CN208492977U - Multilayered structure flexibility artificial hearing Neural stimulation electrodes - Google Patents
Multilayered structure flexibility artificial hearing Neural stimulation electrodes Download PDFInfo
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Classifications
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
- A61N1/00—Electrotherapy; Circuits therefor
- A61N1/02—Details
- A61N1/04—Electrodes
- A61N1/05—Electrodes for implantation or insertion into the body, e.g. heart electrode
- A61N1/0526—Head electrodes
- A61N1/0541—Cochlear electrodes
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- Health & Medical Sciences (AREA)
- Otolaryngology (AREA)
- Cardiology (AREA)
- Heart & Thoracic Surgery (AREA)
- Engineering & Computer Science (AREA)
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- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
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Abstract
The utility model discloses a kind of multilayered structure flexibility artificial hearing Neural stimulation electrodes, the utility model is according to the cochlea auditory nerve end occupy-place regularity of distribution, using the flexible dielectric films material with biocompatibility, with multilayered structure, via hole, wiring, moulding and etc., design and produce flexible artificial cochlea electrode array component, step specific as follows: (1) flexible thin-film material's specific position via hole (2) electrode layer electrode points occupy-place designs and produces each electrode connecting line of (3) electrode layer water-proofing treatment (4) trace layer, draw pin design (5) electrode connecting line layer water-proofing treatment (6) deformation, form, needle electrode is made.The electrode design production method has the characteristics that multilayered structure, electrode are secured, sensing electrode frequency resolution is high, customizable, electrode needle is very thin, can meet individuation, precision sense of hearing deformity treatment, can dock various types of acoustic coding processors.
Description
Technical field
The utility model relates to a kind of multilayered structure flexibility artificial hearing Neural stimulation electrodes.
Background technique
Opsition dependent is dispersed with the nerve endings of a large amount of receivable external irritants inside cochlea, and external voice signal can pass through sound
Signal acquisition, analysis, coding dock these teleneurons with stimulating electrical signal appropriate, activate auditory nerve conduction path, control
The incompleteness of certain auditory systems is treated, Auditory Perception, such as cochlear implant or artificial cochlea are restored.
Current artificial cochlea electrode negligible amounts, are generally less than 30, these electrodes are with a kind of relatively coarse mapping
Relationship docks auditory nerve end in cochlea, and the conduction of these nerve pathways of external irritant signal activation restores human auditory system perception.By
In the voice acoustical signal the characteristics of, these rough distribution of electrodes can preferably transmit language message, can reach 95% or more
The intelligibility of speech, but still there are many acoustic intelligences abundant to be difficult to normally perceive, such as the tone perception of music, Chinese, artitificial ear
The phonosensitive effect of snail implantation person is to be improved.Wherein, the auditory nerve conducting structure and accurately electrode-of cochlea itself are made full use of
Frequency coding opposite joining relation increases electrode number, meet electrod-array entirety bore it is very thin in the case where, implantation electricity more as far as possible
Pole contact, be precision treatment, improve artificial cochlea sound resolution capability it is highly important.On this basis, recycling is listened
Feel nerve and the very strong self study of brain cognitive system, adaptive ability, can reach closer to normal good hearing and debate audio fruit.
However, being helical form warp architecture inside cochlea, membranous cochlea is narrow, and the sensing electrode for auditory nerve stimulation should have
Good flexibility, and there is long-term biocompatibility.Meanwhile individual patient cochlea shape, size, auditory nerve distribution etc. may tool
There is certain specificity, the electrode structure of individuation should be also extremely important convenient for design, customization；But current cochlear implant electrode
Design and production exist be not easy to increase number of electrodes, not enough securely easy to fall off, individuation electrode design is not easy to realize electrode sometimes
The problems such as.
Utility model content
In order to solve the technical problems existing in the prior art, the utility model discloses a kind of multilayered structure flexibility sense of hearings
Neural stimulation electrodes array.The utility model is according to the cochlea auditory nerve end occupy-place regularity of distribution, using flexible, biocompatibility
Thin-film material designs and produces flexible stimulating electrode array, the side of designing and producing with multilayered structure punching, wiring, moulding
Method, have the characteristics that electrode securely, contact can gather, customizability, electrode entirety caliber it is very thin, individuation, precisely can be met
Change treatment.
The technical solution adopted in the utility model is as follows:
The utility model provides a kind of multilayered structure flexibility auditory nerve stimulating electrode array, including a flexible insulation
Film material plies are conductive metal layers on the upper layer of the flexible dielectric films material layer, in flexible dielectric films material layer
Lower layer is also conductive metal layer；One of conductive metal layer makes electrode layer, another conductive metal layer makes trace layer；Institute
The electrode for the electrode layer production stated is connected to the lead that trace layer makes.
Further, there are also waterproof protective layers on the surface of the conductive metal layer described in two.
Further, all flexible dielectric films material surfaces contacted with tissue in the electrode layer and trace layer
All plus apply one layer of waterproofing protection film.
Further, between flexible dielectric films material layer and conductive metal layer, for the adhesive force for improving metal, can add
Enter one layer of binding material.
Further, in the trace layer design, the design of multilayer trace layer can be used as needed；The multilayer
The Different electrodes of trace layer connection electrode layer.
The production method that the utility model additionally provides a kind of multilayered structure flexibility auditory nerve stimulating electrode array is (unilateral
Processing), specific steps are as follows:
Step 1 provides substrate；In the upper spin coating first layer flexible dielectric films material layer of the substrate, stand solid to it
Change；
Step 2. deposits first layer conductive metal layer in first layer flexible dielectric films material surface, and etches metal
Pattern；
Step 3. spin coating second layer flexible dielectric films material layer on the first layer conductive metal layer；
Via hole is arranged on the component that step 3 obtains in step 4.；
Step 5. deposits second layer conductive metal layer on the surface of second layer flexible dielectric films material layer, and etches gold
Metal patterns；The pattern of via hole connection the first conductive metal layer and the second conductive metal layer in step 4；
Step 6 is removed from hard substrate produces the component that step 5 obtains；
Step 7 moulding.
Further；Using first layer conductive metal layer as trace layer, then the second conductive metal layer is as electrode layer；Electrode
The conductive metal electrode array layout of layer, is designed by printed circuit mode, is made；The conductive metal film line of trace layer draws
Foot layout, is also designed, is made using printed circuit mode；
Further, the method for moulding is in step 7: crimping form by axis of flexible metal wire stent, is formed
Similar long taper of the electrode layer outside, including trace layer, wherein there is the wire stent that can be extracted out.
The utility model additionally provides a kind of production method (bilateral of multilayered structure flexibility auditory nerve stimulating electrode array
Processing), specific steps are as follows:
Step 1 provides substrate；In the upper spin coating first layer flexible dielectric films material layer of the substrate, stand solid to it
Change；
Hole site, and drilling was arranged in the first layer flexible dielectric films material layer in step 2.；
Step 3. deposits first layer conductive metal layer in first layer flexible dielectric films material surface, and etches metal
Pattern；；
Step 4. one layer of spin coating (i.e. the second layer) flexible dielectric films material again on the surface for the component that step 3 obtains
Layer；
Step 5 removes the sample made from hard substrate, and sample is turned (i.e. bottom surface is reversed to above),
And the sample bottom surface that suitable protecting is machined, then be fixed on hard substrate；
Step 5. deposits second layer conductive metal layer in sample upper surface again, and etches metal pattern；Wherein
Via hole connection the first conductive metal layer and the second conductive metal layer pattern.
Step 6 removes above-mentioned production sample from hard substrate.
Step 7；Moulding.
Further；Using first layer conductive metal layer as trace layer, then the second conductive metal layer is as electrode layer；Electrode
The conductive metal electrode array layout of layer, is designed by printed circuit mode, is made；The conductive metal film line of trace layer draws
Foot layout, is also designed, is made using printed circuit mode；
Further, the method for moulding is in step 7: crimping form by axis of flexible metal wire stent, is formed
Similar long taper of the electrode layer outside, including trace layer, wherein there is the wire stent that can be extracted out.
The utility model has the beneficial effects that
1, can plant electrode and number of leads is more: number of leads increase is crucial in electrode fabrication, using above-mentioned production side
Method, can make electrode number can be far more than existing cochlear electrode production method.For example, when round window radius is 0.5mm, snail bottom
Zhou Changyue 3mm is divided into 20um between lead when wire widths are 20um, can cloth go out about 70 leads, and existing artificial cochlea is electric
Pole lead is generally less than 30.
2, electrode is secured: it is stronger using electron beam evaporation, the electrode of deposit manufacture " growing ", it is not easily to fall off；And show
Somebody's work cochlear electrode mostly uses mold to pour fixed electrode, and operation implantation process is easily fallen off.
3, Individual design is more convenient: cochlea circle window aperture varies with each individual, about 0.6mm to 5mm etc., in use
State design and processing method so that electrode entirety caliber is very thin, and can according to individual patients cochlear structures, impaired hearing situation,
Custom stimulation electrode position, selection different-thickness membrane structure, construct the electrode product of individuation, precision.
Detailed description of the invention
The accompanying drawings constituting a part of this application is used to provide further understanding of the present application, and the application's shows
Meaning property embodiment and its explanation are not constituted an undue limitation on the present application for explaining the application.
The multilayered structure of Fig. 1 the utility model, in which: 1-1 electrode layer, 1-2 flexible dielectric films material layer, 1-3 lead
Layer；
The curling, shaping procedure chart of Fig. 2 the utility model, in which: 2-1 is electrode, and 2-2 is lead, and 2-3 is via hole perfusion
Metal sites.
Specific embodiment
It is noted that following detailed description is all illustrative, it is intended to provide further instruction to the application.Unless another
It indicates, all technical and scientific terms used herein has usual with the application person of an ordinary skill in the technical field
The identical meanings of understanding.
It should be noted that term used herein above is merely to describe specific embodiment, and be not intended to restricted root
According to the illustrative embodiments of the application.As used herein, unless the context clearly indicates otherwise, otherwise singular
Also it is intended to include plural form, additionally, it should be understood that, when in the present specification using term "comprising" and/or " packet
Include " when, indicate existing characteristics, step, operation, device, component and/or their combination.
As background technique is introduced, the design and production that cochlear implant electrode exists in the prior art, which exist, to be not easy to increase
Not enough securely easy to fall off, individuation electrode design is not easy the problems such as realizing for power-up number of poles, sometimes electrode, the utility model in order to
Technical problem as above is solved, present applicant proposes a kind of multilayered structure flexibility artificial hearing Neural stimulation electrodes and production sides
Method；
In a kind of typical embodiment of the application, as shown in Figure 1, providing a kind of multilayered structure flexibility artificial hearing
Neural stimulation electrodes；Including a flexible dielectric films material layer 1-2, on the upper layer flexible dielectric films material layer 1-2
It is conductive metal layer, is also conductive metal layer in the lower layer of flexible dielectric films material layer；One of conductive metal layer production
Electrode layer 1-1, another conductive metal layer make trace layer 1-3；What the electrode and trace layer of the electrode layer production made
Lead connection；The mode being specifically connected to is to be connected to electrode layer 1-1 with trace layer 1-3 by the way that via hole is arranged.
Further, the surface of the conductive metal layer described in two is additionally provided with waterproof protective layer.
Further, all flexible dielectric films material surfaces contacted with tissue in the electrode layer and trace layer
All plus apply one layer of waterproofing protection film.
Further, between flexible dielectric films material layer and conductive metal layer, for the adhesive force for improving metal, can add
Enter one layer of binding material.
Further, in the trace layer design, the design of multilayer trace layer can be used as needed；The multilayer
The Different electrodes of trace layer connection electrode layer.
Electrode 2-1 is carved out in electrode layer；Trace layer carves out lead 2-2；Passed through between electrode 2-1 and lead 2-2
Hole 2-3 connection.
The utility model is according to the cochlea auditory nerve end occupy-place regularity of distribution, using flexible, non-biocompatible thin film's material,
With multilayered structure punching, wiring, moulding, flexible electric stimulation electrode array is designed and produced, which has
The features such as electrode is secured, contact can gather, customizability, very thin electrode entirety caliber can meet individuation, precision treatment.
Specific production method includes two kinds, and one is unilateral processing methods；It is specific as follows one is bilateral processing method,
The unilateral processing method of embodiment 1:
Hard substrate (for providing support for whole device in production) is provided
Step 1: one layer of PDMS of spin coating, thickness is optional, for example 100um.
Step 2: depositing one layer of metallic film on it, thickness is optional, for example 75nm.
Step 3: etching required pattern, such as trace layer again.
Step 4: again in one layer of PDMS of above structure surface spin coating, thickness is optional, for example 100um.
Step 5: designing hole site on 4PDMS layers of step again, and punch.
Step 6: redeposited one layer of metallic film, thickness is optional, for example 75nm.
Step 7: etching required pattern, such as electrode layer again.
Step 8: the removing production sample from hard substrate.
Step 9: using flexible metal wire stent as axis crimp form, formed electrode layer outside, including trace layer
Similar long taper, wherein there is the wire stent that can be extracted out；Specific method is shown in attached drawing 2 that crimping it in the direction of the arrow can obtain
To flexible conical cochlear electrode.
2 bilateral processing method of embodiment
Hard substrate (for providing support for whole device in production) is provided
Step 1；One layer of PDMS of spin coating, thickness can be set, for example 100um.
Step 2: designing hole site on PDMS layer, and punch.
Step 3: depositing one layer of metallic film on surface again, thickness is optional, such as: for 75nm
Step 4: etching required pattern, such as trace layer again.
Step 5: one layer of PDMS of spin coating, thickness can be set again, for example 100um.
Step 6: removing the sample made from hard substrate, and sample another side is flipped up, suitable protecting is
Processed sample bottom surface, then be fixed on hard substrate.
Step 7: depositing one layer of metallic film in upper surface again, thickness is optional, for example 75nm.
Step 8: etching required pattern, such as electrode layer.
Step 9: the removing production sample from hard substrate.
Step 10: using flexible metal wire stent as axis crimp form, formed electrode layer outside, including trace layer
Similar long taper, wherein there is the wire stent that can be extracted out.
Flexible dielectric films material described in two of them embodiment is dimethyl silicone polymer (PDMS), certainly, also
Other flexible thin-film materials with similar performance can also be used；It is first precoated before spin coating flexible insulating material layer, on substrate anti-stick
Even layer, facilitates the later period to remove；Deposited metal film uses electron beam evaporation, and selected metal material is answered conductive good, biological
Stability is good, the performances such as soft, for example, golden；It etches smithcraft and uses ultraviolet photolithographic；Etching conductive patterning method is divided into rotation
Resist coating, development, deposited metal, washes away photoresist at exposure.
Via hole perfusion conductive metal in two embodiments can be gold.
PDMS can be used in above-mentioned waterproofing protection layer material.
Electrode layer can use ultraviolet photolithographic technique, expose electrode.
Each electrode contacts shape can be determined by amount of crimp, can be customized by actual requirement, such as annular, u-shaped, rectangular
Deng.
The utility model is according to the cochlea auditory nerve end occupy-place regularity of distribution, using the insulation flexible with biocompatibility
Thin-film material designs and produces flexible artificial cochlea electrode array component with multilayered structure, via hole, wiring, moulding, should
Electrode design production method, with multilayered structure, electrode is secured, sensing electrode frequency resolution is high, customizable, electrode needle is very thin
The features such as, individuation, precision sense of hearing deformity treatment can be met, various types of acoustic coding processors can be docked.
It is above-mentioned although specific embodiments of the present invention are described with reference to the accompanying drawings, but it is not practical new to this
The limitation of type protection scope, those skilled in the art should understand that, based on the technical solution of the present invention, ability
Field technique personnel do not need to make the creative labor the various modifications or changes that can be made still in the protection model of the utility model
Within enclosing.
Claims (5)
1. multilayered structure flexibility artificial hearing Neural stimulation electrodes, which is characterized in that including a flexible dielectric films material layer,
It is conductive metal layer on the upper layer of the flexible dielectric films material layer, is also conductive in the lower layer of flexible dielectric films material layer
Metal layer；One of conductive metal layer makes electrode layer, another conductive metal layer makes trace layer；The electrode layer system
The electrode of work is connected to the lead that trace layer makes.
2. multilayered structure flexibility artificial hearing Neural stimulation electrodes as described in claim 1, which is characterized in that described in two
The surface of conductive metal layer be additionally provided with waterproof protective layer.
3. multilayered structure flexibility artificial hearing Neural stimulation electrodes as described in claim 1, which is characterized in that in the electricity
All flexible dielectric films material surfaces contacted with tissue, which all add, in pole layer and trace layer applies one layer of waterproofing protection film.
4. multilayered structure flexibility artificial hearing Neural stimulation electrodes as described in claim 1, which is characterized in that in flexible insulation
Between film material plies and conductive metal layer, one layer of binding material is added.
5. multilayered structure flexibility artificial hearing Neural stimulation electrodes as described in claim 1, which is characterized in that draw in described
In the design of line layer, the design of multilayer trace layer can be used as needed；The Different electrodes of the multilayer trace layer connection electrode layer.
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| CN2017103593197 | 2017-05-19 | ||
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| CN201710812115.4A Active CN107661571B (en) | 2017-05-19 | 2017-09-11 | Flexible auditory nerve stimulating electrode array with multilayer structure |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107661571A (en) * | 2017-05-19 | 2018-02-06 | 山东大学 | Sandwich construction flexibility artificial hearing Neural stimulation electrodes and preparation method |
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| CN109562259B (en) | 2016-08-11 | 2023-06-27 | 领先仿生公司 | Cochlear implant comprising electrode array and method for manufacturing electrode array |
| CN108261605B (en) * | 2018-02-13 | 2021-07-30 | 山东大学 | Flexible single-layer conductive microstructure artificial cochlea electrode and manufacturing method thereof |
| US11452865B2 (en) | 2019-10-10 | 2022-09-27 | Advanced Bionics Ag | Apparatus and methods for making cochlear implant electrode arrays |
| CN111569259A (en) * | 2019-11-29 | 2020-08-25 | 广东艾诗凯奇智能科技有限公司 | Heating band, massage assembly and neck massager |
| US11471668B2 (en) | 2019-12-21 | 2022-10-18 | Advanced Bionics Ag | Apparatus and methods for making cochlear implant electrode arrays |
| CN111202518B (en) * | 2020-01-15 | 2021-04-13 | 清华大学 | Multi-layer flexible high-density brain electrode and preparation method thereof |
| CN111588372A (en) * | 2020-04-20 | 2020-08-28 | 北京邮电大学 | Method for preparing flexible Electrocardiogram (ECG) electrode |
| CN112587094B (en) * | 2020-12-10 | 2022-06-14 | 微智医疗器械有限公司 | Circuit board, manufacturing method thereof and electronic equipment |
| CN112604153B (en) * | 2020-12-10 | 2024-06-07 | 微智医疗器械有限公司 | Electrode, circuit board and electronic equipment |
| CN113262900A (en) * | 2021-05-12 | 2021-08-17 | 上海大学 | Hollowed-out clamping die for spraying medicine on ear electrode and using method of hollowed-out clamping die |
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| US7146221B2 (en) * | 2001-11-16 | 2006-12-05 | The Regents Of The University Of California | Flexible electrode array for artifical vision |
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| CN105944228B (en) * | 2016-04-25 | 2018-12-28 | 清华大学 | A kind of implanted flexibility nerve electrode and preparation method thereof based on liquid metal |
| CN106182975B (en) * | 2016-07-07 | 2018-04-10 | 清华大学 | A kind of artificial cochlea electrode based on liquid metal and preparation method thereof |
| CN208492977U (en) * | 2017-05-19 | 2019-02-15 | 山东大学 | Multilayered structure flexibility artificial hearing Neural stimulation electrodes |
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2017
- 2017-09-11 CN CN201721156919.5U patent/CN208492977U/en active Active
- 2017-09-11 CN CN201710812115.4A patent/CN107661571B/en active Active
- 2017-09-28 WO PCT/CN2017/103875 patent/WO2018209872A1/en active Application Filing
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107661571A (en) * | 2017-05-19 | 2018-02-06 | 山东大学 | Sandwich construction flexibility artificial hearing Neural stimulation electrodes and preparation method |
| CN107661571B (en) * | 2017-05-19 | 2024-01-30 | 山东大学 | Flexible auditory nerve stimulating electrode array with multilayer structure |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2018209872A1 (en) | 2018-11-22 |
| CN107661571A (en) | 2018-02-06 |
| CN107661571B (en) | 2024-01-30 |
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