CN208378982U - A kind of magnetic control spattering target water route backboard - Google Patents
A kind of magnetic control spattering target water route backboard Download PDFInfo
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- CN208378982U CN208378982U CN201820495608.XU CN201820495608U CN208378982U CN 208378982 U CN208378982 U CN 208378982U CN 201820495608 U CN201820495608 U CN 201820495608U CN 208378982 U CN208378982 U CN 208378982U
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Abstract
The utility model discloses a kind of magnetic control spattering target water route backboards, including upper backboard and lower backboard, the upper backboard lower end surface is provided with first annular water route slot, the first annular water route front of the slot is communicated with the first water inlet and the first water outlet, the lower backboard upper surface is provided with the second annular water channel slot, the second annular water channel front of the slot is communicated with the second water inlet and the second water outlet, the first annular water route slot and the second annular water channel slot are the two-wire single-screw annular groove of mirror settings, the first annular water route slot and the second annular water channel slot, which combine, forms total water route slot, first water inlet, first water outlet and the second water inlet, second water inlet combines and forms total water inlet and total water outlet；Total water route slot of the utility model is that two-wire single-screw annular groove forms loop checking installation, may insure the maximization contact area with upper backboard and lower backboard in this way, and keep stable water pressure, it is ensured that cooling good.
Description
Technical field
The utility model relates to magnetic control spattering target backplane technology field, specifically a kind of magnetic control spattering target is carried on the back with water route
Plate.
Background technique
As global electronic information industry is fast-developing, the fast development of FPD industry, planar display surface board size
It is required that constantly expanding, this requires sputtering target material sizes also to expand therewith, and full-size has reached 2 meters of 3 meters of X, this kind of target at present
Material needs to be fixed on backboard, and the low alloy metal usually with good fluidity and with certain viscosity is as solder, due to magnetic
Control in sputtering process, excitaton source particle constantly bombards target material surface under accelerating field traction, and kinetic energy is converted into thermal energy, target because
This can accumulate amount of heat, these heats can not transmit in time, and then cause that target deforms or even target can be caused because of overheat
Miss target phenomenon influences plated film production, and target bulk temperature must be strictly controlled in a certain range thus, and tradition is usually to plate
A cooling trough is designed on film machine, backboard is allowed closely to touch sink, then passes to the cooling target of recirculated cooling water, however such is done
Method is only contacted with back plate surface due to cooling water, and the cooling effect thicker for back plate thickness is general, high-power it is even more impossible to meet
Sputtering target material, further strengthening target cooling effect is the urgent problem to be solved for improving plating membrane efficiency and quality.
Utility model content
The purpose of this utility model is to provide a kind of magnetic control spattering target water route backboards, realize high-power sputtering target material
In magnetron sputtering plating with excellent heat dissipation effect.
To achieve the above object, the utility model provides the following technical solutions:
A kind of magnetic control spattering target water route backboard, including upper backboard and lower backboard, the upper backboard lower end surface are provided with
First annular water route slot, the first annular water route front of the slot are communicated with the first water inlet and the first water outlet, the lower backboard
Upper surface is provided with the second annular water channel slot, and the second annular water channel front of the slot is communicated with the second water inlet and the second water outlet
Mouthful, the two-wire single-screw annular groove of the first annular water route slot and the second annular water channel slot for mirror settings, first ring
Shape water route slot and the second annular water channel slot, which combine, forms total water route slot, and first water inlet, the first water outlet and second enter water
Mouth, the second water inlet, which combine, forms total water inlet and total water outlet, is respectively arranged with out in total water inlet and total water outlet
Water valve fast joint and enter water valve fast joint.
Preferably, the upper backboard and lower backboard are made of metal molybdenum material, the upper backboard lower end surface and lower backboard
The surface roughness of upper surface is not higher than Ra1.6.
Preferably, at the surrounding sideline of the upper backboard lower end surface and lower backboard upper surface and first annular water route slot and the
Oblique angle is provided at the trough rim of second ring water route slot, the oblique angle is specially C3 chamfering.
Preferably, the corner location of the upper backboard lower end surface four is respectively arranged with the first positioning cotter way, the lower backboard
The corresponding first positioning pin groove location of four corners in upper end is respectively arranged with the second positioning cotter way, the first positioning cotter way and the
Two positioning cotter way sizes are identical.
Preferably, gasket is provided between the upper backboard and lower backboard, the diaphragm seal is specially heat-conducting silica gel sheet.
Compared with prior art, the utility model has the beneficial effects that
(1), the upper backboard and lower backboard of the utility model are all made of metal molybdenum material, and hardness is high, thermal expansion coefficient is small, have
Effect, which is reduced, should thermally expand sputter coating quality decline caused by bring backboard deforms；
(2), the utility model uses the first annular water route slot and the second ring of upper backboard lower end surface and lower backboard upper surface
The trough rim of shape water route slot and edge are machined with chamfering, can be minimized size finishing upper backboard lower end surface and lower backboard
Upper surface maximizes filling solder, saves processing cost；
(3), total water route slot of the utility model be two-wire single-screw annular groove formed loop checking installation, may insure in this way with
The maximization contact area of upper backboard and lower backboard, and keep stable water pressure, it is ensured that it is cooling good.
Detailed description of the invention
Fig. 1 is the upper backboard schematic perspective view of the utility model；
Fig. 2 is the lower backboard schematic perspective view of the utility model；
Fig. 3 is that the upper backboard of the utility model and lower backboard install explosive view；
Fig. 4 is the structural schematic diagram of total water route slot of the utility model；
Fig. 5 is the structural schematic diagram of total water route slot of the embodiments of the present invention two.
In figure: 1- upper backboard；The first annular water route slot of 11-；The first water inlet of 12-；The first water outlet of 13-；14- first is fixed
Position cotter way；2- lower backboard；21- the second annular water channel slot；The second water inlet of 22-；The second water outlet of 23-；The second positioning pin of 23-
Slot；3- outlet valve fast joint；4- enters water valve fast joint；The oblique angle 5-；6- gasket；7- positioning pin.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
Please refer to Fig. 1, Fig. 2, Fig. 3 and Fig. 4, in the utility model embodiment one, a kind of magnetic control spattering target is carried on the back with water route
Plate, including upper backboard 1 and lower backboard 2,1 lower end surface of upper backboard are provided with first annular water route slot 11, first annular water route slot 11
Front end is communicated with the first water inlet 12 and the first water outlet 13, and 2 upper surface of lower backboard is provided with the second annular water channel slot 21, and second
21 front end of annular water channel slot is communicated with the second water inlet 22 and the second water outlet 23, first annular water route slot 11 and the second annular water
Road slot 21 is the two-wire single-screw annular groove of mirror settings, it is ensured that the maximization contact area with upper backboard 1 and lower backboard 2, again
Keep stable water pressure, it is ensured that cooling good, first annular water route slot 11 and the second annular water channel slot 21 combine and form total water route slot,
First water inlet 12, the first water outlet 13 and the second water inlet 22, the second water inlet 22, which combine, forms total water inlet and total water outlet
Mouthful, it is respectively arranged with outlet valve fast joint 3 in total water inlet and total water outlet and enters water valve fast joint 4, facilitates the access of water pipe,
Improve installation effectiveness；
Fig. 1 and Fig. 2 are please referred to, upper backboard 1 and lower backboard 2 are made of metal molybdenum material, 1 lower end surface of upper backboard and lower back
The surface roughness of 2 upper surface of plate is not higher than Ra1.6, and metal molybdenum material, hardness is high, thermal expansion coefficient is small, effectively reduces and answers heat
Expand sputter coating quality decline caused by bring backboard deforms；
Fig. 1, Fig. 2, Fig. 3 and Fig. 4 are please referred to, at the surrounding sideline of 1 lower end surface of upper backboard and 2 upper surface of lower backboard and first
Oblique angle 5 is provided at the trough rim of annular water channel slot 11 and the second annular water channel slot 21, oblique angle 5 is specially C3 chamfering, can be most
Smallization size finishes 1 lower end surface of upper backboard and lower backboard upper surface 2, maximizes filling solder, saves processing cost；
Fig. 1 and Fig. 2 are please referred to, upper backboard 1 lower end surface four corner location is respectively arranged with the first positioning cotter way 14, lower back
The corner of 2 upper end of plate four corresponding first positioning 14 position of cotter way is respectively arranged with the second positioning cotter way 24, the first positioning cotter way
14 is identical with the second positioning 24 size of cotter way, facilitates positioning when installation and welding, and reduction should weld sealing caused by dislocation not
It is good, improve the precision of installation position；
Referring to Fig. 3, being provided with gasket 6 between upper backboard 1 and lower backboard 2, diaphragm seal is specially heat-conducting silica gel sheet, is increased
In addition the heat-conducting effect of backboard 1 and lower backboard 2, prevents 1 lower end surface of upper backboard caused by the deformation because of upper backboard 1 and lower backboard 2
With the gap of 2 upper surface both ends of the surface of lower backboard become larger caused by total water route slot mixing, while preventing because of 1 lower end surface of upper backboard
The reduction of the heat transfer efficiency of upper backboard 1 caused by becoming larger with the gap of 2 upper surface both ends of the surface of lower backboard and lower backboard 2, improves
Radiating efficiency.
Referring to Fig. 5, the present embodiment and embodiment one have no other differences, and difference exists in the utility model embodiment two
Different, a kind of magnetic control spattering target water route backboard in the structure of total water channel slot, including upper backboard 1 and lower backboard 2, upper backboard 1
Lower end surface is provided with first annular water route slot 11, and first annular 11 front end of water route slot is communicated with the first water inlet 12 and the first water outlet
Mouth 13,2 upper surface of lower backboard is provided with the second annular water channel slot 21, and 21 front end of the second annular water channel slot is communicated with the second water inlet
22 and second water outlet 23, first annular water route slot 11 and the second annular water channel slot 21 are that concentric double annular grooves of mirror settings are first
Tail is connected the concentric loop water route slot to be formed, it is ensured that the maximization contact area with upper backboard 1 and lower backboard 2, and keep water
Pressure is stablized, it is ensured that cooling good, first annular water route slot 11 and the second annular water channel slot 21 combine and form total water route slot, and first enters
The mouth of a river 12, the first water outlet 13 and the second water inlet 22, the second water inlet 22, which combine, forms total water inlet and total water outlet, always enters
It is respectively arranged with outlet valve fast joint 3 in the mouth of a river and total water outlet and enters water valve fast joint 4, facilitates the access of water pipe, improves peace
Fill efficiency.
The manufacturing method of one of above embodiments magnetic control spattering target water route backboard, the magnetic control spattering target water
Road backboard includes upper backboard 1 and lower backboard 2, includes at least at least one of following methods:
(1), the upper surface and lower end surface of upper backboard 1 and lower backboard 2 are rough milled respectively；
(2), the grooving cutter difference first annular water route slot 11 of 1 lower end surface of finish-milling upper backboard, the first water inlet 12, the are used instead
The second annular water channel slot 21, the second water inlet 22, second of one water outlet 13, first positioning cotter way 14 and 2 upper surface of lower backboard
Water outlet 23, second positions cotter way 24；
(3), it changes rose reamer and chamfered is carried out to above-mentioned sideline respectively, and respectively with 1 upper surface of upper backboard and lower backboard 2
Lower end surface is 1 lower end surface of benchmark face finish-milling upper backboard and 2 upper surface of lower backboard；
(4), heat conductive silica gel is pasted into 2 upper surface of lower backboard and the binding face up and down position of 1 lower end surface of upper backboard respectively
Piece, and the second positioning cotter way 24 of lower backboard 2 is installed into positioning pin 7, the second water inlet 22 and the second water outlet 23 are passed through close
Seal installs outlet valve fast joint 3 and enters water valve fast joint 4, and the first positioning cotter way 14 of 1 lower end surface of upper backboard is uniformly pressed into
On positioning pin 7, and ensure that upper backboard 1 is bonded with lower backboard 2；
(5), by the fitting edge of upper backboard 1 and lower backboard 2 by Welding, and surrounding polishing polishing is handled, it is complete
At production.
It is obvious to a person skilled in the art that the present invention is not limited to the details of the above exemplary embodiments, and
And without departing substantially from the spirit or essential attributes of the utility model, it can realize that this is practical new in other specific forms
Type.Therefore, in all respects, the present embodiments are to be considered as illustrative and not restrictive, this is practical new
The range of type is indicated by the appended claims rather than the foregoing description, it is intended that containing for the equivalent requirements of the claims will be fallen in
All changes in justice and range are embraced therein.It should not treat any reference in the claims as limiting
Related claim.
Claims (5)
1. a kind of magnetic control spattering target water route backboard, including upper backboard and lower backboard, it is characterised in that: the upper backboard lower end
Face is provided with first annular water route slot, and the first annular water route front of the slot is communicated with the first water inlet and the first water outlet, institute
It states lower backboard upper surface and is provided with the second annular water channel slot, the second annular water channel front of the slot is communicated with the second water inlet and
Two water outlets, the first annular water route slot and the second annular water channel slot are the two-wire single-screw annular groove of mirror settings, described
First annular water route slot and the second annular water channel slot, which combine, forms total water route slot, first water inlet, the first water outlet and the
Two water inlets, the second water inlet, which combine, forms total water inlet and total water outlet, sets respectively in total water inlet and total water outlet
It is equipped with outlet valve fast joint and enters water valve fast joint.
2. a kind of magnetic control spattering target water route backboard according to claim 1, it is characterised in that: the upper backboard is under
Backboard is made of metal molybdenum material, and the surface roughness of the upper backboard lower end surface and lower backboard upper surface is not higher than Ra1.6.
3. a kind of magnetic control spattering target water route backboard according to claim 1, it is characterised in that: the upper backboard lower end
Face is provided with at the surrounding sideline of lower backboard upper surface and at first annular water route slot and the trough rim of the second annular water channel slot
Oblique angle, the oblique angle are specially C3 chamfering.
4. a kind of magnetic control spattering target water route backboard according to claim 2, it is characterised in that: the upper backboard lower end
Four, face corner location is respectively arranged with the first positioning cotter way, the corresponding first positioning cotter way of the corner of the lower backboard upper end four
Position is respectively arranged with the second positioning cotter way, and the first positioning cotter way and the second positioning cotter way size are identical.
5. a kind of magnetic control spattering target water route backboard according to claim 2, it is characterised in that: the upper backboard is under
Gasket is provided between backboard, the diaphragm seal is specially heat-conducting silica gel sheet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820495608.XU CN208378982U (en) | 2018-04-09 | 2018-04-09 | A kind of magnetic control spattering target water route backboard |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820495608.XU CN208378982U (en) | 2018-04-09 | 2018-04-09 | A kind of magnetic control spattering target water route backboard |
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| Publication Number | Publication Date |
|---|---|
| CN208378982U true CN208378982U (en) | 2019-01-15 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201820495608.XU Active CN208378982U (en) | 2018-04-09 | 2018-04-09 | A kind of magnetic control spattering target water route backboard |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110284169A (en) * | 2019-07-29 | 2019-09-27 | 福建阿石创新材料股份有限公司 | A kind of the plating protective device and method in copper backboard water route |
-
2018
- 2018-04-09 CN CN201820495608.XU patent/CN208378982U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110284169A (en) * | 2019-07-29 | 2019-09-27 | 福建阿石创新材料股份有限公司 | A kind of the plating protective device and method in copper backboard water route |
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