CN208414625U - A kind of pressuring rotating plate valve applied to single crystal growing furnace - Google Patents
A kind of pressuring rotating plate valve applied to single crystal growing furnace Download PDFInfo
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- CN208414625U CN208414625U CN201820804316.XU CN201820804316U CN208414625U CN 208414625 U CN208414625 U CN 208414625U CN 201820804316 U CN201820804316 U CN 201820804316U CN 208414625 U CN208414625 U CN 208414625U
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Abstract
The utility model relates to the secondary process fields of single crystal growing furnace pressuring rotating plate valve, it is desirable to provide a kind of pressuring rotating plate valve applied to single crystal growing furnace.The pressuring rotating plate valve that this kind is applied to single crystal growing furnace includes disc assembly and rotating plate axis, disc assembly, rotating plate axis and VP type band net flexible hose are threadedly coupled assembly, the pressuring rotating plate valve for being applied to single crystal growing furnace is formed, there are Y-shaped water routes in the pressuring rotating plate valve applied to single crystal growing furnace after the assembly is completed.The disk and disk seal plate welding of the utility model form the internal cavity body structure with tortuous water route, only have intake-outlet at both ends, improve the sealing performance of pressuring rotating plate valve；In addition, can be trapped in pressuring rotating plate valve the long period after so that cooling water is entered disk weld assembly because of its internal waterproof strip, cooling efficiency is improved, to improve the silicon rod single production weight of single crystal growing furnace, reduces the replacement frequency of auxiliary material.
Description
Technical field
The utility model is the secondary process field about single crystal growing furnace pressuring rotating plate valve, in particular to a kind of applied to single crystal growing furnace
Pressuring rotating plate valve.
Background technique
Monocrystalline silicon is the important materials for solar energy power generating.Indispensable needs use consumption in monocrystalline silicon production
Material, such as water, electricity, gas, quartz crucible, each crystal pulling are completed to tear furnace cleaning open after needing cooling, replace necessary consumptive material, again crystal pulling
It needs to begin to warm up from room temperature, not only wastes material resources in the secondary stage, more waste time, with the raising of consumptive material quality, Neng Gousheng
Appoint the ability of multiple crystal pulling, therefore the research and development of composite feeding-material are imperative projects, is the key that improve entire the efficiency of production chain
Factor, pressuring rotating plate valve are critical pieces in composite feeding-material.
Country extremely payes attention to the exploitation and application of new energy now, and puts into substantial contribution and help photovoltaic industry,
The characteristics of demand of domestic monocrystalline silicon is continuously increased, the industry is technology, the double intensities of capital.Technically, technology is first
Process degree directly determines the height of production cost, and production cost is very sensitive for the profitability of monocrystalline silicon enterprise；From money
This angle sees that monocrystalline silicon production needs to put into large number of equipment, and the period of expanding production is long, and it is very high to produce control requirement to personnel.Therefore
Monocrystalline silicon industry enters that barrier is higher, and clearly, industry competitive situation is more difficult in a short time breaks the first-strike advantage of industry faucet.
Monocrystalline silicon production capacity is improved, energy consumption is reduced, whether can also become one of the key factor of industry faucet at monocrystalline silicon production enterprise.
As the significant components of isolation valve seat, the development of pressuring rotating plate valve welding procedure is particularly important, can improve production capacity,
Production cost is reduced, and can guarantee quality stability, it is ensured that is not in leak during crystal pulling is thrown again or seals loosely.
However in the prior art, pressuring rotating plate valve is during the work time because failure welding occurs producing difficult to install, live leakage
The problems such as water is with sealing loosely, causes to do over again, scrap, increased costs, auxiliary material and energy consumption are big during monocrystalline crystal pulling.
Utility model content
The main purpose of the utility model is to overcome deficiencies in the prior art, provide a kind of rotation applied to single crystal growing furnace
Plate valve.In order to solve the above technical problems, the solution of the utility model is:
A kind of pressuring rotating plate valve applied to single crystal growing furnace, including disc assembly and rotating plate axis are provided；
The disc assembly includes disk, waterproof strip, disk sealing plate, disk fixing seat, fixed plate and welding cutting ferrule elbow；
The disk is the disk of cylindrical structure, and a bottom surface of disk is equipped with circular groove；The circular groove
It is concentric circles (and the diameter ratio of the two concentric circles are as follows: the height of 405:380, the circular groove depth and disk with bottom surface
Than are as follows: 15:7)；
The disk sealing plate is diameter plectane identical with the basal diameter of disk, and the bottom of circular groove is equipped with disk
Face is fixed, and makes disk sealing plate and disk outer circle and neat (by the welding fixation in one week of the outer circumference surface of disk sealing plate and disk, realization
Fit closely), the circular groove of disk forms disk cavity therebetween；At least two plug welding holes are drilled on disk sealing plate,
And the plug welding hole is the processed plug welding hole of plug welding (so that the stronger positioning of waterproof strip)；
The waterproof strip is mounted in the circular groove of disk in Y-shaped welding, realizes disk cavity being separated to form (song
Roll over unobstructed) Y-shaped water route, which is able to achieve: cooling water enters in circular disk cavity body from a welding cutting ferrule elbow,
In circular disk cavity body after the disk half cycle of side, two bursts of water flows can be divided into and enter the other side, equally around other half cycle circle
Disk is finally discharged from another welding cutting ferrule elbow；And the installation site of waterproof strip, it is mounted on disk with disk sealing plate
Afterwards, disk sealing plate (is placed on disk in installation process, is pointed with the finger or gesticulate and justified with marking pen by the plug welding hole line coincident on disk sealing plate
6 through-hole of 16- Φ (plug welding hole) on disk seal plate, takes disk sealing plate away, is exactly waterproof strip position by point line according to drawing requirement
It sets, waterproof strip is placed on scribing line trace and discontinuously forms, and tortuous unobstructed water route is formed after the completion of welding)；
The disk fixing seat is disk fixing seat (disk fixing seat height and the basal diameter design of oblate column structure
Ratio is 12:100), a bottom surface of disk fixing seat is mounting surface, and disk fixing seat is weldingly fixed on disk using mounting surface
It is not provided on the bottom surface of circular groove；There is hemispherical groove at the center of another bottom surface of disk fixing seat, on the bottom surface also
If there are four threaded hole (being distributed) on 90 circumference of Φ, for being connected and fixed with rotating plate axis；
The fixed plate be cuboid block structure fixed plate (top surface of fixed plate be equipped with symmetrical threaded hole, spacing
It is 25 millimeters), two fixed plates are respectively welded at disk and are not provided on the bottom surface of circular groove；Two VP type band net flexible hoses
(VP type band net flexible hose is connect using dedicated cutting ferrule and screw with fixed plate, VP type with the connection of corresponding fixed plate respectively
Band net flexible hose is applied in fixed plate and personality card set gap, plays fixed function)；
The welding cutting ferrule elbow is the elbow bend with water pipe head, and fixation is respectively welded in two welding cutting ferrule elbows
It is connected on the bottom surface that disk is not provided with circular groove, and respectively with disk cavity；Two welding cutting ferrule elbows respectively with it is corresponding
VP type band net flexible hose connection；
The rotating plate axis includes that rotating plate axis reinforcing rib, welding ferrule fitting, rotating plate axial cylindrical and cylinder tooling, rotating plate axis add
Strengthening tendons, welding ferrule fitting and rotating plate axial cylindrical are fixed using cylinder tooling；
The cylinder tooling includes upper locating piece and lower locating piece；Upper locating piece and lower locating piece are all provided with through-hole, are used for
Rotating plate axial cylindrical runs through and limits to pressuring rotating plate valve cylinder, and the lead to the hole site of upper locating piece and lower locating piece is all machined with counterbore
(counterbore size is greatest diametrical dimension among pressuring rotating plate valve cylinder)；Upper locating piece is provided with circular trough at two, for fixing two welderings
Connecing ferrule fitting, (welding ferrule fitting is one kind of water pipe head, and the drawing requirement angle of two welding ferrule fittings presses drawing
It is required that generally using two welding ferrule fitting mutual alignments for 30 °), two welding ferrule fittings are respectively used to connection and correspond to
VP type band net flexible hose；Lower locating piece is provided with square groove, (when assembly, will position up and down for fixing rotating plate axis reinforcing rib
Block covers in rotating plate axial cylindrical after close-fitting, is inserted into rotating plate axis reinforcing rib and two welding ferrule fittings, and be welded and fixed)；
The rotating plate axis reinforcing rib is the rotating plate axis reinforcing rib (length-width ratio 340:40) of elongated cube structure, elongated cube
The square groove that one end of structure is used to be inserted into cylinder tooling is fixed；The other end of elongated cube structure runs through through-hole there are three setting,
For being threadedly coupled with the threaded hole in disc assembly in disk fixing seat；
The rotating plate axial cylindrical is the axis of cylindrical structure, and the both ends of the rotating plate axial cylindrical are respectively provided with different steps and (use
In the assembly for realizing i.e. rotating plate axis entire component and other components), and the upper end of rotating plate axial cylindrical is at least provided with two steps；
There are two deep hole A (Φ 5), the side (welding of second step surface of rotating plate axial cylindrical upper end for the top processing of rotating plate axial cylindrical
At ferrule fitting) it is also machined with deep hole B (Φ 5) at two, this four deep holes communicate two-by-two respectively, and circuit does not interlock (i.e. one
Deep hole A is communicated with a deep hole B, another deep hole A is communicated with another deep hole B, but the two circuits do not interlock)；
Disc assembly, rotating plate axis and VP type band net flexible hose (Shanghai Rong Jian mechano-electronic Co., Ltd) are threadedly coupled dress
Match, forms the pressuring rotating plate valve for being applied to single crystal growing furnace (through through-hole and disc assembly at three on the pressuring rotating plate valve reinforcing rib on rotating plate axis
Threaded hole in disk fixing seat is threadedly coupled；The type band net flexible hose both ends VP with external screw thread respectively with rotating plate axis group
In part two at weld in ferrule fitting and disc assembly two at weld cutting ferrule elbow thread connection；In actual production, also
Mountable gland, auxiliary assembly)；There are Y-shaped water route, external water streams in the pressuring rotating plate valve applied to single crystal growing furnace after the assembly is completed
It can be realized on Y-shaped water route:
External water stream can flow to corresponding welding ferrule fitting, by right from a deep hole A of pressuring rotating plate valve cylinder
The VP type band net flexible hose answered reaches the welding cutting ferrule elbow in disc assembly, and external water stream enters in circular disk cavity body as cold
But water uses；Since waterproof strip is in the intracorporal curved structure of circular disk cavity, cooling water is divided into two bursts of water flows and enters after disk half cycle
The other side equally bypasses other half cycle disk, is finally discharged from another welding cutting ferrule elbow of disc assembly, process is another
VP type band net flexible hose reaches another welding ferrule fitting in rotating plate shaft assembly, by another deep hole A of pressuring rotating plate valve cylinder
Water outlet is formed water route (flow path being greatly increased, to promote cooling effect).
As a further improvement, the plug welding hole on the disk sealing plate refers to that 16 diameters are 6 millimeters of through-hole (16-
6 through-hole of Φ) (through-hole is related to waterproof strip arrangement at 16, influences entire cooling water in the intracorporal flow direction of circular disk cavity, due to disc set
Welding cutting ferrule elbow in part is water inlet water outlet, so this is half-and-half divided into semicircle water route at two by waterproof strip arrangement, then
By waterproof strip by water route complications, cooling water is made to be diverted to heteropleural around outer circle half cycle, by the center point further around another semi-circumference, into
Enter water outlet).
As a further improvement, the disk, waterproof strip, disk sealing plate, disk fixing seat, fixed plate, welding cutting ferrule
Elbow, rotating plate axis reinforcing rib, welding ferrule fitting, rotating plate axial cylindrical material be 304L stainless steel.
As a further improvement, the fixing seat of rotating plate axis and disc assembly utilizes 1 pair of A grades of hex nut, standard type bullet
Spring washer, the connection of flat washer, and guarantee that rotating plate axis is vertical with disc face.
As a further improvement, two VP type band net flexible hoses pass through 4 pairs of hexagon socket cap head screws, standard type bullet
Spring washer, plain washer are fixed in the fixed plate in disc assembly.
Compared with prior art, the utility model has the beneficial effects that
The disk and disk seal plate welding of the utility model form the internal cavity body structure with tortuous water route, only at both ends
With intake-outlet, the sealing performance of pressuring rotating plate valve is improved；In addition, because its internal waterproof strip makes cooling water enter disk welding
It can be trapped in pressuring rotating plate valve the long period after component, improve cooling efficiency, to improve the silicon rod single production of single crystal growing furnace
Weight reduces the replacement frequency of auxiliary material.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of disc assembly.
Fig. 2 is the structural schematic diagram of disc assembly.
Fig. 3 is the structural schematic diagram of rotating plate axis.
Fig. 4 is the structure 3D schematic diagram of rotating plate axis.
Fig. 5 is the structural representation of the utility model.
Appended drawing reference in figure are as follows: 1 disk；2 waterproof strips；3 disk sealing plates；4 disk fixing seats；5 fixed plates；6 welding cards
Cover elbow；7 rotating plate axis reinforcing ribs；8 welding ferrule fittings；9 rotating plate axial cylindricals.
Specific embodiment
The utility model is described in further detail with specific embodiment with reference to the accompanying drawing:
A kind of pressuring rotating plate valve applied to single crystal growing furnace as shown in Figure 5, including disk 1, waterproof strip 2, disk sealing plate 3, disk
Fixing seat 4, fixed plate 5, welding cutting ferrule elbow 6, rotating plate axis reinforcing rib 7, welding ferrule fitting 8 and rotating plate axial cylindrical 9.
Disk 1, waterproof strip 2, disk sealing plate 3, disk fixing seat 4, fixed plate 5, welding cutting ferrule elbow 6, rotating plate axis are reinforced
Muscle 7, welding ferrule fitting 8, rotating plate axial cylindrical 9 are 304L stainless steel material, and impulse- free robustness, scuffings lack and expect etc., welding region with
And greasy dirt, corrosion, water and the other impurities within the scope of surrounding 20mm are cleaned out.
As shown in Figure 1 and Figure 2, disk 1, waterproof strip 2, disk sealing plate 3, disk fixing seat 4, fixed plate 5, welding cutting ferrule are curved
First 6 are welded into disk weldment, and disk sealing plate 3 is assembled on disk 1, are marked and are positioned with marking pen, then dismantle disk sealing plate
3, support column point is marked on disk 1 with marking pen, draws waterproof strip distributing line, and waterproof strip is welded as being intermittently welded, and weld seam is disconnected
Continuous fillet weld, weld interval 10mm, length 10mm, 2 two sides symmetrical welding of waterproof strip, welding parameter refer to welding procedure specification (WPS),
Check water flow trend, straightness, and every batch of 1 is taken pictures and keeps on file, disk sealing plate 3 and disk 1 weld: first spot welding is prefabricated, groove
60 °, 0~1mm of reinforcement, welding parameter refers to welding procedure specification (WPS), and 16 support column plug weldings: first spot welding is prefabricated, plug welding, reinforcement 0
~1mm, welding parameter refer to welding procedure specification (WPS).Unique one is formed using waterproof strip 2 in entire disk weld assembly cavity
Disk ring type water channel, only entery and delivery port is external, and water channel is full of cavity in entire, then by disk fixing seat 4, fixed plate 5, welding
Cutting ferrule elbow 6 is successively welded to the corresponding position of disk sealing plate 3 according to Design Requirement Drawing.
As shown in Figure 3, Figure 4, rotating plate axis reinforcing rib 7, welding ferrule fitting 8, rotating plate axial cylindrical 9 are welded into rotating plate axis welding
Part, rotating plate axis reinforcing rib 7 are connect with rotating plate axial cylindrical 9, and using special tooling, first spot welding is prefabricated, fillet welding, and 5 × 45 ° of weld seam, weldering
Parameter reference technological procedure is connect, welding ferrule fitting 8 and rotating plate axial cylindrical 9 weld: utilizing special tooling, first spot welding is prefabricated, angle
Weldering, 5 × 45 ° of weld seam；Two welding ferrule fittings 8 form an angle, and included angle are examined after welding, welding parameter is with reference to welding
Technological procedure.
Disc assembly, rotating plate axis, gland and VP type band net flexible hose are assembled into the pressuring rotating plate valve applied to single crystal growing furnace, can join
Examine Fig. 5.The pressuring rotating plate valve for being applied to single crystal growing furnace to this kind is tested, and standard 4.5Kg/cm2 hydraulic pressure is kept for 30 minutes or more, no leakage
Water phenomenon.
Finally it should be noted that listed above is only specific embodiment of the utility model.Obviously, this is practical new
Type is not limited to above embodiments, can also there is many variations.Those skilled in the art can be from disclosed by the utility model
All deformations for directly exporting or associating in content, are considered as the protection scope of the utility model.
Claims (5)
1. a kind of pressuring rotating plate valve applied to single crystal growing furnace, which is characterized in that including disc assembly and rotating plate axis；
The disc assembly includes disk, waterproof strip, disk sealing plate, disk fixing seat, fixed plate and welding cutting ferrule elbow；
The disk is the disk of cylindrical structure, and a bottom surface of disk is equipped with circular groove；The circular groove and bottom
Face is concentric circles；
The disk sealing plate is diameter plectane identical with the basal diameter of disk, and the bottom surface for being equipped with circular groove with disk is consolidated
It is fixed, make disk sealing plate and disk outer circle and neat, the circular groove of disk forms disk cavity therebetween；It is bored on disk sealing plate
There are at least two plug welding holes, and the plug welding hole is the processed plug welding hole of plug welding；
The waterproof strip is mounted in the circular groove of disk in Y-shaped welding, realizes disk cavity being separated to form Y-shaped water
Road, the Y-shaped water route are able to achieve: cooling water enters in circular disk cavity body from a welding cutting ferrule elbow, through one in circular disk cavity body
After the disk half cycle of side, two bursts of water flows can be divided into and enter the other side, equally bypass other half cycle disk, finally from another weldering
Connect the water outlet of cutting ferrule elbow；And the installation site of waterproof strip, the plug welding after being mounted on disk with disk sealing plate, on disk sealing plate
Hole line coincident；
The disk fixing seat is the disk fixing seat of oblate column structure, and a bottom surface of disk fixing seat is mounting surface, circle
Disk fixing seat is weldingly fixed on disk using mounting surface and is not provided on the bottom surface of circular groove；Another bottom surface of disk fixing seat
Center have hemispherical groove, four threaded holes are additionally provided on the bottom surface, for being connected and fixed with rotating plate axis；
The fixed plate is the fixed plate of cuboid block structure, and two fixed plates are respectively welded at disk and are not provided with circular groove
Bottom surface on；Two VP type band net flexible hoses are connected with corresponding fixed plate respectively；
The welding cutting ferrule elbow is the elbow bend with water pipe head, and two welding cutting ferrule elbows are respectively welded and are fixed on circle
Disk is not provided on the bottom surface of circular groove, and is connected to respectively with disk cavity；Two welding cutting ferrule elbows respectively with corresponding VP
The connection of type band net flexible hose；
The rotating plate axis includes that rotating plate axis reinforcing rib, welding ferrule fitting, rotating plate axial cylindrical and cylinder tooling, rotating plate axis are reinforced
Muscle, welding ferrule fitting and rotating plate axial cylindrical are fixed using cylinder tooling；
The cylinder tooling includes upper locating piece and lower locating piece；Upper locating piece and lower locating piece are all provided with through-hole, are used for rotating plate
Axial cylindrical runs through and limits to pressuring rotating plate valve cylinder, and the lead to the hole site of upper locating piece and lower locating piece is all machined with counterbore；It is upper fixed
Position block is provided with circular trough at two, and for fixing two welding ferrule fittings, two welding ferrule fittings are respectively used to connection and correspond to
VP type band net flexible hose；Lower locating piece is provided with square groove, for fixing rotating plate axis reinforcing rib；
The rotating plate axis reinforcing rib is the rotating plate axis reinforcing rib of elongated cube structure, and one end of elongated cube structure is for being inserted into circle
The square groove of column tooling is fixed；The other end of elongated cube structure is set there are three through through-hole, is used for and disk in disc assembly
Threaded hole in fixing seat is threadedly coupled；
The rotating plate axial cylindrical is the axis of cylindrical structure, and the both ends of the rotating plate axial cylindrical are respectively provided with different steps, and rotating plate
The upper end of axial cylindrical is at least provided with two steps；The top of rotating plate axial cylindrical is processed there are two deep hole A, rotating plate axial cylindrical upper end
The side of second step surface is also machined with deep hole B at two, this four deep holes communicate two-by-two respectively, and circuit does not interlock；
Disc assembly, rotating plate axis and VP type band net flexible hose are threadedly coupled assembly, form the pressuring rotating plate valve for being applied to single crystal growing furnace；Dress
With, there are Y-shaped water route, external water stream can be realized on Y-shaped water route in the pressuring rotating plate valve applied to single crystal growing furnace after the completion:
External water stream can flow to corresponding welding ferrule fitting, by corresponding from a deep hole A of pressuring rotating plate valve cylinder
VP type band net flexible hose reaches the welding cutting ferrule elbow in disc assembly, and external water stream enters in circular disk cavity body as cooling water
It uses；Since waterproof strip is in the intracorporal curved structure of circular disk cavity, cooling water after disk half cycle, be divided into two bursts of water flows enter it is another
Side equally bypasses other half cycle disk, is finally discharged from another welding cutting ferrule elbow of disc assembly, by another VP type
Reach another welding ferrule fitting in rotating plate shaft assembly with net flexible hose, be discharged by another deep hole A of pressuring rotating plate valve cylinder,
Form water route.
2. a kind of pressuring rotating plate valve applied to single crystal growing furnace according to claim 1, which is characterized in that on the disk sealing plate
Plug welding hole refers to that 16 diameters are 6 millimeters of through-hole.
3. a kind of pressuring rotating plate valve applied to single crystal growing furnace according to claim 1, which is characterized in that the disk, waterproof strip,
Disk sealing plate, disk fixing seat, fixed plate, welding cutting ferrule elbow, rotating plate axis reinforcing rib, welding ferrule fitting, rotating plate axial cylindrical
Material be 304L stainless steel.
4. a kind of pressuring rotating plate valve applied to single crystal growing furnace according to claim 1, which is characterized in that rotating plate axis and disc assembly
Fixing seat connected using 1 pair of A grade of hex nut, normal type single coil spring lock washer, flat washer, and guarantee that rotating plate axis and disc face are vertical
Directly.
5. a kind of pressuring rotating plate valve applied to single crystal growing furnace according to claim 1, which is characterized in that two VP type band nets are flexible
Hose is fixed in the fixed plate in disc assembly by 4 pairs of hexagon socket cap head screws, normal type single coil spring lock washer, plain washers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820804316.XU CN208414625U (en) | 2018-05-28 | 2018-05-28 | A kind of pressuring rotating plate valve applied to single crystal growing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820804316.XU CN208414625U (en) | 2018-05-28 | 2018-05-28 | A kind of pressuring rotating plate valve applied to single crystal growing furnace |
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| Publication Number | Publication Date |
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| CN208414625U true CN208414625U (en) | 2019-01-22 |
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ID=65112524
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| CN201820804316.XU Active CN208414625U (en) | 2018-05-28 | 2018-05-28 | A kind of pressuring rotating plate valve applied to single crystal growing furnace |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111098095A (en) * | 2019-12-31 | 2020-05-05 | 光科真空科技(泰兴)有限公司 | Water channeling prevention plug welding process for furnace chamber of single crystal furnace |
| CN115370773A (en) * | 2022-09-26 | 2022-11-22 | 浙江求是半导体设备有限公司 | Crystal growing furnace |
| CN115370779A (en) * | 2022-08-25 | 2022-11-22 | 上海汉虹精密机械有限公司 | Valve core of large-diameter rotary plate valve of single crystal furnace |
-
2018
- 2018-05-28 CN CN201820804316.XU patent/CN208414625U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111098095A (en) * | 2019-12-31 | 2020-05-05 | 光科真空科技(泰兴)有限公司 | Water channeling prevention plug welding process for furnace chamber of single crystal furnace |
| CN115370779A (en) * | 2022-08-25 | 2022-11-22 | 上海汉虹精密机械有限公司 | Valve core of large-diameter rotary plate valve of single crystal furnace |
| CN115370773A (en) * | 2022-09-26 | 2022-11-22 | 浙江求是半导体设备有限公司 | Crystal growing furnace |
| CN115370773B (en) * | 2022-09-26 | 2023-03-24 | 浙江求是半导体设备有限公司 | Crystal growing furnace |
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