JP2009285154A - Peripheral nerve type flexible nerve electrode and its manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To achieve the enhancement of the productivity of a peripheral nerve type flexible nerve electrode and the enhancement of the affinity to a living body. <P>SOLUTION: The implantation type flexible nerve electrode is constituted by a first insulating layer 11 including a photosensitive flexible insulating material, a second insulating layer 12 including the photosensitive flexible insulating material, a second insulating layer 12 including the photosensitive flexible insulating material and a plurality of the electrode wires 13 formed on the first insulating layer 11 and covered with the second insulating layer 12. The respective electrode wires 13 are formed of the electrode part 14 exposed from the second insulating layer 12 and the wiring part 15 not exposed from the second insulating layer 12, and the first and second insulating layers 11 and 12 are modified so that the surfaces of them are made hydrophilic and have a plurality of common through-holes 16 at parts where a plurality of the electrode wires 13 are not present. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a peripheral nerve type flexible nerve electrode using a photosensitive flexible insulating material and a method for manufacturing the same.

As a typical peripheral nerve type nerve electrode used to give electrical stimulation to peripheral nerve cells in various parts of the body and to measure electrical activity, it is made from an insulating material such as silicon using a microfabrication technology. (See Non-Patent Document 1) is known. Peripheral nerve-type nerve electrodes include an insertion type that inserts a nerve electrode into a nerve bundle, a cuff type that winds the nerve electrode around the nerve bundle, and an electrode hole arranged in the regeneration path using the self-regenerative function of a cut nerve fiber There is a regeneration type that passes nerve fibers. However, when a peripheral nerve type nerve electrode made of a material such as hard silicon is placed or fixed to the peripheral nerve, it cannot follow the movement of the peripheral nerve or the surrounding area of the peripheral nerve, damage the living tissue, or measure or stimulate There has been a problem that it is difficult to perform stable measurement or stimulation by killing the target nerve or by inviting movement outside the measurement or stimulation possible range. Therefore, peripheral nerve type flexible nerve electrodes (see Non-Patent Document 2) using a flexible insulating material such as parylene and polyimide have been developed in order to improve followability to movement around peripheral nerves and indwelling portions.
Tayfun Akin et al. "A Micromachined Silicon Sieve Electrode for Nerve Regeneration Applications", IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING, APRIL 1994, VOL.41, No.4, p.305-313 Francisco J. Rodriguez et al. "Polyimide cuff electrodes for peripheral nerve stimulation", Journal of Neuroscience Methods, 2000, 98, p105-118

The conventional peripheral nerve type flexible nerve electrode and its manufacturing process have the following problems.
(1) Manufacturing process is complicated and manufacturing is not easy FIGS. 11A to 11C show a manufacturing process of a conventional peripheral nerve type flexible nerve electrode. In this step, by laminating various materials on the substrate, etching, and the like, the electrode wiring 13 made of metal is finally formed of two layers of insulators (first insulator 11 and second insulator 11) as shown in S120. This is an example of obtaining a finished product sandwiched between the insulators 12). However, as can be seen from FIG. 11, the production process is very complicated and the production is not easy. This is because a step of performing dry etching such as plasma etching or reactive ion etching (S108 to S119) is indispensable for forming the flexible insulating material that exposes the electrode and sandwiches the electrode into a predetermined shape. is there. When forming a finished product in which the electrode wiring is sandwiched between two layers of insulators of the same material by laminating and etching various materials on the substrate, for example, the state as shown in the sectional view of FIG. When molding from (corresponding to the state after S107) to the outer shape as shown in the sectional view of FIG. 12B and the electrode 14 is exposed (corresponding to the state after S119), the same material is used. The first insulating layer 11 and the second insulating layer 12 need to be etched with two film thicknesses x and y. In dry etching such as plasma etching and reactive ion etching, different films are formed of the same material in one step. It is impossible in principle to perform dry etching to a thickness. Specifically, the film thickness y that should be removed to expose the electrode 14 from the second insulating layer 12 is different from the film thickness x that should be removed in order to form the outer shape of both insulating layers in a predetermined shape. However, dry etching cannot be performed in a single step. Therefore, in order to dry-etch the same material to different thicknesses, it has been indispensable to go through multiple dry etching steps.

(2) Many etching processes and large alignment errors In the conventional peripheral nerve type flexible nerve electrode manufacturing process, the alignment mark is deformed by the influence of the dry etching process, and the resulting alignment error is caused by multiple etching processes. Since it increases cumulatively, stable microfabrication is difficult.
(3) The manufacturing cost including the dry etching apparatus and its maintenance is high, and it is difficult to manufacture at low cost. The electrode is exposed using a flexible insulating material such as parylene or polyimide, and the peripheral nerve type flexible nerve electrode is formed in a predetermined shape. In order to form the film, a dry etching process is indispensable as described in the above (1). However, the etching apparatuses necessary for the dry etching process and their maintenance costs are expensive and difficult to manufacture at a low cost.

(4) Since it is difficult to make the electrode wiring multi-layered, the area of the peripheral nerve type nerve electrode increases with an increase in the number of electrode channels. As described in (1) above, in the conventional manufacturing method, the same material is made of different films. Since the manufacturing process becomes complicated in order to process the thickness, it is actually difficult to form the peripheral nerve type flexible nerve electrode in an arbitrary shape, for example, to multilayer the electrode part and the wiring part. . Therefore, in order to increase the number of electrode channels, the area of the peripheral nerve type flexible nerve electrode has to be increased.
(5) In the regeneration type peripheral nerve type flexible nerve electrode, the nerve electrode cannot be properly placed at the position of the Lambier diaphragm for the nerve bundle in which the Lambier diaphragm is irregularly arranged for each nerve fiber.

  FIG. 10 shows the arrangement state of the electrode portion 14 of the peripheral nerve type flexible nerve electrode arranged in the nerve fiber around the diaphragm of the Lambier. Measurement and stimulation of peripheral nerves having myelinated nerve fibers are performed through a Lambier diaphragm 95 that is a constricted portion between each of a plurality of myelin sheaths 96 that are insulators. As described in (4) above, since it was difficult to make the electrode wiring multi-layered in this manufacturing method, the electrode portions 14 could not be arranged at a high density due to the space, so that each nerve fiber was not suitable. It has been difficult to appropriately arrange the electrode portion 14 at the position of the Lambier diaphragm ring 95 with respect to the nerve bundle in which the Lambier diaphragm ring 95 is regularly arranged. For example, in the example of FIG. 10, the number of the electrode portions 14 and the Lambier diaphragms 95 are both three, but due to the irregular arrangement of the Lambier diaphragms 95, one of the three electrode units 14. The Lambier diaphragm 95 can only be captured at 14a, and the remaining two electrode portions 14b cannot be captured.

(6) There is no mechanism that stabilizes the position of the insertion type peripheral nerve type soft nerve electrode in the peripheral nerve tissue, and the position shift occurs during use. Inability to follow movement, damage to living tissue, kill peripheral nerves to be measured or stimulated, and induce movement outside of the measurement or stimulation possible range. It was difficult to stimulate.
(7) Because of low cell adhesion to peripheral nerve tissue, it is difficult to reduce scarring and inflammation of peripheral tissue around the placed or fixed peripheral nerve type flexible nerve electrode. Insulating materials such as silicon, parylene, and polyimide have low cell adhesion regardless of the hardness of the insulating material, and promote the foreign body reaction of the living body. It was difficult to reduce inflammation.
(8) No mechanism to recover peripheral nerve tissue damaged by insertion of peripheral nerve type flexible nerve electrode Conventional peripheral nerve type flexible nerve electrode has a mechanism to recover peripheral nerve tissue damaged by insertion and placement. Not done.

  An object of the present invention is to provide a peripheral nerve type flexible nerve electrode and a method for producing the same, which can be easily and inexpensively manufactured, and which can solve the above-described conventional problems by an appropriate design and mechanism. is there.

  The peripheral nerve type flexible nerve electrode of the present invention is formed on a first insulating layer made of a photosensitive flexible insulating material, a second insulating layer made of a photosensitive flexible insulating material, and a second insulating layer. And a plurality of electrode wirings covered with an insulating layer. Each electrode wiring is composed of an electrode portion exposed from the second insulating layer and a wiring portion not exposed, and the first insulating layer and the second insulating layer have a surface modified to be hydrophilic, A plurality of common through holes are provided in a portion where no electrode wiring exists.

  According to the peripheral nerve type flexible nerve electrode and the manufacturing method thereof of the present invention, the peripheral nerve type flexible nerve electrode can be manufactured inexpensively and easily, and the problems of the conventional peripheral nerve type flexible nerve electrode can be solved. Therefore, stable measurement and stimulation can be performed for a longer period than conventional ones.

[First Embodiment]
FIG. 1 (a) is a top view, FIG. 1 (b) is a bb cross-sectional view, and FIG. 1 (b) is a cc cross-sectional view of an embodiment of the insertion type peripheral nerve type flexible nerve electrode 10 of the present invention. FIG. 2 (c) shows a usage image.
As shown in FIG. 1, the insertion type peripheral nerve type flexible nerve electrode 10 of the present invention includes a first insulating layer 11, a second insulating layer 12, and a plurality of electrodes each including an electrode portion 14 and a wiring portion 15. As shown in FIG. 2, the nerve fiber 92 that is in contact with or close to the electrode portion 14 is electrically connected by being inserted into a nerve bundle 91 including a plurality of nerve fibers 92 as shown in FIG. 2. The electrical activity of the nerve fiber 92 is measured.

  The first insulating layer 11 and the second insulating layer 12 are laminated with the same photosensitive flexible insulating material and the same outer shape as shown in FIG. Since the insertion type peripheral nerve type flexible nerve electrode 10 is used by being inserted into the nerve bundle, the first insulating layer 11 and the second insulating layer 12 have an outer shape that is easy to insert into the nerve bundle, for example, one end in the longitudinal direction. It has a tapered shape. The surfaces of the first insulating layer 11 and the second insulating layer 12 are modified to be hydrophilic by ashing or blasting. Further, a plurality of electrode wirings 13 are sandwiched between the first insulating layer 11 and the second insulating layer 12, and as shown in FIGS. 1A and 1B, the first insulating layer 11 and the second insulating layer 11 are interposed. A plurality of through holes 16 are formed in a portion of the layer 12 where the electrode wiring 13 is not provided.

  By applying the photosensitive flexible insulating material, the flexible insulating material can be molded into a predetermined shape by directly performing exposure and development processing on the flexible insulating material, so that a complicated dry etching process can be omitted. As a result, the manufacturing process of the peripheral nerve type flexible nerve electrode is simplified and can be easily manufactured. A specific manufacturing process will be described later. Further, the omission of the dry etching process eliminates the need for a dry etching apparatus and its maintenance cost, thereby reducing the manufacturing cost. Examples of the photosensitive insulating material to be applied include photosensitive polyimide, photosensitive polyamide, photosensitive polyester, photosensitive benzocyclobutene, photosensitive parylene, photosensitive epoxy, and photosensitive acrylate. Among these, it is more preferable to use photosensitive polyimide which is an imide-based material that is easy to process and has a long history of use.

  In addition, since the surfaces of the first insulator 11 and the second insulator 12 are hydrophobic at the time of production and have poor adhesion to cells, the hydrophilicity can be increased by modifying the surfaces by ashing or blasting. The adhesion between the peripheral nerve type flexible nerve electrode and the cell can be improved. As a result, in addition to suppressing the foreign body reaction of the living body, it can reduce scarring and inflammation around the implanted flexible nerve electrode placed in the brain, thus improving biocompatibility and stable for a long time Measurement and stimulation can be realized.

  Further, by providing a plurality of through holes 16 in the first insulator 11 and the second insulator 12 to form a peripheral nerve type flexible nerve electrode in a network structure, the mesh after the peripheral nerve type flexible nerve electrode is placed in the brain. Brain tissue penetrates into the voids of the structure and integrates with the brain tissue to suppress damage due to deviations in movement of the brain tissue, death of the nerve that is the object of measurement or stimulation, and movement outside the measurement or stimulation possible range It becomes possible. In addition, by fixing a drug that recovers damaged brain tissue in the space of the through hole 16 before insertion, the recovery of brain tissue damaged by the drug that is gradually released after insertion is promoted. be able to. Even if the drug is fixed in this way, it becomes a void again after the drug is slowly released, and as a result, the brain tissue enters as described above, so that the integration of the peripheral nerve type flexible nerve electrode and the brain tissue is realized. The The number, size, and shape of the through holes 16 may be appropriately set according to the strength and rigidity required for each scene where the peripheral nerve type flexible nerve electrode is used.

The electrode wiring 13 is composed of an electrode portion 14 and a wiring portion 15, and the electrode portion 14 is exposed from the second insulating layer 12 in an arbitrary shape as shown in FIGS. Contact with the nerve to be stimulated. The unexposed wiring portions 15 are arranged so as not to short-circuit each other. Examples of the electrode material include platinum (Pt), gold (Au), titanium dioxide (TiO ₂ ), silver oxide (Ag ₂ O), tungsten (W), tin-added indium oxide (Indium Tin Oxide), and tin oxide (SnO). ₂ ), chromium (Cr), copper (Cu), nickel (Ni), aluminum (Al) and the like. Among these, platinum or gold is preferable because it is easy to finely process and has high conductivity and flexibility.

<Production method>
3A and 3B show the manufacturing process of the peripheral nerve type flexible nerve electrode of the present invention, and FIG. 4 shows the diameter of the electrode portion 14 of the insertion type peripheral nerve type flexible nerve electrode 10 completed through such a manufacturing process. The relationship with the electrode impedance is shown respectively. Hereinafter, the manufacturing process will be described with reference to FIG. Although FIG. 3 shows the case where the photosensitive material is a negative type, a positive type may be used depending on the situation.

S1: The first insulating layer 11 is formed on the semiconductor or glass substrate 21. S2: The first insulating layer 11 is exposed and developed using the mask 27 on which the outer shape of the first insulating layer 11 is drawn. 11: S3: Metal layer 22 is formed on the entire surface S4: Photoresist layer 23 is formed on the entire surface S5: Photoresist layer 23 is exposed and developed using mask 24 on which the shape of electrode wiring 13 is drawn

S6: The metal layer 22 is etched by the photoresist layer 23 left by exposure / development to form the shape of the electrode wiring 13 S7: The photoresist layer 23 is removed S8: The second insulating layer 12 is formed on the entire surface S9: The second insulating layer 12 is exposed and developed using a mask 29 on which a predetermined shape of the second insulating layer 12 is drawn, and the shape of the second insulating layer 12 is molded S10: the finished product is peeled from the substrate 21

  As described above, by using a photosensitive flexible insulating material, a peripheral nerve type flexible nerve electrode can be easily formed by a simple manufacturing process without going through a complicated dry etching process as shown in S108 to S119 of FIG. Can be produced. Further, since the dry etching process is not included, deformation of the alignment mark due to the influence of dry etching is avoided, and the alignment error can be reduced. Therefore, it is possible to produce a peripheral nerve type flexible nerve electrode by stable microfabrication.

  The insertion-type peripheral nerve type flexible nerve electrode 10 manufactured in this way has an electrode impedance suitable for measurement and stimulation in correlation with the diameter of the electrode part 14 as shown in FIG. Even so, it has the same performance as the conventional manufacturing method.

[Second Embodiment]
In the first embodiment, the embodiment has been clarified in the case where the electrode wiring including the electrode portion is a single layer. However, by using a photosensitive flexible insulating material, the number of processes is greatly reduced, and the alignment mark is deformed. Since it is not necessary to consider the problem of error, it is possible to easily realize the multilayered electrode wiring, which is difficult with the conventional method. By increasing the number of layers within the allowable range, it is possible to suppress an increase in the area due to the congestion of the wiring parts of the plurality of electrode wirings, so the number of electrodes per unit area can be increased and the same number of electrodes. If so, the area can be reduced. If the volume can be reduced in total with the thickness, invasive damage to the peripheral nerve tissue can be reduced as compared with the conventional one. Even if the number of layers is increased, the first insulating layer is a thin film, and the adhesion between the measurement / stimulation target and the electrode is high. Therefore, the influence on measurement and stimulation can be almost ignored.

<Production method>
FIG. 5 shows an example of a process of forming a peripheral nerve type flexible nerve electrode having one layer of electrode wiring into two layers. It can be realized by repeating the same process for three or more layers. Hereinafter, a manufacturing process of the peripheral nerve type flexible nerve electrode 50 having two layers of electrode wiring will be described with reference to FIG.
S51: The metal layer 51 is formed on the entire surface. S52: The photoresist layer 52 is formed on the entire surface. S53: The mask 54 on which predetermined shapes of the second-layer electrode wiring 53 and the first-layer electrode portion 14 are drawn is used. Then, the photoresist layer 52 is exposed and developed S54: The metal layer 51 is etched by the remaining photoresist layer 52 to form the second electrode wiring 53 S55: The second insulating layer 55 of the second layer is formed on the entire surface. S56: Exposure / development of the second insulating layer 55 of the second layer using the mask 56 on which a predetermined shape (outer shape and electrode portion 57 of the second layer) of the second insulating layer 55 of the second layer is drawn.

[Third Embodiment]
FIG. 6 (a) is a top view, FIG. 6 (b) is a bb cross-sectional view, and FIG. 7 shows a state of attachment to a nerve bundle, for an embodiment of the cuff type peripheral nerve type flexible nerve electrode 60 of the present invention. Show.
The cuff type peripheral nerve type flexible nerve electrode 60 of the present invention is composed of a first insulating layer 11, a second insulating layer 12, and a plurality of electrode wirings 13 each including an electrode part 14 and a wiring part 15, As shown in FIG. 7, by wrapping around the nerve bundle 91, the electrode unit 14 in contact with or approaching the nerve bundle 91 electrically stimulates the nerve bundle 91, and measures the electrical activity of the nerve bundle 91. . The functions and materials of the first insulating layer 11, the second insulating layer 12, and the electrode wiring 13 are the same as those of the insertion type peripheral nerve type flexible nerve electrode 10 of the first embodiment, and thus the same reference numerals are given. However, the description of the overlapping parts is omitted. The same applies to the following embodiments.

As shown in FIG. 6A, the cuff-type peripheral nerve type flexible nerve electrode 60 is attached to the nerve bundles of the first insulating layer 11 and the second insulating layer 12 so as to be fixed when wound around the nerve bundle 91. A pair of protrusions 61 and hooking holes 62 are provided at both end edge line portions that are in contact with each other when wound, and can be fixed by hooking the protrusions 61 into the hooking holes 62 as shown in FIG.
The method for producing the cuff type peripheral nerve type flexible nerve electrode 60 is the same as the method for producing the insertion type peripheral nerve type flexible nerve electrode 60 shown in the first embodiment, and is shown in the second embodiment. The same method can be applied to the multilayered method of electrode wiring. Accordingly, an increase in area due to the congestion of the wiring portions of the plurality of electrode wirings can be suppressed, so that the number of electrodes per unit area can be increased, and the area can be reduced with the same number of electrodes.

[Fourth Embodiment]
FIG. 8 (a) is a top view, FIG. 8 (b) is a cross-sectional view taken along the line bb, and nerve fibers are connected to the electrode portion of the regeneration type peripheral nerve type flexible nerve electrode 70 of the present invention. The attached state is shown in FIG.
The regeneration-type peripheral nerve type flexible nerve electrode 70 of the present invention includes a first insulating layer 11, a second insulating layer 12, and a plurality of electrode wires 13 each including an electrode portion 14 and a wiring portion 15. The Further, the first insulating layer 11, the second insulating layer 12, and the plurality of electrode wirings 13 are provided with a common through hole 71 through which the peripheral nerve fiber 92 can pass in the central portion of the electrode portion 14. In the regeneration type peripheral nerve type flexible nerve electrode 70, the cut peripheral nerve fibers 92 are regenerated and connected through the through hole 71 in the regeneration path by the self regeneration function. As a result, the peripheral nerve fiber 92 is in contact with the electrode portion 14 in the through hole 71, and electrical stimulation to the peripheral nerve fiber 92 and measurement of the electrical activity of the peripheral nerve fiber 92 are possible. In actual use, as shown in FIG. 9, guide tubes 72 for supporting a nerve bundle 91 composed of a plurality of peripheral nerve fibers 92 are attached to both sides.

  The method for producing the regeneration-type peripheral nerve-type flexible nerve electrode 70 is also the same as the method for producing the insertion-type peripheral nerve-type flexible nerve electrode 60 shown in the first embodiment. The same method can be applied to the multilayered method of electrode wiring shown. Therefore, for example, as shown in the cross-sectional view of FIG. 8C, a large number of electrode wirings 13 and second insulating layers 12 are laminated in a cylindrical shape so that a large number of electrode portions and insulating portions are arranged at appropriate intervals. Is possible. In addition, since it is possible to arrange a large number of electrode parts in this way, the nerve bundle in which the Lambier's diaphragm 95 is irregularly arranged for each myelinated nerve fiber as shown in FIG. However, it is possible to appropriately arrange the electrode portion 14 at the position of the diaphragm of the Lambier 95, so that stimulation and measurement of the peripheral nerve can be realized appropriately.

  This is particularly useful when it is desired to perform electrical stimulation on peripheral nerves in various parts of the body or measurement of electrical activity of peripheral nerves for a long period of time safely and accurately.

The figure which shows the structural example of the peripheral nerve type | mold flexible nerve electrode 10 of 1st Embodiment. The figure which shows the use image of the peripheral nerve type | mold flexible nerve electrode 10 of 1st Embodiment. The figure which shows the example of a manufacturing process of the peripheral nerve type flexible nerve electrode of this invention (1/2) The figure which shows the manufacturing process example of the peripheral nerve type | mold flexible nerve electrode of this invention (2/2) The figure which shows the example of the relationship between the diameter of the electrode part 14 of the peripheral nerve type | mold flexible nerve electrode 10 of 1st Embodiment, and electrode impedance. The figure which shows the production example of the peripheral nerve type | mold flexible nerve electrode 50 of 2nd Embodiment. The figure which shows the structural example of the peripheral nerve type | mold flexible nerve electrode 60 of 3rd Embodiment. The figure which shows the mounting state of the peripheral nerve type flexible nerve electrode 60 of 3rd Embodiment. The figure which shows the structural example of the peripheral nerve type | mold flexible nerve electrode 70 of 4th Embodiment. The figure which shows the mounting state of the peripheral nerve type | mold flexible nerve electrode 70 of 4th Embodiment. The figure which shows the arrangement state of the electrode part around the diaphragm of Lambier The figure which shows the example of a manufacturing process of the conventional peripheral nerve type soft nerve electrode (1/3) The figure which shows the example of a manufacturing process of the conventional peripheral nerve type soft nerve electrode (2/3) The figure which shows the example of a manufacturing process of the conventional peripheral nerve type soft nerve electrode (3/3) Diagram showing the need to etch the same material with two film thicknesses

Claims (6)

A first insulating layer made of a photosensitive flexible insulating material;
A second insulating layer made of a photosensitive flexible insulating material;
A plurality of electrode wires formed on the first insulating layer and covered with the second insulating layer;
Consisting of
Each of the electrode wirings comprises an electrode part exposed from the second insulating layer and a wiring part not exposed,
The first insulating layer and the second insulating layer have a tapered shape at one end in the longitudinal direction of the outer shape, the surface is modified to be hydrophilic, and a plurality of common through holes are provided in a portion where the plurality of electrode wirings are not present. A peripheral nerve type flexible nerve electrode. A first insulating layer made of a photosensitive flexible insulating material;
A second insulating layer made of a photosensitive flexible insulating material;
A plurality of electrode wires formed on the first insulating layer and covered with the second insulating layer;
Consisting of
Each of the electrode wirings comprises an electrode part exposed from the second insulating layer and a wiring part not exposed,
Peripheral nerve type flexible nerves in which the first insulating layer and the second insulating layer have a shape in which both end edge line portions in contact with each other when wound around a nerve bundle can be fixed to each other and the surfaces are modified to be hydrophilic electrode. A first insulating layer made of a photosensitive flexible insulating material;
A second insulating layer made of a photosensitive flexible insulating material;
A plurality of electrode wires formed on the first insulating layer and covered with the second insulating layer;
Consisting of
Each of the electrode wirings comprises an electrode part exposed from the second insulating layer and a wiring part not exposed,
The peripheral nerve type flexible nerve, wherein the first insulating layer, the second insulating layer, and the electrode wiring have a common through hole through which a peripheral nerve fiber can pass in a central portion of each of the electrode portions. electrode. The peripheral nerve type flexible nerve electrode according to any one of claims 1 to 3,
A peripheral nerve type flexible nerve electrode, wherein the plurality of electrode wirings are multi-layered. A first insulating layer forming step of forming a photosensitive first insulating layer on the substrate;
A first insulating layer processing step of processing the first insulating layer into a predetermined shape by exposing and developing the first insulating layer using a mask on which the predetermined shape of the first insulating layer is drawn;
A metal layer forming step of forming a metal layer on the entire surface formed in the first insulating layer processing step;
A photoresist layer forming step for forming a photoresist layer over the entire surface formed in the metal layer forming step;
An electrode wiring drawing step of exposing and developing the photoresist layer using a mask on which a predetermined shape of the electrode wiring is drawn;
An electrode wiring processing step for etching the metal layer with the photoresist layer exposed and developed in the electrode wiring drawing step to process it into a predetermined shape of the electrode wiring;
A photoresist removal step to remove the photoresist layer;
A second insulating layer forming step of forming a photosensitive second insulating layer on the entire surface formed by the above steps;
A second insulating layer processing step of processing the second insulating layer into a predetermined shape by exposing and developing the second insulating layer using a mask on which the predetermined shape of the second insulating layer is drawn;
A substrate peeling step for peeling the peripheral nerve type flexible nerve electrode formed by the execution of each step from the substrate;
Peripheral nerve type flexible nerve electrode manufacturing method. In the method for producing a peripheral nerve type flexible nerve electrode according to claim 5,
Between the second insulating layer processing step and the substrate peeling step, each step from the metal layer forming step to the second insulating layer processing step is performed for a desired number of layers of the electrode wiring. A method for producing a peripheral nerve type flexible nerve electrode, characterized in that the method is repeatedly performed in step S1.

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