CN115370779A - Valve core of large-diameter rotary plate valve of single crystal furnace - Google Patents
Valve core of large-diameter rotary plate valve of single crystal furnace Download PDFInfo
- Publication number
- CN115370779A CN115370779A CN202211022923.8A CN202211022923A CN115370779A CN 115370779 A CN115370779 A CN 115370779A CN 202211022923 A CN202211022923 A CN 202211022923A CN 115370779 A CN115370779 A CN 115370779A
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- Prior art keywords
- water
- plate
- valve core
- welding
- single crystal
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- 239000013078 crystal Substances 0.000 title claims abstract description 29
- 238000003466 welding Methods 0.000 claims abstract description 76
- 238000001816 cooling Methods 0.000 claims abstract description 62
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 48
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 5
- 239000004065 semiconductor Substances 0.000 claims abstract description 5
- 238000007789 sealing Methods 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 13
- 229910000816 inconels 718 Inorganic materials 0.000 claims description 5
- 239000000306 component Substances 0.000 description 19
- 238000000034 method Methods 0.000 description 6
- 238000003801 milling Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000008358 core component Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/30—Details
- F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/0263—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor using particular material or covering means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
- F16K3/06—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members in the form of closure plates arranged between supply and discharge passages
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K49/00—Means in or on valves for heating or cooling
- F16K49/005—Circulation means for a separate heat transfer fluid
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention provides a valve core of a large-diameter rotary plate valve of a single crystal furnace, which comprises a valve core of the rotary plate valve, wherein the valve core of the rotary plate valve is used for a large-diameter semiconductor single crystal furnace and a silicon part single crystal furnace; the assembly welded by the rotating shaft and the first support plate is welded with the gas insert welding assembly, the water cooling plate welding assembly and the lower water cooling plate welding assembly combined welding assembly for the last time, and the positioning pin is inserted into the first support plate before welding, so that the positioning holes of the first support plate and the second support plate are completely butted.
Description
Technical Field
The invention relates to the field of semiconductors, silicon rods, solar single crystal furnace crystal growth equipment and vacuum equipment, in particular to a valve core of a large-diameter rotary plate valve of a single crystal furnace.
Background
1. Because the crystal growth size in market is bigger and bigger, the size of the original flap type isolating valve core is bigger and bigger, and three defects are mainly caused, firstly, the weight is very heavy, the driving force is required to be correspondingly increased, sometimes, the sealing effect can not be realized, secondly, the sealing effect can not reach the requirement due to the increase of the size, thirdly, the flap type valve core can not realize the requirement of micro-positive pressure use, only is a single-side stress sealing structure, and the rotary plate valve core adopts an upper sealing structure and a lower sealing structure, so that the use requirement can be met.
2. The valve core of the flap valve is enlarged, the size of the corresponding valve body is widened and heightened, more space structures are used, the use space is particularly limited, and the flap valve is not particularly suitable, and the valve core of the flap valve is rotated in the horizontal direction, so that the occupied height size is better, the corresponding height of the whole furnace is much smaller, and the requirement of large-diameter crystal pulling is met.
3. In the aspect of a water cooling structure, the valve core of the flap valve is only sealed on one side, the O-shaped ring is heated more and is easy to damage, and the valve core of the rotary flap valve is a double-sided water cooling plate for feeding and discharging water, so that the O-shaped ring cannot be burnt out.
4. In terms of stress, the valve core of the flap valve is of a unilateral force-loving structure, the driving force is large, the valve core of the rotary plate valve is of an air-inlaid structure, the stress is uniformly distributed from top to bottom, the sealing effect is good, the O-shaped rings are uniformly distributed, and the service life is longer.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides a valve core of a large-diameter rotary plate valve of a single crystal furnace, which aims to solve at least one technical problem.
The technical scheme of the invention is as follows: a large-diameter rotary plate valve core of a single crystal furnace comprises a rotary plate valve core, and is characterized in that the rotary plate valve core is used for a large-diameter semiconductor single crystal furnace and a silicon component single crystal furnace, the rotary plate valve core comprises an air-inlaid welding component, an upper water-cooling plate welding component, a lower water-cooling plate welding component, a rotating shaft, a first support plate, a second support plate, a positioning pin, a water-passing corrugated pipe and an O-shaped sealing ring, the upper water-cooling plate welding component and the lower water-cooling plate welding component are respectively welded with the air-inlaid welding component, the second support plate is welded with the air-inlaid welding component, an air hole of the second support plate is opposite to an air hole of the air-inlaid welding component, the rotating shaft is welded with the first support plate, and an air hole on the first support plate is opposite to an air hole on the rotating shaft;
the assembly welded by the rotating shaft and the first support plate is welded with the combined welding assembly of the gas-embedded welding assembly, the water-cooling plate welding assembly and the lower water-cooling plate welding assembly for the last time, and a positioning pin is inserted into the first support plate before welding, so that the positioning holes of the first support plate and the second support plate are completely butted;
be equipped with twice waterway channel in the rotation axis, twice waterway channel switches on with last water-cooling board welded subassembly, lower water-cooling board welded subassembly respectively, still be equipped with an airflow channel in the rotation axis, airflow channel is used for gas to inlay to weld the subassembly and opens or close when sealed, and gas inlay welds the subassembly and opens or when closing to drive the downward upward movement of lower water-cooling board welded subassembly, the logical water bellows respectively with rotation axis, last water-cooling board welded subassembly and lower water-cooling board welded subassembly weld.
The original positioning size requirement must be ensured during welding, the sequence number during welding is particularly important and is strictly carried out according to a welding process instruction file, so that the whole valve core part is welded, each part must be precisely finished before welding is finished, and the requirements of size tolerance and form and position tolerance are ensured. After the whole valve core is welded, shaping and high-vacuum sealing treatment are needed, and finally all technical size requirements are guaranteed. And performing water pressure and air pressure tests, performing action and pressure maintaining tests under certain time and pressure conditions, and ensuring that the phenomena of air leakage and water leakage are avoided.
Preferably, the upper water cooling plate welding assembly is a water cooling cavity formed by milling a water through groove on a circular plate and an upper cover plate welding piece, and the lower water cooling plate welding assembly is a water cooling cavity formed by milling a water through groove on a circular plate and a lower cover plate welding piece.
Preferably, the 0-shaped sealing ring is arranged at the joint of the upper water cooling plate welding assembly and the lower water cooling plate welding assembly.
Further preferably, the diameter of the valve core of the rotary plate valve is 630mm.
Further preferably, the gas-to-tack welded assembly is made of Inconel718 material. The gas-inlaid welding component needs to select a material with better elastic property, the range of the correspondingly selected material is very small due to the requirement of high temperature resistance, the elasticity is ensured, and the deformation or distortion is not generated under the high-temperature environment for a long time.
More preferably, four water-passing corrugated pipes are provided.
The beneficial effects are as follows:
1. adopts high-temperature resistant and high-elasticity Inconel718 material
2. Adopts a special heat treatment process to provide the material with processing performance
3. The structure of the stamping die easy to design is designed, and the technological strength and the toughness of the structure are ensured
4. The water cooling structure with the upper cavity and the lower cavity is adopted, so that the O-shaped ring is not easy to burn out when the water cooling structure is used in a high-temperature furnace
5. The upper and lower water cooling plate structures are convenient for oxidation treatment and are not easy to generate oxides, thereby ensuring the improvement of the crystal growth quality of the single crystal furnace
6. The diameter of a valve core of a rotary plate in the general market is about 400mm, while the diameter of the valve core of the rotary plate valve designed by the patent is 630mm, the larger the size is, the greater the processing and manufacturing difficulty is, and the higher the requirements on the material process are particularly.
Drawings
FIG. 1 is a cross-sectional view of a valve core of the rotary plate valve of the present invention;
FIG. 2 is a schematic view of the overall structure of the valve core of the rotary plate valve of the present invention;
fig. 3 is a cross-sectional view at C-C.
In the figure: 1. gas inlay welding subassembly 2, go up water-cooling board welding subassembly 3, lower water-cooling board welding subassembly 4, rotation axis 5, first extension board 6, second extension board 7, locating pin 8, lead to water bellows 9, 0 shape sealing washer
Detailed Description
The invention is further described below with reference to the accompanying drawings.
Referring to fig. 1-3, a large-diameter rotary plate valve core of a single crystal furnace comprises a rotary plate valve core, wherein the rotary plate valve core is used for a large-diameter semiconductor single crystal furnace and a silicon part single crystal furnace, the rotary plate valve core comprises an air-inlaid welding component, an upper water-cooling plate welding component, a lower water-cooling plate welding component, a rotating shaft, a first support plate, a second support plate, a positioning pin, a water-passing corrugated pipe and a 0-shaped sealing ring, the upper water-cooling plate welding component and the lower water-cooling plate welding component are respectively welded with the air-inlaid welding component, the second support plate is welded with the air-inlaid welding component, an air hole of the second support plate is opposite to an air hole of the air-inlaid welding component, the rotating shaft is welded with the first support plate, and the air hole on the first support plate is opposite to the air hole on the rotating shaft;
the assembly welded by the rotating shaft and the first support plate is welded with the gas insert welding assembly, the water cooling plate welding assembly and the lower water cooling plate welding assembly for the last time, and a positioning pin is inserted into the first support plate before welding, so that positioning holes of the first support plate and the second support plate are completely butted;
be equipped with twice waterway channel in the rotation axis, twice waterway channel respectively with last water-cooling board welded subassembly, lower water-cooling board welded subassembly switches on, still be equipped with an airflow channel in the rotation axis, airflow channel opens or closes when being used for gas inlay welding subassembly to seal, gas inlay welding subassembly opens or when closing to drive the downward upward movement of lower water-cooling board welded subassembly, lead to the water bellows respectively with the rotation axis, go up water-cooling board welded subassembly and lower water-cooling board welded subassembly and weld.
The original positioning size requirement must be ensured during welding, the sequence number during welding is particularly important and is strictly carried out according to a welding process guide file, so that the whole valve core component is welded, each part must be precisely finished before welding is finished, and the requirements of size tolerance and form and position tolerance are ensured. After the whole valve core is welded, shaping and high-vacuum sealing treatment are needed, and finally all technical size requirements are guaranteed. And performing water pressure and air pressure tests, performing action and pressure maintaining tests under certain time and pressure conditions, and ensuring that the phenomena of air leakage and water leakage are avoided.
Preferably, the upper water cooling plate welding assembly is a water cooling cavity formed by milling a water through groove on a circular plate and an upper cover plate welding piece, and the lower water cooling plate welding assembly is a water cooling cavity formed by milling a water through groove on a circular plate and a lower cover plate welding piece.
Further preferably, a 0-shaped sealing ring is arranged at the joint of the upper water cooling plate welding assembly and the lower water cooling plate welding assembly.
Further preferably, the diameter of the valve core of the rotary plate valve is 630mm.
Further preferably, the gas-to-tack welded assembly is made of Inconel718 material. The gas-inlaid welding component needs to select a material with better elastic property, the range of the correspondingly selected material is very small due to the requirement of high temperature resistance, the elasticity is ensured, and the deformation or distortion is not generated under the high-temperature environment for a long time.
More preferably, four water-passing corrugated pipes are provided.
The beneficial effects are as follows:
1. adopts high-temperature resistant and high-elasticity Inconel718 material
2. Adopts a special heat treatment process to provide the material with processing performance
3. The structure of the stamping die easy to design is designed, and the technological strength and the toughness of the structure are ensured
4. The water cooling structure with the upper cavity and the lower cavity is adopted, so that the use in a high-temperature furnace is ensured, and the 0-shaped ring is not easy to burn out
5. The upper and lower water cooling plate structures are convenient for oxidation treatment and are not easy to generate oxides, thereby ensuring the improvement of the crystal growth quality of the single crystal furnace
6. The diameter of a valve core of a rotary plate in the general market is about 400mm, while the diameter of the valve core of the rotary plate valve designed by the patent is 630mm, the larger the size is, the greater the processing and manufacturing difficulty is, and the higher the requirements on the material process are particularly.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that it is obvious to those skilled in the art that various modifications and improvements can be made without departing from the principle of the present invention, and these modifications and improvements should also be considered as the protection scope of the present invention.
Claims (6)
1. A large-diameter rotary plate valve core of a single crystal furnace comprises a rotary plate valve core, and is characterized in that the rotary plate valve core is used for a large-diameter semiconductor single crystal furnace and a silicon part single crystal furnace, the rotary plate valve core comprises an air-inlaid welding component, an upper water-cooling plate welding component, a lower water-cooling plate welding component, a rotating shaft, a first support plate, a second support plate, a positioning pin, a water-passing corrugated pipe and a 0-shaped sealing ring, the upper water-cooling plate welding component and the lower water-cooling plate welding component are respectively welded with the air-inlaid welding component, the second support plate is welded with the air-inlaid welding component, an air hole of the second support plate is opposite to an air hole of the air-inlaid welding component, the rotating shaft is welded with the first support plate, and an air hole on the first support plate is opposite to an air hole on the rotating shaft;
welding the assembly welded with the first support plate by the rotating shaft and the gas insert welding assembly, the water cooling plate welding assembly and the lower water cooling plate welding assembly for the last time, and inserting a positioning pin into the first support plate before welding so as to enable positioning holes of the first support plate and the second support plate to be completely butted;
be equipped with twice waterway channel in the rotation axis, twice waterway channel switches on with last water-cooling board welded subassembly, lower water-cooling board welded subassembly respectively, still be equipped with an airflow channel in the rotation axis, airflow channel is used for gas to inlay to weld the subassembly and opens or close when sealed, and gas inlay welds the subassembly and opens or when closing to drive the downward upward movement of lower water-cooling board welded subassembly, the logical water bellows respectively with rotation axis, last water-cooling board welded subassembly and lower water-cooling board welded subassembly weld.
2. The valve core of the large-diameter rotary plate valve of the single crystal furnace according to claim 1, wherein the upper water cooling plate welding component is a water through groove milled in a circular plate, an upper cover plate welding piece is arranged on the water through groove to form a water cooling cavity, and the lower water cooling plate welding component is a water through groove milled in a circular plate, and a lower cover plate welding piece is arranged on the water through groove to form a water cooling cavity.
3. The valve core of the large-diameter rotary plate valve of the single crystal furnace according to claim 2, wherein the O-shaped sealing ring is arranged at the joint of the upper water cooling plate welding assembly and the lower water cooling plate welding assembly.
4. The large-diameter rotary plate valve core of the single crystal furnace according to claim 1, wherein the diameter of the rotary plate valve core is 630mm.
5. The valve core of the large-diameter rotary plate valve of the single crystal furnace according to claim 1, wherein the gas-to-weld assembly is made of Inconel718 material.
6. The valve core of the large-diameter rotary plate valve of the single crystal furnace according to claim 1, wherein four water-passing corrugated pipes are arranged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211022923.8A CN115370779A (en) | 2022-08-25 | 2022-08-25 | Valve core of large-diameter rotary plate valve of single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211022923.8A CN115370779A (en) | 2022-08-25 | 2022-08-25 | Valve core of large-diameter rotary plate valve of single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115370779A true CN115370779A (en) | 2022-11-22 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211022923.8A Pending CN115370779A (en) | 2022-08-25 | 2022-08-25 | Valve core of large-diameter rotary plate valve of single crystal furnace |
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| CN (1) | CN115370779A (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001295952A (en) * | 2000-04-14 | 2001-10-26 | Kawasaki Thermal Engineering Co Ltd | Fine safety valve |
| KR100520728B1 (en) * | 2005-03-25 | 2005-10-13 | 주식회사 에스티에스 | Opening and closing recognition type vacuum valve |
| CN102213326A (en) * | 2010-04-09 | 2011-10-12 | 江苏神通阀门股份有限公司 | Balloon valve |
| CN207740484U (en) * | 2017-12-29 | 2018-08-17 | 晶创铭盛电子科技（香河）有限公司 | A kind of single crystal growing furnace pressuring rotating plate valve |
| CN108626424A (en) * | 2018-06-25 | 2018-10-09 | 上海汉虹精密机械有限公司 | The sealed special-shaped valve of semiconductor monocrystal furnace gas capsule |
| CN208414625U (en) * | 2018-05-28 | 2019-01-22 | 浙江晶鸿精密机械制造有限公司 | A kind of pressuring rotating plate valve applied to single crystal growing furnace |
| CN210372241U (en) * | 2019-03-20 | 2020-04-21 | 浙江晶鸿精密机械制造有限公司 | Rotary plate valve body structure applied to single crystal furnace |
| CN217081427U (en) * | 2022-01-07 | 2022-07-29 | 上海繁枫真空科技有限公司 | Novel single crystal furnace rotary valve |
-
2022
- 2022-08-25 CN CN202211022923.8A patent/CN115370779A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001295952A (en) * | 2000-04-14 | 2001-10-26 | Kawasaki Thermal Engineering Co Ltd | Fine safety valve |
| KR100520728B1 (en) * | 2005-03-25 | 2005-10-13 | 주식회사 에스티에스 | Opening and closing recognition type vacuum valve |
| CN102213326A (en) * | 2010-04-09 | 2011-10-12 | 江苏神通阀门股份有限公司 | Balloon valve |
| CN207740484U (en) * | 2017-12-29 | 2018-08-17 | 晶创铭盛电子科技（香河）有限公司 | A kind of single crystal growing furnace pressuring rotating plate valve |
| CN208414625U (en) * | 2018-05-28 | 2019-01-22 | 浙江晶鸿精密机械制造有限公司 | A kind of pressuring rotating plate valve applied to single crystal growing furnace |
| CN108626424A (en) * | 2018-06-25 | 2018-10-09 | 上海汉虹精密机械有限公司 | The sealed special-shaped valve of semiconductor monocrystal furnace gas capsule |
| CN210372241U (en) * | 2019-03-20 | 2020-04-21 | 浙江晶鸿精密机械制造有限公司 | Rotary plate valve body structure applied to single crystal furnace |
| CN217081427U (en) * | 2022-01-07 | 2022-07-29 | 上海繁枫真空科技有限公司 | Novel single crystal furnace rotary valve |
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