/relative waste stripping liquid (such as common preservative sorbitol: boiling point 494.9 ℃). The utility model can recover water, organic matters and high boiling point water-soluble substances, and has high recovery efficiency and low energy consumption.
Description
Technical Field
The utility model relates to an environment-friendly high-efficiency regeneration device.
Background
In general, in the process of manufacturing printed circuit boards, liquid crystal display panels, semiconductor integrated circuits, and the like, it is necessary to completely strip a photoresist from a substrate with a stripping solution at the final stage of a photolithography process, and with the rapid development of the domestic electronic manufacturing industry and the optoelectronic industry, the amount of an electronic chemical such as a photoresist stripping solution used is greatly increased, and a large amount of a waste stripping solution is generated while a large amount of the stripping solution is used. Because the carrier of the stripping solution is an organic solvent, the stripping solution has poor environmental protection property, large load on the environment and high later-stage cost, and if the stripping solution can be reasonably recycled, the cost can be greatly reduced, and the burden on the environment can be reduced. Therefore, the deep research and process discussion of the stripping solution, and the simple and effective treatment mode are especially important for the hazardous waste market of the stripping solution.
Chinese patent CN 108926860A, CN 208340142U, CN 205182227U discloses a method for cutting light component water, heavy component photoresist and metal ions in waste stripping liquid, all of which adopt a rectifying tower to remove the light component water, adopt a film evaporator to separate high boiling point substances such as photoresist and metal ions from organic matters, recover most of organic components, recover the obtained organic components or use the organic components as the photoresist stripping liquid after decoloring, dehydrating and rectifying treatment, although the method has simple process, the method leads to the loss of a large part of organic components when obtaining high content organic components after several times of rectifying, the economic maximization and the maximization utilization can not be realized, and simultaneously, the heat transfer efficiency of the photoresist is rapidly reduced after the concentration of the photoresist reaches a certain degree in the process of evaporating solvent by using the film evaporator, the solvent recovery efficiency is greatly reduced, the treatment energy consumption is obviously increased, and substances such as residual photoresist and the like after the solvent is removed need to be cleaned regularly, so that the process operation efficiency is influenced; chinese patent CN 1421398A discloses a treatment method for separating alkanolamine and organic solvent in waste stripping liquid by using a composite NF membrane with molecular weight of 700-1000-containing-polysulfone and polyacrylonitrile as base materials, wherein the treatment method has low energy consumption, but needs an expensive organic solvent resistant filter membrane, so that the cost is increased, and the photoresist is a polymer which is easy to block the filter membrane to influence the recovery effect of the waste stripping liquid.
SUMMERY OF THE UTILITY MODEL
1. The utility model has the practical purpose.
The utility model provides an environmental protection high efficiency regenerating unit.
2. The technical scheme that this practicality adopted.
An environmentally friendly and efficient regeneration device, comprising: a dehydration system, a thin film evaporation system and a solid-liquid separation and purification system;
the dewatering system comprises: the device comprises a dehydration tower, a first reboiler, a first condenser and a water storage tank, wherein a stripping waste liquid tank is connected with a feed inlet of the dehydration tower through a first conveying pump, a water vapor outlet at the top of the dehydration tower is connected with the first condenser, the first condenser is connected with the water storage tank, the bottom of the dehydration tower is connected with the first reboiler through a circulating pump, and an outlet of the first reboiler is connected with a reboiling inlet at the middle part or the lower part of the dehydration tower;
the film evaporation system comprises a film evaporator, a second reboiler and a second condenser, a discharge hole at the bottom of the dehydration tower is connected with an inlet of the film evaporator through the second reboiler, and a water vapor outlet at the top of the film evaporator is connected with the second condenser;
the solid-liquid separation and purification system comprises: the device comprises a solid-liquid separator, a waste residue storage tank, a decoloring system, a filter and a stripping liquid tank, wherein a material outlet at the bottom of the thin film evaporator is connected with an inlet at the top of the solid-liquid separator;
the outlet of the water storage tank is connected to the top of the thin film evaporator through a second delivery pump.
Preferably, the system further comprises a first vacuum pump, and the first vacuum pump is connected with the first condenser.
Preferably, the system further comprises a second vacuum pump, and the second vacuum pump is connected with the second condenser.
Preferably, the device further comprises a stirring device, and the stirring device is arranged in the stripping liquid tank. The stirring device is used for supplementing organic components in the recovered stripping solution to prepare a new stripping solution.
The utility model also discloses a resist stripper high-efficiency regeneration method, realize based on foretell environmental protection high-efficiency regeneration device, its step includes:
(1) the stripping waste liquid is sent into a dehydrating tower for dehydration, and dehydrated water is condensed by a first condenser and then enters a water storage tank;
(2) the material after preliminary dehydration is heated by a first reboiler and then enters a dehydration tower again for dehydration;
(3) discharging the dehydrated material from the dehydration tower, entering a thin film evaporator through a second reboiler, and separating the organic mixture from the high boiling point substance;
(4) the separated organic mixture is condensed by a second condenser and then enters a stripping liquid tank;
(5) water in the water storage tank enters the thin film evaporator from the top of the thin film evaporator, resists attached to the thin film evaporator are cleaned, high-boiling-point water-soluble compounds are dissolved out at the same time, and the dissolved mixture enters a solid-liquid separator through a bottom valve of the thin film evaporator;
(6) and (3) after the solid-liquid separation, the liquid enters a decoloring system for decoloring, then enters a stripping liquid tank through a filter, and the solid after the solid-liquid separation enters a waste residue storage tank.
Preferably, the dehydration tower works under negative pressure, and the pressure is-0.09 to-0.01 MPa.
Preferably, the pressure of the dehydration tower is-0.08 to-0.04 MPa.
Preferably, the working pressure of the thin film evaporator is negative pressure, and the pressure is-0.07 to-0.01 MPa.
Preferably, the filter has a filter diameter of 0.3 to 0.8 μm.
Preferably, the filter has a filter diameter of 0.4 to 0.6 μm.
3. The utility model has the technical effects.
(1) The utility model can recover water, organic matters and high boiling point water-soluble substances, and has high recovery efficiency.
(2) The utility model can reduce the waste water discharge, and the amount of the waste water is reduced by 5-10% of the waste liquid.
(3) The utility model uses the recycled light component water to wash the film evaporator, reduces the adhesion of resist and the like on the film evaporator, improves the evaporation efficiency, can dissolve the photoresist and other water-soluble high boiling point substances therein for recycling, and the recycled water-soluble high boiling point substances account for 01-10% of the waste stripping liquid (such as common preservative sorbitol: the boiling point is 494.9 ℃).
(4) The utility model has the advantages of less investment, small occupied area and simple flow.
(5) The utility model has the advantages of reducing the temperature, saving the energy consumption, and simultaneously avoiding the pyrolysis of partial organic matters (such as the decomposition of tetramethyl ammonium hydroxide commonly used at 130 ℃, but the boiling point of other similar N-methyl pyrrolidone commonly used is 203 ℃).
(6) The utility model adopts the organic matter to mix and survey the concentration and replace the independent rectification separation of organic solvent to supplement to the mode of stripping liquid demand concentration, reduces the organic matter loss of at least 5% (for useless stripping liquid), reduce cost improves market competition.
(7) Under the condition of moderate negative pressure, the boiling point difference between light component water and other organic matters is large, the separation is simple, the middle feeding part can meet the separation of the light component water and other matters, the middle and lower feeding parts save energy consumption, and the materials (the same amount of waste stripping liquid is treated) needing reboiling of the first reboiler are reduced.
Drawings
FIG. 1 is a schematic structural diagram of an environment-friendly efficient regeneration device.
Description of reference numerals: 1. stripping the waste liquid tank; 2. a first delivery pump; 3. a dehydration tower; 4. a circulation pump; 5. a first reboiler; 6. a first condenser; 7. a first vacuum pump; 8. a water storage tank; 9. a second delivery pump; 10. a second reboiler; 11. a waste residue storage tank; 12. a solid-liquid separator; 13. a thin film evaporator; 14. a decolorizing system; 15: a filter; 16. a stripping liquid tank; 17. a stirring device; 18. a second condenser; 19. a second vacuum pump.
Detailed Description
Example 1
An environmentally friendly and efficient regeneration device, comprising: a dehydration system, a thin film evaporation system and a solid-liquid separation and purification system;
the dewatering system comprises: the device comprises a dehydration tower 3, a first reboiler 5, a first condenser 6 and a water storage tank 8, wherein a stripping waste liquid tank is connected with a feed inlet of the dehydration tower 3 through a first conveying pump 2, a vapor outlet at the top of the dehydration tower is connected with the first condenser 6, the first condenser 6 is connected with the water storage tank 8, the bottom of the dehydration tower is connected with the first reboiler 5 through a circulating pump 4, an outlet of the first reboiler 5 is connected with a reboiling inlet at the middle part or the lower part of the dehydration tower 3, the device also comprises a first vacuum pump 7, and the first vacuum pump 7 is connected with the first condenser 6;
the film evaporation system comprises a film evaporator 13, a second reboiler 10, a second condenser 18, a material outlet at the bottom of the dehydration tower 3 is connected with an inlet of the film evaporator 13 through the second reboiler 10, a material outlet at the upper part of the film evaporator is connected with the second condenser 18, and the film evaporation system also comprises a second vacuum pump 19, wherein the second vacuum pump 19 is connected with the second condenser 18;
the solid-liquid separation and purification system comprises: the device comprises a solid-liquid separator 12, a waste residue storage tank 11, a decoloring system 14, a filter 15 and a stripping liquid tank 16, wherein a material outlet at the bottom of a thin film evaporator 13 is connected with an inlet at the top of the solid-liquid separator 12, a solid material outlet at the bottom of the solid-liquid separator is connected to the waste residue storage tank 11, a liquid material outlet at the bottom of the solid-liquid separator is connected with the decoloring system 14, the decoloring system is connected with the stripping liquid tank 16 through the filter 15, and a material outlet at the upper part of the thin film evaporator 13 is directly connected with the stripping; the device also comprises a stirring device 17, wherein the stirring device 17 is arranged in the stripping liquid tank 16;
the outlet of the water reservoir 8 is connected to the top of the thin film evaporator 13 via a second transfer pump 9.
Example 2
A method for efficiently regenerating a resist stripper, comprising the steps of:
(1) the waste stripping solution is stored in a stripping solution waste solution tank 1, enters a dehydrating tower 3 through a first conveying pump 2 for dehydration, the dehydrating tower works under negative pressure, the pressure is-0.01 to-0.09 MPa, and the dehydrated water is condensed by a first condenser 6 and then enters a water storage tank 8;
(2) the material after preliminary dehydration enters the dehydration tower 3 again through the middle lower pipeline of the dehydration tower for dehydration after being heated by the first circulating pump 4 and the first reboiler 5;
(3) discharging the dehydrated material (with the water content controlled below 1%) from the dehydration tower 3, feeding the material into a film evaporator 13 through a second reboiler 10, and separating the organic mixture from the high boiling point substance, wherein the working pressure of the film evaporator is negative pressure, and the pressure is-0.07 to-0.01 MPa;
(4) the separated organic mixture is condensed by a second condenser 18 and then enters a stripping liquid tank 16;
(5) water in the water storage tank 8 enters the thin film evaporator from the top of the thin film evaporator 13, resists attached to the thin film evaporator are cleaned, high-boiling-point water-soluble compounds are dissolved out at the same time, and the dissolved mixture enters the solid-liquid separator 12 through a bottom valve of the thin film evaporator;
(6) the liquid after solid-liquid separation enters a decoloring system 14 for decoloring, then enters a stripping liquid tank 16 through a filter 15, and the solid after solid-liquid separation enters a waste residue storage tank 11, wherein the filter diameter in the filter is 0.3-0.8 mu m.
This example enables the recovery of water and organic substances (e.g., dimethyl sulfoxide, N-methylpyrrolidone, ethanolamine, dimethyl glycol monoethyl ether, diethylene glycol monopropyl ether, diethylene glycol monobutyl ether, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, dipropylene glycol monopropyl ether, dipropylene glycol monobutyl ether, ethylene glycol propyl ether, ethylene glycol monobutyl ether, etc.) in the waste stripping liquid.
The above embodiments are preferred embodiments of the present invention, but the embodiments of the present invention are not limited to the above embodiments, and any other changes, modifications, substitutions, combinations, and simplifications which do not depart from the spirit and principle of the present invention should be regarded as equivalent replacements and equivalents, and all such modifications are included in the scope of the present invention.
Claims (4)
1. An environment-friendly efficient regeneration device is characterized in that: the method comprises the following steps: a dehydration system, a thin film evaporation system and a solid-liquid separation and purification system;
the dewatering system comprises: the device comprises a dehydration tower, a first reboiler, a first condenser and a water storage tank, wherein a stripping waste liquid tank is connected with a feed inlet of the dehydration tower through a first conveying pump, a water vapor outlet at the top of the dehydration tower is connected with the first condenser, the first condenser is connected with the water storage tank, the bottom of the dehydration tower is connected with the first reboiler through a circulating pump, and an outlet of the first reboiler is connected with a reboiling inlet at the middle part or the lower part of the dehydration tower;
the film evaporation system comprises a film evaporator, a second reboiler and a second condenser, a discharge hole at the bottom of the dehydration tower is connected with an inlet of the film evaporator through the second reboiler, and a water vapor outlet at the top of the film evaporator is connected with the second condenser;
the solid-liquid separation and purification system comprises: the device comprises a solid-liquid separator, a waste residue storage tank, a decoloring system, a filter and a stripping liquid tank, wherein a material outlet at the bottom of the thin film evaporator is connected with an inlet at the top of the solid-liquid separator;
the outlet of the water storage tank is connected to the top of the thin film evaporator through a second delivery pump.
2. The environmentally friendly and efficient regeneration device of claim 1, wherein: the condenser also comprises a first vacuum pump, and the first vacuum pump is connected with the first condenser.
3. The environmentally friendly and efficient regeneration device of claim 1, wherein: the condenser also comprises a second vacuum pump, and the second vacuum pump is connected with a second condenser.
4. The environmentally friendly and efficient regeneration device of claim 1, wherein: still include agitating unit, agitating unit sets up in the cistern of peeling off.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021374381.7U CN212623575U (en) | 2020-07-14 | 2020-07-14 | Environment-friendly efficient regeneration device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021374381.7U CN212623575U (en) | 2020-07-14 | 2020-07-14 | Environment-friendly efficient regeneration device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212623575U true CN212623575U (en) | 2021-02-26 |
Family
ID=74706099
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021374381.7U Active CN212623575U (en) | 2020-07-14 | 2020-07-14 | Environment-friendly efficient regeneration device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212623575U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111694229A (en) * | 2020-07-14 | 2020-09-22 | 苏州市晶协高新电子材料有限公司 | High-efficiency regeneration device and regeneration method for resist stripping liquid |
-
2020
- 2020-07-14 CN CN202021374381.7U patent/CN212623575U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111694229A (en) * | 2020-07-14 | 2020-09-22 | 苏州市晶协高新电子材料有限公司 | High-efficiency regeneration device and regeneration method for resist stripping liquid |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103224260B (en) | Wastewater treatment and recovery method | |
| CN109336803B (en) | Method and system for recovering production solvent from NMP waste liquid | |
| CN212623575U (en) | Environment-friendly efficient regeneration device | |
| CN105152437A (en) | Online extraction and dephenolization method of coal tar wastewater | |
| CN111694229A (en) | High-efficiency regeneration device and regeneration method for resist stripping liquid | |
| CN102161615A (en) | Process for recovering 1,4-butanediol | |
| CN206467171U (en) | Reclaim, purify the device of N methyl pyrrolidones | |
| CN113009794A (en) | Photoresist stripping liquid waste liquid cyclic utilization system | |
| CN102350435A (en) | Novel process for treating indigo alkaline residue | |
| CN101030047A (en) | Anticorrdant stripping waste liquor regeneration method and device | |
| CN205109056U (en) | Sour vapor removal recovery unit of red fuming nitric acid (RFNA) production | |
| CN104788321A (en) | Recycling device and recycling technology of dimethylamine | |
| CN108774110B (en) | Continuous recycling process for desalting waste liquid of BDO device produced by Rebo method after steaming | |
| CN114213290B (en) | Separation and purification process of DMSO-containing organic waste liquid | |
| CN207002611U (en) | The DMF wastewater treatment energy savers that a kind of low pressure heat pump distillation is combined with double-effect rectification | |
| CN214528548U (en) | Resourceful treatment device for high-salt and high-alcohol wastewater in heparin extraction | |
| CN110615494B (en) | Post-treatment device and method for complex DMF wastewater after DMF recovery | |
| CN107129103B (en) | Comprehensive treatment and utilization process and method for furfural production wastewater | |
| CN213537774U (en) | Light component gas recovery device | |
| CN106927596A (en) | The processing method of octanol waste lye | |
| CN219792756U (en) | Device for extracting sodium acetate from PTA continuous wastewater | |
| CN214193102U (en) | N-methyl pyrrolidone's recovery purification device | |
| CN112851541B (en) | Method and device for recovering NMF and MDG from waste photoresist stripping solution | |
| CN213060535U (en) | Permanent purple kneading wastewater treatment device | |
| CN108862432A (en) | A kind of preprocess method of high concentrated organic wastewater |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |