CN208477288U - The conveying device of exposure machine and wiring board - Google Patents
The conveying device of exposure machine and wiring board Download PDFInfo
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- CN208477288U CN208477288U CN201821106930.5U CN201821106930U CN208477288U CN 208477288 U CN208477288 U CN 208477288U CN 201821106930 U CN201821106930 U CN 201821106930U CN 208477288 U CN208477288 U CN 208477288U
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- 230000005540 biological transmission Effects 0.000 claims description 29
- 230000003028 elevating effect Effects 0.000 claims description 18
- 230000033001 locomotion Effects 0.000 abstract description 16
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 230000009471 action Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 2
- 230000003139 buffering effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 235000013399 edible fruits Nutrition 0.000 description 2
- 230000004069 differentiation Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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Abstract
The utility model discloses the conveying device of a kind of exposure machine and wiring board, which includes: the first roller；Second roller, second roller and the first roller relative spacing are arranged and cooperatively form the transfer passage for conveying circuit plate；Rotary drive mechanism, the rotary drive mechanism are connect, for rotating second roller around the axis of second roller with second roller driving；Displacement detecting element, the displacement detecting element is for detecting displacement of the wiring board in the transfer passage；And controller, the controller are electrically connected with the displacement detecting element and projection exposure system therefor.The conveying device enables to the movement of projection exposure system therefor and wiring board to be consistent, and exposure efficiency and exposure quality is improved, to guarantee the quality of production of exposure machine.The exposure machine uses above-mentioned conveying device, has higher exposure efficiency and exposure quality.
Description
Technical field
The utility model relates to wiring board exposure device technical fields, and in particular to a kind of exposure device and wiring board it is defeated
Send device.
Background technique
Exposure directly affects wiring board as very the key link, the quality of exposure quality in wiring board manufacturing process
The quality of production.For wiring board during carrying out double-sided exposure, traditional mode of movement is to utilize two blocks of opposite transparent glass
Plate clamps wiring board, is moved using wiring board of the motor driven after clamped to complete step of exposure, traditional conveying
In mode, the location information of wiring board can not be accurately obtained, so that projection exposure system therefor can not keep one with the movement of wiring board
It causes, causes exposure efficiency and exposure quality not high.
Summary of the invention
Based on this, it is necessary to provide the conveying device of a kind of exposure machine and wiring board.The conveying device enables to project
The movement of exposure system and wiring board is consistent, and exposure efficiency and exposure quality is improved, to guarantee the production matter of exposure machine
Amount.The exposure machine uses above-mentioned conveying device, has higher exposure efficiency and exposure quality.
Its technical solution is as follows:
A kind of conveying device of wiring board, comprising: the first roller；Second roller, second roller and first roller
Wheel relative spacing is arranged and cooperatively forms the transfer passage for conveying circuit plate；Rotary drive mechanism, the rotary driving machine
Structure is connect, for rotating second roller around the axis of second roller with second roller driving；Displacement detecting
Element, the displacement detecting element is for detecting displacement of the wiring board in the transfer passage；And controller, the control
Device processed is electrically connected with the displacement detecting element and projection exposure system therefor.
The conveying device of above-mentioned wiring board is in use, rotary drive mechanism turns the second roller around the central axis of itself
Dynamic, so that wiring board be driven to enter in transfer passage, after wiring board enters transfer passage, the second roller and the first roller are to route
Plate is squeezed, and the first roller is also therewith around the center axis thereof of itself, so that wiring board is driven to move along direction of feed, line
Road plate is in the process of movement measured in real time the displacement of wiring board and position using displacement detecting element and will test knot
Fruit is transmitted to controller, and when wiring board is transported to predeterminated position, controller controls projection exposure system therefor work to wiring board
It is exposed, so that the movement of projection exposure system therefor and wiring board is consistent, ensure that exposure efficiency and exposure quality.
Meanwhile needing reset motor compared to traditional just and can be carried out the conveying of wiring board, under the action of the first roller and the second roller,
Continual wiring board can be conveyed to be exposed, further improve exposure efficiency.
Technical solution is illustrated further below:
The conveying device further includes elevating mechanism in one of the embodiments, the elevating mechanism and first roller
Wheel is sequentially connected, for driving first roller to move back and forth along the direction close to or far from second roller；When described
When elevating mechanism is in first state, first roller and second roller cooperatively form the transfer passage；When described
When elevating mechanism is in the second state, first roller is arranged far from second roller and cooperatively forms feeding channel.It rises
The setting of descending mechanism so that the relative positional relationship between the first roller and the second roller changes, it is convenient to wiring board into
Row transport and exposure.
First roller at least two in one of the embodiments, at least two first rollers are described in
The direction of feed relative spacing of wiring board is arranged, and at least two first rollers are set to the top of the wiring board；Institute
The second roller at least two is stated, at least two second rollers are arranged along the direction of feed relative spacing, and at least two
Between second roller is set to the lower section of the wiring board, and each second roller is opposite with first roller
Every being arranged and cooperatively form the transfer passage.
The conveying device further includes transmission belt in one of the embodiments, the transmission belt and each second roller
The rotary output of wheel and the rotary drive mechanism is sequentially connected.The first roller and rotary driving machine are realized using transmission belt
The transmission connection of structure, stable transmission have the function of buffering absorbing.
The conveying device further includes strainer in one of the embodiments, and the strainer is described for adjusting
Tensile force between transmission belt and second roller and/or the tensile force between the rotary output.Utilize tensioning device
Structure is to adjust transmission belt and the second roller or the tensile force between the rotary output of rotary drive mechanism, so that the second roller
The problem of being in the course of rotation not in idle running or skidding, guarantees the Stability and veracity of transmission.
The strainer includes at least one tensioning wheel in one of the embodiments, and two adjacent described second
A tensioning wheel is equipped between roller, the tensioning wheel is set to the lower section of second roller, and the tensioning wheel with
The transmission belt transmission connection.Tensile force is adjusted using tensioning wheel, one is arranged between two adjacent the second rollers
Tensioning wheel, so that the regulative mode and regulator site of tensile force are more flexible.
The projection exposure system therefor includes exposing for the upper surface to the wiring board in one of the embodiments,
First light engine of light and the second light engine being exposed for the lower surface to the wiring board, first optics
Engine and second light engine are each perpendicular to the wiring board setting, and first light engine and second optics
Engine is electrically connected with the controller.It is adequately exposed using upper surface of first light engine to wiring board, benefit
It is adequately exposed with lower surface of second light engine to wiring board, so that wiring board can carry out two-sided exposure simultaneously
Light improves exposure efficiency.
First light engine at least two in one of the embodiments, and at least two first optics
Engine is arranged along the length direction relative spacing of first roller；Second light engine at least two, and at least two
A second light engine is arranged along the length direction relative spacing of second roller.At least two first light engine edges
The length direction relative spacing of first roller is arranged, and ensure that wiring board can obtain sufficiently with respect to the surface of the first light engine
Exposure, at least two second light engines along the second roller length direction relative spacing be arranged, ensure that wiring board is opposite
The surface of second light engine can adequately be exposed.
At least two first light engines are at least in the setting of two column, two adjacent column in one of the embodiments,
First light engine is staggered；At least two second light engines are at least in the setting of two column, two adjacent column institutes
The second light engine is stated to be staggered.Two adjacent the first light engines of column are staggered and two adjacent the second optics of column draw
It holds up and is staggered, so that the upper and lower surfaces of wiring board are able to carry out sufficient exposure, guarantee exposure quality.
A kind of exposure machine, comprising: the conveying device of above-mentioned wiring board.
Above-mentioned exposure machine is in use, the rotary drive mechanism of conveying device turns the second roller around the central axis of itself
Dynamic, so that wiring board be driven to enter in transfer passage, after wiring board enters transfer passage, the second roller and the first roller are to route
Plate is squeezed, and the first roller is also therewith around the center axis thereof of itself, so that wiring board is driven to move along direction of feed, line
Road plate is in the process of movement measured in real time the displacement of wiring board and position using displacement detecting element and will test knot
Fruit is transmitted to controller, and when wiring board is transported to predeterminated position, controller controls projection exposure system therefor work to wiring board
Be exposed so that the movement of projection exposure system therefor and wiring board is consistent, improve exposure machine exposure efficiency and
Exposure quality ensure that the product quality of exposure machine production.Meanwhile reset motor is needed just to can be carried out wiring board compared to traditional
Conveying continual wiring board can be conveyed under the action of the first roller and the second roller to be exposed,
Further improve exposure efficiency.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the conveying device of the wiring board of one embodiment；
Fig. 2 is the structural schematic diagram under one visual angle of conveying device of the wiring board of Fig. 1.
Description of symbols:
110, the first roller, the 120, second roller, 130, transfer passage, 140, rotary drive mechanism, 150, displacement detecting
Element, 160, transmission belt, 170, strainer, 171, tensioning wheel, the 181, first light engine, the 182, second light engine,
200, wiring board.
Specific embodiment
It is below in conjunction with attached drawing and specifically real for the purpose of this utility model, technical solution and advantage is more clearly understood
Mode is applied, the utility model is described in further detail.It should be understood that the specific embodiments described herein
Only to explain the utility model, the protection scope of the utility model is not limited.
It should be noted that it can be directly another when element is referred to as " being set to ", " being fixedly arranged on " another element
On a element or there may also be elements placed in the middle.When element is referred to as " being fixedly arranged on " another element, or with another yuan
Part " is fixedly connected ", and can be the mode of being detachably fixed between them is also possible to non-removable fixed form.When a member
Part is considered as " connection ", " rotation connection " another element, it can be directly to another element or may be same
When there are centering elements.Term as used herein "vertical", "horizontal", "left" and "right", "upper", "lower" and similar
Statement for illustrative purposes only, be not meant to be the only embodiment.
Unless otherwise defined, all technical and scientific terms used herein are led with the technology for belonging to the utility model
The normally understood meaning of the technical staff in domain is identical.Terminology used in the description of the utility model herein only be
The purpose of description specific embodiment, it is not intended that in constraint the utility model.Term " and or " used herein packet
Include any and all combinations of one or more related listed items.
The similar term such as " first " described in the utility model, " second ", " third " does not represent specific quantity and sequence,
It is only used for the differentiation of title.
As shown in Figures 1 and 2, one embodiment of the utility model discloses a kind of conveying device of wiring board, comprising:
First roller 110；Second roller 120, second roller 120 are arranged with 110 relative spacing of the first roller and cooperate shape
At the transfer passage 130 for conveying circuit plate 200；Rotary drive mechanism 140, the rotary drive mechanism 140 and described the
Two rollers 120 are sequentially connected, for rotating second roller 120 around the axis of second roller 120；Displacement detecting member
Part 150, the displacement detecting element 150 is for detecting displacement of the wiring board 200 in the transfer passage 130；And control
Device (not shown) processed, the controller are electrically connected with the displacement detecting element 150 and projection exposure system therefor.
The conveying device of the wiring board 200 of above-described embodiment is in use, rotary drive mechanism 140 makes the second roller 120
Around the center axis thereof of itself, so that wiring board 200 be driven to enter in transfer passage 130, wiring board 200 enters transfer passage
After 130, the second roller 120 squeezes wiring board 200 with the first roller 110, and the first roller 110 is also therewith in itself
The rotation of mandrel line, so that wiring board 200 be driven to move along direction of feed, wiring board 200 utilizes displacement inspection in the process of movement
Survey element 150, which is measured in real time the displacement of wiring board 200 and position and will test result, is transmitted to controller, works as wiring board
200 when being transported to predeterminated position, and controller controls projection exposure system therefor work to be exposed to wiring board 200, so that
The movement of projection exposure system therefor and wiring board 200 is consistent, and ensure that exposure efficiency and exposure quality.Meanwhile compared to tradition
Need reset motor just and can be carried out the conveying of wiring board 200, can under the action of the first roller 110 and the second roller 120
It is continual that wiring board 200 is conveyed to be exposed, further improve exposure efficiency.
It needs to be illustrated, the rotary drive mechanism 140 of the utility model embodiment can be motor, rotating hydraulic
The mechanism of cylinder or other existing center axis thereofs around itself that can make the second roller 120.The utility model embodiment
The transmission connection of rotary drive mechanism 140 and the second roller 120, the rotary output that can be rotary drive mechanism 140 are direct
It drives the second roller 120 that can also add and realize by intermediate transmission mechanism around the center axis thereof of itself, such as adds biography
Dynamic band or transmission chain, need to only meet the center axis thereof for enabling to the second roller 120 around itself.The utility model is real
Apply example displacement detecting element 150 can be position sensor, angular displacement sensor or other it is existing can be to wiring board 200
Moving displacement or the element that is monitored of movement position.In one embodiment, displacement detecting element 150 is set as rotation volume
Code device, rotary encoder is set on the second roller 120, using rotary encoder detect the angular displacement of the second roller 120 to
Converse displacement and the movement position of wiring board 200.The controller of the utility model embodiment can be single-chip microcontroller, PLC
(Programmable Logic Controller, programmable logic controller (PLC)) or other existing devices with control function
Part.The electric connection of controller and displacement detecting element 150 and projection exposure system therefor, can be existing wired by data line etc.
Connection type is realized, can also be realized by adding the existing radio connection such as radiated element and receiving element.
In one embodiment, which further includes elevating mechanism (not shown), elevating mechanism and the first roller 110
It is sequentially connected, for driving the first roller 110 along the direction reciprocating motion close to or far from the second roller 120；Work as elevating mechanism
When in first state, the first roller 110 and the second roller 120 cooperatively form transfer passage 130；When elevating mechanism is in second
When state, the first roller 110 is arranged far from the second roller 120 and cooperatively forms feeding channel.First roller 110 is set to second
The top of roller 120, using the rotation of the second roller 120 so that wiring board 200 is moved along direction of feed, at this point, elevating mechanism
In the second state, elevating mechanism drives the first roller 110 far from the second roller 120, i.e. elevating mechanism drives the first roller 110
It moves upwards, so that the spacing between the first roller 110 and the second roller 120 becomes larger to form feeding channel, when wiring board 200 exists
When entering in feeding channel under the drive of the second roller 120, elevating mechanism drives the first roller 110 close to the second roller 120, i.e.,
Elevating mechanism drives the first roller 110 to move downward, until the spacing of the first roller 110 and the second roller 120 is equal to or smaller
In the thickness of wiring board 200, at this point, elevating mechanism is in first state, the first roller 110 is cooperatively formed with the second roller 120
Transfer passage 130, wiring board 200 can be smooth, stable under the action of the extruding force of the first roller 110 and the second roller 120
The quality that ensure that exposure to be exposed is moved along direction of feed.
As shown in Figures 1 and 2, optionally, the first roller 110 at least two, at least two first rollers 110 are along route
The direction of feed relative spacing of plate 200 is arranged, and at least two first rollers 110 are set to the top of wiring board 200；Second roller
120 at least two are taken turns, at least two second rollers 120 are arranged along direction of feed relative spacing, at least two second rollers 120
It is set to the lower section of wiring board 200, and each second roller 120 and 110 relative spacing of the first roller are arranged and cooperate shape
At transfer passage 130.The transfer passage 130 formed using at least two first rollers 110 and at least two second rollers 120,
It enables to wiring board 200 to keep smooth during exposure, also the conveying of wiring board 200 can be enabled constant,
Improve exposure efficiency.
In one embodiment, the first roller 110 is set as seven, and the second roller 120 is accordingly set as seven, and seven the
One roller 110 and seven the second rollers 120 correspond interval and are arranged and form transfer passage 130.
In another embodiment, the first roller 110 is set as ten, and the second roller 120 is accordingly set as ten, ten
First roller 110 and ten the second rollers 120 correspond interval and are arranged and form transfer passage 130.
As shown in Figures 1 and 2, further, which further includes transmission belt 160, transmission belt 160 and each second
The rotary output of roller 120 and rotary drive mechanism 140 is sequentially connected.Using transmission belt 160 realize the first roller 110 with
The transmission connection of rotary drive mechanism 140, stable transmission have the function of buffering absorbing.In other embodiments, can also lead to
It crosses gear drive or chaindriven mode is realized, gear-driven high transmission accuracy, transmission efficiency is high.
As shown in Figures 1 and 2, further, which further includes strainer 170, and strainer 170 is used for
Adjust the tensile force between transmission belt 160 and the second roller 120 and/or the tensile force between rotary output.Utilize tensioning
Mechanism 170 is to adjust transmission belt 160 and the second roller 120 or the tensioning between the rotary output of rotary drive mechanism 140
Power guarantees the accuracy of transmission and steady so that the problem of the second roller 120 is not in idle running or skids in the course of rotation
It is qualitative.
As shown in Figures 1 and 2, in one embodiment, strainer 170 includes at least one tensioning wheel 171, two phases
A tensioning wheel 171 is equipped between the second adjacent roller 120, tensioning wheel 171 is set to the lower section of the second roller 120, and is tensioned
Wheel 171 is sequentially connected with transmission belt 160.Tensile force is adjusted using tensioning wheel 171, two adjacent the second rollers 120
Between be arranged a tensioning wheel 171 so that the regulative mode and regulator site of tensile force are more flexible, tensioning wheel 171 is set to
The lower section of second roller 120 so that adjusting for tensioning wheel 171 will not generate interference to the movement of the second roller 120, while may be used also
So that the gap between two adjacent the second rollers 120 can be convenient and flexibly be adjusted.
As shown in Figures 1 and 2, further, projection exposure system therefor includes exposing for the upper surface to wiring board 200
First light engine 181 of light and the second light engine 182 being exposed for the lower surface to wiring board 200, the first light
It learns engine 181 and the second light engine 182 is each perpendicular to the setting of wiring board 200, and the first light engine 181 and the second optics draw
182 are held up to be electrically connected with controller.It is adequately exposed using upper surface of first light engine 181 to wiring board 200,
It is adequately exposed using lower surface of second light engine 182 to wiring board 200, so that wiring board 200 can be same
Shi Jinhang double-sided exposure, improves exposure efficiency.First light engine 181 and the second light engine 182 are each perpendicular to or approximation
It is arranged perpendicular to wiring board 200, ensure that exposure quality.First light engine 181 and the second light engine 182 are and controller
It is electrically connected, under the synergistic effect of displacement detecting element 150, the first light engine 181 and the second optics is enabled to draw
Hold up 182 exposure it is synchronous with transport holding of the conveying device to wiring board 200, when wiring board 200 is delivered to exposure position,
One light engine 181 and the work of the second light engine 182, when wiring board 200 does not reach or leaves exposure position, the first optics draws
Hold up 181 and second light engine 182 stop working.
As shown in Figures 1 and 2, further, the first light engine 181 at least two, and at least two first light
The length direction relative spacing that engine 181 is learned along the first roller 110 is arranged；Second light engine 182 at least two, and at least
Two the second light engines 182 are arranged along the length direction relative spacing of the second roller 120.At least two first light engines
181 along the first roller 110 length direction relative spacing be arranged, ensure that wiring board 200 with respect to the first light engine 181 table
Face can adequately be exposed, and at least two second light engines 182 are set along the length direction relative spacing of the second roller 120
It sets, ensure that wiring board 200 can adequately be exposed with respect to the surface of the second light engine 182, ensure that the matter of exposure
The validity of amount and exposure.In one embodiment, the first light engine 181 and the second light engine 182 are six, and first
Light engine 181 is set between two adjacent the first rollers 110, and the second light engine 182 is set to adjacent two
Between two rollers 120, so that the work of the first roller 110 and the second roller 120 will not cause to interfere to exposure.
As shown in Figures 1 and 2, specifically, at least two first light engines 181 are adjacent at least in two column settings
Two column first light engines 181 be staggered；At least two second light engines 182 are at least arranged in two column,
Two adjacent column second light engines 182 are staggered.At least two are set by least two first light engines 181
Two the first light engines of column 181, are respectively arranged at the two sides of the first roller 110, two adjacent the first light engines of column 181 by column
Between be staggered, enable the first light engine 181 to the upper surface of wiring board 200 realize completely, adequately exposure, no
It will appear exposure blind area, ensure that the exposure quality of 200 upper surface of wiring board；At least two second light engines 182 are arranged
It is at least two column, two the second light engines of column 182 is respectively arranged to the two sides of the second roller 120, two adjacent the second light of column
It learns and is staggered between engine 182, the second light engine 182 realizes completely, sufficiently the lower surface of wiring board 200
Exposure, be not in exposure blind area, ensure that the exposure quality of 200 lower surface of wiring board.
In one embodiment, the first light engine 181 is 12, and 12 the first light engines 181 are divided to for two column, each column
First light engine 181 is 6, and first light engine 181 of each of two first light engines of column 181 shifts to install, the
One the first light engine of column 181 is set to the left side of first roller 110, and the first light engine of secondary series 181 is set to this
The right side of first roller 110；Second light engine 182 is 12, and 12 the second light engines 182 are divided to for two column, each column second
Light engine 182 is 6, and second light engine 182 of each of two second light engines of column 182 shifts to install, first row
Second light engine 182 is set to the left side of second roller 120, the second light engine of secondary series 182 be set to this second
The right side of roller 120.
One embodiment of the utility model also discloses a kind of exposure machine, comprising: the wiring board of any of the above-described embodiment
200 conveying device.
The exposure machine of above-described embodiment is in use, the rotary drive mechanism 140 of conveying device makes the second roller 120 around certainly
The center axis thereof of body, so that wiring board 200 be driven to enter in transfer passage 130, wiring board 200 enters transfer passage 130
Afterwards, the second roller 120 squeezes wiring board 200 with the first roller 110, and the first roller 110 is also therewith around the center of itself
Axis rotation, so that wiring board 200 be driven to move along direction of feed, wiring board 200 utilizes displacement detecting in the process of movement
Element 150, which is measured in real time the displacement of wiring board 200 and position and will test result, is transmitted to controller, works as wiring board
200 when being transported to predeterminated position, and controller controls projection exposure system therefor work to be exposed to wiring board 200, so that
The movement of projection exposure system therefor and wiring board 200 is consistent, and is improved the exposure efficiency and exposure quality of exposure machine, be ensure that
The product quality of exposure machine production.Meanwhile needing reset motor compared to traditional just and can be carried out the conveying of wiring board 200,
Under the action of one roller 110 and the second roller 120, continual wiring board 200 can be conveyed to be exposed, into
One step improves exposure efficiency.
Each technical characteristic of above embodiments can be combined arbitrarily, for simplicity of description, not to above-described embodiment
In each technical characteristic it is all possible combination be all described, as long as however, the combination of these technical characteristics be not present lance
Shield all should be considered as described in this specification.
Above embodiments only express the several embodiments of the utility model, and the description thereof is more specific and detailed, but simultaneously
The constraint to utility model patent range therefore cannot be interpreted as.It should be pointed out that for the ordinary skill people of this field
For member, without departing from the concept of the premise utility, various modifications and improvements can be made, these belong to this reality
With novel protection scope.Therefore, the scope of protection shall be subject to the appended claims for the utility model patent.
Claims (10)
1. a kind of conveying device of wiring board characterized by comprising
First roller；
Second roller, second roller and the first roller relative spacing are arranged and cooperatively form for conveying circuit plate
Transfer passage；
Rotary drive mechanism, the rotary drive mechanism connect with second roller driving, for make second roller around
The axis of second roller rotates；
Displacement detecting element, the displacement detecting element is for detecting displacement of the wiring board in the transfer passage；And
Controller, the controller are electrically connected with the displacement detecting element and projection exposure system therefor.
2. conveying device according to claim 1, which is characterized in that it further include elevating mechanism, the elevating mechanism and institute
State the connection of the first roller driving, for driving first roller back and forth to transport along the direction close to or far from second roller
It is dynamic；
When the elevating mechanism is in first state, first roller and second roller cooperatively form the conveying and lead to
Road；
When the elevating mechanism is in the second state, first roller be arranged far from second roller and cooperatively form into
To channel.
3. conveying device according to claim 1, which is characterized in that first roller at least two, at least two
First roller is arranged along the direction of feed relative spacing of the wiring board, and at least two first rollers are set to institute
State the top of wiring board；Second roller at least two, at least two second rollers are opposite along the direction of feed
Interval setting, at least two second rollers are set to the lower section of the wiring board, and each second roller and one
The first roller relative spacing is arranged and cooperatively forms the transfer passage.
4. conveying device according to claim 3, which is characterized in that it further include transmission belt, the transmission belt and each institute
The rotary output for stating the second roller and the rotary drive mechanism is sequentially connected.
5. conveying device according to claim 4, which is characterized in that further include strainer, the strainer is used for
Adjust the tensile force between the transmission belt and second roller and/or the tensile force between the rotary output.
6. conveying device according to claim 5, which is characterized in that the strainer includes at least one tensioning wheel,
A tensioning wheel is equipped between two adjacent second rollers, the tensioning wheel is set under second roller
Side, and the tensioning wheel and the transmission belt are sequentially connected.
7. conveying device according to any one of claims 1 to 6, which is characterized in that the projection exposure system therefor includes using
The first light engine being exposed in the upper surface to the wiring board and the lower surface for the wiring board expose
Second light engine of light, first light engine and second light engine are each perpendicular to the wiring board setting, and
First light engine and second light engine are electrically connected with the controller.
8. conveying device according to claim 7, which is characterized in that first light engine at least two, and extremely
Few two first light engines are arranged along the length direction relative spacing of first roller；Second light engine is extremely
It is less two, and at least two second light engines are arranged along the length direction relative spacing of second roller.
9. conveying device according to claim 7, which is characterized in that at least two first light engines are at least in two
Column setting, two adjacent column first light engines are staggered；At least two second light engines are at least in two column
Setting, two adjacent column second light engines are staggered.
10. a kind of exposure machine characterized by comprising the conveying device of wiring board as described in any one of claim 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821106930.5U CN208477288U (en) | 2018-07-12 | 2018-07-12 | The conveying device of exposure machine and wiring board |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821106930.5U CN208477288U (en) | 2018-07-12 | 2018-07-12 | The conveying device of exposure machine and wiring board |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208477288U true CN208477288U (en) | 2019-02-05 |
Family
ID=65210477
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821106930.5U Active CN208477288U (en) | 2018-07-12 | 2018-07-12 | The conveying device of exposure machine and wiring board |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208477288U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114245709A (en) * | 2021-12-28 | 2022-03-25 | 湖北金禄科技有限公司 | Leak-proof supply method and device for sampling inspection plate before exposure and development section of dense line network through plate |
-
2018
- 2018-07-12 CN CN201821106930.5U patent/CN208477288U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114245709A (en) * | 2021-12-28 | 2022-03-25 | 湖北金禄科技有限公司 | Leak-proof supply method and device for sampling inspection plate before exposure and development section of dense line network through plate |
| CN114245709B (en) * | 2021-12-28 | 2023-10-20 | 湖北金禄科技有限公司 | Leak-proof feeding method and device for front sampling inspection plate of exposure development section of dense line network through plate |
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