CN208420616U - Silicon wafer hydrophily tester - Google Patents
Silicon wafer hydrophily tester Download PDFInfo
- Publication number
- CN208420616U CN208420616U CN201820670019.0U CN201820670019U CN208420616U CN 208420616 U CN208420616 U CN 208420616U CN 201820670019 U CN201820670019 U CN 201820670019U CN 208420616 U CN208420616 U CN 208420616U
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- Prior art keywords
- guide rail
- connection guide
- module
- rack
- hydrophily
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Abstract
The utility model discloses a kind of silicon wafer hydrophily testers, it includes rack, slide glass transfer module, control module of dripping and image capture module are provided in rack, slide glass transfer module is set to the bottom of rack and it includes the active guide rail and driven guide rail being parallel to each other, a movable block is correspondingly arranged on active guide rail and driven guide rail, common horizontal is connected with a bearing plate on two movable blocks, and slide glass platform is provided on bearing plate；Control module of dripping is set to the middle part in rack and is located at the top of slide glass transfer module, control module of dripping includes upper and lower upper connection guide rail disposed in parallel and lower connection guide rail, connection frame is provided on rear side of upper connection guide rail, water droplet automatic control module is connected on connection frame, it is connected with module of dripping on front side of upper connection guide rail and lower connection guide rail, multiple pumps that drip are arranged at intervals on upper connection guide rail.The utility model can be realized to the unitized of silicon wafer hydrophily testing standard, standardization and precision.
Description
Technical field
The utility model relates to photovoltaic manufacture and detection technique fields, more particularly to a kind of silicon wafer hydrophily tester.
Background technique
Photovoltaic industry generally realizes that anti-PID(current potential induces decaying using ozone), how to detect and control anti-PID effect
Fruit, mainly test oxidation film, i.e. progress silicon wafer hydrophily test.Current silicon wafer hydrophily test, it is main to be surveyed using artificial
The method of examination carries out.The subjectivity of manual testing is larger, can not measurement request be standardized and be standardized, and can not be right
Test data carries out recording and storage, causes difficulty to subsequent technique case study.
Utility model content
In order to overcome the above problem, the utility model provides a kind of silicon wafer hydrophily tester.
The technical solution of the utility model is to provide a kind of silicon wafer hydrophily tester comprising rack, in the rack
It is provided with slide glass transfer module, control module of dripping and image capture module, the slide glass transfer module is set to the rack
Bottom and its include the active guide rail and driven guide rail being parallel to each other, it is right on the active guide rail and the driven guide rail
It should be provided with a movable block, common horizontal is connected with a bearing plate on two movable blocks, and slide glass platform is provided on the bearing plate；
The control module of dripping is set to the middle part in the rack and is located at the top of the slide glass transfer module, the control of dripping
Molding block includes upper and lower upper connection guide rail disposed in parallel and lower connection guide rail, the company of being provided on rear side of the upper connection guide rail
Frame is connect, water droplet automatic control module, the front side of the upper connection guide rail and the lower connection guide rail are connected on the connection frame
It is connected with module of dripping, is arranged at intervals with multiple pumps that drip on the upper connection guide rail.
Further, described image acquisition module is set to the top in the rack, and described image acquisition module includes
There is horizontally disposed slideway, the sliding shoe that can be moved back and forth with described slideway or so, the sliding are provided on the slideway
Block is to be vertically arranged, and sliding rail is vertically installed on front side of the sliding shoe, being provided on the sliding rail can be on the sliding rail
The link block of lower movement is connected with a CCD camera on the link block.
Further, one end of the active guide rail is provided with the driving motor for driving the movable block to move back and forth.
Further, the module of dripping includes movable plate, and the movable plate is connected to the upper connection guide rail and institute
It states on lower connection guide rail, the leading flank of the movable plate vertically connects a mobile sliding block, is provided with connection on the mobile sliding block
Plate, the connecting plate can be moved back and forth up and down with the mobile sliding block, and multiple gargoyles are provided on the connecting plate.
Further, one end of the upper connection guide rail is provided with drive motor.
The beneficial effects of the utility model are: the silicon wafer hydrophily tester of the utility model is provided with slide glass in rack
Transfer module, control module of dripping and image capture module, after slide glass transfer module can realize slide glass platform absorption silicon wafer, according to
It sets track and carries out precise motion, and realize that height of dripping freely is adjusted with water of dripping；Control module of dripping is realized different
The automatic control for mode of dripping is, it can be achieved that single-point and multi-point sampler；Image capture module is using high resolution CCD camera to water droplet
Image Acquisition is carried out, by then calculating the diameter and area of water droplet, and judges whether qualification；And can realize water droplet diameter,
The data of area, image and qualification rate store.The utility model can realize unitized, the specification to silicon wafer hydrophily testing standard
Change and refines.After all data are stored, valid data can be provided to subsequent technique problem and supported.
Detailed description of the invention
Fig. 1 is the overall structure diagram for the silicon wafer hydrophily tester that the utility model one is embodied.
Fig. 2 is the schematic perspective view for the slide glass transfer module that the utility model one is embodied.
Fig. 3 is the schematic perspective view for the control module of dripping that the utility model one is embodied.
Specific embodiment
In order to be easy to understand the technical means, creative features, achievement of purpose, and effectiveness of the utility model, under
In conjunction with specific embodiments, the utility model is further described in face.
As shown in Figure 1 to Figure 3, a kind of silicon wafer hydrophily tester of the utility model comprising rack 1 is set in rack 1
It is equipped with slide glass transfer module 2, control module of dripping 3 and image capture module 5, slide glass transfer module 2 is set to the bottom of rack 1
And it includes the active guide rail 21 and driven guide rail 22 being parallel to each other, and is correspondingly arranged on active guide rail 21 and driven guide rail 22
There is a movable block 23, common horizontal is connected with a bearing plate 24 on two movable blocks 23, is provided with slide glass platform 25 on bearing plate 24；
One end of active guide rail 21 is provided with the driving motor 26 that driving movable block 23 moves back and forth, in this way, it is only necessary to a driving electricity
Machine 26 drives active guide rail 21 to work, and can realize the transfer of slide glass platform 25, energy saving.Slide glass transfer module 2 can be realized
After slide glass platform 25 adsorbs silicon wafer, precise motion is carried out according to setting track, and realize the freedom of drip height and water of dripping
It adjusts.
Control module of dripping 3 is set to the middle part in rack 1 and is located at the top of slide glass transfer module 2, drips and controls mould
Block 3 includes that upper connection guide rail 31 disposed in parallel and lower connection guide rail 32, the rear side of upper connection guide rail 31 are provided with company up and down
Frame 33 is connect, water droplet automatic control module 34 is connected on connection frame 33, upper connection guide rail 31 and the lower front side for connecting guide rail 32 connect
It is connected to module 4 of dripping, multiple pumps 35 that drip are arranged at intervals on upper connection guide rail 31, one end of upper connection guide rail 31 is provided with drive
Dynamic motor 36.Control module of dripping 3 realizes the automatic control of different modes of dripping, it can be achieved that single-point and multi-point sampler.
Module of dripping 4 includes movable plate 41, and movable plate 41 is connected on connection guide rail 31 and lower connection guide rail 32, is moved
The leading flank of movable plate 41 vertically connects a mobile sliding block 42, is provided with connecting plate 43 on mobile sliding block 42, and connecting plate 43 can be with
Mobile sliding block 42 moves back and forth up and down, and multiple gargoyles 44 are provided on connecting plate 43 for use of dripping, the present embodiment setting
There are three gargoyle 44, the quantity of gargoyle 44 and the pump 35 that drips can be increased and decreased in actual use as needed.
Image capture module 5 is set to the top in rack 1, and image capture module 5 includes horizontally disposed slideway 51,
The sliding shoe 52 that can be moved back and forth with slideway 51 or so is provided on slideway 51, sliding shoe 52 is to be vertically arranged, sliding shoe 52
Front side be vertically installed with sliding rail 53, the link block 54 that can be moved up and down with sliding rail 53, link block 54 are provided on sliding rail 53
On be connected with a CCD camera 55.Image capture module 5 using high resolution CCD camera 55 to water droplet carry out Image Acquisition, by and
The diameter and area of water droplet are calculated afterwards, and judges whether qualification, and can realize diameter, area, image and the qualification rate of water droplet
Data storage.
The utility model can be realized to the unitized of silicon wafer hydrophily testing standard, standardization and precision.All data
After being stored, valid data can be provided to subsequent technique problem and supported.
Above embodiments are only the one such embodiment of the utility model, and the description thereof is more specific and detailed, but simultaneously
Therefore it cannot be interpreted as that a limitation on the scope of the patent of the present invention.It should be pointed out that for the ordinary skill of this field
For personnel, without departing from the concept of the premise utility, various modifications and improvements can be made, these belong to this
The protection scope of utility model.Therefore, the scope of protection shall be subject to the appended claims for the utility model patent.
Claims (5)
1. a kind of silicon wafer hydrophily tester comprising rack, it is characterised in that: be provided with slide glass transfer mould in the rack
Block, control module of dripping and image capture module, the slide glass transfer module is set to the bottom of the rack and it includes
It is mobile that one is correspondingly arranged on the active guide rail and driven guide rail being parallel to each other, the active guide rail and the driven guide rail
Block, common horizontal is connected with a bearing plate on two movable blocks, and slide glass platform is provided on the bearing plate；Described drip controls mould
Block is set to the middle part in the rack and is located at the top of the slide glass transfer module, on the control module of dripping includes
Under upper connection guide rail disposed in parallel and lower connection guide rail, be provided with connection frame, the connection on rear side of the upper connection guide rail
It is connected with water droplet automatic control module on frame, is connected with the mould that drips on front side of the upper connection guide rail and the lower connection guide rail
Block is arranged at intervals with multiple pumps that drip on the upper connection guide rail.
2. silicon wafer hydrophily tester according to claim 1, it is characterised in that: described image acquisition module is set to institute
The top in rack is stated, described image acquisition module includes horizontally disposed slideway, and being provided on the slideway can be with institute
The sliding shoe of slideway or so reciprocating movement is stated, the sliding shoe is to be vertically arranged, and is vertically installed with cunning on front side of the sliding shoe
Rail is provided with the link block that can be moved up and down with the sliding rail on the sliding rail, a CCD phase is connected on the link block
Machine.
3. silicon wafer hydrophily tester according to claim 1, it is characterised in that: one end of the active guide rail is provided with
The driving motor for driving the movable block to move back and forth.
4. silicon wafer hydrophily tester according to claim 1, it is characterised in that: the module of dripping includes movement
Plate, the movable plate are connected on the upper connection guide rail and the lower connection guide rail, and the leading flank of the movable plate vertically connects
A mobile sliding block is connect, is provided with connecting plate on the mobile sliding block, the connecting plate can be with the mobile sliding block up and down reciprocatingly
It is mobile, multiple gargoyles are provided on the connecting plate.
5. silicon wafer hydrophily tester according to claim 1, it is characterised in that: one end setting of the upper connection guide rail
There is drive motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820670019.0U CN208420616U (en) | 2018-05-07 | 2018-05-07 | Silicon wafer hydrophily tester |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820670019.0U CN208420616U (en) | 2018-05-07 | 2018-05-07 | Silicon wafer hydrophily tester |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208420616U true CN208420616U (en) | 2019-01-22 |
Family
ID=65117955
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820670019.0U Active CN208420616U (en) | 2018-05-07 | 2018-05-07 | Silicon wafer hydrophily tester |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208420616U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113777568A (en) * | 2021-09-15 | 2021-12-10 | 深圳市新益技术有限公司 | Guide rail device |
| CN114112797A (en) * | 2021-11-23 | 2022-03-01 | 横店集团东磁股份有限公司 | Hydrophilicity detection mechanism |
-
2018
- 2018-05-07 CN CN201820670019.0U patent/CN208420616U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113777568A (en) * | 2021-09-15 | 2021-12-10 | 深圳市新益技术有限公司 | Guide rail device |
| CN113777568B (en) * | 2021-09-15 | 2024-04-12 | 深圳市新益技术有限公司 | Guide rail device |
| CN114112797A (en) * | 2021-11-23 | 2022-03-01 | 横店集团东磁股份有限公司 | Hydrophilicity detection mechanism |
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