CN208385371U - A kind of column tool reflux unit - Google Patents

A kind of column tool reflux unit Download PDF

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Publication number
CN208385371U
CN208385371U CN201821011989.6U CN201821011989U CN208385371U CN 208385371 U CN208385371 U CN 208385371U CN 201821011989 U CN201821011989 U CN 201821011989U CN 208385371 U CN208385371 U CN 208385371U
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China
Prior art keywords
column
reflux
guide rail
tool
frame
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CN201821011989.6U
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Chinese (zh)
Inventor
申兵兵
王敬苗
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Zishi Energy Co ltd
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Dongtai Hi-Tech Equipment Technology (beijing) Co Ltd
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Abstract

The utility model provides a kind of column tool reflux unit comprising reflux frame, column have output unit, column tool input unit, travelling jack and controller, and the first end of reflux frame is arranged in column tool input unit, for the input field tool into first end;The second end of reflux frame is arranged in column tool output unit, for the Output bar tool out of second end;Travelling jack setting can move in reflux frame in reflux frame;Controller can control travelling jack and move back and forth between the first and second ends;It is provided on travelling jack for having the fixed structure being connected with column.The column of the utility model has reflux unit, and the automatic cycle that can be realized column tool is carried, without manually carrying to column tool, so that the carrying of column tool is more laborsaving.

Description

A kind of column tool reflux unit
Technical field
The utility model relates to reflux unit technical fields, and in particular to a kind of column tool reflux unit.
Background technique
In current solar battery and semiconductor wafer production process, chip, which requires to put into column tool, carries out wet process Process.After in wet processing, processing terminate, chip is removed carry out the next step, and empty column tool needs repetitive cycling It uses.It is in the prior art usually to be carried using artificial cart to column tool, but such mode is relatively elaborate, can not realize The automatic cycle of column tool is carried.Therefore, it is necessary to design column tool reflux unit, realize that the automatic cycle of column tool is carried, so that column has Carrying it is more laborsaving.
Utility model content
The purpose of the utility model is to provide a kind of columns to have reflux unit, to realize that the automatic cycle of column tool is carried, so that The carrying of column tool is more laborsaving.
To achieve the above object, the utility model provides following technical solution:
A kind of column has reflux unit comprising reflux frame, column tool output unit, column tool input unit, travelling jack with And controller, the first end of the reflux frame is arranged in the column tool input unit, for the input field into the first end Tool;The second end of the reflux frame is arranged in the column tool output unit, for the Output bar tool out of described second end;It is described Travelling jack is arranged in the reflux frame, and can move in the reflux frame;The controller can control institute It states travelling jack and is moved back and forth between the first end and the second end;Be provided on the travelling jack for it is described Column has the fixed structure being connected.
Preferably, be relatively set with the first guide rail and the second guide rail in the reflux frame, first guide rail with it is described Second guide rail is parallel to each other;The travelling jack moves reciprocatingly along first guide rail and second guide rail.
Preferably, the travelling jack include crossbeam, be separately positioned on the crossbeam both ends two mounting blocks, it is described It is provided with driving device on mounting blocks, the idler wheel driven by the driving device, the peace are provided in two mounting blocks The two sides of dress block are oppositely arranged there are two directive wheel;The controller drives the idler wheel in institute by controlling the driving device It states and is rolled on the first guide rail and second guide rail.
Preferably, the travelling jack further includes the elevating mechanism being arranged on the crossbeam, connecting rod, the fixed knot Structure includes two handles for being separately positioned on the connecting rod both ends, and two handles are respectively used to and are located at column tool two sides Handle mutually fix;The force piece of the elevating mechanism is connected with the controller;The drive rod of the force piece and the company Extension bar is connected, and the elevating mechanism drives the handle to rise or fall by the connecting rod.
Preferably, it is provided with guide rod in the connecting rod, is provided on the crossbeam and is led for what the guide rod passed through Xiang Kong.
Preferably, push rod is provided in the connecting rod, one end of the push rod is provided with the top plate phase for having with column The push block of abutting, the through-hole that the other end of the push rod passes through in the connecting rod are connected with fixture nut;On the push rod It is set with spring, one end of the spring is abutted against with the push block, and the other end of the spring offsets with the connecting rod It connects.
It preferably, further include the first braced frame, first braced frame is vertically connected with the first end, described Column tool input unit includes transfer dish, transmission mechanism and the driving motor that sliding rail and the sliding rail are slidably matched, the cunning Rail is arranged in first braced frame, and extends in the first end;The driving motor and the transmission mechanism One end is connected, and the transfer dish is connected with the other end of the transmission mechanism, and the driving motor passes through the transmission mechanism band The transfer dish is moved to slide on the sliding rail.
Preferably, the number of the travelling jack is one or two;It is provided in the reflux frame positioned at described The water-collecting tray of the lower section of one guide rail and/or second guide rail, the column tool being provided on the water-collecting tray for storing column tool are slow Deposit position.
Preferably, be provided with the sensor being connected with the controller on the travelling jack, the reflux frame and/or The sensing chip for matching with the sensor is provided on first guide rail and/or second guide rail;The column tool The inductive pick-up that for detecting the column tool cache location whether there is column to have, the induction sensing are provided at cache location Device is connected with the controller.
Preferably, be provided with catch basin on the water-collecting tray, the bottom of the catch basin be provided with for downcomer phase The leakage hole of connection.
The utility model has the beneficial effects that:
The column of the utility model has reflux unit, need to only have input unit by column and column tool is input in first end, Then column tool is fixed on travelling jack, is had with column together, by reflux frame by the i.e. controllable travelling jack of controller First end moves to the second end of reflux frame, and after when column, tool is removed from travelling jack, column has output unit and column has from the It is exported in two ends, meanwhile, travelling jack moves to reflux frame under the control of the controller, by the second end through the frame that flows back First end, to carry out the transport of next column tool, thus realize column tool automatic cycle carry, without manually to column have into Row is carried, so that the carrying of column tool is more laborsaving.
Detailed description of the invention
In order to illustrate the technical solutions in the embodiments of the present application or in the prior art more clearly, below will be to institute in embodiment It needs attached drawing to be used to be briefly described, and specific embodiment of the utility model will be made in conjunction with attached drawing further detailed Illustrate, wherein
Fig. 1 is the schematic diagram that column provided by the embodiment of the utility model has reflux unit;
When Fig. 2 is that reflux frame provided by the embodiment of the utility model is connect with column tool input unit and column tool output unit Schematic diagram;
Fig. 3 is the schematic diagram of piece frame provided by the embodiment of the utility model;
Fig. 4 is schematic diagram when the first braced frame provided by the embodiment of the utility model is connect with the frame that flows back;
Fig. 5 is the schematic diagram of travelling jack provided by the embodiment of the utility model.
It is attached marked in the figure:
11, column has input unit 12, the first guide rail 13, the second guide rail 14, sensing chip
15, transfer dish 16, sliding rail 17, driving motor 18, transmission mechanism
21, flow back frame 211, first end 212, second end 213, the first braced frame
24, piece frame 31, column have output unit 41, travelling jack 42, crossbeam
43, mounting blocks 44, idler wheel 45, directive wheel 46, driving device 47, elevating mechanism
48, handle 481, push block 482, spring 49, drive rod 491, guide rod
492, connecting rod 493, connecting rod 51, water-collecting tray 61, sensor
Specific embodiment
In order to enable those skilled in the art to better understand the technical solutions of the present invention, below in conjunction with specific implementation This programme is further discussed in detail in example.
As shown in Figures 1 to 5, the utility model embodiment provides a kind of column tool reflux unit comprising reflux frame 21, column tool output unit 31, column tool input unit 11, travelling jack 41 and controller, column have the setting of input unit 11 and are returning The first end 211 for flowing frame 21, for the input field tool into first end 211;Column has the setting of output unit 31 in reflux frame 21 Second end 212, for out of second end 212 Output bar have;The setting of travelling jack 41 can return in reflux frame 21 It is moved in stream frame 21;Controller can control travelling jack 41 and move back and forth between first end 211 and second end 212;It hangs It is provided on fortune trolley 41 for having the fixed structure being connected with column.
Column provided by the embodiment of the utility model has reflux unit, only need to have input unit 11 by column and column is had input Into the first end 211 of reflux frame 21, then column tool is fixed on travelling jack 41, passes through the i.e. controllable handling of controller Trolley 41 has the second end 212 for moving to reflux frame 21 by the first end 211 of reflux frame 21 together with column, when column has After removing from travelling jack 41, column has output unit 31 and exports column tool out of second end 212, meanwhile, travelling jack 41 exists Under the control of controller, the second end 212 through the frame 21 that flows back is moved to the first end 211 of reflux frame 21, to carry out The transport of next column tool, so that the automatic cycle for realizing column tool is carried, without manually carrying to column tool, so that column has Carrying it is more laborsaving.
As shown in Figure 3 and Figure 4, the first guide rail 12 and the second guide rail 13, the first guide rail are relatively set in reflux frame 21 12 are parallel to each other with the second guide rail 13;Travelling jack 41 moves reciprocatingly along the first guide rail 12 and the second guide rail 13.So that Guiding of the travelling jack 41 when moving reciprocatingly is preferable, and operation is also more steady.It is understood that travelling jack 41 can be with Movement is realized by way of being slidably matched with the first guide rail 12 and the second guide rail 13, can be controlled drive by controller at this time Motivation structure pulls the travelling jack 41 to slide on the first guide rail 12 and the second guide rail 13, realizes above-mentioned reciprocating motion;Handling is small Vehicle 41 can also realize movement with the first guide rail 12 and the second guide rail 13 by way of rolling cooperation.
As shown in figure 5, two mounting blocks 43 of the travelling jack 41 including crossbeam 42, the both ends for being separately positioned on crossbeam 42, It is provided with driving device 46 on mounting blocks 43, the idler wheel 44 driven by driving device 46 is provided in two mounting blocks 43, installs The two sides of block 43 are oppositely arranged there are two directive wheel 45;Controller drives idler wheel 44 in the first guide rail by control driving device 46 It is rolled on the second guide rail, so that the rolling for realizing travelling jack 41 and the first guide rail and the second guide rail cooperates, so that handling Movement of the trolley 41 on the first guide rail and the second guide rail is more easily implemented, at the same directive wheel 45 can to mounting blocks 43 carry out compared with It limits well, idler wheel 44 is avoided to be detached from the first guide rail and the second guide rail, carried out so as to the movement to travelling jack 41 preferable Ground guiding.It is understood that can be both provided with driving device 46 on each mounting blocks 43, each driving device 46 is for driving An idler wheel 44 is moved, only can also be provided with driving device 46 on a mounting blocks 43 wherein, and will be on two mounting blocks Idler wheel 44 is connected by connecting rod, is rotated by 46 drive link 493 of driving device, and then drives two idler wheels by connecting rod 493 44 are rotated;Can be preferred, it can be respectively provided in each mounting blocks 43 there are two idler wheel 44, two idler wheels 44 are separately positioned on The both ends of mounting blocks 43, the rolling cooperation of travelling jack 41 and the first guide rail 12 and the second guide rail 13 is better achieved;Each The both ends of mounting blocks 43 can be respectively set there are two directive wheel 45, in mounting blocks 43 and the first guide rail 12 and the second guide rail 13 Between play the role of preferably limit and be oriented to;The driving device 46 can be motor;The installation in left side is eliminated in Fig. 5 Block, in order to embody the structure of idler wheel.
Further, travelling jack 41 can also include be arranged on crossbeam 42 elevating mechanism 47, connecting rod 492, Gu Determining structure includes two handles 48 for being separately positioned on 492 both ends of connecting rod, and two handles 48 are respectively used to and are located at column tool two sides Handle mutually fix;The force piece of elevating mechanism 47 is connected with controller;The drive rod 49 of force piece is connected with connecting rod 492, Elevating mechanism 47 drives handle 48 to rise or fall by connecting rod 492, so as to control elevating mechanism 47 by controller Force piece starting, handle 48 can be driven to fix or separate with the ambilateral handle in column, and then it is small to have conveniently realized handling Fixing and separating between vehicle 41 and column tool.Simultaneously as travelling jack 41 is mutually fixed with the ambilateral handle in column, so as to Enough contacts for preferably avoiding having ontology with column greatly reduce the abrasion of caused column tool ontology when transport.Force piece can Think motor, cylinder etc..
It is preferably oriented in order to the raising and lowering to handle 48, guiding can be set in connecting rod 492 Bar 491 is provided with the pilot hole passed through for guide rod 491 on crossbeam 42.Can be preferred, the number of guide rod 491 is two, with Play preferably guiding role.
Specifically, push rod can be set in connecting rod 492, one end of push rod is provided with for offseting with the top plate that column has The push block 481 connect, the through-hole that the other end of push rod passes through in connecting rod 492 are connected with fixture nut;Bullet is set on push rod Spring 482, one end and the push block 481 of spring 482 abut against, and the other end and the connecting rod 492 of spring 482 abut against, thus logical Push rod is crossed to abut the top plate of column tool, and then can preferably prevent column tool run-off the straight during transportation.It is understood that It is that can be not provided with pushing away under the premise of can guarantee that column has stability according to the different shape of the ambilateral handle in column Bar.
As shown in figure 4, it further includes the first support that the column, which has reflux unit, in another embodiment provided by the utility model Frame 213, the first braced frame 213 are vertically connected with first end 211, and column tool input unit includes that sliding rail 16 and sliding rail 16 are sliding Transfer dish 15, transmission mechanism 18 and the driving motor 17 of dynamic cooperation, sliding rail is arranged in the first braced frame 213, and extends To first end 211;Driving motor 17 is connected with one end of transmission mechanism 18, the other end phase of transfer dish 15 and transmission mechanism 18 Even, driving motor 17 drives transfer dish 15 to slide on sliding rail 16 by transmission mechanism 18.Using this scheme, front end robot is utilized Hand or robot are placed on column tool on transfer dish 15, then start driving motor 17 by controller, can pass through driver Structure 18 drives transfer dish 15 by column tool transport to the handling position in first end 211, which is the first guide rail 12 and the The lower section of two guide rails 13, so that the fixation between travelling jack 41 and column tool is more convenient.It is understood that driving motor 17 can be set in the first braced frame 213, also can be set in first end 211, as long as it can pass through transmission mechanism 18 drive transfer dish 15 mobile on sliding rail 16.
It is understood that similarly, it can also include the second braced frame, the second braced frame which, which has reflux unit, It is vertically connected with second end 212, column has output unit can be identical as the column tool structure of input unit, i.e., it also may include sliding Rail, transfer dish, transmission mechanism, driving motor, column has the sliding rail in output unit and is arranged in the second braced frame, and extends to In second end 212, column tool can be transferred out from second end 212 to unloading machinery hand or machine conveniently by transfer dish People.
In another embodiment provided by the utility model, the number of travelling jack 41 can be one or two;Reflux It is provided with the water-collecting tray 51 positioned at the lower section of the first guide rail and/or the second guide rail in frame 21, is provided with and is used on water-collecting tray 51 The column for storing column tool has cache location.A handling can be first passed through when travelling jack 41 is two by this technical solution Trolley 41 transports column tool on the column tool cache location of water-collecting tray 51 in reflux frame 21, then will by another travelling jack The second end 212 of column tool transport to the frame 21 that flows back betters meet production so as to more quickly realize the reflux of column tool The high beat production requirement of line.Meanwhile when having extra column tool or column tool to break down, travelling jack 41 can be by the column Tool is placed on column tool cache location.It is understood that reflux frame 21 can be by multiple end to end 24 phases of piece frame Even, water-collecting tray 51 can be set on each piece frame 24.
Further, can be set the sensor 61 being connected with controller on travelling jack 41, flow back frame 21 and/or The sensing chip 14 for matching with sensor 61 is provided on first guide rail 12 and/or the second guide rail 13;Column has cache location Place is provided with the inductive pick-up that for detecting column tool cache location whether there is column to have, and inductive pick-up is connected with controller, To which the position signal of one of travelling jack can be fed back to controller, so that controller can control by sensor 61 Another trolley continues to transport to column tool, improves the working efficiency of column tool reflux unit.Wherein, have on sensing chip 14 different Coding, sensor 61 can know the position where travelling jack 41 by sensing chip 14;Sensing chip 14, which can be set, to flow back On at least one of frame 21, the first guide rail 12 and second guide rail 13.
Specifically, catch basin can be set on water-collecting tray 51, the bottom of catch basin is provided with for being connected with downcomer The leakage hole connect, so as to collect dripping in column tool transportational process, and by the discharge of dripping.
The general work process of tool reflux unit in column provided by the utility model are as follows: front end robot or robot are column Tool is placed on the transfer dish 15 of column tool input unit, and driving motor 17 drives transfer dish 15 along sliding rail 16 by transmission mechanism 18 Column tool is delivered to the lower section of the first guide rail in first end by sliding;Travelling jack 41 moves to the top that column has in first end, rises Descending mechanism 47 drives handle 48 to fix the handle for the two sides that column has, and column tool is lifted from transfer dish 15, then transfer dish returns Return original position;Travelling jack 41 has the second end that reflux frame 21 is transported to by the first end 211 of reflux frame 21 with column 212, travelling jack 41 releases the fixation having to column, and column has output unit 31 and exports column tool out of second end 212, by unloader Column tool is removed by tool hand or robot, and then travelling jack 41 returns to the first end 211 of reflux frame 21.
It should be noted that column tool input unit 11 and column tool output unit 31 are not limited to above structure, that is, it include sliding rail 16, transfer dish 15, transmission mechanism 18 and the driving motor 17 being slidably matched with sliding rail 16;Front end robot or robot can With directly by column tool be placed in first end 211, in order to travelling jack 41 to column tool be fixed, at this time front end robot or Person robot is column tool input unit, and similarly, unloading machinery hand or robot can also directly take out out of second end 212 Column tool, unloading machinery hand or robot are column tool output unit at this time;It is of course also possible to be otherwise to put column tool Enter in first end 211, then column tool is taken out from second end 212 by manpower.
Above are merely preferred embodiments of the utility model, it should be pointed out that these embodiments are merely to illustrate this Utility model rather than limitation the scope of the utility model, moreover, after having read the content of the utility model, this field Related technical personnel can make various changes or modification to the utility model, and such equivalent forms are equally fallen into appended by the application Claims limited range.

Claims (10)

1. a kind of column has reflux unit, which is characterized in that it includes reflux frame, column tool output unit, column tool input unit, hangs Trolley and controller are transported, the column tool input unit is arranged in the first end of the reflux frame, is used for the first end Interior input field tool;The second end of the reflux frame is arranged in the column tool output unit, for exporting out of described second end Column tool;The travelling jack is arranged in the reflux frame, and can move in the reflux frame;The controller energy It enough controls the travelling jack and is moved back and forth between the first end and the second end;It is arranged on the travelling jack useful In the fixed structure being connected with column tool.
2. column according to claim 1 has reflux unit, which is characterized in that be relatively set with first in the reflux frame Guide rail and the second guide rail, first guide rail are parallel to each other with second guide rail;The travelling jack is along first guide rail It moves reciprocatingly with second guide rail.
3. column according to claim 2 has reflux unit, which is characterized in that the travelling jack includes crossbeam, sets respectively Two mounting blocks at the both ends of the crossbeam are set, driving device is provided on the mounting blocks, is all provided in two mounting blocks It is equipped with the idler wheel driven by the driving device, the two sides of the mounting blocks are oppositely arranged that there are two directive wheels;The controller The idler wheel is driven to roll on first guide rail and second guide rail by controlling the driving device.
4. column according to claim 3 has reflux unit, which is characterized in that the travelling jack further includes being arranged described Elevating mechanism, connecting rod on crossbeam, the fixed structure include two handles for being separately positioned on the connecting rod both ends, and two The handle is respectively used to mutually fix with positioned at the ambilateral handle in the column;The force piece of the elevating mechanism and the control Device is connected;The drive rod of the force piece is connected with the connecting rod, and the elevating mechanism passes through described in connecting rod drive Handle rises or falls.
5. column according to claim 4 has reflux unit, which is characterized in that be provided with guide rod, institute in the connecting rod State the pilot hole for being provided on crossbeam and passing through for the guide rod.
6. column according to claim 4 has reflux unit, which is characterized in that push rod is provided in the connecting rod, it is described One end of push rod is provided with the push block for abutting against with the top plate that column has, and the other end of the push rod passes through the connecting rod On through-hole be connected with fixture nut;Spring is set on the push rod, one end of the spring is abutted against with the push block, The other end of the spring is abutted against with the connecting rod.
7. column according to claim 3 has reflux unit, which is characterized in that it further includes the first braced frame, and described the One braced frame is vertically connected with the first end, and the column tool input unit includes that sliding rail and the sliding rail are slidably matched Transfer dish, transmission mechanism and driving motor, the sliding rail is arranged in first braced frame, and extends to described first In end;The driving motor is connected with one end of the transmission mechanism, the other end phase of the transfer dish and the transmission mechanism Even, the driving motor drives the transfer dish to slide on the sliding rail by the transmission mechanism.
8. column according to claim 3 has reflux unit, which is characterized in that the number of the travelling jack is one or two It is a;The water-collecting tray being provided in the reflux frame below first guide rail and/or second guide rail, it is described to catchment It is provided with the column for storing column tool on disk and has cache location.
9. column according to claim 8 has reflux unit, which is characterized in that be provided on the travelling jack and the control The connected sensor of device processed, be provided on the reflux frame and/or first guide rail and/or second guide rail for The sensing chip that the sensor matches;It is provided at the column tool cache location for whether detecting the column tool cache location Inductive pick-up with column tool, the inductive pick-up are connected with the controller.
10. column according to claim 9 has reflux unit, which is characterized in that be provided with catch basin, institute on the water-collecting tray The bottom for stating catch basin is provided with leakage hole for being connected with downcomer.
CN201821011989.6U 2018-06-28 2018-06-28 A kind of column tool reflux unit Active CN208385371U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201821011989.6U CN208385371U (en) 2018-06-28 2018-06-28 A kind of column tool reflux unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201821011989.6U CN208385371U (en) 2018-06-28 2018-06-28 A kind of column tool reflux unit

Publications (1)

Publication Number Publication Date
CN208385371U true CN208385371U (en) 2019-01-15

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201821011989.6U Active CN208385371U (en) 2018-06-28 2018-06-28 A kind of column tool reflux unit

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Address after: 102299 room A129-1, No. 10, Zhongxing Road, Changping District science and Technology Park, Beijing

Patentee after: DONGTAI HI-TECH EQUIPMENT TECHNOLOGY Co.,Ltd.

Address before: 102299 room A129-1, No. 10, Zhongxing Road, Changping District science and Technology Park, Beijing

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Effective date of registration: 20191125

Address after: 518112 Room 403, unit 2, building C, Dongfang Shengshi, Jinpai community, Buji street, Longgang District, Shenzhen City, Guangdong Province

Patentee after: Shenzhen yongshenglong Technology Co.,Ltd.

Address before: 102299 room A129-1, No. 10, Zhongxing Road, Changping District science and Technology Park, Beijing

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Effective date of registration: 20210226

Address after: Unit 611, unit 3, 6 / F, building 1, yard 30, Yuzhi East Road, Changping District, Beijing 102208

Patentee after: Zishi Energy Co.,Ltd.

Address before: Room 403, unit 2, building C, Dongfang Shengshi, Jinpai community, Buji street, Longgang District, Shenzhen, Guangdong 518112

Patentee before: Shenzhen yongshenglong Technology Co.,Ltd.

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